MXQ

1 !2 !3 !4 !5 !6 !7 !8 !

Air Slide Table

Model Bolt Maximum tightening torque (Nm) Maximum screw-in depth (l mm) MXQR 6 MXQR 8 MXQR12 MXQR16 MXQR20 MXQR25 5 6 8 10 13 15 0.9 2.1 4.4 7.4 7.4 18.0 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 M8 x 1.25 1.

One-touch Fittings Series KQ2

. 5 1 5 . 4 6 5 . 4 2 2 . 5 1 7 . 3 1 6 4 5 . 8 1 6 . 5 2 7 . 7 1 2 2 0 1 0 1 9 9 0 1 U 2 Q K 5 . 8 1 5 . 1 7 5 . 7 2 5 . 8 1 1 . 6 1 5 . 0 5 1 2 0 4 4 . 8 2 6 2 2 1 2 1 9 9 2 1 U 2 Q K 9 . 0 2 5 . 5 7 0 3 9 . 0 2 1 . 8 1 5 . 3 5 2 2 4 . 7 5 4 . 5 4 2 3 6 1 6 1 9 9 6 1 U 2 Q K 5 . 6 2 0 9 5 . 6 3 5 . 6 2 3 2 5 6 5 2 3 1 1 ) 3 1 1 ( 8 7 Branch Y: KQ2U Inch Applicable tube O.D.

Fieldbus system EtherNet/IP compatible SI Unit

System 4 1: Diagnosis of SI unit is generated. 5 1: Diagnosis of IO-Link master unit is generated. 6-7 Reserved 0 1: There is an error in unit 0. 1 1: There is an error in unit 1. 2 1: There is an error in unit 2. 3 1: There is an error in unit 3. 4 Unit 4 1: There is an error in unit 4. 5 1: There is an error in unit 5. 6 1: There is an error in unit 6. 7 1: There is an error in unit 7.

HRX-OM-X084

1-5 1.7 Waste Disposal . 1-6 1.7.1 Disposal of refrigerant and compressor oil . 1-6 1.7.2 Disposal of product . 1-6 1.8 Material Safety Data Sheet (MSDS) . 1-7 Chapter 2 Name and Function of Parts . 2-1 2.1 Model Number of Product . 2-1 2.1.1 HRR010-A-10. 2-1 2.1.2 HRR010-W-10. 2-2 2.1.3 HRR010-A-20. 2-3 2.1.4 HRR010-W-20. 2-4 2.2 Name and Function of Parts . 2-5 2.2.1 HRR010-A-10/20. 2-5

Air Cylinder

2 5.5 6 28 35 5 26 M4 x 0.7 5 25 Up to 300 301 to 1500 12 10 (12) 1/8 12.5 10 (12.5) M5 x 0.8 22 19.5 44 17 16.5 10 14 2 5.5 7 32 40 6 31 M5 x 0.8 5.5 32 Up to 300 301 to 1500 12 10 (12) 1/8 10.5 10 (10.5) 1/8 22 19.5 53 17 20 12 18 2 6.6 7 38 40 6 38 M5 x 0.8 5.5 40 Up to 300 301 to 1500 13 10 (13) 1/8 13 10 (10) 1/8 30 27 61 19 26 16 25 2 6.6 8 46 50 8 47 M6 x 1 6 50 Up to 300 301 to 1500

CM2

1 No. !2 !3 !4 !5 !6 !

Step Motor Controller

B-1 A-1 B-2 A-2 B-3 A-3 Cable color Signal Nil 2 1 6 5 3 4 A A B B COM-A/COM COM-B/ Brown Red Orange Yellow Green Blue S Standard cable Cable color Connector D terminal no. Shield 12 13 7 6 9 8 3 Brown Black Red Black Orange Black Vcc GND A A B B B-4 A-4 B-5 A-5 B-6 A-6 Connector B terminal no.

CXS

Dual-Double-Rod Type CXSW Series CXSJ 6, 10 How to Order Piping Standard piping Axial piping Nil P CXS P 6 M 50 A90 J S Number of auto switches 2 pcs. 1 pc.

NCM

Option Compatibility Option Compatibility (1) NCDM Description Note S T NCDM S T C XB6 XB7 XB9 XC6 B C E R O O O S S N S O O O S Auto switch capable Spring return Spring extend Bumper Heat resistant Cold resistant Low speed Stainless steel rod Front nose mount Rear pivot mount Double end mount Block mount 1, 6 1, 6 1, 6 1, 2, 6 1, 6 1, 6 1, 6 1, 3, 6 1, 6 1, 6 1, 6 1, 5, 6 N O S S N S O

HRX-OM-X037

Refer to Table 5.4-6 Offset setting for details. (1) (2) Offset setting Table 5.4-6 Offset setting No. Indication Item Explanation Setting range (1) Offset Temp.

