VKF300

Proper tightening torque Nm {kgfcm} Tightening torque for piping Connection threads M5 Rc(PT) 1/8 1.5 to 2 {15 to 20} 7 to 9 {71 to 92} Reference: Tightening into the M5 fitting threads After tightening by hand, tighten about 1/6 of a turn further using a tightening tool.

ZCUK

20, 25, 30 20, 25, 32 5, 10, 15, 20, 25, 30, 40, 50 TN TF R Rod piping/ Pad direct mounting 32 32 mm Note) In the case of rod piping (Q, R), TF (G1/8) is not available.

ZQ

F.S. or less (adjustable) 2% F.S. or less (fixed) 0 to 15% F.S. or less (adjustable) 2% F.S. or less (fixed) Display 2-digit red LED Display accuracy 3 %F.S. 2 digits Output indicator light Lights up when output is ON (red LED).

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fl 110+559120+559 Differenl 1 5 90 100 1 1 0 Same 90 100 1 1 0 Ditterent 15+5d!

NCRBIBwserbs

Rotation Speed Range Model: 10, 15, 20O.O3 0.3 sec,/90' Model 300.04-0.3 sc,/90' lf a rotation soeed is used slower than 0.3sec/90", sticking may occur.

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Port Thread Optional Specitications Standard specif icalion CE marked . 17. 18. 19 For manifold mountinq 2. 3. 15 CE marked DeviceNet comoatible 4,5.6.8. 14 CE marked 1 6 oreset tvoe 4 , 5 . 7 , 1 0 DeviceNet comoalible 5. 6, 8. 14 1 6 Dreset tvDe 5.7.10. 16 0 1s hiqh speed response Digital input type Reverse output 1 2 . 1 3 CE marked lar manilold mountinq 3. 15 CE rnarked 0.1s high speed

Speed Controller with Uni One-touch Fitting Series AS Elbow Type/Universal Type 1

(Refer to pages 15-6-3 to 15-6-5 for details.) Note 2) Brass parts are all electroless nickel plated.

AS-FPQ/AS-FPG

1 Clean Speed Controller with One-touch Fitting Series AS-FPQ/AS-FPG Series AS-FPG Series AS-FPQ AS ASP ASN AQ ASV AK ASS Speed controllers for clean room use ASR ASF AS-FPQ: Brass (electroless nickel plated) and AS-FPG: Stainless steel 304 are now available as a series. 15-17-1 2 Low particulate generating speed controllers designed for use in clean rooms Body Polypropylene resin Release

[Option] 3 Port Solenoid Valve Direct Operated Poppet Type VT317 Series Rubber Seal

Note) Tighten within the tightening torque of 0.5 Nm 15%. Note: a It is possible to wire even in the state of bare wire.

Aluminum High Vacuum Angle Valve

Inrush current flow time (Reference) 200V Current XLA 100V XL XL XLQ XM XY 0 5 15 10 20 25 30 Time (second) DXSA XVD XGT CYV 459 A XL Series Glossary 1 Shaft Sealing Method 2 Seal Materials Bellows Bellows offer cleaner sealing with reduced particle generation and less outgassing. The two major bellow types are: Formedbellows and Welded-bellows.

AFF

Option J: With drain guide Bracket (Option) 1/4B female thread T: With element service indicator Maintenance space HA Drain AT ID AMG AFF Element service indicator Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G H 10 10 10 10 10 10 10 10 10 I 56 66 66 80 80 90 90 100 150 J 15 20 17 22 19 25 21 30 40 K 5 8 8 8 8 10 10 10 15 L 9 12 12 14 14 14 14 16 20 M 5.5

Air Preparation Equipment Degrees of quality Max. particle diameter ( µ m) Min. pressure dew point ( ° C) Max. oil density (mg/m 3 ) International Standard ISO 8573-1: 1991 Degrees of Quality Japanese Industrial Standard JIS B 8392-1: 2000 Degrees of Qual

Selection of air quality by purpose For these cases, degree of quality is 15 4 +3 5 specified as 1, 4, and 2 respectively. 40 5 +7 25 Refer to Guide (1). Refer to Guide (2). Refer to Guide (3). Refer to below piping system chart. Refer to Guide (4) page 14-14-4.

RSH

Series RSH 20, 32, 50, 63, 80 How to Order RSH 20 15 D L Z73 Heavy Duty Stopper Cylinder Bore size Number of auto switches 20mm 32mm 50mm 63mm 80mm 20 32 50 63 80 S 2 1 Auto switch Stroke Without auto switch (Cylinder built-in magnet) 15mm 20mm 30mm 40mm 20 32 50/63 80 * Refer to the table below for auto switch model nos.

06-reas-e

Seal kit includes a grease pack (10: 5 g and 10 g, 15: 10 g). Order with the following part number when only the grease pack is needed. For 10 grease pack part no.: GR-F-005 (5 g) for external sliding part GR-S-010 (10 g) for tube interior For 15 grease pack part no.: GR-S-010 (10 g) Piston seal NBR Scraper NBR Cushion seal NBR Seal kit includes @6 to #2.

Cylinder Speed Checker

Description Note 1 +15 V 1 2 1 2 5 2 Output signal 1 D-F8N 3 4 3 4 Display part 3 GND Socket connector A-coded (Normal key) Plug connector A-coded (Normal key) 4 Output signal 2 D-F8N DD1677

Pulse Valve

[The pressure differential of the solenoid valve portion must not exceed the maximum operating pressure differential.] 15 JSXFA Series Specific Product Precautions 1 Be sure to read this before handling the products. Refer to the back cover for safety instructions.

Dedicated Controller

Description RUN 15 +24V Common The positive common of the input terminal. 1, 14 HOLD 3 The terminal that performs setup operations (actuator starting preparation). 2 Starting preparation STOP 16 SET-UP ALARM RESET 4 The terminal that performs program start. RUN 15 Starting PRO-NO BIT 1 17 17 Pro-no. bit1 The terminal that designates the program to be executed.

Hydraulic Filters

M10 x 30 86 340 4.6 49.1 61.1 152 110 214 268.5 54.5 100 15 M12 x 35 102 370 6.1 77.1 9.5 176 125 220 290.5 70.5 120 15 M12 x 35 130 410 90.0 8.0 102.6 14.0 224 155 280 364.5 84.5 150 15 M16 x 40 166 490 115.4 13.5 501

Peltier-type Chiller Thermo-con/ Compact Type

Water bath Q = T x V x x C h x 60 x 1000 10 x 2 x 1 x 103 x 4.2 x 103 20C V = 15 x 60 x 1000 After 15 min, = 93.3 W cool 30C down to 20C.

Series 12-REA Sine rodless cylinder

10 I 46 36 30 NB 19 17 17 T S 11 9 8 G ZZ 10 8 8 R 60 50 50 W 16 16 13 F 40 40 30 X 12-REA40 12-REA32 12-REA25 Rc, NPT, G 1/8 Rc, NPT, G 1/8 Rc, NPT, G 1/4 70 60 46 M26 x 1.5 M26 x 1.5 M32 x 2.0 21 17 15 50 40 34 19 15 13 150 124 111 182 156 137 92 80 70 M5 x 0.8 x 8 M6 x 1.0 x8 M6 x 1.0 x10 12REA 50/63 0 -0.2 L NA 33 2-Rc, NPT, G 1/4 14 14 E(h8) E(h8) X D I 4-TC 14 14 Effective thread depth