KA

KAU23-M5 38 9.6 15.5 34.5 9 M5 X 0.8 M6 X 1.0 2.2 2.2 10 38.5 3.4 2.9 11 3.2 9.6 1 8 KAU23-M6 KAU23-U01 11 39.5 KAU04-M5 4 M5 X 0.8 M6 X 1.0 2.2 2.2 KAU04-M6 10 11 16 10.4 36 10.4 40 4 1 8 KAU04-U01 4.2 4.2 11 1 4 KAU04-U02 42 16 14 42.5 KAU06-M5 M5 X 0.8 M6 X 1.0 39 2.2 2.2 12 KAU06-M6 43 13 17 12.8 1 8 3 8 KAU06-U03 46 45 43.5 39.5 17 14 12.8 KAU06-U01 13 6 1 4 39 KAU06-U02

MQQ

16 15 8 21 4.5 11 66 + Stroke 27.5 93.5 + Stroke 10, 16, 20, 25 Mounting nut Rod end nut G1 G2 NN 2-P I NA D J N2 N1 MM A F S + Stroke F H ZZ + Stroke (mm) Bore size (mm) A D NN F G1 P G2 MM S I ZZ H J N1 N2 NA M5 x 0.8 16 15 4 8 15 6 M12 x 1 M4 x 0.7 65 18.5 101 28 11 20 16 10 M5 x 0.8 22 15 5 10 15 6 M14 x 1 M5 x 0.8 74 22 114 30 12 21 19.5 16 Rc 1/8 28.5 18 8 13 25 8.5 M20 x 1.5 M8 x

3 Port Direct Operated Poppet Solenoid Valve Series VKF300 1

20 26 49 300 (lead wire length) 1 P = 19 13.5 L2 5.5 L1 47.5 11 5 n-Rc 1/8, M5 x 0.8 2(A) port 19 35 n-Rc 1/8 3(R) port 47.5 11 R R P = 19 19 L Dimension n: Stations n L 1 38 27 2 57 46 3 76 65 4 95 84 5 114 103 6 133 122 7 152 141 8 171 160 9 190 179 10 209 198 11 228 217 12 247 236 13 266 255 14 285 274 15 304 293 16 323 312 17 342 331 18 361 350 19 380 369 20 399 388 L1 L2 4-13-8 9 3

VSA4

2 position single: VSA4140 2 position double: VSA4240 3 position closed center: VSA4340 3 position exhaust center: VSA4440 4-9 (11) Mounting hole 4-9 (11) Mounting hole 4-9 (11) Mounting hole ( ): Valve for Rc 3/4 5-3-36 7 Series VSA40 Manifold Specifications Specifications Valve manifold with the same body size Valve manifold with the same body size Value manifold with the different body

E-P HYREG ® Series VY1 1

4 7 1 4 11 2 1 2 2 9 Note) Only bracket or foot may be mounted. 14-10-2 3 E-P HYREG Series VY1 Standard Specifications 02 03 04 04 06 10 02 03 04 VY1A0 0 1-M5 VY1B0 0 1M 0 5 1 VY110 0 10 0 1 2 VY120 0 10 0 1 2 VY130 0 1VY140 0 1VY150 0 1VY170 0 11 1 0 2 VY190 0 11 2 4 0 Model VY1D00-M5 10 M5 01 M5 Port M5 01 02 01 02 02 03 20 04 02 03 04 04 06 10 12 14 P Port size Rc 11 2 1 1 8 1 8 1 4

VDW

2 3 4 5 n U side VDW23-GVDW23-GVDW23-GVDW23-G70 31.5 21 18.5 (OUT port) n-1/8 n-M5 x 0.8 11 P = 22 11 4.5 1.5 54 6 32 6 (19.5) 9.5 11 9.5 11 4-M4 x 0.7 46 10 24 10 When w/o bracket, M3 threads at both ends (4 positions) can be used for other purposes.

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

Refer to Glossary of Terms on front matter 10 for details on the max. operating pressure differential and the max. system pressure. 3.0 4.5 0.46 0.61 2.3 3 8 (10A) 6 0.3 1.1 4.1 8 0.3 1.6 6.4 1.0 10 0.3 2.2 11 1 2 (15A) 10 0.3 2.2 11 Note) Weight of grommet type. Add 10 g for conduit type, 30 g for DIN terminal type, 60 g for conduit terminal type respectively.

Air Pilot Operated

OYTOT MSA 1010.02 Yes '/f t2) Yes MBA 10't r.02 11 Yes 't"et t ' l Z YE MAA 4210.02 t6 Y5 v." 11) v.' t2\ t " t2:l t ' l a STATX)flS 2 3 a 5 6 7 I t t0 -1 nm) 5 .

7.4

AN110-01 (BC sintered body) AN10-01 (Resin) 34 23 11 13 756 Options S0700 Series Body Ported Base Mounted Double check block (Separated) VQ1000-FPG-mm Cylinder side pressure (P2) SJ It is used on the outlet side piping to keep the cylinder in the intermediate position for long periods of time.

