High Vacuum Angle Valve Valve size 16 25 40 50 63 80 Bellows assembly u XL1A16-2-101 XL1A25-2-101 XL1A40-2-101 XL1A50-2-101 XL1A63-2-101 XL1A80-2-101 Nut assembly o XL1A16-10-1 XL1A25-10-1 XL1A40-10-1 XL1A50-10-1 XL1A80-10-1 Bellows assembly * Bellows assembly includes the valve seal 1 (Standard material: FKM).
) L n 20 19 18 17 16 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 389 759 352 722 315 685 278 648 L1 L2 L3 L4 L5 241 611 204 574 167 537 130 500 93 463 56 426 379 749 342 712 305 675 268 638 231 601 194 564 157 527 120 490 83 453 46 416 412.5 775 375 737.5 337.5 700 300 662.5 261.5 625 225 587.5 187.5 562.5 150 525 112.5 487.5 75 450 423 785.5 385.5 748 348 710.5 310.5 673 273 635.5 235.5 598 198
Port Switch mounting groove 20 10, 20, 30, 40, 50, 75, 100, 125, 150 25 10, 20, 30, 40, 50, 75, 100, 125, 150 Because piping ports and auto switch grooves are provided on both sides, only the adjuster part of the centralized adjuster is symmetric.
to 60C Non-explosion proof (non hazardous Iocations only) 20 to 80C The positioner body is EXd2BT5 labeled.
ID 14 Pushing force 1 0 to 30 10% 15 Trigger LV 1 0 to 30 10% 16 Pushing Numerical data speed 1 0 to 255 mm/s ID1 input 17 Positioning Data writing thrust 1 0 to 30 10% 18 H 19 L In pos 2 0 to 65500 0.01mm ID2 20 to 39 Same as ID1 ID3 40 to 59 Same as ID1 ID4 60 to 79 Same as ID1 ID5 80 to 99 Same as ID1 ID6 100 to 119 Same as ID1 ID7 120 to 139 Same as ID1 ID8 140 to 159 Same as ID1 ID9
CPU CPU CPU 1-198 CPU E 1 SV1.00 RESETSVONSETUP 52 - 13. / A () (50mm ) () () 5m 5m 10% 15m 20% 53 - 14 / 141.
Never use pressure sensors in the presence of inflammable or explosive gases. 20 Series PSE Specific Product Precautions 2 Be sure to read before handling. Refer to pages 17 through 19 for general safety instructions and common precautions, and to pages 20 through 22 for specific product precautions.
28 'Vacuuh to 30o FSIG (20 Kglrcm?).
28 'Vacuuh to 30o FSIG (20 Kglrcm?).
1.2 Weight (kg) 0.10 0.28 1.3 Particulate Generation Characteristics Flow-through Characteristics Particle concentration (particles/mL) Particle diameter: 0.1 m or larger 400 1000 350 Value of specific resistance to that of supplied DI water Resistivity (km) 300 100 250 200 150 10 100 50 0 1 0 5 10 15 20 25 30 0 5 10 15 20 25 30 Time of water flow (min) Measuring time (min) Test method
-00 Fax: 01-64-76-10-10 South America Argentina Phone: 011-4555-5762 Fax: 011-4555-5762 ?
Cylinder stroke (mm) Model Cushion Bore size (mm) 40 63 100 Standard stroke (mm) Auto switch mounting Action Port size Lubrication Model Rubber Air 10-MGF40 10-MGF63 10-MGF100 1/8 Relief type (Both sides) Double acting 30, 50, 75, 100 1/4 Non-lube Non-standard intermediate strokes (in 5 mm increments) are available by attaching a spacer of 5, 10, 15, 20 or 25 mm width.
