Slit Valve

CAUTION 184 49 Valve seat side (XGT222, 223, and 224 common) Cassette type Full MESK/XGT224 305 50 85 36 (mm) A B C D Valve type Model XGT221-32 XGT221-46236 XGT222-32 XGT222-46236 XGT223-46236 XGT224-46236 222 32 235 45 Non-cassette type 236 46 249 59 222 32 Cassette type Standard 236 46 236 46 Cassette type Half MESK !

Stainless Steel Heat

6 Series IDUS/IDFS Option Specification Refer to pages 1 and 5 for "How to Order" of options.

KS/KX

28 1 8 1 4 20 26 28 34 43 69 77 95 89 106 14 8.6 8.6 4 28 29 32 33 38 39 29 32 33 34 1 8 18 15.2 27 18.5 6 1 4 3 8 1 4 3 8 1 2 3 8 1 2 17 21.6 14.9 8 Applicable tubing 42 10 18.5 32 23.5 21 22 30.5 25.0 7 43 44 45 Connection thread 42 40 43 24 20.9 26 35 22 8 35.1 35.1 12 Reference dimensions after R thread installation.

EX510-GPR1.eng

CLR OFF Address 64 (No.1) 32 (No.2) 16 (No.3) 8 (No.4) 4 (No.5) 2 (No.6) 1 (No.7) HOLD Output is held when a communication error occurs. ON 0 OFF OFF OFF OFF OFF OFF OFF 1 OFF OFF OFF OFF OFF OFF ON : HOLD/CLR setting is made available per one point by parameter setting.

SI unit for CC-Link

When remote I/O station is assigned to buffer area, the area of 32 inputs/ 32 outputs will be used.

AS-FPQ/AS-FPG

(mm) Applicable cylinder bore size (mm) 4 6 8 10 12 AS-FPG AS-FPQ Clean performance Resin: PP Metal: Brass (electroless nickel plated) Resin: PP Metal: Stainless steel 304 M5 x 0.8 6, 10, 16, 20 AS121FP-M5 R 1/8 20, 25, 32 AS221FP-01 R 1/4 20, 25, 32, 40 AS221FP-02 R 3/8 40, 50, 63 AS321FP-03 10-AS-F 10-AS-FG R 1/2 63, 80, 100 AS421FP-04 Resin: PBT, POM Metal: Brass (electroless nickel plated

Large Size 3 Port Solenoid Valve VP3145/3165/3185 Series Rubber Seal

Conduit terminal: VP3145-T A B DIN terminal: VP3145-D A B [105] 76 Light (For TL, TZ) 30 31.3 Max.12 G1/2 Applicable cable 6 to 12 Light position (For DL, DZ) G1/2 [196] NO NO 190.6 194 181.5 166 PE PE 26 26 83 83 32 32 36 36 80 80 [ ]: With indicator light (TL, TZ) 1310 Large Size 3 Port Solenoid Valve VP3165 Series Dimensions: VP3165 Grommet: VP3165-G A B 113 87.4 54 30 71 101 G1/2 1

AC Servo Motor Driver (MECHATROLINK-II type)

Trial Operation (SigmaWin+) . 29 5.1 Communications setting for PC . 29 5.2 JOG Operation . 32 5.3 Program JOG Operation . 34 6. The recommended the parameter for each actuator . 37 6.1 The recommended value of the parameter [LEF] . 37 6.2 The recommended value of the parameter [LEJ] . 38 6.3 The recommended value of the parameter [LEY] . 39 7.

Series KDM Rectangular Multi-connector

Other tube sizes Tube size Number of (O.D.) connection Part No. 10 6 IN-254-52 12 6 IN-254-53 68

Series MXP/MXPJ6 11- ø6, ø10, ø12, ø16 22- Air Slide Table

+0.030 0 10 9.5 4 Section AA B D Mounting base side +0.030 0 Q QL depth 1.5 3 11-/22-MXP10-20 Without magnet and switch rail Max. 2.5 2 x M2 x 0.4 depth 3 8 2.5 4.7 15 15 L 6 x M3 x 0.5 depth 4 2 x M3 x 0.5 depth 3.5 (mm) G H J K L M N Q QL S V W Z Model 11-/22-MXP10-10 8 32 52.4 20 20 21 6.5 32 14 10 44 40 60 11-/22-MXP10-20 20 50 82.4 36 36 39 7.5 50 20 20 74 65 90 835 MXP/MXPJ6 1122Air

SI unit for CC-Link

When remote I/O station is assigned to buffer area, the area of 32 inputs/ 32 outputs will be used.

