45

Maximum 16 stations (Specify a model with more than 9 stations by means of the manifold specification sheet.)

RSQ

9 !

HRX-OM-I051

Page 5-9 Option screen 1, 2 Allows the setting of option. Page 5-9 The alarm message is displayed in the event of an error in this system. Not displayed if no error. Alarm Display screen Page 5-10 System Information screen Displays the status of system startup and shutdown.

MHZ

9 Cap Piston seal Urethane rubber NBR o @0 Bumper O-ring Synthetic rubber !

MU

For details, refer to page 7-9-36. 7-8-21

MHZ

B 5 5.7 7 9 12 14 17 MM A 2.5 3 4 5 6 7 9 C 2 2 2.5 4 5 6 7 B 5 5.7 7 9 12 14 17 A 2.5 3 4 5 6 7 9 Model MHZ2-6 1 MHZ2-10 Model MHT MHZ2-62 MHZ2-10 M2 x 0.4 M2.5 x 0.45 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 M8 x 1.25 1 N1 1 N1 1 N1 2 N2 2 N2 2 N2 2 N2 MHY MHZ2-16 MHZ2-16 MHZ2-20 MHZ2-20 MHW MHZ2-25 MHZ2-25 1 N1 MHZ2-32 1 MHZ2-32 2 MRHQ MHZ2-40 1 MHZ2-40 2 Specifications and dimensions

45

Maximum 16 stations (Specify a model with more than 9 stations by means of the manifold specification sheet.)

Vacuum

9 tuE!!.

Sine Cylinder Series REC

I-020B I-032B I-040B 0.058 0 0.1 0.2 0.058 0 0.1 0.2 9 9 9 9 18 41 M8 x 1.25 14 10 11 66 46 16 20 36 M8 x 1.25 10 14 0.058 0 0.1 0.2 0.058 0 0.1 0.2 9 9 9 9 22 45 14 10 14 69 48 18 20 38 10 14 M10 x 1.25 M10 x 1.25 0.070 0 0.1 0.3 0.070 0 0.1 0.3 12 16 12 16 24 50 20 14 13 92 69 22 24 55 20 M14 x 1.5 M14 x 1.5 15.5 Double Knuckle Joint Mounting Y (Max.) hole H10 Shaft (mm) H L MM ND NX2

Refrigerated Air Dryers Series IDF/IDU

Power cable outlet 0.7 [17 mm] (Wire diameter 0.4 [9 to 11 mm]) IDFB6E to 15E-11 IDF-S0086 F One-touch fitting (KQ2H1002S) is not included.

High Vacuum Angle Valve, XL Series

Valve side exhaust Operating principle By turning the handle (9) to the left, the valve (6) opens. The handle (9) does not move up and down, but the indicator (11) shows the open or closed position of the valve. As the handle (9) is turned to the right, the valve (6) closes, and when the turning force of the handle (9) suddenly ceases to be felt, the valve (6) is sealed.

Sine Cylinder Series REC

I-020B I-032B I-040B 0.058 0 0.1 0.2 0.058 0 0.1 0.2 9 9 9 9 18 41 M8 x 1.25 14 10 11 66 46 16 20 36 M8 x 1.25 10 14 0.058 0 0.1 0.2 0.058 0 0.1 0.2 9 9 9 9 22 45 14 10 14 69 48 18 20 38 10 14 M10 x 1.25 M10 x 1.25 0.070 0 0.1 0.3 0.070 0 0.1 0.3 12 16 12 16 24 50 20 14 13 92 69 22 24 55 20 M14 x 1.5 M14 x 1.5 15.5 Double Knuckle Joint Mounting Y (Max.) hole H10 Shaft (mm) H L MM ND NX2

JIS Standard Hydraulic Cylinder

9 !6 !7 @9 !2 @2 @4 t e !0 CH2G Series !3 @3 r @5 !

Sine Cylinder Series REC

I-020B I-032B I-040B 0.058 0 0.1 0.2 0.058 0 0.1 0.2 9 9 9 9 18 41 M8 x 1.25 14 10 11 66 46 16 20 36 M8 x 1.25 10 14 0.058 0 0.1 0.2 0.058 0 0.1 0.2 9 9 9 9 22 45 14 10 14 69 48 18 20 38 10 14 M10 x 1.25 M10 x 1.25 0.070 0 0.1 0.3 0.070 0 0.1 0.3 12 16 12 16 24 50 20 14 13 92 69 22 24 55 20 M14 x 1.5 M14 x 1.5 15.5 Double Knuckle Joint Mounting Y (Max.) hole H10 Shaft (mm) H L MM ND NX2

MU

For details, refer to page 7-9-36. 7-8-21

CXS

9 Lead wire entry is inward prior to shipment.

AC

T type interface Y41 Y31 Model Port size Applicable model A B C Y21-01 Y11-M5 AC1000, AC1020 M5 X 0.8 8 8 12 T type interface 1/8 1/4 1/8 AC2000, AC2020, AR2030 10 19 29 Model File Y11-M5 Y21-01, 02 Y31-01, 02 Y21-02 Y31-01 Y31-02 Y41-02 Y41-03 Y51-02 Y51-03 Y61-03 Y61-04 SAC1000, #9 SAC2000, #9 SAC2503, #9 SAC4000, #9 SAC4006, #9 SAC5000, #9 AC2500, AC2520, AC2530 AC3000, AC3020, AC3030

ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

D H11 FB TG 0.2 E R MF TF UF L4 Screw size L4 32 F5032 30 7 32.5 50 32 10 64 79 5 M6 x 20L 40 F5040 35 9 38 55 36 10 72 90 5 M6 x 20L 50 F5050 40 9 46.5 70 45 12 90 110 6.5 M8 x 20L 63 F5063 45 9 56.5 80 50 12 100 120 6.5 M8 x 20L 80 F5080 45 12 72 100 63 16 126 153 9 M10 x 25L 100 F5100 55 14 89 120 75 16 150 178 9 M10 x 25L 125 F5125 60 16 110 Max. 157 90 20 180 Max. 224 10.5 M12 x 25L

MLU

13-9. 32, 40, 50 TN Action D Double acting Applicable Auto Switch/Refer to page 9-15-1 for further information on auto switches.

AC Servo Motor Driver (Pulse input type/Positioning type)

Reverse rotation is indicated by a minus (-) sign. -9 to 9 pulse 4 Cumulative command pulses The position command input pulses are counted and displayed. Press the [Clear] button to reset the display value to zero. Reverse rotation is indicated by a minus (-) sign. -9 to 9 pulse 78 - No.