BP1000

Seat Seal Hastelloy C-22 Hastelloy C-22 316 SS 316 SS Viton (Option: Teflon, Kalrez) Teflon Dimensions BP1000 2.12 (53.8) Max. 4.9 (124.5) Max. 5.6 (142.2) (Option: panel mount) 2.25 (57.2) 0.69 (17.5) 0.88 (22.4) 2 x 10-32 UNF depth 0.25 (6.3) (Mounting hole) 2.00 (50.8) Flow Characteristics BP1000 30 0.21 28 0.19 Back pressure (MPa) Back pressure (psig) 26 0.18 24 0.17 22 0.15 20 0.14 18

BP1000

Parts Material S 316L SS secondary remelt SH Wetted Parts Body Diaphragm Nozzle Seat Seal Hastelloy C-22 Hastelloy C-22 316L SS 316L SS Viton (Option: Teflon, Kalrez) Teflon Flow Characteristics Dimensions inch (mm) BP1000 BP1000 30 0.21 28 0.19 Back pressure (MPa) Back pressure (psig) 26 0.18 5.6'' MAX. (142) P OPTION 24 0.17 5.0'' MAX. (127) 22 0.15 1.50'' (38.1) 20 0.14 2.25'' (57.2) 18

Series MHZ2 11- ø10, ø16, ø20, ø25 22- Air Gripper

12 0.02 0.02 0.05 112211221122MHZ2-16D 5 15 67.3 8 11 38 16 6.5 23.6 30 13 30.6 24 42.5 24.5 7.5 22 15 0.02 0.02 0.05 MHZ2-20D 8 18 84.8 10 16.8 50 18.6 7.5 27.6 35 15 42 30 52.8 29 9.5 32 20 0.02 0.02 0.05 MHZ2-25D 102.7 63 33.6 52 63.6 11 25 10 12 22 36.5 36 30 40 22 21.8 10 20 0.02 0.02 0.05 U V W X Y Z AA AB AC AD AE AF AG AH AJ AK Model 1122+0.043 0 +0.043 0 +0.052 0 +0.052 0 +0.025

Compact Cylinder with Solenoid Valve/

Bore size (mm) Stroke range (mm) OB P1 P2 Q RA RB S V W Y Z 32 40 50 63 9 M5 x 0.8 M5 x 0.8 2.5 10 7 12 43 43.5 59 38 5 to 100 9 M5 x 0.8 M5 x 0.8 2.5 10 7 12 43 43.5 67 46 5 to 100 11 Rc, G, NPT1/8 Rc, G, NPT1/8 3.5 14 8 17 54 63 83 58 10 to 100 14 Rc, G, NPT1/8 Rc, G, NPT1/8 3.5 18 10.5 17 54 63 97 69 10 to 100 6 Compact Cylinder with Solenoid Valve/Guide Rod Type Series CVQM Auto Switch

Series CXS 10-/11-/12- Dual rod cylinder 21-/22- ø6, ø10, ø15, ø20, ø25, ø32

(mm) Model CXS10-10 S SS ZZ Z 10 70 87 30 20 80 97 30 30 90 107 40 40 100 117 40 21-/2210-/11-/12CXS10-20 CXS10-30 CXS10-40 CXS10-50 21-/2210-/11-/1221-/2210-/11-/1221-/2210-/11-/1250 110 127 40 21-/2210-/11-/1283 Dual rod cylinder CXSL 1221CXS / 10-/1122Basic style / CXS15, CXSL15 10-/11221221S ZZ SS 20 10 9 2-4.3 through Z 28 counter bore depth 4.4 18 5 30 1 M6 x 1.0 x 5L (Hexagon socket

Low Profile Guide Type

Technical Data 1555 CY1F Series Auto Switch Mounting Proper Auto Switch Mounting Position (Detection at stroke end) D-A9, D-A9V (mm) Note 2) Bore size Mounting patternq A1 Mounting patternw A2 Mounting patterne A3 Operating range 9 B1 B2 B3 (mm) 10 15 25 38 60 18 80 38 80 10 39 66 19 86 39 86 11 44.5 95.5 24.5 115.5 44.5 115.5 D-M9, D-M9V, D-M9W, D-M9WV D-M9A, D-M9AV Mounting pattern q B1

Two Hand Control Valve

3 Component Parts No. 1 2 3 4 5 6 7 8 9 Description Description Material Aluminum die-cast Aluminum die-cast Rolled steel Aluminum alloy Brass Aluminum alloy Aluminum alloy Aluminum alloy Brass Material Stainless steel H-NBR Stainless steel Note Note Urban gray Urban white Nickel plated No. 10 11 12 13 14 15 16 17 18 Cover Body Plate Spool valve Orifice Valve seat Valve guide B Valve guide

3

VXB Reduced apparent power Reduced coil temperature rise VXE 12 VA2 18 VA 15 VA3 20 VA VXP 24 VDC added 100C4 120C VXR 2 VXS23/24 Current model VXS22 3 VXS25/26 Current model VXS23 VXH 4 VXS23 to 26 Current model VXS22/23 VXF Electrical entry VX3 Grommet/DIN terminal Conduit terminal/Conduit VXA DIN terminal added Body material C37, Stainless steel Full-wave rectifier standardized High sealing

VZM500

Panel mounting hole Roller plunger VZM550-01-06 VZM550-01-06S 12 (Polyacetal or hard steel roller) Hexagon nut thick 8, across flats 22 JIS Symbol (Pilot exhaust port) 0.5 MPa supply 1.5 mm P.T. 18 N F.O.F. 2.0 mm O.T. 2-3.2 mounting hole 3.5 mm T.T. Panel mounting hole Toggle lever VZM550-01-08 T.T.

