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Lead wire length symbols: 0.5 m Nil (Example) Y69A 3 m L (Example) Y69AL 5 m Z (Example) Y69AZ Since there are applicable auto switches other than the listed above, refer to page 9-11-29.

Model (2) Weight (g) Operating pressure range (MPa) Function Vacuum specifications (MPa) Port size Effective area (mm2) Valve model Type 1(P), 3(R) port 2(A) port Grommet L plug connector, M plug connector 1(P) port 3(R) port SY11 3 4 Standard 0 to 0.7 0.14 100 kPA to 0.6 100 kPA to 0 M3 x 0.5 M3 x 0.5 N.C.

Nil Right flange surface Left flange surface A F J K M With indicator With indicator Without indicator Without indicator Flange side Flange side t Auto switch type r Temperature specifications XLA Symbol Auto switch Without auto switch (without built-in magnet) Remarks Temperature range 5 to 60C 5 to 150C Symbol Nil M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// D-M9N(M

AR-OMX0055-B PRODUCT NAME Regulator MODEL / Series / Product Number AR20(K)-(F,N)01(F,N)02(B,E,E1,E2,E3,E4,G,H,J,M)(-1,N,R,Y,Z,ZA)-D AR30(K)-(F,N)02(F,N)03(B,E,E1,E2,E3,E4,G,H,J,M)(-1,N,R,Y,Z,ZA)-D AR40(K)-(F,N)02(F,N)04(B,E,E1,E2,E3,E4,G,H,J,M)(-1,N,R,Y,Z,ZA)-D AR40(K)-(F,N)06(B,E,E1,E2,E3,E4,G,H,J,M)(-1,N,R,Y,Z,ZA)-D AR50(K)-(F,N)06(F,N)10(B,E,E1,E2,E3,E4,G,M)(-1,N,R,Y,Z,ZA)-D AR60(K)-(

With cushion on head end 05 Exension cable CE1-R Cable length 05 10 15 20 Suffix 5 m Nil Extension cable 10 m C Extension cable & connector 15 m 20 m Applicable Auto Switches/Refer to pages 941 to 1067 for further information on auto switches.

ZP3EA-P2 [Weight: 7.6 g] 10.3 27.4 10.3 20.3 R R 20 20 2.9 4.9 2.9 4.9 R R R R R R 23.5 19.5 31.6 26.5 Applicable pad part no. ZP3E-32UM ZP3E-40UM ZP3E-32BM ZP3E-40BM Applicable pad part no. ZP3E-50UM ZP3E-50BM Part no. ZP3EA-P3 [Weight: 17.7 g] Part no. ZP3EA-P4 [Weight: 31.1 g] 16.3 34.5 16.3 43.6 R R 4.9 7.9 4.9 7.9 15 15 R R R R R R R 50.5 41 39.8 32 Applicable pad part no.

I = m + mL kgm 2 r Find the actual moment of inertia I.

Shock absorber Port variations R L R L Tighten the four unit fixing bolts equally to secure the unit body. R R R R L L L L R L R L L R Slide table operating direction 8-14-26

Cylinder operation pressure Thrust Torque Operation cycle Ambient temperature Friction coefficient Symbol m h r d p F T n t Unit kg m/sec m rad/sec m mm MPa N Nm cycle/min C 2 gh m RHC R m 2 1 2 m 2 1 2 1 2 T S R 2 mgh F1S m Nm C m/s kg S T t m MK(2) E1 + E2 mgS F1S mgS mgS F1S + mgS RS Q G 2 2 E1 + E2 E1 + E2 E1 + E2 E1 + E2 E1 + E2 E Corresponding weight of impact object 2 2 E 2

t = 25C m 2 1 2 m 2 1 2 R Operating condition Impacting object weight Collision speed Dropping height Angle speed Distance between axis of cylinder and impact point Bore size Cylinder operation pressure Thrust Torque Operation cycle Ambient temperature Friction coefficient Symbol m h r d p F T n t Unit kg m/sec m rad/sec m mm MPa N Nm cycle/min C 2 gh m RHC R m 2 1 2 m 2 1 2 1 2 T S

