OMS0020

112 70 p 17 11 DC1 49 31 1 81 51 Q 113 71 q 18 12 DC2 50 32 2 82 52 R 114 72 r 19 13 DC3 51 33 3 83 53 S 115 73 s 20 14 DC4 52 34 4 84 54 T 116 74 t 21 15 NAK 53 35 5 85 55 U 117 75 u 22 16 SYN 54 36 6 86 56 V 118 76 v 23 17 ETB 55 37 7 87 57 W 119 77 w 24 18 CAN 56 38 8 88 58 X 120 78 x 25 19 EM 57 39 9 89 59 Y 121 79 y 26 1A SUB 58 3A : 90 5A Z 122 7A z 27 1B ESC 59 3B ; 91 5B [ 123 7B

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

center/pressure center 5 (EA) 1 (P) 3 (EB) 5 (EA) 1 (P) 3 (EB) 3 position pressure center (A) 4 (B) 2 4 (A) 5 (EA) 1 (P) 3 (EB) 2 (B) 5 (EA) 1 (P) 3 (EB) Parts list 2 position single with back pressure check valve Material Note Description No.

2/3 Port Valve for Various

Standard BC6 BC6 NBR Stainless steel, Brass NBR Standard BC6 BC6 NBR Stainless steel, Brass NBR Body Bonnet O-ring Diaphragm assembly Valve spring Body Bonnet O-ring Diaphragm assembly Valve spring q w e q w e FKM Stainless steel, Brass FKM FKM Stainless steel, Brass FKM r r Stainless steel Stainless steel t t y Core assembly Stainless steel, Copper y Core assembly Stainless steel,

Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

P tight screw (4 x 14), 2 pcs. EX600-ZMA3 (Specified for SY series) Enclosed parts: Round head screw (M4x20) with washer, 1 pc. P tight screw (4 x 14), 2 pcs. (3)Intermediate support bracket EX600-ZMB1: For direct mounting Enclosed parts: Round head screw (M4 x 5), 2 pcs.

Fieldbus system EtherNet/IP compatible SI Unit

P tithe screw (4 x 14), 2 pcs. EX600-ZMA3 (Specified for SY series) Enclosed parts: Round head screw (M4 x 20) with washer, 1 pc. P tithe screw (4 x 14), 2 pcs. (3) Intermediate support bracket EX600-ZMB1for direct mounting Enclosed parts: Round head screw (M4 x 5), 2 pcs.

Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Mounting Series Guide type Motor type Model Page orientation Ground ball screw Rolled ball screw 6 10 6 10 LTF6 Page 60 to Horizontal 10 20 10 20 LTF8 Page 68 to Frame-type

NFB MC CNP1 NFB MC L1 L1 Three phase 200 to 230 VAC Single phase 200 to 230 VAC CNP3 CNP3 L2 L2 U U U Motor U Motor L3 L3 V V V V M M N () N W W W W P1 P1 PE PE P2 P2 CNP2 CNP2 P (+) P Regeneration option Regeneration option C C D D Detector Detector CN2 CN2 L11 L11 L21 L21 Note) For single phase 200 to 230 VAC, power supply should be connected to L1 and L2 terminals, with nothing connected

180

8 e w !7 t !5 r o !8 e !6 w @0 !7 t !5 r o !8 e !6 w @0 !7 t !5 !0 u !2 i q !1 !4 y !9 !0 u !2 i q !1 !4 y !9 !0 u !3 !2 i q !1 !4 y !9 Open condition Component Parts Note No.

VZM400

5 w !3 EA EA y A A P P r q B EB B !4 EB !7 !1 !2 t Component Parts Aluminum alloy NBR Note No. !0 Description Material No. PBT ADC Material Note q Description Black zinc chromated Metallic plated Pilot body Body Piston guide B Valve Metallic plated !1 !2 w e Return spring Cushion Cushion Valve spring Return spring Piston B Head cover r Stainless steel Spool/sleeve Stainless steel ZDC !

VR4151/4152

Component Parts w q Description Brass Brass t r Description Stainless steel Material Note No. Material Note No.

