15

-X Technical Data 1501 A CY1S Series Construction CY1S/Bilateral piping type For 6 #8 For 6 For 10 23a 29a o !5 !1 @4 !2 !3 @1 !8 !7 !6 $4 !9 @0 @7 @2 #1 r q w e y t i u !5 !1 !4 #2 #0 !

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

5 6 7 8 9 1 1 2 3 4 5 6 7 8 9 Double Double Double Double Double Double Double SI unit SI unit Single Single Single Single Single Single Single Single Single Single Single SI unit output no.

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

Flow Rate and Effective Area AS121FG AS221FG-02 AS321FG AS421FG AS221FG-01 Model AS131FG AS231FG-02 AS331FG AS431FG AS231FG-01 Universal type 3.2 6 8 10 12 3.2 6 10 4 6 8 JIS Symbol 4 4 8 10 12 Metric size 6 10 Tubing O.D. 1/8" 5/32" 5/32" 3/16" 1/4" 5/16" 3/8" 3/8" 1/2" 1/4" 5/16" 3/16" 1/4" 1/8" 5/32" Inch size 3/8" 5/16" 3/16" 1/4" Flow Direction Symbols on Body Meter-out type Meter-in

mb1

, refer to page 6-17-1.)

70astamb1

, refer to page 6-17-1.)

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

8 5 0 0.030 156 (189) 175 (213.5) 199 (243) 259 (325) 1 8 6 0 0.030 6 0 0.030 8 0 0.036 1 4 3 8 Single shaft with four chamfers: CDRA1BX Double shaft key: CDRA1BY Double shaft with four chamfers: CDRA1BZ Note) Other dimensions are the same as the single shaft.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

8 5 0 0.030 156 (189) 175 (213.5) 199 (243) 259 (325) 1 8 6 0 0.030 6 0 0.030 8 0 0.036 1 4 3 8 Single shaft with four chamfers: CDRA1BX Double shaft key: CDRA1BY Double shaft with four chamfers: CDRA1BZ Note) Other dimensions are the same as the single shaft.

Plug-in Unit

PW 0 0 0 1 1 1 9 9 9 PW LRUN 2 2 2 8 8 8 3 3 3 7 7 7 4 4 4 6 6 6 SD RD LERR. 5 5 5 L RUN SD RD x10 x1 24V 0V +24V 24G DA DB FG DG L ERR.

HRX-OM-Z002

Option . 6-1 6.1 OPTION LIST . 6-1 6.2 OPTION C [WITH INVERTER FOR COMPRESSOR] . 6-1 6.3 OPTION M [DEIONIZED WATER (PURE WATER) PIPING] . 6-1 6.4 OPTION P [WITH INVERTER FOR PUMP] . 6-2 Chapter 7 Alarm Notification and Troubleshooting . 7-1 7.1 ALARM NOTIFICATION . 7-1 7.2 ALARM SOUND STOP . 7-3 7.3 TROUBLESHOOTING . 7-4 7.3.1 Alarm details, causes, and troubleshooting . 7-4 7.3.2 How to

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

depth 5 +0.030 0 NA x M6 x 1 thread depth 6 M 37 25 KA 6.5 12 Bottom view of MXQ20-50 132225 K 12 48 36 6.5 12 43.5 0.5 6.5 46 Z ZZ H G (NN 1) x H 26 10.5 26 10.5 A B 9.5 5.1 5.1 11 11 29 1.5 A B NN x M6 x 1 thread depth 12 6 5H9 ( ) depth 5 +0.030 0 GA HA B-B A-A 5H9 ( ) depth 5 +0.030 0 (mm) Model F 45 40 48 58 42 55 50 55 62 N 4 4 4 4 6 6 8 8 8 G 22 22 22 22 17 18 37 56 H 46 46 46 56

KP/KPQ/KPG

M KPL04-01 KPL04-02 KPL06-01 KPL06-02 KPL08-01 KPL08-02 KPL10-02 KPL10-03 KPL12-03 KPL12-04 1/8 1/4 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 12 14 12 24.5 26.5 27 29 30 31.5 35.5 36.5 38.5 41.5 23.2 27.2 24.4 28.4 26.6 29.4 32.1 33.1 34.3 38.3 4 5 5 6 8 9 13 14 15 18 4 18 20.7 3.5 10.4 3.5 10 D1 6 19.5 22.8 9 12.8 9 L2 A D2 14 8 21.5 26.3 15 15.2 22 12 H Connection threads 10 24 29.4 25 18.5 35 17

44

H2 H1 1/8" (3.18) 0.086" (2.18) KFG2F0122-N02 25 8 1/4 26.7 17.2 5 1.5 1.1 17 d KDM 0.098" (2.5) 5/32" (4) KFG2F0325-N02 23 8 1/4 26.7 17.2 5 1.8 1.6 17 KB 1/4" (6.35) 5/32" (3.95) M L2 L1 KFG2F0704-N02 28 12 1/4 27.5 16.3 6 3.3 6 17 KR 5/16" (8) 0.236" (6) KFG2F0906-N03 32 14 3/8 29.4 17 6.6 5.3 17 19 Applicable tubing KA 3/8" (9.53) 1/4" (6.35) KFG2F1163-N03 38 17 3/8 30.5 16.1 7.6 5.6

HRX-OM-R039

Alarm indication and trouble shooting . 6-1 6.1 Alarm Display . 6-1 HRS Series HRX-OM-R039 Contents 6.2 Alarm buzzer stop . 6-2 6.3 Troubleshooting . 6-3 6.4 Other Errors . 6-4 Chapter 7 Control, Inspection and Cleaning . 7-1 7.1 Control of Circulating Fluid Quality . 7-1 7.2 Inspection and Cleaning . 7-2 7.2.1 Daily check . 7-2 7.2.2 Monthly check . 7-3 7.2.3 Inspection every 3 months .

