Fieldbus system Ethernet POWERLINK compatible SI unit

code, Plug, Straight 5 m, SPEEDCON compatible EX9-AC010EN-PSRJ: Cable with M12 connector, D code-RJ45, Plug, Straight 1 m EX9-AC020EN-PSRJ: Cable with M12 connector, D code-RJ45, Plug, Straight 2 m EX9-AC030EN-PSRJ: Cable with M12 connector, D code-RJ45, Plug, Straight 3 m EX9-AC050EN-PSRJ: Cable with M12 connector, D code-RJ45, Plug, Straight 5 m EX9-AC100EN-PSRJ: Cable with M12 connector

VCW

W (44) Z (X) (V) T R (Y) T 25 IN port 2-3/8 l=280 l=300 2.5 (N) E A (U) S Q D G C C B L1 L2 L3 16 D side U side Stations 1 2 3 4 5 n 21 5.5 16 OUT port n-1/4 n-1/8 H H P=J (Pitch) 2 : Thread type L dimensions (mm) n (stations) Model Dimension 2 3 4 6 9 7 5 8 10 L1 69 103.5 138 207 310.5 241.5 172.5 276 345 VV2CW2 L2 81 115.5 150 219 322.5 253.5 184.5 288 357 L3 93 127.5 162 231 334.5 265.5

HRX-OM-W038

Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Fig. 3-11 Connection of RS-232C 3.3 Installation HRS Series 3-16 HRX-OM-W038 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly. Incorrect piping might cause leakage of supplied or drained leakage and wet surrounding area and facility.

PSxx-OMM0006CN

D ZS-24-D X X X ZS-35-C X X X X X E ZS-35-D X X ZS-35-F X X X X X + F ZS-35-G X X 1/ 1 ZS-24-A A M35 L,M45 L 2 ZS-24-B B M45 L, 2 ZS-24-D D M35 L,M45 L 2 ZS-35-C (01,N01) ZS-35-D (W1,WF1,M5,C4,C6) ZS-35-F +(01,N01) ZS-35-G +(W1,WF1,M5,C4,C6) -10No.PS-OMM0006CN-E M8(3 ) 01 N M L ISE40A 1/ 2 ISE40A -0.11.000 MPa Y ZSE40A 0.0-101.3 kPa K + T + 1 01 R1/8(M5) N01 NPT1/8(M5) A A

Nozzle Type Ionizer

d A IZN10E-01 02m06 6 3.5 IZN10E-01 02m07 1/4" 7 34.7 26 2 x M3 x 0.5 thread depth 10 11 291 *1 Dimension of the resin part in described in the Mounting Warning note 3 (page 24). 18.31 One-touch fitting (Elbow) IZN10E-mm 16 17 D B C Applicable tubing O.D. d 180 [mm] Model d B C D IZN10E-mm16 6 22 16 11.5 IZN10E-mm17 1/4" 24.5 18.5 12 Female threads for piping (Rc1/8) IZN10E-11mm 14 Rc1/

Electric Actuator Triple Axis P&P Unit

5 700 16 5 650 14 4 600 14 4 550 22 8 950 22 8 1000 11 Triple Axis P&P Unit Dimensions (reference drawing for assembling) 12 6 (26) 14 2-M5 x 0.8 Effective screw length 10 130 80 4-M6 x 1depth14 4-M8 x 1.25depth18 31 4H10depth 5 92 5 4H10depth5 D (Stroke+145) 25 21 Stroke+191 D section detail (S=2/1) L Stroke+214 26 10 10 (92) 14 2-M5 x 0.8 Effective screw length 10 61 60 57 31 12 6 Reference

Speed Controller with Uni One-touch Fitting Series AS Elbow Type/Universal Type 1

Flow Rate and Effective Area AS22IF-U01 AS23IF-U02 AS42IF-U04 AS43IF-U04 AS22IF-U02 AS23IF-U02 AS32IF AS33IF Model 6, 8 4 3.2 4 10 12 8, 10 Metric size 6 6 8 10 12 4 JIS Symbol Tubing O.D. 1 8" 3 16" 1 4" 1 4" 5 16" 5 16" , 3 8" , 5 32" 3 16" 1 4" 5 16" 3 8" 3 8" " 1 2 Inch size 5 32" Flow rate (/min (ANR)) 260 390 660 790 920 1580 180 230 460 1710 Flow Direction Symbols on Body Controlled

CU

(V), D-A93(V), D-A96(V) Specifications D-A96 D-A90 In-line D-A90V D-A93 In-line D-A93V In-line D-A96V Auto switch part no.

Rotary Cylinder Series MRQ Size: 32, 40 1

The value of the auto switchs hysteresis as represented by an angle Hysteresis angle : 3. 4. 5. 11-10-16 17 Rotary Cylinder with Auto Switch Series MRQ Auto Switch Mounting Dimensions Reed switch D-A7/A80 D-A7H D-A73C/A80C CRB2 (In parentheses) are the dimensions of A72.