2/3 Port Solenoid Valve for Chemicals

3 Sleeve 7 Iron Spacer 8 PBT r Return spring 9 Stainless steel w Board assembly 10 e Casing 11 PBT q Plug 12 NBR O-ring 13 NBR 3 Diaphragm Type Direct Acting 2/3 Port Solenoid Valve for Chemicals Series LVM10/100 Construction/Base Mounted Type LVM13R LVM14R LVM16R !2 !0 !2 !0 !2 !0 !1 !1 !1 y y y t t t u u i i u i o o !3 !3 o !3 r r r e e w w e w q !4 !4 q q !4 LVM115 Description No.

HEC-OM-U015

HECR008-W HECR012-W 3000 3000 mentioned above. Switch off electrical supplies and ensure any high temperature parts have cooled to ambient temperature.

MTS

3 w Component Parts Qty. 2 1 1 2 1 1 3 1 1 1 1 1 2 1 2 2 1 1 Note 8 12 to 40 Qty. 1 1 1 1 1 1 1 1 1 1 1 1 2 1 1 1 Note Clear anodized Clear anodized Hard anodized Chromated Chromated 8: Quenched Description Material Description Rod cover Head cover Cylinder tube Piston Spacer for switch type Material No. q w e r t No. Aluminum alloy !5 Bumper Urethane Aluminum alloy !

Lateral Load Resisting Low Friction Cylinder Series MQM ø6, ø10, ø16, ø20, ø25

6 r t !3 w q e !5 !0 !1 !

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

base weight W (g) n: Station W = 36n + 6 W = 43n + 64 Note 1) For more than 10 stations (more than 5 stations in case of SS5Y7), supply pressure to P port on both sides and exhaust from EA/EB port on both side.

LG1H

3 e w t !3 A A !0 !2 !7 !6 o !5 !1 i !4 Section A-A u Parts list Material Note No. Description No.

Digital Flow Switch

Pressure characteristics 3 5%F.S. (0 to 0.8 MPa, 0.6 MPa standard) Power supply voltage 12 to 24 VDC 10% Ripple (p-p) 10% or less Electrical Current consumption 55 mA or less Protection Polarity protection Display accuracy 3%F.S. Analogue output accuracy 3%F.S.

JXCx-OMT0001CN

EtherNet/IP PLC 5.1 (IP ) EtherNet/IP IP IP <> L:2.0 2.4[mm] W:0.5 0.6[mm] L W IP IP x100 x10 x1 1) 0 0 0 Remote Control 0 0 1 192.168.1.1 () 0 0 2 192.168.1.2 : : : : 2 5 4 192.168.1.254 2) 2 5 5 DHCP 2 5 6 : : : 9 9 9 1)DHCP IP IP Rockwell Automation BOOTP/DHCP Server IP Enable DHCP : DHCP IP IP Disable DHCP : DHCP IP Disable DHCPIP 2)DHCP IP IP DHCP IP IP (1)OFF

AMR3000 to 6000

Refer to p.0-26 and 0-27 for Safety Instructions and common precautions on the products mentioned in this catalog, and refer to p.1.0-1 and 1.0-2 for precautions on every series. Selection Warning qThe residual secondary pressure cannot be released by releasing the supply pressure. To release the residual pressure, contact SMC.

VM100F

Construction Side ported Bottom ported t y w u q q w u y t 3(R) (3-port only) 3(R) (3-port only) Non-actuated Non-actuated !4 i !0 2(A) 1(P) r o e !3 !1 !2 !3 e o r !0 i !1 !2 2(A) 1(P) Actuated Actuated 2(A) 1(P) 2(A) 1(P) Component Parts No. Description Material Note 1 Valve PBT 2 Valve sheet A PBT 3 Valve sheet B PBT 4 Valve sheet C PBT No.

AMR3000 to 6000

Description AMR3000 1349161A 13579 135711A 135011 G75 135714 AMR4000 131515A 135511 13154A 131514 G90 635327 AMR5000 131515A 13589 135811A 131613 G100 635327 AMR6000 131614A 13569 135614-1A 135413 G115 63555 Diaphragm ass'y Element (1) Body Housing Bowl Bonnet Aluminum alloy Aluminum alloy Aluminum alloy Brass Stainless steel NBR Fiber q w e r t y u i o !