SMC Corporation of America
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Able to control 16 point pressure by 4 bit swilching input rvro[@-@nAZnnZ-m rvzo!@-@Innntrtr-@ rveo!@-@n-m a 16 points preset type Note 1) E in parl number is lhe same modelno. for the standard products.

7 2)4 (1 11 7 ) ON OUT1OUT2 4 0,10,50,100,500,1000,5000 ms IP40 AC1000 V 1 50 M(DC500 V ) -550 -1060 () 3585RH() UL/CSA(E216656)CE(EMC RoHS ) 2 m 1(0 ms) 2 3MPa/kPa 490% 5 -76No.PS-OMU0002CN-D M5 01 N01 C4H C6H N7H C4L C6L N7L M5X0.8 R1/8 NPT1/8 4 mm 6 mm 1/4 inch 5/32 inch 4 mm 6 mm 1/4 inch 5/32 inch () PBTCB156PPSO HNBR C3604( ) POMSUS304NBRC3604 SUS304NBR 24 g 34 g 36

Fastening ring: 3402184 25 Series VM100/200 Specific Product Precautions 4 Be sure to read before handling. Refer to back cover for Safety Instructions and Handling Precautions for SMC Products (M-E03-3) for 3/4/5 Port Solenoid Valve Precautions.

FH FH HOW Element (m) nominal filtration Operating pressure Page Accessory (Option) Port size Series Differential pressure indicator (CB-H) Differential pressure indication switch (CB-H) Blanking cap Vertical Suction Filter FHIA Series Micromesh 74, 105, 149 Negative pressure 1/2, 3/4, 1, 1 1/4, 1 1/2, 2, 2 1/2, 3, 3 1/2, 4 498 Differential pressure indicator (CB-H) Differential pressure

M-5G1 Applicable model Material Applicable thread PVC Stainless steel 304, NBR M-5G2 Stainless steel 316, Special FKM M-5G3 Gasket M5 MS-5ALHU-6 MS-5HLH-4 MS-5HLH-6 MS-5ATHU-6 M-5GH Nylon 66, GF30% MS-5H-4 MS-5HL-4 MS-5HLH-4 MS-5-4-P01 Stainless steel 316 Cap nut MS-5H-6 MS-5HL-6 MS-5HLH-6 MS-5-6-P01 Stainless steel 316 Precautions Be sure to read this before handling the products.

3 Pin no. 1: Open 2: 12 port side SOL (+) 3: COM () 4: 14 port side SOL (+) ZNR 4 4 2 1 DC: Single COM M12 Connector: Wiring specifications (EVS1-01) 3 1 14 port side SOL 12 port side SOL Pin no. 1: Open 2: 12 port side SOL (+) 3: COM () 4: 14 port side SOL (+) 5: Ground ZNR ZNR 4 2 2 4 5 DC: Double 3 3-11-14 15 Series EVS1-01/1-02 Conforming to ISO Standard Solenoid Valve (with M Connector

Bore size (mm) Part No. d Cotter pin l d H B Dd9 L C D m (Cut through) Note 1) 3 x 18l 4 x 25l 4 x 35l 0.040 0.076 0.050 0.093 0.065 0.117 NT-03 NT-04 NT-05 NT-08 NT-10 CD-M03 CD-M05 CD-M08 10 14 22 32, 40 50, 63 80, 100 32 40 50, 63 80 100 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 6 8 11 13 16 17 22 27 32 41 19.6 25.4 31.2 37.0 47.3 16.5 21 26 31 39 36 51 72 4 4.5 5 44 60 82 3 4

This is recommended because it can absorb off-centering, compared with direct mounting type. 6.1 16 M 5 Part name Part number P368010-24 Fork lever assembly M N P368010-25 Fork lever assembly S Resin connector (Non-explosion proof specification) L2=31 (M type: 55) 39 (M type: 63) Optional cable connectors are available for different cable sizes.

6 4 LE FB16 2 LEFB16 0 0 500 1000 1500 2000 V (mm/s) -12- (2)DC24V LEFB16A LEFB25A (mm) 1) (300), 500, (600, 700), 800, (900), 1000 (300), 500, (600,700), 800, (900), 1000, (1200, 1500, 1800, 2000) (kg) 2) 1 2 (mm/s) 2) 482000 482000 (mm/s 2) 3,000 (mm) 0.1 (mm) 48 48 (m/s 2) 3) 50/20 () 540 (%) 90 RH ) 28 42 W 30 36 DC24V A/B 800 //Z (V) DC2410% (W) 4) 78 69 (W) 5) 4 5 (W) 6)

1 W Z (2 m) (2 m) + () 2 R S () () T V () () A A B B -11No.PF-OMJ0005CN-I IN OUT X693 IN OUT 73 IN OUT X694 IN OUT 73 X731 (Ar)(CO2) (ArCO2) 92:890:1080:2070:3060:40 75 / ZS-33-D 2 m () ZS-33-F ZS-33-J () ZS-33-JS () ZS-33-M () 2 ZS-33-MS () 3 ZS-33-R DIN 1 2 3 4 5 DIN F02(G1/4)DIN -12No.PF-OMJ0005CN-I LED UP) (DOWN) (OUT2) (OUT1) SET) (OUT ) (IN ) (OUT1

