Multistage Ejector Series ZL112/212 1

Body r Vacuum sensor unit t Nozzle y Diffuser u P397110 Other than vacuum switch Detent plug i P397176 Vacuum switch specifications Lead wire cover With valve Front cover B !2 With valve Valve plate !3 With valve Needle !4 SYJ514 With valve Supply valve (N.C.) !5 SYJ514 With valve Release valve (N.C.) !

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

LEF How to Order LEJ 11 Vacuum type LEJS 11 40 S2 A 500 H LEL Clean series q w e r y u i o !0 !

HRX-OM-X037

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-14 Connection of RS-232C 3.3.10 Ethernet Modbus/TCP Communication wiring This product can operate the following by Ethernet Modbus/TCP communication.

HRX-OM-X071

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-12 Connection of RS-232C 3.3 Installation HRR Series 3-20 HRX-OM-X071 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.

MHx-OMY0005

. <> AS1211F-M3 AS1201F-M5 AS1000 AS1002F 2-4. 1. 2. 2. 4. 1. () 2. 5 3. 4. 5 10 2-5 1.

LEF-OM006xx

20m 5 5m 5 C C 5m 3 00 3 00 500 500 600 600 7 00 7 00 800 800 900 900 1000 1000 1 2 00 1 2 00 1500 1500 1800 1800 2000 2000 LEFB16 LEFB16 LEFB25 LEFB25 () R R LEFB32 LEFB32 S S / P.38 5.3 <> NPNPNP LEFS16A-100 NPN -14- 2.4. 16/25/32 40 22 21 1 12 2 13 3 14 4 15 5 16 NBR 6 17 7 18 8 A 19 9 B 20 10 21 11 22 1 12 2 13 3 14 4 15 5 16 NBR 6 17 7 18

3 Way, 3 Port NVF110 Series Direct Solenoid Operated

HOW TO ORDER N V F 1 1 0 H s D Z O 0 1 T F T T Opo.afing Pressure -J I 0 100 psi (CrP.055) | ' H 0 r 150 psi (C\p.05) | Solenr io vAc 3 _ KYPS" 4-2mVAC E l{vF 1100-oc{17 @io.rg None F Foot Bracket --R(PT),Mekic' T NPTF (Std.) N _ N P T Ii ; o Electrical Corinsctioi G 12'Lead (Sd.) D .

ZQ-OM01401

R 3. L 4.

SY3000V-OMY0001

-2SY3000-OMY0001 / 1 1.5 *3) 3)1 1 () -3SY3000-OMY0001 SY Series 5 / / () ( ) () 1 DC DC N.O.( 33 AB , 3 , , () 3 EXH 0.1 2 () () C-R ( ) C-R 3 3 1) 2 , 4 No.SY3000V-OMY0001 SY Series 5 / / 2) ,1V & -10 ,1 1 3 1) M5 () 1/61/4 11.5Nm ) 2)Rc N m Rc 1/8 35 Rc 1/4 812 Rc 3/8 1416 5 No.SY3000V-OMY0001 SY Series 5 / DC () m [] ()ISO VG32 (MSDS) IP65 IP67(IEC60529

VFR5000-OMN0001

() C-R DC 3% AC 20% ( ) () () 3 3 EXH (VVFS5000-R-04-1,2) ( ) () 3 4 No.VFR5000-OMN0001 VFR5000 Series 5 / (SSR )AC 1) (C-R ) OFF 2)() 1 -10 1 1) M5 1/6~1/4 1~1.5Nm ) ( ) 2 Rc Nm Rc 1/8 7~9 Rc 3/8 22~24 Rc 1/2 28~30 Rc 3/4 28~30 5 No.VFR5000-OMN0001 VFR5000 Series 5 / ( ) 5m 1) 2)1 ()ISO VG32 (MSDS) 3) 2 ()ISO VG32 \ 6 No.VFR5000-OMN0001 VFR5000 Series 5 / ( ) 3 30 (

