Model: 11 (Port A One-touch Fitting, Port B One-touch Fitting), Applicable Tube OD: 07 (1/4"), Port Size Applicable Tube: 11 (3/8"), Number of Ports: 10 pcs.

Cylinder (Tube) Inner Diameter(φ): 10, Stroke(mm): 10, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Guided, Additional Function: Standard, Environment, Applications: Clean Room, End Locking: No, Valves: No, Operating Pressure(MPa): 0.1～0.7, Cushion: Rubber cushion, Specification: Clean Series (vacuum type), Port thread type:

Cylinder (Tube) Inner Diameter(φ): 15, Stroke(mm): 10, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Guided, Additional Function: Standard, Environment, Applications: Clean Room, End Locking: No, Valves: No, Operating Pressure(MPa): 0.1～0.7, Cushion: Rubber bumper at both ends, Specification: Clean Series (vacuum type), Port thread

Triple, Port A Number: 10, Color: Black, Release button color: Red, Custom-made specifications: N/A

Specification: Clean Type, Vacuum Suction, Bore Size: Ø10, Stroke: 10mm, Adjuster: Rubber Stopper, Magnet: W/Magnet and Rail, Auto Switch: Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire: 1m, Number: -

Specification: Clean Type, Vacuum Suction, Bore Size: Ø10, Stroke: 10mm, Adjuster: Rubber Stopper, Magnet: W/Magnet and Rail, Auto Switch: Solid State, 2-color Indication, 3 Wire PNP, Horizontal, Lead Wire: 1m, Number: -

Specification: Clean Series, Vacuum Suction Type, Bearing Type: Slide Bearing, Bore Size: 15mm, Port Type: M5x0.8: 6-20mm Bore; Rc: 25-32mm Bore, Stroke: 10mm, Auto Switch: Y59A--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: 3m, Number: -

Specification: Clean Series, Vacuum Suction Type, Bearing Type: Slide Bearing, Bore Size: 6mm, Port Type: M5x0.8: 6-20mm Bore; Rc: 25-32mm Bore, Stroke: 10mm, Auto Switch: Y7PW--Solid State, 2-color Indication, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: 0.5m Cord Length, M8-3 Pin Connector, Number: 1 pc.

Specification: Clean Series, Vacuum Suction Type, Bearing Type: Ball Bushing Bearing, Bore Size: 6mm, Port Type: M5x0.8: 6-20mm Bore; Rc: 25-32mm Bore, Stroke: 10mm, Auto Switch: Y7P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: 3m, Number: -

Specification: Clean Series, Vacuum Suction Type, Bearing Type: Ball Bushing Bearing, Bore Size: 32mm, Port Type: NPT: 25 & 32mm Bore, Stroke: 10mm, Auto Switch: Y7P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: 5m, Number: -

Specification: Clean Series, Vacuum Suction Type, Bearing Type: Ball Bushing Bearing, Bore Size: 15mm, Port Type: M5x0.8: 6-20mm Bore; Rc: 25-32mm Bore, Stroke: 10mm, Auto Switch: Y59A--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: -, Number: -

Specification: Clean Series, Vacuum Suction, Bearing: Slide Bearing, Bore Size: 10mm, Stroke: 10mm, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire or Prewired Connector: 5m, Number: -

3 Port Air Operated Valve VPA3145/3165/3185 Series

4 VFA 11 4 11 4 11 2 VFRA VPA3185 2.3 VPA4 SYJA Dimensions VZA 3 x Rc Pilot port 1 8 VTA VGA VPA VPA3 VPA3 2 x Mounting hole Port size Rc (EXH port) Port size 2 x Rc (IN, OUT port) Port size Rc Model Mounting hole IN, OUT EXH A B C D E F G H J K L 3 8 1 2 3 4 VPA3145 71 3 4 8.5 85 14 52 55 93 32 87.4 36 71 80 3 4 VPA3165 82.6 1 4 8.5 1 110 17 68 75 118 45 113 36 71 95 1 1 4 1 1 1 1 4 1 2

PF3W7.eng

Rc(NPT)11/4 40 to 42 Nm Hysteresis H_1 Item Default setting / With the temperature sensor in parenthesis (Displayed alternately) Flow [L/min] Rc(NPT)11/2 48 to 50 Nm [F 3] Response time setting 1 second Temperature upper limit exceeded If the tightening torque is exceeded, the product can be broken. If the correct tightening torque is not applied, the fittings may become loose.

PF3W5.eng

Piping port (IN side) 11/4 54 mm Measurement mode Bracket (Option) 11/2 54 mm *: Green: Flashes once. PF3W5 -1 (Analogue 1 to 5 V type: Without temperature sensor) Flashes twice. PF3W5 -2 (Analogue 4 to 20 mA type: Without temperature sensor) Flashes three times. PF3W5 -1T (Analogue 1 to 5 V type: With temperature sensor) Tighten to the specified torque for piping.

PF3W7x-X445.eng

Otherwise it can cause failure or malfunction of the system. 11/4 54 mm Temperature upper limit exceeded Flow range, unit specification and mounting of temperature sensor are displayed Set value Sets the ON or OFF point of the switch output. 50 oC 11/2 54 mm The fluid temperature is above 110 oC. Reduce the fluid temperature.

Pressure Control Equipment

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 14-4-11 Miniature regulator ARJ310 Small, compact Allows smaller mounting pitch Bracket Pressure gauge M5 0.2 to 0.7 1 8 / to 2 1 4 Pilot operated regulator AR425-925 AR435-935 Compact manifold regulator ARM10/11 / 14-4-15 Internal pilot type Relieving

Enclosure: W (IP67), SI Unit: EA (EtherNet/IPâ„¢ - 32 Outputs - Connector M12), SI Unit Output Polarity: N (-COM), Stations: 10 Stations, P, E Port Entry: U (U Side 2~10 Stations), SUP/EXH Block Assembly: Internal Pilot, A, B Port: N7 (1/4" One-touch Fitting), Mounting: D (DIN Rail Mounting), DIN Rail Option: 11 (for 11 Stations; Longer Rail than Total Length of Specified Valve Stations)

AU

None Float type auto-drain 00 11 q Replacement Parts AU100 has no auto-drain type. Element Bowl guard Material Model Port size Description No.

: °C), Bracket: None, Calibration Certificate: None, Series: Z (Flow Range: 04: 0.5 to 4 L/min , 20: 2 to 16 L/min, 40: 5 to 40 L/min, 11: 10 to 100 L/min)