Name plate symbol Insert pin Nut Insert bushing Description Model External view Page Description Model External view Page Panel Mount Union Reducing LQ1P-R p. 5-11 Male Connector LQ1H-M p. 5-2 Female Connector LQ1H-F p. 5-2 Union Reducing LQ1U-R p. 5-11 Space Saving Union Elbow LQ1E-SS p. 5-12 Male Elbow LQ1L-M p. 5-3 Space Saving Union Elbow Reducing LQ1E-SS-R p. 5-12 Female Elbow LQ1L-F

3/h 273 m 3/h 390 m 3/h 660 m 3/h m 3/min (ANR) 1 7 oC 231 m 3/h 347 m 3/h 432 m 3/h 720 m 3/h 10 oC 254 m 3/h 382 m 3/h 510 m 3/h 822 m 3/h 0.7MPa 35 oC 25 oC 230V 50Hz 550 oC 0.15MPa 1.0MPa 24085% AC230V10 50Hz (4) (2) 4.3A 6.1A 7.9A (2) 760W 1390W 1700W (3) 10A 20A R407C(HFC) 42010g 73010g 55010g 67010g R1 R1-1/2 R2 10mm 1 2 54kg 62kg 100kg 116kg 1ANR 2065% 2 3 30mA

R 30 - PNP type (LECPAP-) Power supply for pulse signal Positioning unit side Inside of the driver Current limiting resistor R NP+ <3> 1k NP<4> 120 Current limiting resistor R PP+ <5> 1k PP<6> 120 Caution Be sure to install a current-limiting resistor R according to the pulse-train signal voltage.

17 18.5 17 26.5 10 23 K 25.0 35.2 1 2 KRL10-04S 37 63 28 38 22 Connection thread (With seal) 1 4 3 8 KRL12-02S KRL12-03S 35.5 37 M 17 24 39.7 50.2 17 28.5 1 2 KRL12-04S 20.9 39.5 65 12 22 H Reference dimensions after R thread installation.

(Switch body only)] NPN output / Wiring bottom entry ISE35-R-25-MLA [ISE35-R-25-M (Switch body only)] NPN output / Wiring top entry Note 4) Digital type ISE35-N-65-MLA [ISE35-N-65-M (Switch body only)] PNP output / Wiring bottom entry ISE35-R-65-MLA [ISE35-R-65-M (Switch body only)] PNP output / Wiring top entry Clean Room Compliant (10-) 10-ARP20(K) 10-ARP30(K) 10-ARP40(K) Model Bracket

0.4 [9 to 11 mm]) Drain tube (O.D.: 0.4 [10 mm], Length: 39.4 [1.0 m]) J P L K 4 to 0.5 [4 to 13 mm] M N Dimensions Unit: inch [mm] A B C D E F G H J K L M N P Q R Model Port size 31.5 [800] 34.2 [868] IDFB55E 2 18.5 [470] 33.7 [855] 5.0 [128] 17.9 [455] 4.3 [110] 9.8 [250] 2 [50] 0.5 [13] 19.7 [500] 3.0 [75] 27.6 [700] 20.7 [526] 20.4 [519] 1.4 [36] 35.4 [900] 38.1 [968] IDFB75E 2 96 Series

(Switch body only)] NPN output / Wiring bottom entry ISE35-R-25-MLA [ISE35-R-25-M (Switch body only)] NPN output / Wiring top entry Note 4) Digital type ISE35-N-65-MLA [ISE35-N-65-M (Switch body only)] PNP output / Wiring bottom entry ISE35-R-65-MLA [ISE35-R-65-M (Switch body only)] PNP output / Wiring top entry Clean Room Compliant (10-) 10-ARP20(K) 10-ARP30(K) 10-ARP40(K) Model Bracket