Soft Start-up Valve

1 to 6D/Y(Z)m-A 3/4, 1 3/4, 1 3/4 128 109 59 53 74 108 53 Width across flats 36 80 [mm] Optional specifications With bracket With built-in silencer Model K L M N P Q R S T U V W X Y AV2000-m02-1 to 6D/Y(Z)m-A 30 50 51.5 44 5.5 10 66 2.3 33.5 54 M4 x 0.7 Depth 6 3 Width across flats 14 AV3000-m03-1 to 6D/Y(Z)m-A 41 50 53.5 46 5.5 15 70 2.3 33.5 54 M4 x 0.7 Depth 6 3 Width across flats 19

Series GS40 Digital Pressure Sensor 1

Bracket (Option) AV R 1/8, 1/4 Dedicated mounting screw AU 22 14 (Hex. width across flats) (M4 x 0.7) M5 x 0.8 38 AF 2 26 2-4.5 600 8 AR (Lead wire length) 19 3 25 IR 5 9 8 5 VEX 36 1 3 22 22 AMR 3.2 ITV IC M5 type PT type 40 VBA VE SMC DIGITAL PRESSURE SENSOR ALM. SET 20 VY1 + G P.SET PPA AL 14-11-19

Series 10-, 21- AR-B Regulator, Series 10-, 21- ARK-B Regulator with Backflow Function

-/21-AR30-B 10-/21-AR40-B 10-/21-AR40-06-B 10-/21-AR50-B 10-/21-AR60-B 2 Note 2) 1/8, 1/4 28.5 1/8 20.5 40 11 67.4 44 26.5 65.5 M28 x 1 30 28.5 34 43.9 5.4 15.4 55 2.3 24.7 28.5 14 6 1/4, 3/8 0 27.5 1/8 21.3 53 9.8 71.9 44 28 64.5 M32 x 1.5 30 27.5 34 43.9 5.4 15.4 55 2.3 25.7 32.5 16 6 1/4, 3/8 3.5 29.4 1/8 24.8 53 10.5 85.6 44 30.7 66.4 M38 x 1.5 41 29.4 40 45.8 6.5 8 53 2.3 31.1 38.5 19

Series 12-REA Sine rodless cylinder

Rotary actuator Air gripper Directional control valve Fittings & Tubing Pressure switch Clean gas filter Flow control equipment Filter, Pressure control equipment Air preparation equipment NN G 4-MM 0 -0.1 B L H G Effective thread depth J 2-Port size D I NB NB T N K W N S + Stroke F F NA R ZZ + Stroke 43 35 29 22 20.5 27.8 D Model Port size K NN B L MM x J N NA H 16 15 10 I 46 36 30 NB 19

Series 10-V100 Rubber seal 3 port direct operated solenoid valve

Stations L1 L2 2 stations 33.5 27.5 11 128 122 12 138.5 132.5 13 149 143 14 159.5 153.5 15 170 164 16 180.5 174.5 17 191 185 18 201.5 195.5 19 212 206 20 stations 222.5 216.5 3 44 38 4 54.5 48.5 5 65 59 6 75.5 69.5 7 86 80 8 96.5 90.5 9 107 101 10 117.5 111.5 645 Series 10-V100 Specific Product Precautions 1 Be sure to read before handling.

Series 10-VQD1000 4 Port Direct Operated Poppet Solenoid Valve

4 R 3 P 1 30 17 6.5 15 2 2 2 2 2 8 0.5 0.5 P=11 10 M5: M5 thread 2n-M5 4(A), 2(B) port 4 L2 35 L1 38 42 M plug connector (M) Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors Stations 1 2 3 4 5 n D side U side Direct manual override (Non-locking) 24 15 43 L plug connector (L) n: Stations Dimensions n L 11 12 13 14 15 16 17 18 19

Series 11-/12-, 21-/22- CXSJ Dual Rod Cylinder/Compact Type

The maximum piston speed for retraction is approximately 70% that of extension. 848 Dual Rod Cylinder/Compact Type CXSJ 2122CXSJ/ 1112Auto Switch Proper Mounting Positions (Detection at Stroke End) CXSJ6 / CXSJ6 11122122D B (mm) D-M9 23 (24) 2 (1) 13 (11.5) 8 (9) D-A93 19 (20) 14.5 (15.5) 6.5 (7.5) Symbol A B C D Note 1) A C Note 1) The above mentioned values are indicated as a guide for

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

.: 3.2 : 4 : 6 Thread size: M5 L n Formula L1 = 11.5n + 55.5 L2 = 11.5n + 73 n: Stations (Max. 24 stations) Dimensions 24 331.5 349 375 385.5 23 320 337.5 362.5 373 22 308.5 326 350 360.5 21 297 314.5 337.5 348 20 285.5 303 325 335.5 19 274 291.5 312.5 323 18 262.5 280 300 310.5 17 251 268.5 300 310.5 16 239.5 257 287.5 298 15 228 245.5 275 285.5 14 216.5 234 262.5 273 13 205 222.5 250 260.5

Series 10-, 21- AW-B Filter Regulator

-AW30-B 10-/21-AW40-B 10-/21-AW40-06-B 10-/21-AW60-B 142.1 174.1 176.1 261.1 93.9 122.1 154.1 156.1 241.1 91.4 Dimensions B B B B Standard specifications Model Optional specifications Round type pressure gauge Bracket mounting size Panel mount Q R S T U V W Y Z F J K BB CC H J M N 10-/21-AW20-B 10-/21-AW30-B 10-/21-AW40-B 10-/21-AW40-06-B 10-/21-AW60-B P1 P2 A B C Note) D E 6 7 7 7 14 19

