Rotary Actuator/Vane Type

Current: 4 directions 8 directions Starting point Rotation range CRB2 CRB2 Starting point Rotation range Port surface Starting point CRB1 Port surface Rotation range MSU CRJ 30 30 Port surface CRA1 Port surface Port surface 60 60 Rotation range Starting point CRQ2 MSQ Starting point MSZ Starting point (Single flat) 60 60 CRQ2X MSQX Port surface Rotation range MRQ 30 30 Port surface Rotation

Process Valve

Hz 200 VAC 50/60 Hz 100 VAC 50/60 Hz Orifice dia.

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

Urethane rubber 0 to 60 60 Fluoro rubber 0 to 250 50 EPR 20 to 150 The above table covers only general characteristics of subject rubber materials.

Compact Cylinder

10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B40-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 55 60 65 70 75 80 85 90 95 100 110 130 150 55 60 65 70 75 80 85 90 95 100 110 130 150 M6 x 55 l x 60 l x 65 l x 70 l x 75 l x 80 l x 85 l x 90 l x 95 l x 100 l x 110 l x 130 l x 150 l M5 x 55 l x 60 l x 65 l x 70 l x 75 l x 80 l x 85 l x 90 l x 95 l x 100 l x 110

Secondary Batteries

Valve Treatment Material Regulator AR25K to 60K Stem Treatment AR25 to 40: POM AR50, 60: ADC AR25 to 40: POM AR50, 60: ADC ADC Material Bonnet AR25 to 40: AR50, 60: Chromate, black painted AR25 to 40: AR50, 60: Chromate, black painted Chromate, black painted Treatment Steel belt Steel belt Material Steel belt Bracket Electro-deposition painted (Black) Electro-deposition painted (Black)

SL5200

0.41 1.18 (30.0) Delivery pressure (MPa) Delivery pressure (psig) 50 0.34 Max. 3.95 (100.3) 40 0.28 30 0.21 0.44 (11.2) 1.42 (36.1) 20 0.14 10 0.07 0 0.00 1.25 (31.8) A 0 20 40 60 80 100 120 140 Flow rate (slpm, N2) SL5210 100 psig (0.69 MPa) 30 psig (0.21 MPa) Inlet pressure: 60 psig (0.41 MPa) 2 x 10-32 UNF depth 0.25 (6.3) (Mounting hole) 0.28 40 0.24 35 4 Delivery pressure (MPa) Delivery

CG5-S

, 75, 100, 125, 150 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 Mounting Basic type Axial foot type Front flange type Double clevis type B L F D CJ5 L 16 S R 60 Without Auto Switch CDJ5 L 16 S R 60 H7BAL With Auto Switch With auto switch (built-in magnet) Number of auto switches 2 pcs. 1 pc.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

Coil voltage 1 2 3 4 5 6 9 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Other Valve model Pilot valve model Note) VQZ115-L VQ110-M Note) For the special voltages, please consult with SMC. VQZ115-M VQ110-L 4-14-41

LEC-OM02704CN

-21 TD-112TD-124 YF-1E-4 YET-60-1 (1)f R60-8 YPT-60-21 TD-113TD-125 YF-1E-4 YET-60-1 g FVD2-4 YNT-1614 h FVD2-M3 j FVD5.5-6 YNT-1210S k FVD5.5-8 l FVD8-6 DH-111DH121 m FVD14-8 DH-112DH122 YF-1E-4 YNE-38 n FVD22-8 DH-113DH123 (1)p R38-8 YPT-60-21 TD-112TD-124 YF-1E-4 YET-60-1 q FVD2-6 YNT-1614 1. 2. 13 16 13 (2) 13.3 1 (2) (1) [mm] [m] [/mm] [/km] d[mm] (3) VSVP 7/0.26( AWG#22)-3P-16823

70pvvna

100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 24 VDC 12 VDC 240 VAC 50/60 Hz Other Nil A B Non-locking push type Non-locking extended type Locking slotted type 1 2 3 4 5 6 7 9 1 2 3 4 5 6 7 9 Electrical entry Grommet Conduit Conduit terminal DIN terminal DIN terminal with indicator light Option G C T Note) D DL Option Option Option Note) When the electrical entry

VNC

Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 24 VDC 12 VDC 240 VAC 50/60 Hz Other VC 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 24 VDC 12 VDC 240 VAC 50/60 Hz Other Nil S Z None With surge voltage suppressor With light/surge voltage suppressor With indicator light Option VDW L Light/Surge voltage suppressor Nil Z VQ Except 12 VDC, 240 VAC, other voltages

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

50 100V AC Hz 110V AC Hz 200V AC Hz 220V AC Hz Closed center Exhaust center Pressure center 60 50 60 M5 X 0.8: 1.8(0.1) 50 60 (1) AC Push-turnlocking slotted style With light and surge voltage suppressor SYJ5000 Rc(PT)1/8: 4.5(0.25) SYJ7000 Rc(PT)1/8, 1/4: 12.6(0.7) Note 1) All AC voltage models have built-in surge voltage suppressor. 1.2-2 Series SYJ3000/5000/7000 Manifold Variations Manifold