11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

Adjuster for series 11-MXP6 is available for one side only. Without adjuster type is unavailable for series 11-MXP6. 11-MXP How to Order 11MXPJ6 Clean series 11 Vacuum suction type 11 MXPJ6 10 22 MXPJ6 10 11-MXPJ6 Copper, fluorine and silicon-free + low particle generation Stroke 5 10 5mm 10mm 22 Vacuum suction type With auto switch type is unavailable for 11-MXPJ6.

Series MXP/MXPJ6 11- ø6, ø10, ø12, ø16 22- Air Slide Table

Without adjuster type is not available for the 11-MXP6 series. 11-MXP How to Order MXPJ6 Clean series 11 Vacuum suction type 11 MXPJ6 10 22 MXPJ6 10 11-MXPJ6 Copper, fluorine and silicone-free + Low particle generation Stroke 5 10 5 mm 10 mm 22 Vacuum suction type With auto switch type is not available for the 11-MXPJ6 series.

Air Slide Table ø 4, ø 6, ø 8 Series MXJ

Clean Series 11 Standard model no. MXJ Clean Series 11: Vacuum type External dimensions are identical to the standard model.

SI Unit for Vacuum Manifold

Wiring 11 2.1. Communication/Power connector 11 2.2. FE terminal 11 3. Configuration 12 3.1. IODD file 12 3.2. Direct Parameter page 1 12 3.3. IO-Link defined parameters 13 3.4. Vendor defined parameters 15 4. Process data 22 4.1. Input process data 22 4.2 Output process data 26 5. Example of energy saving operation of ejector 28 6. LED indication 29 7. Event 30 8. Specification 31 8.1.

IDX-OM-W093

R .11-1 11.1 . 11-1 11.2 . 11-1 11.3 . 11-2 12 T . 12-1 12.1 . 12-1 12.2 . 12-1 12.3 . 12-2 12.4 . 12-3 12.5 . 12-4 13 V . 12-5 13.1 . 13-1 13.2 . 13-1 13.3 . 13-2 14 . 14-1 14.1 . 14-1 IDF60/70/80/90 Series IDX-OM-W093 1 1.1 () 6.2 1.1.1 3 IDF60/70/80/90 Series 1-1 IDX-OM-W093 1.2 6 1.2.1 1.2.2 50 1.2.3 0 IDF60/70/80/90 Series 1-2 IDX-OM-W093 1.2.4 IDF60/70/80/90

Air preparation filter

Application 11 3. Specifications 11 4. How to Order 12 5. Component name and spare parts list 13 6. Troubleshooting 14 7. Assembly and replacement procedure 7-1. Bracket assembly 15 7-2. Auto drain replacement 15 7-3. Element replacement 19 8. Dimensions 20 -2- Doc. no.

High-precision Digital Pressure Switch ( compatible)

The display accuracy Refer to Trouble No.11 does not meet the specifications. The Display Refer to Trouble No.12 measurement unit cannot be changed. Buttons do not work. Refer to Trouble No.13 Refer to Trouble No.14 -75No.PS-OMY0007-A Troubleshooting list Problem No.

Modular F.R.L. Pressure Control Equipment

Straight type V Elbow type Fitting size One-touch fittings for regulator Straight V 2.5 3 6.5 Elbow W 6 6.5 6 Elbow X 11 11 11.5 Elbow Y 35.5 36 38.5 4, 5/32 6 1/4 8, 5/16 W X Y Note) The O-ring is attached.

Smooth Cylinder Series CG1Y ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the low friction, double acting, single rod type of Series CG1  Q .

77 1/8 24 114 Up to 200 11 11 77 1/8 29 119 Up to 300 11 11 79 1/8 35.5 121 Up to 300 12 12 87 1/8 44 139 Up to 300 13 13 102 1/4 55 162 Up to 300 13 13 102 1/4 69 162 Up to 300 122 3/8 80 196 Up to 300 122 1/2 100 196 Up to 300 13

Clamp Cylinder with Lock Series CLK1

2-M6 thread depth 11 15 15 35 18 15 2-M6 thread depth 11 2-M6 thread depth 11 20 20 A 17 17 40 A 20 20 15 45 60 25 45 60 A Applicable clamp cylinder A Applicable clamp cylinder Part no.

Free-Mounting Cylinder with Air Cushion Series CU

(mm) D-A9, D-A9V D-F9, D-F9W D-F9V, D-F9WV Bore size (mm) A A W B W B W A B 20 25 32 22 22 13 (10.5) 19 18 9 19 11 15 24.5 24.5 9 (6.5) 15 20 5 15 7 11 26.5 26.5 11.5 (9) 17.5 22.5 7.5 17.5 9.5 13.5 Values in ( ) are dimensions for D-A93 type.