Programless Controller Series LECP1

B-1 A-1 B-2 A-2 B-3 A-3 Nil Circuit Cable color 2 1 6 5 3 4 A A B B COM-A/COM COM-B/ Brown Red Orange Yellow Green Blue S Standard cable Cable color Connector D terminal no. Shield 12 13 7 6 9 8 3 Vcc GND A A B B Brown Black Red Black Orange Black B-4 A-4 B-5 A-5 B-6 A-6 Connector B terminal no.

HRX-OM-Q026

Alarm Notification and Troubleshooting . 6-1 6.1 Alarm Notification . 6-1 6.2 Alarm Buzzer Stop . 6-3 6.3 Troubleshooting . 6-4 6.3.1 Alarm contents, causes, and troubleshooting. 6-4 6.3.2 How to release Fan Breaker Trip alarm . 6-8 6.4 Other Errors . 6-10 Chapter 7 Control, Inspection and Cleaning . 7-1 7.1 Quality Control of Circulating Fluid and Facility Water . 7-1 7.2 Inspection and

Table of Contents

6 7 7 9 9 9 11 159 172 178 204 210 225 232 259 311 13 13 16 16 19 19 22 22 32 100 113 119 145 151 166 173 200 253 63 76 76 90 90 106 106 122 160 20 20 20 20 20 20 20 20 20 63 76 76 90 90 106 106 122 160 10 10 10 10 10 10 10 10 10 1 8 1 4 3 8 AMG150 , , 1 4 3 8 , AMG250 1 2 3 8 1 2 , AMG350 3 4 1 2 3 4 , AMG450 1 1 1 1 AMG550 AMG650 3 4 1 2 , , 14-20-6 5 Water Separator Series AMG Dimensions

Hydraulic

) Load (kN) 126 Technical Data 2 Series CH2E, CH2F, CH2G, CH2H Stroke range limit charts: Bore sizes 50, 63, 80, 100 Bore size 50 B-rod C-rod 5 2 4 8 3 7 2 4 8 3 7 5 2000 6 1 6 1 1000 Stroke (mm) 500 100 50 0.5 1 5 10 20 30 0.5 1 5 10 20 30 Load (kN) Load (kN) Bore size 63 B-rod C-rod 2000 1 2 8 5 4 3 7 6 1 2 3 5 4 8 7 6 1000 Stroke (mm) 500 100 50 0.5 1 5 10 20 50 0.5 1 5 10 20 50 Load (

NCG/CG1

18 22 22 30 15.5 19.5 19.5 27 13 17 17 19 14 16.5 20 26 8 10 12 16 12 14 18 25 2 2 2 2 12 12 12 13 10 10 10 10 35 40 40 50 5 6 6 8 26 31 38 47 M4 x 0.7 depth 7 6 8 10 14 M8 x 1.25 M10 x 1.25 M10 x 1.25 M14 x 1.5 24 29 35.5 44 1/8 1/8 1/8 1/8 M5 x 0.8 depth 7.5 M5 x 0.8 depth 8 M6 x 1 depth 12 S 1 to 50 st 51 to 100 st 101 to 125 st 126 to 200 st Bore size (mm) TA TB TC S 94 94 96 103 ZZ 131

Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

4H9 10h9 6H9 12h9 MA 8H9 14h9 DTA M4 x 0.7 M4 x 0.7 M5 x 0.8 M5 x 0.8 M6 x 1 SC 9 9 12 14 19 SB 8 9.5 9.5 11 11 R 44 53 62 76 95 SA 4.5 5.5 5.5 6.6 6.6 Y 6 8 7 7.5 8 O 4.5 4.5 5 5.5 6 P M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 Q 11 12 14 17 20 TB 8 8 10 10 12 UA M4 x 0.7 M5 x 0.8 M5 x 0.8 M6 x 1 M6 x 1 UB 6 7.5 10 9 12 VA VB 3 4 4 5 6 WA WB 2 2 2 2.5 3 XA XB 3 4 4 5 6 Model MHS3-32D MHS3-40D MHS3

42

Stations (1 to 12) C C kit (Plug lead type) 6.

Table of Contents

1 !2 !3 !4 !5 !6 !7 No. q w e r t y u i o !

Vacuum Unit

Port Size Ejector system Vacuum pump system Metric Inch Metric Inch PV 6 1/4" 6 1/4" V 6, 8 1/4", 5/16" 6, 8 1/4", 5/16" EXH (Port exhaust) 8 5/16" If the sound absorbing material is clogged, it will cause a reduction in the ejector performance.