5 Port Pilot Operated Solenoid Valve Metal Seal, Plug-in/Non Plug-in Series VZS3000 For details about certified products conforming to international standards, visit us at www.smcworld.com.

conforming to international standards, visit us at www.smcworld.com. 5 Port Pilot Operated Solenoid Valve Metal Seal, Plug-in/Non Plug-in Series VZS3000 Model VK 1 4/2 (P A/B) C [dm3/(sbar)] C [dm3/(sbar)] b Cv 4/2 5/3 (A/B R1/R2) Flow characteristics (1) Response time (ms) (2) Weight (kg) (3) Max. operating cycle (CPM) Port size Rc VZ Model Type of actuation b Cv VF 2 position VZS3150 1200 18

Smooth Vent Valve

18 524 Smooth Vent Valve XVD Series Construction/Operation Main air supply scale plate !

Air Suction Filter

ZFA100 Port size Symbol Model A B 18 20 28 ZFA200 1 8 1 4 Manifold Pitch (Section F-F') Port size (The above diagram is for ZFA200) ZFA100 Port size Symbol Model A B 19 18 24 28 ZFA200 1 8 1 4 Number of manifold stations Symbol Single unit Note) Model 2 56 68 76 88 3 74 86 104 116 4 92 104 132 144 5 110 122 160 172 6 128 140 188 200 7 148 158 216 228 8 164 176 244 256 9 182 194 272 284 10

Air Suction Filter With One-touch Fittings ZFB Series

2 ZFB101-05 ZFB101-07 ZFB201-07 ZFB301-11 ZFB401-13 65 54 53 27.2 24.2 24 19.7 17.7 17.5 " " 15.2 18.5 21.7 14.4 15.5 50 15 12.5 22.5 26 48 12.8 8.5 52 57 64.5 28 30 34 9.5 11 13.5 24.5 27 30.5 13.5 14.5 16.5 16 17 21.5 61 65 81 17.5 21.5 25.6 16.6 18 23 70 87.5 30.2 34 21.7 24 280

Vacuum Saving Valve

18 23 23 7 7 19 24 20 Note) When mounting and removing the product, apply a wrench or torque wrench to the place shown in Figure.

ZSM1-115/121

Number of rotations of pressure adjusting screw Installation/Piping L H Number of rotations Caution 0 5 10 15 18 23 1. When piping switch by hand, hold body. Electrical wire must not be subjected to excessive force. 2. Do not drop nor apply excessive force. It may cause malfunction or damage. 3. Tighten switch by applying the wrench on the fitting part.

NCQ8

CD-P11 OUT Brown Surge absorber Choke coil to OUT Blue Choke coil CD-P12 OUT (+) Brown Switch operating position (ON) Zener diode OUT () Blue Note) Reed switch: 0.08" (2mm) or less Solid state switch: 0.04" (1mm) or less Hysteresis Dimensions 0.35(9) 9 0.17 (4.4) Switch operating position (OFF) 0.13 (3.4) 0.71(18) 0.13 1.5(38) 061(15.5) Note) Hysteresis may fluctuate due to the operating

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

18 Rotary Table: Basic Type Vane Style Series MSUB Construction/Component Parts CRB2 t r For 180 For 90 Single vane Double vane Figure in the middle position CRBU2 Figure with pressure to A port Figure in the middle position for 180 Figure with pressure to A port Single vane: Size 1 Single vane: Size 3, 7, 20 CRB1 Component Parts MSU No. q w Description Body (A) Body (B) Note Light gray

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

port f)] WB WA TA TA WA R TB Plug TB R W [P (port d)] Inner cover Note 3) holding screw (mm) K 21 20 JK 10 12 J M6 x 1 M10 x 1.5 HT 19.5 39 HS 27 49.5 HP 44 73.5 HL 38.6 64.9 HI 23 39 HG 8.5 19 HB 8.5 19 HA 19.5 39 H 45 75 G 6.5 8.5 F 12.5 25 EK 4 6 ED 9.5 13 E 4H9 6H9 B 9.5 14 A 8 12 C 5.4 8.6 Model +0.030 0 +0.030 0 CYP15 CYP32 L 67 90 Z 118 155 Y 2.5 3.5 WB 17 27 WA 32 46 W 69 115 TB 18

MXF

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 21 31 20.5 13 18 58 3H9 depth 3 +0.025 0 15 9.5 4-3.2 4-6.5 4.5 4.7 2-M3 x 0.5 thread depth 6 A G H 8 4-M4 x 0.7 Operating port 2-M3 x 0.5 Section AA M 8 N 2 ( 1): The number of pitches 0.3 15 (Table length) 16 4.5 J 8 Z 2.4 Max. 9 ZZ H G 3H9 depth

10-my1w-e

Seal Kit List (12, 13, 18 and 20 are not included in the seal kit. Order them as required with by individual part numbers.) Description Qty.