PF2D

Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16 Mcm of deionized water at class 10 clean room (1 l/min flow rate).

Air Suction Filter Series ZFA 1

How to Order ZFA 100 01 Bracket Air suction filter Nil L None With bracket (1 pc. on the left) R With bracket (1 pc. on the right) Type (Recommended flow rate) L or R shows the left or right of the filter IN when viewed from front. 50 l /min (ANR) 200 l /min (ANR) 100 200 Port size ZFA100 B (ZFA200) B (ZFA100) 1 8 1 4 02 01 Thread type Nil T Rc How to Order Manifold NPTF F G Indicate both

Speed Controller with One-touch Fittings Panel Mount Type Series AS



1F-3 In-line Type 1

JIS Symbol How to Order 1 F 06 3 200 AS Flow Direction Symbols on Body JIS Symbol Body size Panel mount type Symbol M5 standard 1/8 standard 1/4 standard 3/8 standard 1/2 standard 100 200 205 300 400 Applicable tubing O.D.

VS 8-2/VS 8-4

EXH. (2, 4 3, 5) ISO Standard: Interface conforming to 18 mm size (VS 8-2) and 26 mm size (VS 8-4) Up to 100 VSR8-4 (Rubber seal) VSS8-2 (Metal seal) 19 VSR8-2 (Rubber seal) VSS8-4 (Metal seal) 27 (Metal seal: Single type, with light/surge voltage suppressor) Applicable to EX600 (Input/ Output) serial transmission Compact and high flow VSS8-2: 20 msec or less, service life 200 million cycles

NCA1

Bore Piston Area Forces (lbs); Push Stroke (in) (in) Operating medium Pressure (PSI) 50 60 80 100 200 250 1.5 1.767 88 106 141 177 353 442 HOW TO USE THIS TABLE 1 Locate column with desired operating pressure. 2 Move down that column and locate the thrust value which is equal (or the next larger to the force to be delivered by the cylinder.) 3 On that same line, locate in the first (left)

Speed Controller with One-touch Fittings Series AS In-line Type 1

M5 standard 1/8 standard 1/4 standard 3/8 standard 1/2 standard 100 200 205 300 400 Applicable tubing O.D. Metric size Inch size P . 15-11-3 3.2 With One-touch fittings 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" Use 1/8" tube. 23 04 06 08 10 12 01 03 05 07 09 11 13 4 6 8 10 12 Flow Direction Symbols on Body JIS Symbol Symbol 15-9-10

Speed Controller with

Body size 100 200 205 300 400 Metric size Inch size M3, M5 standard 1/8 standard 1/4 standard 3/8 standard 1/2 standard Grease-free (Sealant: Fluoro coated) + Restrictor (Without Check Valve) -X21 02 23 04 06 08 10 12 01 03 07 09 11 13 1/8" 5/32" 1/4" 5/16" 3/8" 1/2" 2 3.2 Ex.)

HRX-OM-W069

To send request messages in series, wait for 100 msec. or longer after receiving a response message from the product before sending the next message. Retry (resend request message). The response may not be returned due to noise. If no message is returned 1sec. after sending a request message, resend the request message.

5% F.S. or less; allowable load resistance: 100 k or more.Current output 4 to 20 mA (within the flow rate range)Linearity: ?5% F.S. or less; allowable load resistance: 300 or less with 12 VDC, 600 or less with 24 VDC12 to 24 VDC (ripple ?10% or less)100 mA or lessIP65Operating: 0 to 50C, Stored: ?

Speed Controller with One-touch Fittings Panel Mount Type Series AS



1F-3 In-line Type 1

JIS Symbol How to Order 1 F 06 3 200 AS Flow Direction Symbols on Body JIS Symbol Body size Panel mount type Symbol M5 standard 1/8 standard 1/4 standard 3/8 standard 1/2 standard 100 200 205 300 400 Applicable tubing O.D.

