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M9 M9V F9W(V) B Electrical entry is in the direction C (mm) Proper mounting position Proper mounting position Proper mounting position D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV Model Model Model A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C

Electric Actuators

Refer to page 100 for part numbers. 293 Made to Order Series LXF/LXP/LXS Short Stroke Type Low Particulate Generation Specification With Motor Brake/Without Motor Brake How to Order LXFH 5 B 1 C 25 GD X60 Low Profile Slide Table Type LXPB 2 B 1 B C 50 F9N X60 Guide Rod Type X60 High Rigidity Slide Table Type C 50 F9N 1 B LXSH 2 B Motor type Low particulate generation specification 2 phase

ZP

Y C B Y C D H Model Model Misc.

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-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com N B A B 2-P C L L C A B A B LVA10 2-F B B K LVA60 LVA20 With flow rate adjustment With indicator (Max.

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A: Acceleration time B: Constant velocity time C: Deceleration time D: Resting time (0.4sec.)

ZP

5 3 x 4 4 x 8 3 x 6.5 4 x 9.5 18 34 40 Dimensions Dimensions Dimensions Model A 40 50 ZP40H ZP50H B 42 52 C 32 42 Model A 63 80 ZP63H ZP80H B 65 82 C 50 61 D 14.5 16.5 Y 3.5 4.5 Model A 100 125 ZP100H ZP125H B 103 128 C 80 104 ZP HB 40 50 ZP HB ZP HB 63 80 100 125 F F F 4 x 9.5 4 x 8 3 x 6.5 4 x 6 4 x 5 3 x 4 6 G E E Y E 3.5 Y Y 10 6 8 40 18 34 C C C A A A B B B D D D Dimensions Model ZP63HB

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C D J K Y A J K B Y C D Misc.

V

N G T Y P E V A L V E W I T H M A N U A L O V E R R I D E M A N I F O L D O P T I O N P A R T S A V A I L A B L E : P E R F E C T C H E C K B L O C K P E R F E C T C H E C K B L O C K W I T H V A L V E O R M A N I F O L D Courtesy of Steven Engineering, Inc. !

5 Port Solenoid Valve Series SY3000/5000/7000/9000

4/25/3 (A/BEA/EB) Grommet Cv b C (kdm3/ 14/2 (PA/B) 4/25/3 (A/BEA/EB) Grommet Cv b C (dm3/ L/M plug L/M plug 4, 2 (A, B) 4, 2 (A, B) 1, 5, 3 1, 5, 3 DIN terminal (sbar)) Cv b C (kdm3/ (sbar) ) Cv b C (dm3/ (P, EA, EB) (P, EA, EB) connector 57 82 connector 108 133 connector 51 53 68 74 connector 101 104 120 125 (sbar) ) (sbar) ) 125 167 Single Single 2 position 2 position 0.81 4.1 3.3 0.33

ZP

5 3 x 4 4 x 8 3 x 6.5 4 x 9.5 18 34 40 Dimensions Dimensions Dimensions Model A 40 50 ZP40H ZP50H B 42 52 C 32 42 Model A 63 80 ZP63H ZP80H B 65 82 C 50 61 D 14.5 16.5 Y 3.5 4.5 Model A 100 125 ZP100H ZP125H B 103 128 C 80 104 ZP HB 40 50 ZP HB ZP HB 63 80 100 125 F F F 4 x 9.5 4 x 8 3 x 6.5 4 x 6 4 x 5 3 x 4 6 G E E Y E 3.5 Y Y 10 6 8 40 18 34 C C C A A A B B B D D D Dimensions Model ZP63HB

Made to Order

CS1 (D) (B) (D) (B) (D) (B) (D) (B) CNA2 (C) (C) (C) (C) (C) (C) (C) Cushion valve CL1 1.

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Cooling water (l/min) 180C Inlet air temperature Correction factor Air flow (l/min (ANR)) Model 50C 70C 100C 41.5 43 45.5 37 43 49.5 37 43 45.5 37 42 43.5 40 44 46 39.5 43 44.5 41 43 45.5 A B C A B C A B C A B C A B C A B C A B C 35.5 36 36.5 33.5 36 38 33.5 36 36.5 33.5 35 36 34.5 36 37 34.5 35.5 36 34.5 35.5 36 38.5 40 42 36 40 45.5 36 40 42.5 36 40 41 38 40 42.5 38

LX

1 C 25 GD X60 Low Profile Slide Table Type LXPB 2 B 1 B C 50 F9N X60 Guide Rod Type X60 High Rigidity Slide Table Type C 50 F9N 1 B LXSH 2 B Motor type Low particulate generation specification 2 phase stepper motor 5 phase stepper motor 2 5 Number of auto/proximity switches Ball screw B Lead screw type 1 2 1 pc. 2 pcs.

Hydraulic

H B (mm) C d D H B Part no.

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D A B MTS Side support B MY-SB MY CY 2-J MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX E A B C D D(mm) -X Model Applicable bore size A B C 12 15 25 D E F G H J M4 x 0.7 M4 x 0.7 M5 x 0.8 A B A B A B MY-S10 MY-S16 MY-S20 43.6 53.6 65.6 75 84 105 131 158 200

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Applicable bore size (mm) 12 16 20 25 32, 40 50, 63 80 100 Dd9 d H B C Part no.

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Non plug-in C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv (kg) 0.61 (0.64) <0.58> 0.71 (0.74) <0.69> 0.72 (0.75) <0.71> 0.72 (0.75) <0.71> 0.72 (0.75) <0.71> Note 1) [ ]: Denotes the normal position.

V100

4-7-17 2 Series VT325 Flow Characteristics/Weight Flow characteristics 1 2 (P A) 2 3 (A R) 3 2 (R A) 2 1 (A P) Weight Valve model Grommet Port size C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv VT325 VT325V (Vacuum spec. type) VT325 VT325V (Vacuum spec. type) 0.55 kg (For AC) 0.60 kg (For DC) Note) Values for a single valve unit.

ZP

C D J K Y A J K B Y C D Misc.

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

Shield Brown Black Red Black Orange Black 12 13 7 6 9 8 3 Vcc GND A A B B B-4 A-4 B-5 A-5 B-6 A-6 LE-CP-3-B 360 LE-CP-5-B 590 LE-CP-8-B 1060 LE-CP-A-B 1320 LE-CP-B-B 1920 LE-CP-C-B 2620 Robotic cable Connector B terminal no.