Fluid: compressed air, Noise reduction: 25-35 dB(A) or more, Maximum operating pressure: 1.0MPa, Effective area mm 2 (Cv): AN*00 35-960 (1.9-53); AN*02 35-90 (1.9-5.0); AN*03 10-60 (0.6-3.3), Ambient and fluid temperature: 5 - 60 C, END PLATE ASSY (NARM3000), AIRLINE EQUIPMENT, ARM NO SIZE RAPART, .55000 lb

Fluid: compressed air, Noise reduction: 25-35 dB(A) or more, Maximum operating pressure: 1.0MPa, Effective area mm 2 (Cv): AN*00 35-960 (1.9-53); AN*02 35-90 (1.9-5.0); AN*03 10-60 (0.6-3.3), Ambient and fluid temperature: 5 - 60 C, MUFFLER, AIRLINE EQUIPMENT, AN SILENCER, HB, AN 1 INCH STANDARD (PT), .44636 lb, ModelEffective area mm2Sonic conductance C [dm3/(s?

Fluid: air , Operating pressure range (MPa): 0.15 to 0.7 , Ambient and fluid temperature: -10 to 50° C (no freezing) , Maximum operating frequency: 10Hz, VALVE/SOL, 4/5 PORT SOLENOID VALVE, VVD, 53 lb

Fluid: air , Operating pressure range (MPa): 0.15 to 0.7 , Ambient and fluid temperature: -10 to 50° C (no freezing) , Maximum operating frequency: 10Hz, VALVE/SOL, 4/5 PORT SOLENOID VALVE, VVD, 53 lb

Fluid: air , Operating pressure range (MPa): 0.15 to 0.7 , Ambient and fluid temperature: -10 to 50° C (no freezing) , Maximum operating frequency: 10Hz, VALVE/SOL, 4/5 PORT SOLENOID VALVE, VVD, 53 lb

The SY is available in body ported or base mounted styles, and can be used individually or manifold mounted., 5 port solenoid valve, 4/5 PORT SOLENOID VALVE, VVD, 53 lb

PF2D

Corner: R3.5 or less 387 PF2D Series Dimensions: Remote Type Monitor Unit for Deionized Water and Chemical Liquids (4-channel Controller) PF2D200/201 40.1 (7.5) 40 6 2.5 L L/min 36.8 OUT1 CH FLOW SMC SET Sensor connector (option) Front protective cover + Panel mounting 53 9.4 (2) 47 42.4 46.4 Panel mounting adapter Front protective cover Waterproof seal Panel Panel fitting dimensions 55 or

Series PF2W Digital Flow Switch For Water

Corner: R3.5 or less 311 A Series PF2W Dimensions: Remote Type Monitor Unit For Water (4-channel Flow Monitor) PF2W200, 201 40.1 (7.5) 40 6 2.5 L L/min 36.8 OUT1 CH FLOW SMC SET Sensor connector (option) Front protective cover + Panel mount adapter 53 9.4 (2) 47 42.4 46.4 Panel mount adapter Front protective cover Waterproof seal Panel Panel fitting dimensions 55 or more 37.5 +0.1 -0.2 R1

7.4

22.5) 0.5 (43) 2.5 U side D side Stations 1 2 3 n DIN rail clamping screw 2n x C3, C4, M5 C3: 3.2 One-touch fitting assembly C4: 4 One-touch fitting assembly M5: M5 thread 2n x C3, C4, M5 C3: 3.2 One-touch fitting assembly C4: 4 One-touch fitting assembly M5: M5 thread 45.5 2.5 10.5 (5) Dimensions Formula L1 = 11n + 20 n: Station (Maximum 20 stations) 21.5 n L 1 2 3 4 5 6 7 8 9 10 L1 31 42 53

Rotary Table/

57 36 88h9 90h9 46H9 16 22H9 12.5 5 3.5 9 22 10.4 17.5 10.5 100h9 101 102 95 50 29.5 27 8 17 85 50.5 130 66 42 98h9 56H9 19 24H9 14.5 6 3.5 12 27 10.4 17.5 10.5 116h9 118h9 119 120 113 60 36.5 36 10 24 103 65.5 150 80 57 64H9 24 32H9 16.5 9 5.5 15 32 14.2 20 12.5 (mm) JC JD JJ JK JU Q S SD SF SU UU WA WB WC WD WE WF XA XB XC YA YB YC Size 70 100 200 M12 x 1.75 18 M8 x 1.25 10 M20 x 1.5 53

PSE530/200

Terminal DC (+) 7 Green : CH4_OUT1 DC () 6 Red : CH3_OUT1 CH1_OUT1 5 Gray : CH2_OUT1 CH1_OUT2 4 White : CH1_OUT2 3 Black : CH1_OUT1 CH2_OUT1 2000 2 Blue : DC () CH3_OUT1 1 Brown: DC (+) CH4_OUT1 Auto shift input 16-3-8 8 Series PSE200 Multi-channel Controller Dimensions Front protective cover + Panel mount 53 9.4 (2) 47 42.4 ZSE ISE MPa kPa PSE 46.4 OUT1 OUT2 1 2 3 4 Z I SE3 CH PRESSURE PS