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

L3 L2 L1 IN port 2-3/8 (N) N 2.5 E D A F B Q C Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com S U 16 V W X Approx. 300 Approx. 280 G1/2 33 25 D side Stations 1 2 3 4 5 n U side Y R 44 16 T 5.5 21 H J H OUT port n-1/4, 1/8 (Pitch) 2 (mm) n (stations) Model Dimension

VP4

Product Profile: ISO Standard Solenoid Valve: Size 1, 2 Rubber Seal Series VP7-6/7-8 Solenoid valve conforming to ISO standard Size (1)/VP7-6 Size (2)/VP7-8 (Rubber seal) Single solenoid (FG-S) Double solenoid (FG-D) Reverse pressure (YZ-S) Reverse pressure (YZ-D) 2 position 3 position Closed center (FHG-D) Exhaust center (FJG-D) Double pilot check (FPG-D) Pressure center (FLG-D) Courtesy

3 Position Cylinder Series RZQ

D-A80 =U B + First-stage stroke =U B A D-A7H D-A80H D-F7 D-J79 D-F7W D-J79W D-F7F D-Y7NTL D-F7BAL B + First-stage stroke =U SMC =U B A D-A73C D-A80C D-J79C B + First-stage stroke =U =U B A D-A79W D-F7WV D-F7V D-F7BAVL B + First-stage stroke =U SMC =U B A 11 3 Position Cylinder Series RZQ D-A9 D-F9 D-F9W D-A9V D-F9V D-F9WV D-F9BAL B =U =U A B + First-stage stroke 50 or larger bore size D-P5DW

MIW/MIS

() Blue 3.1 10.9 3 D-F8B OUT (+) Brown 4 Most sensitive position 8 Switch Main circuit OUT () Blue 16 Solid State Switches/Direct Mount Type D-F9N(V), D-F9P(V), D-F9B(V) Auto Switch Specifications Grommet D-F9, D-F9V (with indicator light) D-F9N Perpendicular D-F9BV D-F9NV D-F9P Perpendicular D-F9B Perpendicular D-F9PV Auto switch part no.

EXxx-OMS0026CN

W.S. 032767 032767 +0+32767 3276865535 -0-32767 -0-32767 15 V()50001000 4 V PLC 4000 -57No.EX-OMS0026CN EX600 byte EX600 byte EX600 byte byte EX600-SEN3/4 (32 ) 0 4 SI EX600-SEN3/4 (32 ) 4 4 () EX600-DXB (8 ) 1 0 EX600-DXC (8 ) 1 0 EX600-DXC1 (8 ) 1 0 () EX600-DXD (16 ) 2 0 EX600-DXE (16 ) 2 0 EX600-DXF (16 ) 2 0 EX600-DYB (8 ) 0 1 EX600-DYE (16 ) 0 2 EX600-DYF (16 ) 0 2 EX600-DME

Programless Controller (With Stroke Study) ® Specialized for Series LEM Series LECP2

side (14) (18) (Terminal no.) 20 A1 B1 Produced upon receipt of order (Robotic cable only) (13.5) A6 B6 1 2 Connector D (14.7) 15 16 Connector A Cable type (30.7) L (11) (10) Robotic cable (Flexible cable) Nil Connector A terminal no.

Lubrication Equipment

ALF600 ALF800 ALF900 / / 1 4 3 8 3 4 1 2 ITV / 1 3 4 1 VBA 2 1 1 2 /1 1 4 VE Dimensions: Auto Feed Tank VY G AL L K 428 428 J 414 414 472 472 I 382 382 422 422 H 24 24 40 40 G 197 197 258 258 F 106 106 137 137 E 91 91 121 121 D 7 7 7 7 C 16 16 30 30 B 70 70 108 108 Model A 174 174 234 234 ALT-5 ALT-5-IS ALT-9 ALT-9-IS 449 482 1.17-14 Oil Distributor VA, VB/Nylon Tubing Related Products Oil

Rubber Seal, 5 Port Solenoid Valve, Series SZ3000

10 stations) 16 16 stations Both sides (2 to 16 stations) Pilot specifications Note 1) Double wiring specifications: Single, double, 3 position and 4 position solenoid valves can be used at all of the manifold stations.

NCM-A

LB + STROKE K W ZC 0.50 L ZC G PIVOT PIN HOLE 2-ZD A MM WA B -0.003 0.000 PILOT B -0.003 0.000 PILOT KK UNF-2A N Y YC D ACROSS FLATS WB 2-NN MOUNTING NUT Bore MM KK A B D E F G K L 075 (3/4") 0.250 1/4-28 0.50 0.624 0.86 0.38 0.251 0.34 106 (1 1/16") 0.312 5/16-24 0.50 0.624 0.25 1.12 0.38 0.251 0.12 0.34 150 (1 1/2") 0.437 7/16-20 0.75 0.749 0.38 1.56 0.25 0.63 200 (2") 0.625 1/2-20 0.88

Precision Cylinder Series MTS

freezing) Bearing type Ball spline Rubber bumper Cushion Air cushion Effective cushion length (mm) 11 12 9 10 17 17 Lubrication Non-lube Reed switch: D-A9 Solid state switch: D-F9 D-F8 Reed switch: D-A9 Solid state switch: D-F9 Auto switches +1.0 0 Stroke tolerance mm 0.1 or less (within allowable torque values) 0.2 or less (within allowable torque values) Non-rotating accuracy Port size

VP300/500/700

) (D, Y) VS N.C.