SI unit for EtherNet/IP TM

Designation Description 1 Tx+ Transmit Data + 2 TxTransmit Data 3 Rx+ Receive Data + 4 5 6 RxReceive Data 7 8 BUS IN: RJ45 8-pin socket No. Designation Description 1 Tx+ Transmit Data + 2 TxTransmit Data 3 Rx+ Receive Data + 4 5 6 RxReceive Data 7 8 Use only plugs conforming to FCC standards. Shielded Ethernet cable is recommended.

ARJ310

6 t Zinc chromated w Electroless nickel plated Black zinc chromated Accessory Accessory IN 2 Series ARJ310 Dimensions ARJ310-01 ARJ310F-01 Approx. 31 Approx. 56 Approx. 56 Approx. 35 32 22 M12 x 1 Panel fitting dimensions 12.5/Panel thickness: 4 or less Approx. 27 19 2 2 -5.5 Approx. 57.2 8.5 Approx. 82.5 15 Applicable tube O.D. 4, 6, 5/32, 1/4 Port size Rc, NPT 1/8 2 2 1 1 Pressure gauge

06-cbg1-e

Contents Bore size (mm) Series CBG1N20-PS 20 25 32 40 CBG1N20-PS CBG1N25-PS CBG1N32-PS CBG1N40-PS Above no. @5, @6, @7, @8. And a grease pack. CBG1N Rubber bumper type CBG1N25-PS Locking at head or rod end CBG1N32-PS CBG1A20-PS 20 25 32 40 CBG1A20-PS CBG1A25-PS CBG1A32-PS CBG1A40-PS Above no. @5, @6, @7, @8, $0, $1. And a grease pack.

EX500-Sx03_eng

Refer to the drawing below. : Factory default setting is 32. Source/PNP (negative common) Output type 32 outputs (selected from 16 or 32 outputs) Number of outputs Output No. assignment The Output number is assigned by the SI unit.

Rotary Clamp Cylinder: Standard ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63 Series MK

MK-A012 MK-A016 Bore size (mm) 12 16 20 25 32 40 50 63 12 70 87 16 100 123 20 250 290 25 280 320 32 500 525 40 595 640 50 1100 1350 63 1520 1805 Clamp bolt, Hexagon socket head cap screw, Hexagon nut, Spring washer MK-A020 MK-A032 Additional Weight MK-A050 Unit: g 63 17 46 25 350 531 50 7 46 13 350 345 32 7 21 5 200 166 40 6 21 7 200 198 25 7 10 3 100 153 12 13 16 32 20 6 10 2 100

VCW

Valve model VCW2 VCW20-12-01A 1/8, 1/4 34 40 25 30 12.8 12.8 5 4.5 6 13 VCW30-12-02A 1/4, 3/8 42 52 30 40 19 19 6 5.5 7 19 VCW3 VCW30-12-04A Note 1) 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-02A 1/4, 3/8 42 52 30 40 23 23 6 5.5 7 19 VCW4 VCW30-12-04A Note 1) 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-06A 3/4 56 65 44 53 28.2 28.2 6 5.5 7 26 2 mounting screws (for mounting bracket) are included

LV50-OMQ0002

Bracket thickness is approx. 1.6mm Model Piping port size A B C D E F G H I J K L LFE13 3/8 90 73 40 23.5 56 83 89 24 6 1.6 96 87 LFE14 1/2 104 73 40 23.5 56 83 89 28 6 1.6 96 87 LFE26 3/4 105 78 50 29 67 94 100 35 6 1.6 115 106 LFE38 1 120 90 55 32 73 100 106 41 6 1.6 115 106 Model M N O P Q R S T U Bracket weight LFE13 48 39 4.6 12 11.5 52 28 2.5 depth 8.5 2 Approx. 45g LFE14 48 39 4.6

LFE-OMY0008

([n1L]) [P1H] or [n1H] ([n1H]) (33 ) 30 No.LFE*-OMY0008 c. ()/() ( [n1AH]) ( [n1dH]) () 31 No.LFE*-OMY0008 ( ) 3 6 3 1 3 6 6 1 1 1 32 No.LFE*-OMY0008 4. 4. 4. 4. (OUT1)( ON ON ON ON OFF OFF OFF OFF ON ON ON ON OFF OFF OFF OFF 5. 5. 5. 5.

JXCx-OMU0024

Start-up . 6 3.1 Preparation . 6 (1) Software installation . 6 (2) Installation and wiring . 6 3.2. Start-up . 6 (1) Supply of power . 6 (2) Start-up of the Controller setting software . 6 (3) Time and date setting . 8 (4) Alarm and error check . 10 4.