Printed in Japan. 1st printing October, 1998 D-SMC.L.A. P-84.5 (YG)
Rated Flow Range: 21 (2 to 200 L/min), Flow Adjustment Valve: None (Straight), Port Size: C8 (ø8), Output Specification: D (Out 1: NPN; Out 2: Analog 4 to 20 mA), Lead Wire: W (Lead Wire w/Connector + Rubber Cover for Connector), Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: T (Panel Mount Adapter, w/o Flow Adjustment Valve), Calibration Certificate: A (Calibration
Rated Flow Range: 21 (2 to 200 L/min), Flow Adjustment Valve: None (Straight), Port Size: N2 (NPT1/4), Output Specification: D (Out 1: NPN; Out 2: Analog 4 to 20 mA), Lead Wire: W (Lead Wire w/Connector + Rubber Cover for Connector)
Rated Flow Range: 21 (2 to 200 L/min), Flow Adjustment Valve: None (Straight), Port Size: 02 (Rc1/4), Output Specification: D (Out 1: NPN; Out 2: Analog 4 to 20 mA), Lead Wire: Lead Wire w/Connector, Unit Specification: M (SI Unit Only)
Rated Flow Range: 21 (2 to 200 L/min), Flow Adjustment Valve: None (Straight), Port Size: 02 (Rc1/4), Output Specification: D (Out 1: NPN; Out 2: Analog 4 to 20 mA), Lead Wire: N (w/o Lead Wire w/Connector), Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: R (Bracket, w/o Flow Adjustment Valve)
Rated Flow Range: 21 (2 to 200 L/min), Flow Adjustment Valve: None (Straight), Port Size: 02 (Rc1/4), Output Specification: D (Out 1: NPN; Out 2: Analog 4 to 20 mA), Lead Wire: N (w/o Lead Wire w/Connector)
Rated Flow Range: 21 (2 to 200 L/min), Flow Adjustment Valve: None (Straight), Port Size: N2 (NPT1/4), Output Specification: D (Out 1: NPN; Out 2: Analog 4 to 20 mA), Lead Wire: W (Lead Wire w/Connector + Rubber Cover for Connector), Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: R (Bracket, w/o Flow Adjustment Valve)
Rated Flow Range: 21 (2 to 200 L/min), Flow Adjustment Valve: None (Straight), Port Size: N7 (1/4), Output Specification: D (Out 1: NPN; Out 2: Analog 4 to 20 mA), Lead Wire: N (w/o Lead Wire w/Connector)
Rated Flow Range: 21 (2 to 200 L/min), Flow Adjustment Valve: None (Straight), Port Size: C8 (ø8), Output Specification: D (Out 1: NPN; Out 2: Analog 4 to 20 mA), Lead Wire: W (Lead Wire w/Connector + Rubber Cover for Connector), Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: R (Bracket, w/o Flow Adjustment Valve), Calibration Certificate: A (Calibration Certificate
Rated Flow Range: 21 (2 to 200 L/min), Flow Adjustment Valve: S (With Flow Adjustment Valve, Straight), Port Size: N2 (NPT1/4), Output Specification: D (Out 1: NPN; Out 2: Analog 4 to 20 mA), Lead Wire: N (w/o Lead Wire w/Connector), Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: S (Bracket, w/Flow Adjustment Valve)
Rated Flow Range: 21 (2 to 200 L/min), Flow Adjustment Valve: S (With Flow Adjustment Valve, Straight), Port Size: N2 (NPT1/4), Output Specification: D (Out 1: NPN; Out 2: Analog 4 to 20 mA)
Rated Flow Range: 21 (2 to 200 L/min), Flow Adjustment Valve: None (Straight), Port Size: N2 (NPT1/4), Output Specification: D (Out 1: NPN; Out 2: Analog 4 to 20 mA), Lead Wire: N (w/o Lead Wire w/Connector)
Rated Flow Range: 21 (2 to 200 L/min), Flow Adjustment Valve: None (Straight), Port Size: 02 (Rc1/4), Output Specification: D (Out 1: NPN; Out 2: Analog 4 to 20 mA), Lead Wire: W (Lead Wire w/Connector + Rubber Cover for Connector), Unit Specification: M (SI Unit Only), Bracket/Panel Mount Adapter: R (Bracket, w/o Flow Adjustment Valve)
Rated Flow Range: 21 (2 to 200 L/min), Flow Adjustment Valve: None (Straight), Port Size: C8 (ø8), Output Specification: D (Out 1: NPN; Out 2: Analog 4 to 20 mA), Lead Wire: Lead Wire w/Connector, Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: R (Bracket, w/o Flow Adjustment Valve)
Rated Flow Range: 21 (2 to 200 L/min), Flow Adjustment Valve: S (With Flow Adjustment Valve, Straight), Port Size: N2 (NPT1/4), Output Specification: D (Out 1: NPN; Out 2: Analog 4 to 20 mA), Lead Wire: Lead Wire w/Connector, Unit Specification: M (SI Unit Only), Bracket/Panel Mount Adapter: No Bracket, Calibration Certificate: A (Calibration Certificate)
Rated Flow Range: 21 (2 to 200 L/min), Flow Adjustment Valve: None (Straight), Port Size: N7 (1/4), Output Specification: D (Out 1: NPN; Out 2: Analog 4 to 20 mA), Lead Wire: N (w/o Lead Wire w/Connector), Unit Specification: M (SI Unit Only)
Main sealing Main sealing D side sealing A side sealing A seal is formed when the tubing is inserted, with its insert bushing, and its compression against the internal nut. Tapered face The fluid pressure pushes the seal face to get effective sealing.
Model: 21, Orifice Diameter: 2 (3 mm), Valve/Body Configuration: 1 (N.C. for Manifold), Solenoid Valve Option: H (SUS Body, FKM Seal, Class B), Suffix: Z (Oil-Free Specification), Manifold Designation: Brass, Stainless Steel Base Material, Voltage: 5 (24VDC), Lead Wire: D (DIN Connector)
D Shows how precisely the pressure can be indicated or set by the digital Pressure switch. When 1 digit = 1 kPa, the pressure is given with an increment of Digit (Min. setting unit) 1 kPa, e.g., 1, 2, 3,, 99, 100. E Energy saving automatic control Indicate that the vacuum pressure during adsorption is monitored and ON and OFF of the ejector is automatically controlled.
dB R134aHFC g 1505 2005 2305 2705 2905 3505 Rc3/8 Rc1/2 Rc3/4 Rc1 R3/8 R1/2 R3/4 R1 mm 10 12 kg 18 22 23 27 28 46 1ANR 2065% 2 330mA 4 () 6-1 IDFA Series 6 1 IDX-OM-W017 6 6-2 GWP (GWP) Regulation (EU) No 517/2014 IPCC AR4) R134a 1,430 1,430 R404A 3,922 3,920 R407C 1,774 1,770 R410A 2,088 2,090 (1) (2) IDFA Series 6-2 GWP 6 2 IDX-OM-W017 6 6-3 mm IDFA4E15E1 A B C D