Dual Speed Controller with One-touch Fitting Series ASD 1

3 6 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) 07, 08, 09, 10, 11 Flow rate (l/min (ANR)) Effective area (mm2) Effective area (mm2) Effective area (mm2) 300 06 1.0 2 4 200 50 100 0.5 1 2 100 0 0 0 0 5 10 0 5 10 0 5 10 Number of needle rotations Number of needle rotations Number of needle rotations ASD530F ASD630F 1500 1000 14 10,11 12 20 Flow rate (l/min (ANR)) Flow rate (l/min (ANR

Speed Controller with One-touch Fittings Series AS In-line Type 1

M5 standard 1/8 standard 1/4 standard 3/8 standard 1/2 standard 100 200 205 300 400 Applicable tubing O.D.

ASD

(l/min (ANR)) Flow (l/min (ANR)) Effective area (mm2) Effective area (mm2) Flow (l/min (ANR)) 300 06 1.0 2 4 200 50 100 0.5 1 2 100 0 0 0 0 5 10 0 5 10 0 5 10 Needle rotation (Turns) Needle rotation (Turns) Needle rotation (Turns) ASD530F ASD630F 1000 1500 14 20 10, 11 12 Flow (l/min (ANR)) Effective area (mm2) Effective area (mm2) Flow (l/min (ANR)) 12 1000 10 8 10, 11, 12 08, 09 15 500

Clean Rodless Cylinder Series CYP

Nil S n Standard stroke Standard stroke (mm) 100, 150, 200, 250, 300 350, 400, 450, 500, 600, 700 Bore size (mm) Type of auto switch 15, 32 Nil Select auto switches from the table below.

Air Cylinder NCA1 Series

Bore Piston Area Forces (lbs); Push Stroke (in) (in) Operating medium Pressure (PSI) 50 60 80 100 200 250 1.5 1.767 88 106 141 177 353 442 HOW TO USE THIS TABLE 1 Locate column with desired operating pressure. 2 Move down that column and locate the thrust value which is equal (or the next larger to the force to be delivered by the cylinder.) 3 On that same line, locate in the first (left)

Clean Room Regulator/Fluoro Resin Type Series SRF30

Resistivity (km) 100 250 200 150 10 100 50 0 1 0 5 10 15 20 25 30 0 5 10 15 20 25 30 Time of water flow (min) Measuring time Test method and conditions The liquid contact portions were filled with sulphuric acid and left untouched for half an hour.

SFOD-OMT0011CN

Result area (LER ) ) LEY16RA-100BMLLEY16RA-100 LERH30K-3LLERH30K-3 0 ) LEY16RA-75LEY16RALEY16RA-100 LEFSH LEFS ) LEFSH25RH-300LEFS25RH-300LEFS25RH-300 11-)(25A-) 11-25A-11-25A) 11-LEFSH16A-100BRLEFS16A-100LEFS16A-100 29 No.SFOD-OMT0011CN-A c) Execute Execute b) c) (Apply) d), d) download e) 30 No.SFOD-OMT0011CN-A (2) a View(V) 4.1 (1-1-2) View (V) b c) download e) 31 No.SFOD-OMT0011CN-A

Bore sizes: 6, 10, 15, 20, 25, 32, 40, 50, 63; Stroke lengths: 50, 100, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000, 1500, 3000, 5000 mm; Minimum operating pressure: 0.12 ~0.16 MPa (17 ~ 23 psi); Speed: 50 ~ 500 mm/sec.; Fluorine grease; ISO Class 5 (Class 100)

Bore sizes: 6, 10, 15, 20, 25, 32, 40, 50, 63 mm; Stroke lengths: 50, 100, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000, 1300 mm; Direct mount type; Speed: 50 ~ 400 mm/sec.; Fluorine grease; ISO Class 5 (Class 100); Auto switch capable

Bore sizes: 25, 32, 40 mm; Stroke lengths: 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000, 1200, 1400, 1600, 1800, 2000, 3000, 4000, 5000 mm; Minimum operating pressure: 0.10 MPa (15 psi); Speed: 100~1000 mm/sec (air cushion), 100~1500 mm/sec (external shock absorber); Long stroke option: up to 5000 mm (XB11); RoHS compliant; Auto switch capable