ZX

(PD port) Common EXH port Pitch = 21 M5 (or M6) Individual vacuum supply port (PV port) Common vacuum supply port (PV port) Common supply port for vacuum switch valve (PS port) Stations (mm) 8 7 180 192 197 6 159 171 176 5 138 150 155 4 117 129 134 3 96 108 113 2 75 87 92 1 54 66 71 Symbol L1 33 45 50 L2 L3 13-2-56 56 Vacuum Module: Vacuum Pump System Series ZX (In the case of individual

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This ligure has to be multiplid by 150, tor 5 times 100 mm stroke and 30 times per minute: 150/min .3.021 liters = 453.15 l/min. P T I E U A T I C T E C H N O L O G Y horanv ACTUATORS R A C K A N D P I N I O N T Y P E The output shatt has an integral pinion gear driven by a rack anached to a double piston. Standard angles of rotation are 90" or '180'.

Magnet: D (Built-in), Mounting: L (Foot), Bore Size: Ø32 mm, Port Thread Type: Rc: 32-100 Bore; M Thread 12 to 25 Bore, Stroke: 100mm, Body Option: C (Rubber Bumper, Rod End Female Thread), Lock Position: R (Front Lock), Release of Manual: L (Locking)

Magnet: D (Built-in), Series: BA2 (with End Lock), Mounting: D (Double Clevis), Tube Material: Aluminum Tube, Bore Size: 100mm, Port Thread: TN (NPT), Stroke: 450mm, Rod Boot: N (w/o Gaiter, w/o Cushion), Cushion: Air Cushion, Lock Position: R (Front Lock), Release Type: L (Locking)

Magnet: D (Built-in), Series: BA2 (with End Lock), Mounting: G (Rear Flange), Tube Material: Aluminum Tube, Bore Size: 80mm, Port Thread: Rc, Stroke: 100mm, Rod Boot: w/o Gaiter w/Cushion Both Sides, Cushion: Air Cushion, Lock Position: R (Front Lock), Release Type: L (Locking)

Cylinder (Tube) Inner Diameter(φ): 100, Stroke(mm): 500, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, End Locking: [Included] Presence (Only Rod Side), Cushion: Air cushion, Operating Pressure(MPa): 0.15 to 1.0, Specification: Without magnet, Port

Cylinder (Tube) Inner Diameter(φ): 100, Stroke(mm): 700, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, End Locking: [Included] Presence (Only Rod Side), Cushion: Air cushion, Operating Pressure(MPa): 0.15 to 1.0, Specification: Without magnet, Port thread

Cylinder (Tube) Inner Diameter(φ): 50, Stroke(mm): 100, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, End Locking: [Included] Presence (Only Rod Side), Cushion: Air cushion, Operating Pressure(MPa): 0.15 to 1.0, Specification: Without magnet, Port thread

Cylinder (Tube) Inner Diameter(φ): 63, Stroke(mm): 175, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, End Locking: [Included] Presence (Only Rod Side), Cushion: Air cushion, Operating Pressure(MPa): 0.15 to 1.0, Specification: Without magnet, Port thread

Cylinder (Tube) Inner Diameter(φ): 100, Stroke(mm): 200, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, End Locking: [Included] Presence (Only Rod Side), Cushion: Air cushion, Operating Pressure(MPa): 0.15 to 1.0, Specification: Without magnet, Port

Cylinder (Tube) Inner Diameter(φ): 100, Stroke(mm): 300, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, End Locking: [Included] Presence (Only Rod Side), Cushion: Air cushion, Operating Pressure(MPa): 0.15 to 1.0, Specification: Without magnet, Port

Cylinder (Tube) Inner Diameter(φ): 100, Stroke(mm): 125, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, End Locking: [Included] Presence (Only Rod Side), Cushion: Air cushion, Operating Pressure(MPa): 0.15 to 1.0, Specification: Without magnet, Port

Cylinder (Tube) Inner Diameter(φ): 100, Stroke(mm): 300, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, End Locking: [Included] Presence (Only Rod Side), Cushion: Air cushion, Operating Pressure(MPa): 0.15 to 1.0, Specification: Without magnet, Port thread

Cylinder (Tube) Inner Diameter(φ): 50, Stroke(mm): 100, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, End Locking: [Included] Presence (Only Rod Side), Cushion: Air cushion, Operating Pressure(MPa): 0.15 to 1.0, Specification: Without magnet, Port thread

Cylinder (Tube) Inner Diameter(φ): 50, Stroke(mm): 350, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, End Locking: [Included] Presence (Only Rod Side), Cushion: Air cushion, Operating Pressure(MPa): 0.15 to 1.0, Specification: Without magnet, Port thread

Cylinder (Tube) Inner Diameter(φ): 63, Stroke(mm): 75, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, End Locking: [Included] Presence (Only Rod Side), Cushion: Air cushion, Operating Pressure(MPa): 0.15 to 1.0, Specification: Without magnet, Port thread

Cylinder (Tube) Inner Diameter(φ): 63, Stroke(mm): 100, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, End Locking: [Included] Presence (Only Rod Side), Cushion: Air cushion, Operating Pressure(MPa): 0.15 to 1.0, Specification: Without magnet, Port thread

Cylinder (Tube) Inner Diameter(φ): 63, Stroke(mm): 125, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, End Locking: [Included] Presence (Only Rod Side), Cushion: Air cushion, Operating Pressure(MPa): 0.15 to 1.0, Specification: Without magnet, Port thread

Cylinder (Tube) Inner Diameter(φ): 63, Stroke(mm): 300, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, End Locking: [Included] Presence (Only Rod Side), Cushion: Air cushion, Operating Pressure(MPa): 0.15 to 1.0, Specification: Without magnet, Port thread

Cylinder (Tube) Inner Diameter(φ): 63, Stroke(mm): 500, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, End Locking: [Included] Presence (Only Rod Side), Cushion: Air cushion, Operating Pressure(MPa): 0.15 to 1.0, Specification: Without magnet, Port thread