VFR3000-OMY0001

-2No.VFR3000-OMY0001 / 1 1.5 *3) *3)1 1 () No.VFR3000-OMY0001 -3- VFRA30004000 5 / () () () () -10 3 3 EXH (VVFS3000-R-03-1,2 VVFS4000-R-04-1,2) () () 3 , 4 VFR3000-OMY0001 VFRA3000,4000 5 1) 2) 1 ()ISO VG32 (MSDS) 3) 2 ()ISO VG32 1 1) M5 1/61/4 11.5Nm ) 2) Rc Nm Rc 1/8 79 Rc 1/4 1214 Rc 3/8 2224 Rc 1/2 2830 5 VFR3000-OMY0001 VFRA3000,4000 5 () () 5 3 30 ( ) 1 ()ISO

lVFl 10

HOW TO ORDER N V F 1 1 0 H s D Z O 0 1 T F T T Opo.afing Pressure -J I 0 100 psi (CrP.055) | ' H 0 r 150 psi (C\p.05) | Solenr io vAc 3 _ KYPS" 4-2mVAC E l{vF 1100-oc{17 @io.rg None F Foot Bracket --R(PT),Mekic' T NPTF (Std.) N _ N P T Ii ; o Electrical Corinsctioi G 12'Lead (Sd.) D .

High Pressure Coolant Valve

0 e e u u r i !1 r t !1 !0 Port 1 Port 2 Port 1 Port 2 Valve element A t q q o o w Valve element B y w Port 3 3 Port valve 2 Port valve Working Principle When the pilot operated solenoid valve !2 is not energized, the valve element A t connected to the piston u is closed by the return spring i. Then valve element B y connected to the valve element A t is open.

Body Size: 1 (M5 x 0.8, 10-32UNF), Control Type: 0 (Meter-out), Thread Type: R, Port Size: M5 (M5 x 0.8), Applicable Tubing O.D.: 06 (ø6)

Body Size: 1 (M5 x 0.8, 10-32UNF), Control Type: 0 (Meter-out), Thread Type: R, Port Size: M5 (M5 x 0.8), Applicable Tubing O.D.: 04 (ø4), Seal Method: without Sealant, Option: BH [for Welding Environments, Brass Parts (External), No Plating)

Thread sizes range from M3 to 2 and are available in both inch (NPT) and metric R/Rc(PT)Speed controller standard in-line style, Body sizes: M3, M5, 1/8, 1/4, 3/8, 1/2, Port sizes: M3, M5, 01, 02, 03, 04, SPEED CTRL, W/FITTING,, AIRLINE EQUIPMENT, AS FLOW CONTROL, AB, AS M5 STANDARD (PT), .08818 lb, ModelPort sizeFree flowControlled flowApplicable cylinder bore size (mm)Weight

Body Size: 10, Thread: None (Rc: for Body Size 20, 30, 40, 50, 60; M5: for Body Size 10), Port Size: M5 (M5 x 0.8), Option: w/o Bracket; w/o Auto Drain, Semi-Standard 1: 6R (6 + R), Semi-Standard 2: Standard

Body Size: 10, Thread: None (Rc: for Body Size 20, 30, 40, 50, 60; M5: for Body Size 10), Port Size: M5 (M5 x 0.8), Option: w/o Bracket; w/o Auto Drain, Semi-Standard 1: 6R (6 + R), Semi-Standard 2: Z (Name Plate, Caution Plate for Bowl, & Pressure Gauge in Imperial Units: psi, °F)

Body Size: 10, Thread: None (Rc: for Body Size 20, 30, 40, 50, 60; M5: for Body Size 10), Port Size: M5 (M5 x 0.8), Option: C (N.C., Float Type Auto Drain), Semi-Standard 1: 6R (6 + R), Semi-Standard 2: Z (Name Plate, Caution Plate for Bowl, & Pressure Gauge in Imperial Units: psi, °F)

Body Size: 10, Thread: None (Rc: for Body Size 20, 30, 40, 50, 60; M5: for Body Size 10), Port Size: M5 (M5 x 0.8), Option: w/o Bracket; w/o Auto Drain, Semi-Standard 1: R (Flow Direction Right to Left), Semi-Standard 2: Z (Name Plate, Caution Plate for Bowl, & Pressure Gauge in Imperial Units: psi, °F)