Exhaust Cleaner for Vacuum Pump AMV Series

AMV15 SP ZCUK 0.015 Inlet pressure (MPa) AMJ AFJ 0.01 AMV AMV AMV15 AMV160 AMV75 AMV37 AMV6 AMV3 ZH -X185 0.005 Related Products 0 100 200 500 1,000 2,000 5,000 10,000 20,000 Flow rate (L/min [ANR]) Dimensions AMV3, 6, 15, 37 AMV 75, 160 B Exhaust Exhaust A A B Port size IN IN C E 8 x d Flange part Model Port size A 231 305 410 710 562 860 B 123 153 210 210 500 500 C 80.7 105.3 d 19 19 E

Series AP500

Vespel is a registered trademark of DuPont. 19 Intermediate flow (Tied-diaphragm) Two Stage Regulator for Ultra High Purity Series AP2700 For UHP gas delivery High inlet pressure type: Max. 3500 psig (24.1 MPa) Flow capacity to 150 slpm (NF3) to 900 slpm (H2) Body material: 316L SS secondary remelt Hastelloy internals available for corrosion resistance Minimizes supply pressure effect by

Speed Controller with

L4 Note) Weight (g) 5 5.5 6.5 8.5 9.5 19 22 35 38 52 86 95 Model Applicable tube O.D. d AS1002F-01 AS1002F-03 AS1002F-07 AS2002F-03 AS2002F-07 AS2052F-07 AS2052F-09 AS3002F-07 AS3002F-09 AS3002F-11 AS4002F-11 AS4002F-13 MIN.

EXxx-OMS0026CN

) 12 PLC PLC SI TM NS: EtherNet/IP PLC PLC SI TM NS: EtherNet/IP NS: IP IP [IP ](19 ) -38No.EX-OMS0026CN No.

EX260-SPN-A_eng

Caution: PWR(V) Load voltage for the valve is not supplied or is outside the tolerance range. (19 V or less) Mounting hole Mounting hole for connection to the valve manifold 7 OFF SV0 V 0 V for solenoid valve 2 4 5 2 Accessories 3 SI24 V +24 V for SI unit operation Warning: WARNING indicates a hazard with a medium level of risk which, if not avoided, could result in death or serious injury

Fieldbus system Ethernet POWERLINK compatible SI unit

EX##-OMS1015-A PRODUCT NAME Fieldbus system Ethernet POWERLINK compatible SI unit MODEL / Series / Product Number EX600-SPL1-X26 EX600-ED# Table of Contents Safety Instructions 2 System Outline 8 Assembly 10 Mounting and Installation 12 SI Unit 15 Model Indication and How to Order 15 Summary of Product parts 15 Mounting and Installation 16 Setting and Ajustment 17 LED Display 19 Specification

EXxx-OMN0037CN

No.EX-OMN0037CN-A / EX600-AXA EX600-AYA EX600-AMB SMC 3 9 10 12 12 14 15 15 16 16 LED 18 19 19 24 25 25 26 26 LED 27 28 28 32 33 33 34 34 LED 36 37 37 44 -1No.EX-OMN0037CN-A 45 46 46 46 46 46 47 -2No.EX-OMN0037CN-A (ISO/IEC)(JIS) 1 2 *1 ISO 4414: Pneumatic fluid power -General rules relating to systems.

EXxx-OML0010CN

SI"PWR"LED 24 V10 1 POWER LED 2 ERROR LED EX600 LCD 3 LCD LCD Warning System access is not completed." 4 Ex600 SI"ST(M)"LED/ SI 5 " EX600 SI"ST(M)"LED/ 6 -50No.EX-OML0010CN-C 0 1 2 3 4 5 6 7 8 9 ON/OFF 1015 16 17 18 19 () 20 () 21 22 23 -51No.EX-OML0010CN-C SI EX600-DXB EX600-DXC EX600-DXC1 DX(8DI) DX EX600-DXD EX600-DXE EX600-DXF DX(16DI) DY(8DO) EX600-DYB DY(16DO) EX600

PFxx-OMO0004CN

No.PF-OMO0004CN-E // PFMB7201 2 10 13 14 16 16 19 21 [] 25 OU1OUT2 {3 ] 26 28 [] 28 28 F0 29 F1 OUT1 31 F2 OUT2 39 F3 44 F10 45 F13 46 F20 47 F22 48 F30 49 F31 50 F80 OFF 51 F81 52 F90 53 F98 55 F99 56 57 61 62 64 65 65 68 71 -1No.PF-OMO0004CN-E (ISO/IEC)(JIS) *1) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic

PFxx-OMK0003CN

PF-OMK0003CN-E / / PFMV5## 2 10 12 13 14 14 16 17 18 19 19 20 22 -1No.

PFxx-OMO0007CN

No.PF-OMO0007CN / / PF2A7## 2 10 12 13 15 15 16 17 19 20 21 22 25 F_1 26 F_2 () 27 F_3 28 30 31 32 32 34 35 35 37 38 40 -1No.PF-OMO0007CN (ISO/IEC)(JIS) 1) 2) 1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery -Electrical equipment of machines (