Air-hydro Unit

CCVS10-U1 Solenoid valve rated voltage 0 2 1 2 3 4 5 6 7 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz 110 VAC, 50/60 Hz 220 VAC, 50/60 Hz 24 VDC 12 VDC 240 VAC, 50/60 Hz L 1 0, 1, 2, 3 2 0, 1, 2, 3 Semi-standard Specifications Combined valve Control valve Stop valve, Skip valve Specifications Throttle valve Flow control valve Small flow Large flow Small flow Large flow Timid flow Small

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

S + Stroke Relief port M5 x 0.8 1.5 (20, 25) FZ Z N N F H 20 to 32 Standard port ZZ + Stroke 4 x FD F Y 45 Relief port (32, 40) 40 (mm) K I HC H FY D B2 A 66 52 40 40 34 B 22 17 17 13 B1 10.5 7.5 7.5 7.5 DL Bore size FT F FD FX AL FZ G H1 H2 E C2 MM 0 41 32 32 26 20-0.033 7 7 7 4 4 4 60 60 60 16 13 13 13 40 32 25 20 24 22 22 18 21 19.5 19.5 15.5 5 24 46.5 37.5 33.5 28 47.3 37 37 30 36 50

SMC

70 75 80 F 50 50 50 60 35 60 70 75 80 GA 22 22 22 22 55 61 102 154 190 13-/22-MXS25-10 13-/22-MXS25-20 13-/22-MXS25-30 13-/22-MXS25-40 13-/22-MXS25-50 13-/22-MXS25-75 13-/22-MXS25-100 13-/22-MXS25-125 13-/22-MXS25-150 149 MXS Air slide table 1322Dimensions / MXS25 1322Axial piping (25) MXS25-P 132280.7 Maximum 11.5 35.5 Operating port 2-Rc, G, NPT1/8 40 18 20 Other dimensions are the same

High Pressure Coolant Valve

./7.0 MPa Electrical entry/With light/surge voltage suppressor D DIN terminal Seal material DZ DIN terminal with light/surge voltage suppressor A B NBR seals FKM seals Rated voltage Valve size Port size 3 2 1 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 10A 15A 20A 25A 1 2 3 4 3 8 1 2 3 4 4 1 7 6 5 24 VDC 12 VDC 240 VAC 50/60 Hz Semi-standard For other rated voltages

MNB

Bore size (mm) A B A + B + 90 B DA DB DL DU DC DX DE DO DR DT DS DH Z DDH10(Hole) 32 40 50 63 80 100 6.6 54 42 32 22 44 14 62 9 15 7 33 224 10 +0.058 0 10 32, 40 160 25 45 MB-B03 6.6 63 42 32 22 44 14 62 9 15 7 33 235 10 +0.058 0 10 9 75 53 43 30 60 20 81 10.5 18 8 45 271 11.5 +0.070 0 14 50, 63 190 40 60 MB-B05 9 90 53 43 30 60 20 81 10.5 18 8 45 285 +0.070 0 11.5 14 +0.084 0 11 102 73 64

Fluoropolymer Tubing Variations

Recommended radius Tube close bend radius Min. bending radius (mm) Note 4) 15 10 20 15 35 20 60 40 95 60 100 65 130 110 Fixed end Air, Inert gas: -20 to 200C Water: 0 to 100C (No freezing) Operating temperature Material FEP (Fluorinated Ethylene Propylene Resin) Note 1) When using a fluid in liquid form, the surge pressure must not exceed the maximum operating pressure.

LEY-OM007

40% 60% 40 No. mm/s mm % % mm 0 ABS 250 40.00 60 40 20.00 No.1 No. mm/s mm % % mm 0 ABS 250 40.00 60 40 20.00 1 ABS 250 0.00 0 0 0.50 0mm 20mm 20 No. mm/s mm % % mm 0 ABS 250 40.00 60 40 20.00 1 ABS 250 20.00 0 0 0.50 (6) 4.3 []P21~P29 ACT Contoroller Help/Easy 1.3. 1 -6- (2) JOG SET MENU TEST DATA MONITOR JOG SET JOG JOG ALARM JOG SETTING ON SET SET SET MENU

MNB

Bore size (mm) A B A + B + 90 B DA DB DL DU DC DX DE DO DR DT DS DH Z DDH10(Hole) 32 40 50 63 80 100 6.6 54 42 32 22 44 14 62 9 15 7 33 224 10 +0.058 0 10 32, 40 25 45 160 MB-B03 6.6 63 42 32 22 44 14 62 9 15 7 33 235 10 +0.058 0 10 9 75 53 43 30 60 20 81 10.5 18 8 45 271 11.5 +0.070 0 14 50, 63 40 60 190 MB-B05 9 90 53 43 30 60 20 81 10.5 18 8 45 285 +0.070 0 11.5 14 +0.084 0 11 102 73 64