Output Specification: V (PNP Open Collector 2 Outputs + Analog Current Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: C6L (ø6 One-touch Fitting, Elbow Type)

Output Specification: X (NPN Open Collector 2 Outputs + Copy Function), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: 01 (R 1/8)

Output Specification: Y (PNP Open Collector 2 Outputs + Copy Function), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: C4L (ø4 One-touch Fitting, Elbow Type)

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

R.

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

depth 6 +0.030 0 ( ) A B C , , Adjustment bolt Adjustment: Max. 8.25 2-5.5 through A port B port 2-M5 x 0.8 2-M5 x 0.8 depth 10 Chamfer Chamfer (Single vane) (Double vane) If the adjustment bolt is removed, rotation will be approximately 270 for the single vane type and 100 for the double vane type.

Speed Controller: Standard Type Series AS In-line Type 1

1 14143 14144 14147 Stainless steel NBR 15-9-30 4 Speed Controller: Standard Type In-line Type Series AS Dimensions: AS1000-M3 Dimensions: AS1000-M5 Male M5 x 0.8 Female M5 x 0.8 Dimensions: AS2000/3000 Dimensions: AS4000 2-1/4 to 1/2 AS 2-port size ASP ASN AQ ASV Dimensions AK Max. Min.

MXH

1 r !4 @2 u o !3 @4 e !5 !1 r u @2 @3 !3 @4 e !2 MXH16/20 (16, 20) @0 y @1 !7 w q!9 t !8 i !0 !1 r u @2 @3 !3 @4 e !2 Component Parts Description Material Note Description Material No. q w No. !2 !3 !4 !5 !

Miniature Regulator Series ARJ310

One-touch fitting ARJ310-01 ARJ310-N01 ARJ310F-01-04 ARJ310F-01-06 ARJ310F-N01-03 ARJ310F-N01-07 R 1/8, M5 x 0.8 NPT 1/8, M5 x 0.8 R 1/8, M5 x 0.8 NPT 1/8, M5 x 0.8 Note) M5 x 0.8 female thread is cut inside the pipe.

KA

<M5, M6> Tube O.D. (mm) Soft nylon Polyurethane A <M5, M6> P D L M Part No.

Series 11-CRA1-Z Rack & Pinion Type Rotary Actuator Size: 30, 50

R.

Pneumatic Transfer System Series MF

Plate mounting support bracket Body mounting side support Auto switches mountable (both sides) Types of Units and Parts Type of units and parts Type of units Type of parts Single units P.1 to P.9 Combination units P.11 to P.18 Set parts P.11 to P.14 Parts P.16 Spare parts P.4 & 5 Optional parts P.2 Catalog pages Parts for combination units.

&snac

n o t o P e r a t e p r o p e r l y , e x a m i n e a n d r e p a i r t n e m ' ( R e f e r t o P . 5 ' ) a c h e c k d r a i n P i P i n s o f m i s t e a c h s e p a r a t o r s . l f t h e v r i s e o r b e n d ' r e m o v e r i s i n g p a r t s a n d s t r a i g n t e n d r a i n p i p l n s . a l f e t e m e n t s o f e a c h s e p a r a t o r s a r e n o t r e o l a c e d p r o p e

V

VALVE TYPES AVAILABLE To operate a solenoid pilot valve in a vacuum s y s t e m , a s e p a r a t e p r e s s u r e s u p p l y m u s t b e s u p p l i e d t o t h e v a l v e t o m o v e t h e s p o o l o r p o p p e t a s d e s c r i b e d a b o v e .

Miniature Regulator

fitting R1/8, M5 x 0.8 2 1 6 One-touch fitting 5/32" One-touch fitting NPT1/8, M5 x 0.8 1/4" One-touch fitting M5 x 0.8 female thread is cut inside the pipe.

SMC Basic Pneumatics

A r-ll B T-l I t# r. r-1 zK 9K Flg. 8.25 Two cylinder cascade- P N E U M A T I C T E C H N O L O G Y APPENDIX SYMBOLS T H E S Y M B O L S F O R F L U I D P O W E R S Y S T E M S A N D C O M P O N E N T S A R E S T A N D A B D T Z E D I N I S O 1 2 1 9 . T H E S T A N D A R D C O M B T N E S H Y D R A U L I C A N D P N E U M A T I C C O M P O N E N T S .

%silltr

A r-ll B T-l I t# r. r-1 zK 9K Flg. 8.25 Two cylinder cascade- P N E U M A T I C T E C H N O L O G Y APPENDIX SYMBOLS T H E S Y M B O L S F O R F L U I D P O W E R S Y S T E M S A N D C O M P O N E N T S A R E S T A N D A B D T Z E D I N I S O 1 2 1 9 . T H E S T A N D A R D C O M B T N E S H Y D R A U L I C A N D P N E U M A T I C C O M P O N E N T S .

SV

TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE1 US C R C US US C R R R R R R R US C US C US C US C US C US C SERIAL NO.

Series: 25A-ISE20, Rated Pressure Range: B (-0.1 TO 1 Mpa), Output Specification: X (NPN Open Collector 2 Outputs + Copy Function), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: M5 (Female Thread), Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof)

Series: 25A-ISE20, Rated Pressure Range: B (-0.1 TO 1 Mpa), Output Specification: S (NPN Open Collector 2 Outputs + Analog Current Output), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: M5 (Female Thread), Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof)

Series: 25A-ISE20, Rated Pressure Range: B (-0.1 TO 1 Mpa), Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: M (SI Unit Only), Piping Specification: M5 (Female Thread)