Series KP/KPQ/KPG

mm Connection threads R Weight g L2 M D2 L1 Applicable tubing M 4 5 5 6 8 9 13 14 15 18 24.5 26.5 27 29 30 31.5 35.5 36.5 38.5 41.5 23.2 27.2 24.4 28.4 26.6 29.4 32.1 33.1 34.3 38.3 1/8 1/4 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 12 14 12 KPL04-01 KPL04-02 KPL06-01 KPL06-02 KPL08-01 KPL08-02 KPL10-02 KPL10-03 KPL12-03 KPL12-04 4 3.5 10.4 3.5 20.7 18 10 D1 6 9 12.8 9 22.8 19.5 D2 L2 A 14 8 12 22

Series KP/KPQ/KPG

mm Connection threads R Weight g L2 M D2 L1 Applicable tubing M 4 5 5 6 8 9 13 14 15 18 24.5 26.5 27 29 30 31.5 35.5 36.5 38.5 41.5 23.2 27.2 24.4 28.4 26.6 29.4 32.1 33.1 34.3 38.3 1/8 1/4 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 12 14 12 KPL04-01 KPL04-02 KPL06-01 KPL06-02 KPL08-01 KPL08-02 KPL10-02 KPL10-03 KPL12-03 KPL12-04 4 3.5 10.4 3.5 20.7 18 10 D1 6 9 12.8 9 22.8 19.5 D2 L2 A 14 8 12 22

IDX-OM-W028

References 6 1 Specifications . 6 1 6 2 Refrigerant with GWP reference . 6 2 6 3 External Dimensions . 6 3 6 4 Electrical Circuit . 6 4 6 5 Compressed Air and Refrigerant Circuit / Operation Principles . 6 6 Table of Contents 1 Air Dryer Table of Contents Chapter 7 Option Specification C 7 1 Specifications . 7 1 7 2 Precautions for the installation and handling of the product . 7 1 Chapter

Fieldbus system CC-Link IE Field compatible SI Unit IO-Link Master Unit

Valve output 14 RXn.F RYn.F Valve output 15 Unit No.0 Reserve RX(n+1).0 RY(n+1).0 Valve output 16 EX600-SCF1 RX(n+1).1 RY(n+1).1 Valve output 17 RX(n+1).2 RY(n+1).2 Valve output 18 RX(n+1).3 RY(n+1).3 Valve output 19 RX(n+1).4 RY(n+1).4 Valve output 20 RX(n+1).5 RY(n+1).5 Valve output 21 RX(n+1).6 RY(n+1).6 Valve output 22 RX(n+1).7 RY(n+1).7 Valve output 23 RX(n+1).8 RY(n+1).8 Valve output

Pin Cylinders Series CJP2/CJP

IY-P006 IY-P010 IY-P015 CT-P006 CT-P010 CT-P015 0.020 0.045 3 0.020 0.045 3 9 2.85 6.2 0.75 0.65 20.4 2.85 17.6 0.75 0.65 Clip C-type 3 Clip C-type 3 6 6 0.030 0.060 0.030 0.060 5 5 13.6 4.8 10.2 1 0.7 23.9 4.8 20.5 1 0.7 C-type 5 C-type 5 10 10 0.030 0.060 0.030 0.060 6 6 15.8 5.7 12.2 1 0.8 31.7 5.7 28.1 1 0.8 C-type 6 C-type 6 16 16 Included Included Mounting nut Rod end cap Flat type

Rotary Table/Rack & Pinion Style Series MSQ

DD 284 Rotary Table/Rack & Pinion Style Series MSQ Construction CRB2 CRBU2 CRB1 MSU CRJ #1 oi @7 @8 t !0 y !6 !7 !8 !1 @5 er w@4 MSQ R (With internal shock absorber) CRA1 @1 !2 !5 !4 !9 @6 u @3 @0 @2 @9 #0 !

Step Motor Controller (Servo / 24 VDC)

number and the combination of IN0-IN5 or OUT0-OUT5. 0 OFF 1 ON 0 OFF 1 ON No IN5 IN4 IN3 IN2 IN1 IN0 Step Step OUT OUT OUT OUT OUT OUT No 5 4 3 2 1 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 1 0 0 0 0 0 1 1 0 0 0 0 0 1 2 0 0 0 0 1 0 2 0 0 0 0 1 0 3 0 0 0 0 1 1 3 0 0 0 0 1 1 4 0 0 0 1 0 0 4 0 0 0 1 0 0 5 0 0 0 1 0 1 5 0 0 0 1 0 1 6 0 0 0 1 1 0 6 0 0 0 1 1 0 7 0 0 0 1 1 1 7 0 0 0 1 1 1 8 0 0 1 0 0 0 8