Valves are easily replaced without changing existing piping.Direct operated, 3 port solenoid valve for manifold - New VX Series, Max. system pressure (MPa): 2.0, Flow characteristics: 0.08 ~ 0.5 Cv, Voltage: 48, 100, 200, 110, 220, 230, 240VAC; 12, 24VDC, Direct Op 3 Port Solenoid Valve, N.C., 3 PORT SOLENOID VALVE, 470 lb

Valves are easily replaced without changing existing piping.Direct operated, 3 port solenoid valve for manifold - New VX Series, Max. system pressure (MPa): 2.0, Flow characteristics: 0.08 ~ 0.5 Cv, Voltage: 48, 100, 200, 110, 220, 230, 240VAC; 12, 24VDC, Direct Op 3 Port Solenoid Valve, N.O., 3 PORT SOLENOID VALVE, 470 lb

Valves are easily replaced without changing existing piping.Direct operated, 3 port solenoid valve for manifold - New VX Series, Max. system pressure (MPa): 2.0, Flow characteristics: 0.08 ~ 0.5 Cv, Voltage: 48, 100, 200, 110, 220, 230, 240VAC; 12, 24VDC, Direct Op 3 Port Solenoid Valve, N.C., 3 PORT SOLENOID VALVE, 820 lb

Valves are easily replaced without changing existing piping.Direct operated, 3 port solenoid valve for manifold - New VX Series, Max. system pressure (MPa): 2.0, Flow characteristics: 0.08 ~ 0.5 Cv, Voltage: 48, 100, 200, 110, 220, 230, 240VAC; 12, 24VDC, Direct Op 3 Port Solenoid Valve, N.C., 3 PORT SOLENOID VALVE, 870 lb

Valves are easily replaced without changing existing piping.Direct operated, 3 port solenoid valve for manifold - New VX Series, Max. system pressure (MPa): 2.0, Flow characteristics: 0.08 ~ 0.5 Cv, Voltage: 48, 100, 200, 110, 220, 230, 240VAC; 12, 24VDC, Direct Op 3 Port Solenoid Valve, N.O., 3 PORT SOLENOID VALVE, 810 lb

High Vacuum L Type Valve

x 10-11 for the standard material (FKM) at ambient temperatures , excluding gas permeation Flange type KF (NW) KF (NW), K (DN) Main material Body: aluminum alloy, Bellows: SUS316L, Main part: SUS304 and FKM (standard sealant material) Surface treatment for body Outside: hard anodized Inside: basis material Actuation pressure MPa(G) 0.4 to 0.7 Air consumption cm3 Note 2) for 0.5MPa 31 61 220

XL-OMY0001

XLA-16-2 XLA-25-2 XLA-40-2 XLA-50-2 XLA-63-2 XLA-80-2 16 25 40 50 63 80 5605150 -6 Pa(abs) 110 l/s 1 5 14 45 80 160 200 10 FKM1.310 3/s Pam -11 FKM1.310 KFNW KFNW KDN SUS316L,SUS304,FKM MPa(G) 0.40.7 3 2 0.5MPa 31 61 220 390 680 1420 cm M5 Rc1/8 kg 0.28 0.47 1.1 1.7 3.1 5.1 1 21 9 XL-OMY0001 4-2 XLA-25-2 XLA-40-2 XLA-50-2 AC90240V XL1A25-60S-1 XL1A25-60S-1 1 1 H4 AC100V 200

CEx-OMQ0011

DD EE HA KA KB KK 9 45.5 5.5 M5x0.8 9.5 69 30.5 16 M6x1 11 54 6.5 M6x1 12 84 32 15 M8x1.25 14 64 8.5 M8x1.25 12 102 41.5 19 M10x1.5 R S T U V W X Y Z 22 63.5 23.5 22 41 16 9 30 34.5 26 77.5 32.5 27 56 19 10 37 42 37.5 95 50.5 35 68 23 23 45 51 I J K L M N O P Q 76.5 40 46 28 11 14.5 28 15 16 91 46.5 58 32 15 16 30.5 16 21.5 110 55 68 36 16.5 22 37.5 17.5 24.5 A B C D E F G H ML2B25 110 220

MHx-OMM0057

c.p.m. mm(L1-L2) (L1) (L2) g MHL2-10D 60 20 56 76 280 MHL2-10D1 40 78 118 345 10 40 MHL2-10D2 60 96 156 425 MHL2-16D 60 30 68 98 585 MHL2-16D1 60 110 170 795 16 40 MHL2-16D2 80 130 210 935 MHL2-20D 60 40 82 122 1,025 MHL2-20D1 80 142 222 1,495 20 40 MHL2-20D2 100 162 262 1,690 MHL2-25D 60 50 100 150 1,690 MHL2-25D1 100 182 282 2,560 25 40 MHL2-25D2 120 200 320 2,775 MHL2-32D 30 70 150 220

MHS

6 8 8 12 16 20 g 95 150 230 440 620 1,050 1,800 3,200 1) 1625 =20mm 3263 =30mm 80 =50mm 0.5MPa MHSH3 16D MHSH320D MHSH325D MHSH332D MHSH340D MHSH350D MHSH363D MHSH3MHSH380D mm 16 20 25 32 40 50 63 80 MPa 0.20.6 0.10.6 -1060 mm 0.01 c.p.m. 120 60 30 9 21 36 62 97 155 280 400 1 N 15 26 45 77 118 187 329 490 3H10 3H10 4H10 6H10 10H10 12H10 16H10 20H10 mm 4 4 6 8 8 12 16 20 g 90 140 220

