VXA21/22 VXA223 VXA224 VXA225 VXA226 VXA226 0.5 1.0 1.0 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 170 0.5 1.0 0.6 0.2 0.1 1.0 0.6 0.2 0.1 0.1 4.5 15 0.61 2.5 10.45 0.75 1 4 250 (8A) 26 41 46 15 26 41 58 58 1.1 1.7 1.9 0.61 1.1 1.7 2.4 2.4 3.3 6.4 8.8 2.5 3.3 6.4 11
High flow rate: Cv factor 0.16 to 2.1 Compact: Single valve volume reduced 15% (Class 3) Clip type Quick change coil Clip design makes coil replacement easy.
High speed response (nearly twice the previous VX series) (Class 3) High flow rate: Cv factor 0.16 to 2.1 Smaller size: Single valve 15% reduction in volume (Class 3) Manifold length Reduced by 18% (Class 3: 5 stations) (SMC comparison) Clip type Internal surge voltage suppressor (Class B coil) Quick change coils Clip design makes coil replacement easy Internal rectifier circuit (AC) AC
High flow rate: Cv factor 0.16 to 2.1 Smaller size: Single valve volume reduced by 15% (Class 3) Manifold length reduced by 18% (Class 3: 5 stations) (SMC comparison) Clip type Quick change coils Clip design makes coil replacement easy Flame resistance Coil size and weight reduced Conforms to UL94 V-0 New compact coil reduces the overall size and weight of the valve Volume 15% Weight 20%
H L1 L2 L3 L4 L5 L6 M1 M2 Q Model C D J E F G K 1(P)2(A) 2(A)3(R) 18 1(P) 2(A) 4 4 47.6 23.8 23.8 16.5 15.8 15.8 11 3.4 1.2 15 VHK-B1A 44.5 14.5 1 27 22 16.5 26 41 3.5 VHKl-04F-04F VHKl-06F-04F 18 6 4 6 41 48 48.6 24.3 23.7 16.5 3.5 16.8 15.8 11 5.1 1.2 15 16 VHK-B1A 44.5 14.5 1 27 22 16.5 26 VHKl-06F-06F 24.3 16.8 7.2 VHKl-08F-06F 18 8 6 8 41 50.5 52.4 26.2 24.3 16.5 3.5 18.7 16.8 11 9 1.2
Proper tightening torque Nm {kgfcm} Tightening torque for piping Connection threads M5 Rc(PT) 1/8 1.5 to 2 {15 to 20} 7 to 9 {71 to 92} Reference: Tightening into the M5 fitting threads After tightening by hand, tighten about 1/6 of a turn further using a tightening tool.
20, 25, 30 20, 25, 32 5, 10, 15, 20, 25, 30, 40, 50 TN TF R Rod piping/ Pad direct mounting 32 32 mm Note) In the case of rod piping (Q, R), TF (G1/8) is not available.
F.S. or less (adjustable) 2% F.S. or less (fixed) 0 to 15% F.S. or less (adjustable) 2% F.S. or less (fixed) Display 2-digit red LED Display accuracy 3 %F.S. 2 digits Output indicator light Lights up when output is ON (red LED).
fl 110+559120+559 Differenl 1 5 90 100 1 1 0 Same 90 100 1 1 0 Ditterent 15+5d!
Rotation Speed Range Model: 10, 15, 20O.O3 0.3 sec,/90' Model 300.04-0.3 sc,/90' lf a rotation soeed is used slower than 0.3sec/90", sticking may occur.
Port Thread Optional Specitications Standard specif icalion CE marked . 17. 18. 19 For manifold mountinq 2. 3. 15 CE marked DeviceNet comoatible 4,5.6.8. 14 CE marked 1 6 oreset tvoe 4 , 5 . 7 , 1 0 DeviceNet comoalible 5. 6, 8. 14 1 6 Dreset tvDe 5.7.10. 16 0 1s hiqh speed response Digital input type Reverse output 1 2 . 1 3 CE marked lar manilold mountinq 3. 15 CE rnarked 0.1s high speed
(Refer to pages 15-6-3 to 15-6-5 for details.) Note 2) Brass parts are all electroless nickel plated.
1 Clean Speed Controller with One-touch Fitting Series AS-FPQ/AS-FPG Series AS-FPG Series AS-FPQ AS ASP ASN AQ ASV AK ASS Speed controllers for clean room use ASR ASF AS-FPQ: Brass (electroless nickel plated) and AS-FPG: Stainless steel 304 are now available as a series. 15-17-1 2 Low particulate generating speed controllers designed for use in clean rooms Body Polypropylene resin Release
Note) Tighten within the tightening torque of 0.5 Nm 15%. Note: a It is possible to wire even in the state of bare wire.
Inrush current flow time (Reference) 200V Current XLA 100V XL XL XLQ XM XY 0 5 15 10 20 25 30 Time (second) DXSA XVD XGT CYV 459 A XL Series Glossary 1 Shaft Sealing Method 2 Seal Materials Bellows Bellows offer cleaner sealing with reduced particle generation and less outgassing. The two major bellow types are: Formedbellows and Welded-bellows.
Option J: With drain guide Bracket (Option) 1/4B female thread T: With element service indicator Maintenance space HA Drain AT ID AMG AFF Element service indicator Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G H 10 10 10 10 10 10 10 10 10 I 56 66 66 80 80 90 90 100 150 J 15 20 17 22 19 25 21 30 40 K 5 8 8 8 8 10 10 10 15 L 9 12 12 14 14 14 14 16 20 M 5.5
Selection of air quality by purpose For these cases, degree of quality is 15 4 +3 5 specified as 1, 4, and 2 respectively. 40 5 +7 25 Refer to Guide (1). Refer to Guide (2). Refer to Guide (3). Refer to below piping system chart. Refer to Guide (4) page 14-14-4.
Series RSH 20, 32, 50, 63, 80 How to Order RSH 20 15 D L Z73 Heavy Duty Stopper Cylinder Bore size Number of auto switches 20mm 32mm 50mm 63mm 80mm 20 32 50 63 80 S 2 1 Auto switch Stroke Without auto switch (Cylinder built-in magnet) 15mm 20mm 30mm 40mm 20 32 50/63 80 * Refer to the table below for auto switch model nos.
Seal kit includes a grease pack (10: 5 g and 10 g, 15: 10 g). Order with the following part number when only the grease pack is needed. For 10 grease pack part no.: GR-F-005 (5 g) for external sliding part GR-S-010 (10 g) for tube interior For 15 grease pack part no.: GR-S-010 (10 g) Piston seal NBR Scraper NBR Cushion seal NBR Seal kit includes @6 to #2.
Description Note 1 +15 V 1 2 1 2 5 2 Output signal 1 D-F8N 3 4 3 4 Display part 3 GND Socket connector A-coded (Normal key) Plug connector A-coded (Normal key) 4 Output signal 2 D-F8N DD1677