SMC Actuators:

6 SMC Actuators: Copper-free Rotary Actuators Size: 1, 3, 7, 10, 20, 30, 50, 70, 100, 200 Size (Torque) Rotary Actuators Series Application Standard Copper-free 1 3 7 10 20 30 50 70 100 200 Series variations Rotary table Series MSU Basic type MSU With auto switch MDSU Rotary table Series MSQ 20-MSQ Basic type (Adjusting bolt type) 20-MSQA High precision type (Adjusting bolt type) 20-MSQR

！ Contact our sales office for delivery dates and prices since this is a special model. SP157X-014E P TY P.G.Information (Specialized Product ) Step motor (Servo 24 DC) SMC Corporation Absolute Controller 4-14-

Note 3) The temperature is 20 (8hrs/day). When operating temperature rises, battery performance deteriorates and the period for battery replacement shortens. Note 4) This is a guide for normal temperatures (20). If the operating temperature is higher or lower than this, the retention period will be shorter.

Centering Unit

] 10 2250 lbf [10 KN] Relief port Nil No V Yes Stroke Sensor type Symbol Stroke (Applicable model) 12 12 mm (MACM2) 20 20 mm (MACM4) 30 30 mm (MACM6) 50 50 mm (MACM10) Nil Unsupported P Port side photo sensor mounted type B Port back side photo sensor mounted type Specications Precautions Model MACM2-12 MACM4-20 MACM6-30 MACM10-50 Max. allowable load weight lbf [KN] 450 [2] 900 [4] 1350 [

INFORMATION Step Motor Controller 5 types of communication protocols New New

bytes Output 36 bytes Input 36 bytes Output 36 bytes Input 36 bytes Output 36 bytes Input 4, 10, 20 bytes Output 4, 12, 20, 36 bytes Input 14 bytes Output 22 bytes Terminating resistor Not included Memory EEPROM LED indicator PWR, RUN, ALM, ERR PWR, ALM, MS, NS PWR, ALM, SF, BF PWR, ALM, MS, NS PWR, ALM, COM Cable length [m] Actuator cable: 20 or less Cooling system Natural air cooling Operating

Air Cylinder RSQ Series Stopper Cylinder

*j::: ""."," O Note: Shaded areas in bold type-Special Order; Unshaded areas-Made to Order Fixed mountins heisht SefteS RSO Max. operaling pressure Ambient and fluid Lubrication Cushion Stroke lenoth tolerance Bolh Non lube Throuqh holet Both ends tapped Avaitabte Rod end configuration Sound bar, non"rolatjng. roller. levr Bore/standard stroke 10, 15. 20 20, 25, 30 oolble act rg Sngeactng

Fluid: air/inert gas, Operating pressure range: 0.1MPa - 0.7MPa (high pressure style 0.8MPa), Effective area mm 2 (Cv): metal seal 3.6 (0.2); rubber seal 5.4 (0.3), Coil rated voltage: 12, 24VDC; 100, 110, 200, 220VAC, Response time (ms) standard 1W, H 1.5W: 2 position metal seal 12 or less; 2 position rubber seal 15 or less 3 position metal seal 20 or less; 3 position rubber seal 25 or less

Fluid: air/inert gas, Operating pressure range: 0.1MPa - 0.7MPa (high pressure style 0.8MPa), Effective area mm 2 (Cv): metal seal 3.6 (0.2); rubber seal 5.4 (0.3), Coil rated voltage: 12, 24VDC; 100, 110, 200, 220VAC, Response time (ms) standard 1W, H 1.5W: 2 position metal seal 12 or less; 2 position rubber seal 15 or less 3 position metal seal 20 or less; 3 position rubber seal 25 or less

Fluid: air/inert gas, Operating pressure range: 0.1MPa - 0.7MPa (high pressure style 0.8MPa), Effective area mm 2 (Cv): metal seal 3.6 (0.2); rubber seal 5.4 (0.3), Coil rated voltage: 12, 24VDC; 100, 110, 200, 220VAC, Response time (ms) standard 1W, H 1.5W: 2 position metal seal 12 or less; 2 position rubber seal 15 or less 3 position metal seal 20 or less; 3 position rubber seal 25 or less

ZFC Series

Weight g (oz) Model IN side, OUT side ZFC100-04 4 10 (0.35) 11.5 (0.41) ZFC100-06 6 20 (0.70) Metric size ZFC200-06 6 30 (1.05) 21.5 (0.76) ZFC200-08 8 50 (1.75) ZFC101-03 5/32" 10 (0.35) 11.5 (0.41) ZFC101-07 1/4" 20 (0.70) Inch size ZFC201-07 1/4" 30 (1.05) 21.5 (0.76) ZFC201-09 5/16" 50 (1.75) Note 1) Flow rate when initial pressure drop is 0.003MPa (0.44psi) or less.