MXU

port (2 on both sides) M4 x 0.7 2.5 6 8-3-5 6 Series MXU Dimensions: MXU6 (mm) Stroke (mm) 5 10 15 20 25 30 TS Z S NS LS BS 45.5 46 37.5 14 20 10 50.5 51 42.5 14 20 15 55.5 56 47.5 24 25 20 60.5 61 52.5 24 30 25 65.5 66 57.5 34 40 30 70.5 71 62.5 34 40 35 8-3-6 7 Compact Slide Series MXU Dimensions: MXU10 MX MTS MY CY MG CX D-X 20Data (mm) Stroke (mm) 5 10 15 20 25 30 TS Z S NS LS BS 52.5 53

Compact

Guide MXZ Series Compact Slide MXH Series (Linear guide) Height (Overall length) Compact Guide Cylinder MGPM Series (Slide bearing) MGPL Series (Ball bushing) Compact Cylinder with Linear Guide MXZ Series (Linear guide) Guide Rod Type Compact Cylinder CQM Series (Slide bearing) Deflection Compact and Space-saving Height/at 10 mm stroke [mm] Depth Width Bore size MXZ MXH MGP CQM 12 44 56.51 53

Table of Contents - Tubing

Min. bending radius mm Note 3) Length 20m 100m Specifications Operating fluid Max. operating pressure Burst pressure Operating temperature Material inner tube Material Hardness Air, Water Note 1) 145psi (1MPa) at 68F (20C) Note 2) Refer to burst pressure characteristics chart Air: 4 to 140F (20 to 60C), Water: 32 to 140F (0 to 60C) Nylon 11 PVC (Equivalent to UL94, standard VO) Shore D 53

Electro-Pneumatic Proportional Valve Series VEF/VEP

3 (R) Port 1 (P) ARM ARP G1/2 Applicable cable O.D. 6 to 12 IR IRV 112.2 99.7 VEX 21.5 SRH 28 SRP 25 13 50 SRF 122 3 x 1/4, 3/8 VCHR ITV Flow type: VEF2131 Flow type: VEF2141, VEF3141 Pressure type: VEP3141 IC 3 x 3/8, 1/2, 3/4 45 45 2 x 1/4, 3/8, 1/2 ITVX PVQ VEF VEP VEF VEP 129 Port 1 (P) VER 154.5 Port 1 (P) Port 2(A) Port 2 (A) Port 3 (R) P 95 120.5 Plug A VEA 65 P 36 35 51 35 VY1 9 53

Clean Exhaust Filter SFE Series

Clean Exhaust Filter SFE Series RoHS How to Order SFE 11 Size/Port size Male thread type Plug-in type Symbol Port size Max. ow capacity L/min (ANR) 11 M5 x 0.8 3 42 R1/8 65 52 R1/8 130 53 R1/4 130 73 R1/4 200 Symbol Port size Max. ow capacity L/min (ANR) 3A 4 30 4B 6 65 5C 8 130 7D 10 200 Male thread type One-touch tting type Symbol Applicable tubing O.D.

VX

G 53 55 56 (? ! C ) ! ! D !"# Coil insulation type # 9% ,* /) 3 ? $% % 33 1 ,) % % 1 ) ,, ) /) H B 7 !"# ! , & Ordering example VX021-001GB-01 !"# $ % & VX021-002DBT-04 ' ( !

Series ZCUK is available in 5 bore diameters., CYL, FREE MOUNT, W/VACCUM *LQA, ACTUATOR, ZCU COMPACT CYLINDER, EE, 10MM ZCU DBL-ACT AUTO-SW, .29394 lb, ModelBore size (mm)Cylinder stroke (mm) 510152025304050ZC(D)UKQ1049(54)53(63)57(67)61(71)65(75)69(79)??

Model: 30 (4000 L/min), Pressure Range: 5 (0.005~0.9MPa), Power Voltage: 0 (24VDC), Input Signal: 53 (16 Points Preset Input - PNP Output), Monitor Output: For Input Signal/Communication Model Types 40, CC, DE, PR, RC and IL Only, Thread: Rc(PT), Port Size: 3 [3/8 (2000,3000)], Accessory: C (L Bracket), Cable Connector: L (Right Angle Style 3m), Pressure Display Unit: 4 (PSI)

Model: 10 (200 L/min [ANR]), Pressure Range: 5 (0.005~0.9MPa), Power Voltage: 0 (24VDC), Input Signal: 53 (16 Points Preset Input - PNP Output), Monitor Output: For Input Signal/Communication Model Types 40, CC, DE, PR, RC and IL Only, Thread: N (NPT), Port Size: 1 [1/8 (1000)], Accessory: None, Cable Connector: L (Right Angle Style 3m), Pressure Display Unit: 4 (PSI)