IN side, OUT side 4 10 20 30 50 75 75 Weight (g) 22 22 30 30 39 39 Model Tubing size ZFB100-04 ZFB100-06 ZFB200-06 ZFB200-08 ZFB300-08 ZFB300-10 7 7 12 12 16 16 Unrestricted 360 piping tube mounting on the IN side 6 6 8 8 10 Metric size Easily replaced filter element Easy installation and removal with One-touch fittings ZFB101-05 ZFB101-07 ZFB201-07 ZFB301-11 ZFB401-13 22 22 30 40 62 20 20
Recommended flow rate Note) (l/min (ANR)) Mass (g) Internal capacity (cm3) 1.7 ZA Model IN side, OUT side 2 3.2 4 4 6 6 8 1/8" 5/32" 5/32" 1/4" 1/4" 5/16" ZFC050-02 ZFC050-23 ZFC050-04 ZFC100-04 ZFC100-06 ZFC200-06 ZFC200-08 ZFC051-01 ZFC051-03 ZFC101-03 ZFC101-07 ZFC201-07 ZFC201-09 2 7 10 10 20 30 50 7 10 10 20 30 50 4.9 ZX 1.7 4.3 IN/OUT straight piping Metric size ZR Easy installation
Do not receive a moment force on the nozzle (Page 6). 9 Doc. no.IZ-OMV0005 1-2.Accessories Power supply cable IZN10E CP Z Symbol Type Nil 3m Z 10m Made-to-Order power supply cable Available from 1 to 20 m in 1 m increment (use standard for 3 m and 10 m).
0 Repair kit for main valve Kit includes parts from 10-1 to 10-5. !0 10-3 !1 G85(B) O-ring Material: NBR Note) When changing parts, follow the instruction manual. Do not disassemble other parts. 10-4 10-5 OUT Precautions Be sure to read before handling.
BORE B D GA'GA K MM N P x LD LH H zz h 1 3 8 (35) 2.76 2.05 t52l 0 7 9 l:20) 1.57 1.39 (10) 0.67 M8x1.25 J.2A t7l M18rl 5 1 . 1 4 3 5 4 l90l 1.06 lz7) 1 5 1 o3) 3 5 4 ls0J 2.24 (58) 1188) 2.05 (52) '11.21 2.60 (66) s T o 7 7 2 (196) 1 3 8 (35) 3.35 (85) 2.52 079 (20) 1 5 7 1.39 (10) 0.67 M10x1.25 i.2a l7l M18x1 5 1.22 (31) 3 8 6 l93l 1.34 (341 1.63 (16) 0.45 1 1 1 . 5 ) 1 9 7 t50l 6 5 4 t1661
These instructions indicate the level of potential hazard by label of Month y Z A B C D . 0 0 0 10 20 30 40 50 60 70 Do not use devices that generate electromagnetic radiation such as Jan o yo Zo Ao Bo Co Do . 0 10 20 30 40 50 60 70 Caution, Warning or Danger, followed by important safety information which must be carefully followed.
C.O. 1 2 1 4.1 4.2 Normally closed Normally open Double acting VNB0 VNB02 VNB03 VN 1 4 7.7 7.8 40 12 (P1) 12 (P1) 10 (P2) LVC 6.3 6.4 2 Air operated LVA 2 (B) 1 (A) 2 (B) 1 (A) 2 (B) 1 (A) 11.4 11.5 50 10 (P2) Note) The flange should be JIS B 2210 10K (ordinary style) or its equivalent.
26 23 20 26 30 29 10 30 29 10 ISA2 77 77 99 99 IS 126 126 R 3/8 R 3/8 ZSM PF2 IF Dripproof type ISG210 to 291-030 (Without hysteresis scale plate) ISG210 to 231-031 (With hysteresis scale plate) Data Hysteresis adjusting bolt Hysteresis adjusting bolt Setting pressure adjusting bolt Setting pressure adjusting bolt 75 18 8.5 110 56 175 110 56 175 93 8.5 30 2.3 2.3 30 3-6.3 3-6.3 23 20 26