lPSMt

Linearitv Within t 1% Within t 2% Hvsteresis' Within 1% Repeatabilitv Within 0.5% Within 1% Sensitivitv Within 0.1% Within 0.5% Within 0.2% Within 1% Within 0.2% Within 1% Air Consumption (Max.) less than 0.25 SCFM @ 20 osi 0.7 SCFM @ 70 psi 0.25 SCFM @ 20 psi 0.7 SCFM @ 70 osi 0.25 SCFM @ 20 osi 0.7 SCFM @ 70 psi Supply Pressure Variation Effect (Max.)

lPSMt

Linearitv Within t 1% Within t 2% Hvsteresis' Within 1% Repeatabilitv Within 0.5% Within 1% Sensitivitv Within 0.1% Within 0.5% Within 0.2% Within 1% Within 0.2% Within 1% Air Consumption (Max.) less than 0.25 SCFM @ 20 osi 0.7 SCFM @ 70 psi 0.25 SCFM @ 20 psi 0.7 SCFM @ 70 osi 0.25 SCFM @ 20 osi 0.7 SCFM @ 70 psi Supply Pressure Variation Effect (Max.)

FSQ seies

*j::: ""."," O Note: Shaded areas in bold type-Special Order; Unshaded areas-Made to Order Fixed mountins heisht SefteS RSO Max. operaling pressure Ambient and fluid Lubrication Cushion Stroke lenoth tolerance Bolh Non lube Throuqh holet Both ends tapped Avaitabte Rod end configuration Sound bar, non"rolatjng. roller. levr Bore/standard stroke 10, 15. 20 20, 25, 30 oolble act rg Sngeactng

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

Example) 10-ARP30K-03BG-1RY Clean room compliant, copperfree, fluorine-free, silicone-free Clean room compliant Symbol Description 20 30 40 Body size 20 30 40 Body size Nil K Without backflow function With backflow function With backflow function + Nil N F Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) H a Without mounting option With bracket With set nut (For

Process Valve

Port 2(B) Working Principle Port 1(A) VNA01, 11 (N.C.) When the pilot solenoid valve i is not energized (or when air is exhausted from the port 12(P1) of the air operated type), the valve element r linked to the piston t is closed by the return spring u.

Gun Type Ionizer

(Rated voltage 125 V, Plug JIS C 8303, Inlet IEC 60320-C13) *1 Measured with a high pressure probe of 1000 M and 5 pF *2 Measurement value based on a charged plate (Dimensions: 150 mm x 150 mm, Capacitance: 20 pF) as defined in the U.S.

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

Example) 10-ARP30K-03BG-1RY Clean room compliant, copperfree, fluorine-free, silicone-free Clean room compliant Symbol Description 20 30 40 Body size 20 30 40 Body size Nil K Without backflow function With backflow function With backflow function + Nil N F Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) H a Without mounting option With bracket With set nut (For

Auto Feed Lube, Auto Feed Tank ALF400 to 900, ALT-5/-9

T0604 How to Order T 0604 B 20 Max. operating pressure Max. operating pressure Color Length per roll Nylon tubing 20 20 m 100 m roll (Black, white only) Symbol Color B W R BU Y G Operating temperature (C) Black White Red Blue Yellow Green 100 Tube size Maximum operating pressure is 1/3 max. of burst pressure at 60C, considering the safety ratio.

AR Series Modular Type Regulator

Nq Body size 10 20 25 30 40 Symbol Description Nw Pipe thread type Nil Metric thread (M5) V Rc V V V V N NPT V V V V F G V V V V + M5 M5 V 01 1/8 V 02 1/4 V V V V 03 3/8 V V V 04 1/2 V 06 3/4 V + Ne Port size a Mounting Nil Without mounting option V V V V V B Note 2) With bracket V V V V V H With set nut (for panel mount) Note 3) V V V V V + Option Note 1) Nr Nil Without pressure gauge

IZ-OMU0031-CN

kV 1 -20+20 kV 2 -0.4+0.4 kV 0.001 kV 0.1 kV 1050 mm 2575 mm DC24 V10( 50 mA () DC15 V(1 M) 1 (26.4 V ) NPN PNP 2 80 mA DC30 V(NPN ) 1 V (80 mA ) () 100 ms.500 ms1 s2 s 15 V( 1 k () (25 ) 1F.S. 420 mA() 600 (DC24 V) 50 () (25 ) 1F.S

6)2 to 10 stations: W = 22n + 11811 to 20 stations: W = 22n + 140