HRZ-F recirculating chillers are especially suited for high technology sectors, by conforming to several SEMI equipment standards and regulating fluid temperature to ±0.1°C. Both the pump and compressor rotations are inverter controlled for energy efficiency. Refrigerant is R410A, compliant with current EU F-gas regulations.
Flow range (lpm): 5-500, 10-1000, 20-2000; Port sizes (Rc, NPT, G): 1/2 or 3/4 (flow range dependent); Rated pressure range: (MPa): 0 to 0.8; Output options: NPN/PNP, 1-5V, 4-20mA; Accuracy: ±3% F. S.; Repeatability: ±1% F. S.
LEY*F is a high performance version of the standard rod actuator, suitable for push, pull, lift and press applications. Cycle time is dramatically reduced by a combination of higher maximum speed and acceleration/deceleration. Speed gains are 20-60% faster, depending on motor size, ballscrew pitch, and stroke.
LEY*F is a high performance version of the standard rod actuator, suitable for push, pull, lift and press applications. Cycle time is dramatically reduced by a combination of higher maximum speed and acceleration/deceleration. Speed gains are 20-60% faster, depending on motor size, ballscrew pitch, and stroke.
Maximum load mass: 500g (horizontal), 100g (vertical) ; Maximum pushing force: 5.5N ; Strokes: 10, 20, 30 mm ; Weight: 130, 190, or 250g (stroke dependent) ; Positioning repeatability: ±5 µm (“F” resolution option) ; Parts measurement repeatability: ±10 µm (“F” resolution option)
Magnet: D (Built-in), Mounting: F (Front Flange), Bore Size: 100mm, Thread: M5x0.8 (20-25 Bore); Rc (32-100 Bore), Stroke: 100mm, Body Option: Standard, Locking Direction: F (Forwarding Stroke Lock)
Magnet: D (Built-in), Mounting: F (Front Flange), Bore Size: 25mm, Thread: M5x0.8 (20-25 Bore); Rc (32-100 Bore), Stroke: 50mm, Body Option: CM (Rubber Bumper, Rod End Male Thread), Locking Direction: F (Forwarding Stroke Lock), Auto Switch: M9PW--Solid State, 2-color Indication, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: SDPC (0.5m Cord Length, M12-4 Pin Connector)
Flow Rate Range: 102 (10 to 1000 L/min), Thread Type: F (G), Port Size: 04 (1/2), Output Specifications: F (PNP; Analog 4 to 20 mA), Option 1: N (No Lead Wire), Unit Specifications: M (SI Unit Only), Option 2: R (With Bracket)
Flow Rate Range: 102 (10 to 1000 L/min), Thread Type: F (G), Port Size: 04 (1/2), Output Specifications: F (PNP; Analog 4 to 20 mA), Option 1: W (w/Lead Wire w/Connecter + Connector Cover), Unit Specifications: Unit Selection Function, Option 2: R (With Bracket)
Flow Rate Range: 501 (5 to 500 L/min), Thread Type: F (G), Port Size: 04 (1/2), Output Specifications: F (PNP; Analog 4 to 20 mA)
Flow Rate Range: 102 (10 to 1000 L/min), Thread Type: F (G), Port Size: 04 (1/2), Output Specifications: F (PNP; Analog 4 to 20 mA), Option 1: W (w/Lead Wire w/Connecter + Connector Cover), Unit Specifications: Unit Selection Function, Option 2: Without Bracket, Calibration Certificate: A (With Calibration Certificate)
Flow Rate Range: 102 (10 to 1000 L/min), Thread Type: F (G), Port Size: 04 (1/2), Output Specifications: F (PNP; Analog 4 to 20 mA)
Flow Rate Range: 102 (10 to 1000 L/min), Thread Type: F (G), Port Size: 04 (1/2), Output Specifications: F (PNP; Analog 4 to 20 mA), Option 1: w/Lead Wire w/Connector, Unit Specifications: Unit Selection Function, Option 2: R (With Bracket), Calibration Certificate: A (With Calibration Certificate)
Flow Rate Range: 501 (5 to 500 L/min), Thread Type: F (G), Port Size: 04 (1/2), Output Specifications: F (PNP; Analog 4 to 20 mA), Option 1: W (w/Lead Wire w/Connecter + Connector Cover)
Flow Rate Range: 501 (5 to 500 L/min), Thread Type: F (G), Port Size: 04 (1/2), Output Specifications: F (PNP; Analog 4 to 20 mA), Option 1: N (No Lead Wire), Unit Specifications: Unit Selection Function, Option 2: R (With Bracket)
Flow Rate Range: 501 (5 to 500 L/min), Thread Type: F (G), Port Size: 04 (1/2), Output Specifications: F (PNP; Analog 4 to 20 mA), Option 1: W (w/Lead Wire w/Connecter + Connector Cover), Unit Specifications: Unit Selection Function, Option 2: Without Bracket, Calibration Certificate: A (With Calibration Certificate)
Flow Rate Range: 501 (5 to 500 L/min), Thread Type: F (G), Port Size: 04 (1/2), Output Specifications: F (PNP; Analog 4 to 20 mA), Option 1: N (No Lead Wire)
Flow Rate Range: 102 (10 to 1000 L/min), Thread Type: F (G), Port Size: 04 (1/2), Output Specifications: F (PNP; Analog 4 to 20 mA), Option 1: w/Lead Wire w/Connector, Unit Specifications: M (SI Unit Only)
Valve; w/Stop Valve), Return Port Size: 03 (3/8), Flow Switch Output Specifications: BT (Out 1: PNP; Out 2: Flow Rate: PNP; Temp.: PNP; Temperature Sensor: Yes), Lead Wire: N (w/o Lead Wire and M8 Connector), Flow Switch Unit Specifications: F (Integrated Display: gal/min; Accumulated Flow: gal; Temp.: °F)
Valve; w/Stop Valve), Return Port Size: 03 (3/8), Flow Switch Output Specifications: BT (Out 1: PNP; Out 2: Flow Rate: PNP; Temp.: PNP; Temperature Sensor: Yes), Lead Wire: N (w/o Lead Wire and M8 Connector), Flow Switch Unit Specifications: F (Integrated Display: gal/min; Accumulated Flow: gal; Temp.: °F)