LEH_C

/LEHZ 2.1 LEHZ () 2.1.1 LEHZ10 LEHZ16 LEHZ20 LEHZ25 LEHZ32 LEHZ40 /(mm) 4 6 10 14 22 30 (mm) 251/73 249/77 246/53 243/48 242/39 254/43 614 1640 52130 84210 (N) 40100 1) 3) 26 38 1128 /(mm/s) 2)3) 580 /550 5100 /550 5120 /550 + () (mm) 4) 0.02 (mm)5) 0.05 /(mm) 6) 0.5 1.0 / (m/sec 2) 7) 150 / 30 (c.p.m) 60 () 540 (%RH) 90 () 165 220 430 585 1120 1760 (g) 135 190 365 520 20 28

Valves are easily replaced without changing existing piping.Direct operated, 3 port solenoid valve for manifold - New VX Series, Max. system pressure (MPa): 2.0, Flow characteristics: 0.08 ~ 0.5 Cv, Voltage: 48, 100, 200, 110, 220, 230, 240VAC; 12, 24VDC, VALVE, MEDIA, VALVE, VX3 3-WAY MEDIA VALVE, EC, VX3 BODY PT 1/4NPT, 1.40140 lb, Port sizeOrifice diameter (mm?)

Valves are easily replaced without changing existing piping.Direct operated, 3 port solenoid valve for manifold - New VX Series, Max. system pressure (MPa): 2.0, Flow characteristics: 0.08 ~ 0.5 Cv, Voltage: 48, 100, 200, 110, 220, 230, 240VAC; 12, 24VDC, VALVE, MEDIA, VALVE, VX3 3-WAY MEDIA VALVE, EA, VX3 BODY PT 1/4NPT, 1.54367 lb

Valves are easily replaced without changing existing piping.Direct operated, 3 port solenoid valve for manifold - New VX Series, Max. system pressure (MPa): 2.0, Flow characteristics: 0.08 ~ 0.5 Cv, Voltage: 48, 100, 200, 110, 220, 230, 240VAC; 12, 24VDC, VALVE, MEDIA, VALVE, VX3 3-WAY MEDIA VALVE, GA, VX3 BODY PT 3/8NPT, 1.47901 lb, ModelOrifice dia.Port size1.5 mm?2.2 mm?3 mm?

Valves are easily replaced without changing existing piping.Direct operated, 3 port solenoid valve for manifold - New VX Series, Max. system pressure (MPa): 2.0, Flow characteristics: 0.08 ~ 0.5 Cv, Voltage: 48, 100, 200, 110, 220, 230, 240VAC; 12, 24VDC, VALVE, MEDIA, VALVE, VX3 3-WAY MEDIA VALVE, EA, VX3 BODY PT 1/4NPT, .00000 lb, ModelOrifice dia.Port size1.5 mm?2.2 mm?3 mm?

Valves are easily replaced without changing existing piping.Direct operated, 3 port solenoid valve for manifold - New VX Series, Max. system pressure (MPa): 2.0, Flow characteristics: 0.08 ~ 0.5 Cv, Voltage: 48, 100, 200, 110, 220, 230, 240VAC; 12, 24VDC, VALVE, MEDIA, VALVE, VX3 3-WAY MEDIA VALVE, EC, VX3 BODY PT 1/4NPT, 1.16844 lb, Port sizeOrifice diameter (mm?)

Valves are easily replaced without changing existing piping.Direct operated, 3 port solenoid valve for manifold - New VX Series, Max. system pressure (MPa): 2.0, Flow characteristics: 0.08 ~ 0.5 Cv, Voltage: 48, 100, 200, 110, 220, 230, 240VAC; 12, 24VDC, VALVE, MEDIA, VALVE, VX3 3-WAY MEDIA VALVE, HC, VX3 BODY PT 3/8, 1.56528 lb, Port sizeOrifice diameter (mm?)

Valves are easily replaced without changing existing piping.Direct operated, 3 port solenoid valve for manifold - New VX Series, Max. system pressure (MPa): 2.0, Flow characteristics: 0.08 ~ 0.5 Cv, Voltage: 48, 100, 200, 110, 220, 230, 240VAC; 12, 24VDC, VALVE, MEDIA, VALVE, VX3 3-WAY MEDIA VALVE, EC, VX3 BODY PT 1/4NPT, 1.86340 lb, Port sizeOrifice diameter (mm?)

Valves are easily replaced without changing existing piping.Direct operated, 3 port solenoid valve for manifold - New VX Series, Max. system pressure (MPa): 2.0, Flow characteristics: 0.08 ~ 0.5 Cv, Voltage: 48, 100, 200, 110, 220, 230, 240VAC; 12, 24VDC, VALVE, MEDIA, VALVE, VX3 3-WAY MEDIA VALVE, EC, VX3 BODY PT 1/4NPT, 1.87392 lb, Port sizeOrifice diameter (mm?)

Valves are easily replaced without changing existing piping.Direct operated, 3 port solenoid valve for manifold - New VX Series, Max. system pressure (MPa): 2.0, Flow characteristics: 0.08 ~ 0.5 Cv, Voltage: 48, 100, 200, 110, 220, 230, 240VAC; 12, 24VDC, VALVE, MEDIA, VALVE, VX3 3-WAY MEDIA VALVE, EA, VX3 BODY PT 1/4NPT, 2.43282 lb, ModelOrifice dia.Port size1.5 mm?2.2 mm?3 mm?