62 15 9 M8 37 29 160 176 125 165 160 Rc(PT) 86.5 104 110 75, 100, 125, 150, 200, 250, 300 88 4 16 9 62 15 9 M8 37 30 160 176 125 165 160 Rc(PT) 86.5 104 110 96 4 19 12 67 18 190 210 135 11 200 42 194 Rc(PT) 35 142 115 M10 95 J I GR GQ GL P Q U O T N S W K L M R V Bore size (mm) 20 25 32 40 60 35 4 4 5.5 M5 X 0.8 93 M6 X 1 16 25 26 50 80 50 12 53 105 112 70 40 7 7 9 M5 X 0.8 M8 X 1.25 20

(October 1999) (3) Lead wire specifications Nil No lead wire with connector W Lead wire for energy saving switch (2 m) (4) Fitting (V port) 0 Without fittingM5x0.8 1 3.2Straight 2 4Straight 3 6Straight 4 3.2Elbow 5 4Elbow Lead wire with connector for energy saving Pressure switch assembly ZQ1 LW6 N A (1) (1) Output N NPN open collector P PNP open collector 9 - NO.

Setting range 100.0 to 100.0 kPa 101.3 to 101.3 kPa 1.000 to 1.000 MPa Set pressure range 100.0 to 100.0 kPa 10.0 to 101.3 kPa 0.1 to 1.000 MPa Lead wire length Nil L 0.6 m 3 m 16-2-17 4 Series ZSE40/ISE40 Specifications ZSE40 (Vacuum pressure) 0.0 to 101.3 kPa 10.0 to 101.3 kPa ZSE40F (Compound pressure) 100.0 to 100.0 kPa 100.0 to 100.0 kPa 500 kPa 0.1 0.001 0.001 0.02 0.01 1 0.1 Air,

A A, E, b MM -110 U, HDHa HX 50,63 56 ,. 028 0) Ml8x1.5 I. 20 ' 4 i 010 22 ~3 ~., Pan No. NX HZ L Y.Q05 50,63 56 20 028 40 , M 1 8xlS " 20 14 ~070 22.03 ~.S 44 SO.8 IV -60s eo 71 2. 038 !OJ 1A22x1.5 2. 1I 1 8 --g07D 28-03 ~ , Y-G08 80 71 23 038 SO r.122x15 21 27 lS'g.070 28 ~ 3 ~, 56 84 IV -GOS ~iTt .1 , m_ , m , L , CQ2 Double Rod Clevis Pin (mm) C02 Jam Nut J r ,..,. No. AppI_ bon~..

/ M Pa/ m M Pa/ ( S) () m 2 1 1 m N MPa M Pa N m (A) / N ( B) /N () m 2 ( A) m 2 N -5- 1 SUP OUT 2 %F.S. 3 , 4 R B(P36201023) G 2 3 Rc,F N IR1000G33-2-01 G33-P2-N01-X30 IR1010G33-4-01 G33-P4-N01-X30 IR1020G33-10-01 G33-P10-N01-X30 011/84 Rc NNPT FG 00.0050.2MPa 10.010.4MPa 20.010.8MPa PRECI SI O N REG U LATO R I R101BG M AX.

Optional Parts Clean Room Compliant (10-) 10-ARP20(K) 10-ARP30(K) 10-ARP40(K) Model Bracket assembly Note 1) ARP20P-270AS ARP30P-270AS ARP40P-270AS Set nut ARP20P-260S ARP30P-260S ARP40P-260S G49-4-01 G49-4-02 0.4 MPa G49-2-01 G49-2-02 0.2 MPa Round type Note 2) G49-7-01 G49-7-02 0.7 MPa Pressure gauge NPN output / Wiring bottom entry ISE35-N-25-MLA [ISE35-N-25-M (Switch body only)] NPN output

Optional Parts Clean Room Compliant (10-) 10-ARP20(K) 10-ARP30(K) 10-ARP40(K) Model Bracket assembly Note 1) ARP20P-270AS ARP30P-270AS ARP40P-270AS Set nut ARP20P-260S ARP30P-260S ARP40P-260S G49-4-01 G49-4-02 0.4 MPa G49-2-01 G49-2-02 0.2 MPa Round type Note 2) G49-7-01 G49-7-02 0.7 MPa Pressure gauge NPN output / Wiring bottom entry ISE35-N-25-MLA [ISE35-N-25-M (Switch body only)] NPN output

N Port 2 (A),1 (P) Port size A Model E F G H I J L M P R T U B C D K N O Q S Port 3 (R) VEX5510 VEX5511 160 50 25 10 7 25 173 80 60 98 Center 1 2 3 4 , , 1 1 2 3 4 60 150 79 70 53 13 18 100 2 x M6 Thread depth 9 116.5 , ,1 25 VEX5710 VEX5711 177.5 167.5 84.5 90 60 30 15 7 190.5 54.5 100 60 13 105.5 103.5 18 4 x M6 Thread depth 6 136.5 17 82 1 4 1 4 1,1 1 c Bracket mounting dimensions g Grommet

IDH N ID L P IDG K 4 x 13 IDK Dimensions AMG (mm) A B C D E F G K L M N P Q Port size Model AFF IDFA22E IDFA37E R 1 775 600 290 623 134 405 698 93 13 25 85 340 R 11/2 855 680 AM AMD IDFA55E, IDFA75E AMH A R B AME AMF Q E ZFC D SF G SFD F LLB C AD GD M N L P K 4 x 13 Dimensions (mm) A B C D E F G K L M N P Q R Model Port size IDFA55E IDFA75E 800 (868) R 2 470 855 (128) (273) (110) 13 500