q"s

*sure dlsplay Accuracy J3% (lull span) Minimum unit [ i l P a : 0 . 0 1 . k a f / c m ' : 0 . 0 1 , b a r : 0 . 0 1 .

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

8 4.5 2 7 4.5 12 9.5 0.5 0 4 1.5 3.5 1 6.5 4 0.5 10.5 0 8 4.5 2 7 4.5 12 9.5 0.5 0 4 1.5 3.5 1 7 4.5 1 11 0 8.5 5 2.5 7.5 5 12.5 10 1 0 4.5 2 4 1.5 7 4.5 1 11 0 8.5 5 2.5 7.5 5 12.5 10 1 0 4.5 2 4 1.5 10 8.5 4 14 2.5 12.5 8 6.5 10.5 9 15.5 14 4 2.5 7.5 6 7 5.5 10 8.5 4 14 2.5 12.5 8 6.5 10.5 9 15.5 14 4 2.5 7.5 6 7 5.5 12 12 6 16 6 16 10 10 12.5 12.5 17.5 17.5 6 6 9.5 9.5 9 9 Note) Adjust

New

0.21 0 to 430 0 to 3 430 103 to 0.1 to 1/8 3.2 1.12 0.51 0.35 0 to 180 0 to 1.2 1/8, 1/4, 2 VXN24 Atmospheric 430 Atmospheric 3/8 460 5/32 4 1.56 0.57 0.52 0 to 140 0 to 1 pressure pressure 7/32 5.6 2.29 0.55 0.73 0 to 50 0 to 0.35 1/8 3.2 1.19 0.47 0.35 0 to 430 0 to 3 560 1/8, 1/4, 3 VXN34 570 590 5/32 4 1.71 0.50 0.52 0 to 300 0 to 2.1 3/8 7/32 5.6 3.14 0.47 0.88 0 to 130 0 to 0.9 Note

CNS

0 %3!9 %6@0 CL CL1 MLGC CNG MNB Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com %2@9#5#0 !3$2$1@6#6%0 @4@5!4$8#9#1#7$0e !2 %5r CNA CNS Description Material Note Component Parts No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

MLU

MU-D02 MU-D03 MU-D04 MU-D05 +0.058 0 +0.058 0 +0.058 0 +0.058 0 +0.058 0 +0.058 0 +0.058 0 +0.070 0 8 10 10 14 8 10 10 14 Applicable pin no. CD-MU02 CD-MU03 CD-MU04 CD-MU05 DZ 8 10 10 14 CZ 8 10 10 14 DY 9 11 13 16 CX 9 11 13 16 DX 18 22 26 32 CT 9.5 11 14 17 DT 9.5 11 14 17 CR 5.3 6.4 8.4 10.5 DR 5.3 6.4 8.4 10.5 CL 26 42 54 64 DL 26 42 54 64 Part no.

Ionizer Nozzle type IZN10 Series IZS

Tube I.D.: 5 mm 5 5 4 4 Discharge time [s] Discharge time [s] 3 3 0.05 MPa 0.05 MPa 2 2 0.1 MPa 0.3 MPa 1 1 0.1 MPa 0 0 0 100 200 300 400 500 0 100 200 300 400 500 Tube length [mm] Tube length [mm] Maximum operating pressure is 0.1 MPa. Note 1) Maximum operating pressure is 0.3 MPa. Note 1) Note 1) Refer to Cautions when using the IZN10-11(female threads for piping) on page 448.

LECP6_C

ABS 100 20.00 1000 1000 0 0 0 100 18.00 22.50 0.5 1 ABS 50 10.00 1000 1000 70 60 5 100 6.0 12.0 1.5 63 ABS 20 5.00 500 500 0 0 0 100 3.0 8.0 1.2 28 - TB No.

MHL2

0.2MPa 40 40 0.2MPa 0.2MPa 0.2MPa 20 20 40 80 120 160 200 40 80 120 160 20 40 60 80 100 120 140 0 0 0 20 40 60 80 100 120 0 Holding point R (mm) Holding point R (mm) Holding point R (mm) Holding point R (mm) MHL2-40D MHL2-40D MHL2-32D MHL2-32D 2 1 2 1 500 500 0.6MPa 0.6MPa 300 300 0.6MPa 0.6MPa 400 400 Holding force (N) Holding force (N) Holding force (N) Holding force (N) 250 250 0.5MPa

Air Cylinder Series MB

B TA TL TU TC TX TE TO TT TR TS TH TF TDH10 MB-S03 32 40 50 63 80 100 125 32 40 50 63 80 100 125 +0.070 0 +0.070 0 +0.070 0 +0.084 0 +0.084 0 +0.084 0 +0.084 0 46 52 65 75 95 114 136 45 60 60 70 70 90 105 8.5 10 10 15 15 15 18.5 62 80 92 110 130 158 186 50 63 75 90 110 132 160 74 97 109 130 150 184 212 12 17 17 20 20 26 26 13 17 17 22 22 24 24 10 12 12 14 14 17 25 35 45 45 60 60 75 85 89

5 Port Solenoid Valve, Series VQC

D-side How to order applicable valves VQC 4 0 5 E B 0 Y 1 Series VQC4000 F E D A C B Stations are numbered in ascending order from the D-side.

EX180-SMJ3_5_eng

Element Description 40 (No.1) 20 (No.2) 10 (No.3) 8 (No.4) 4 (No.5) 2 (No.6) 1 (No.7) Fieldbus interface connector (BUS) DANGER indicates a hazard with a high level of risk which, if not avoided, will result in death or serious injury. 0 0 0 0 0 0 1 1 The connector for CC-Link ( ) that is used to connect to the CC-Link bus line. 7 1 Danger: 2 0 0 0 0 0 1 0 Socket for the power supply (PWR

Rotary Table/

0 y !5 !4 @2 !3 w @4 @3 !6 !7 !8 !1 @1 !2 q @0 u !

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

0 0 0 0 F = mg 0.2 1 0.8 0.6 0.4 0.4 0.6 0 0.2 0.8 1 Mass m Operating pressure (MPa) Operating pressure (MPa) Operating pressure (MPa) Static torque calculation Movement Load Tf = F x l (Nm) Allowable Load g = 9.8 m/s2 l Lever Do not allow the load and moment applied to the table to exceed the allowable values shown in the table below.

RHC

9, @0, @2, @3, @4, @5 NBR 32 RHC32-PS @4 O-ring NBR 40 RHC40-PS @5 O-ring Stainless steel for 20, 25 Carbon steel for 32, 40 10-6-10 10 High Power Cylinder Series RHC Construction: 50 to 100 u q !2 i e !0 o w !6 !5 !4 !3 y r t !

180

6 w @0 !7 t !5 r o !8 e !6 w @0 !7 t !5 !0 u !2 i q !1 !4 y !9 !0 u !2 i q !1 !4 y !9 !0 u !3 !2 i q !1 !4 y !9 Open condition Component Parts Note No.

Vane Type Rotary Actuator Series CRB1 New 63mm Bore Size

o n ti ti e g a n o a r ti a a e t n 1 t t o o g o 0 1 r e Key r r 0 9 y 2 y y 0 e 8 e e +4 0 K 0 K K +4 0 +4 0 +4 0 0 Key Key 0 (40) 1 Key e g n a r n o ti a t o r y (85) e (40) K (40) A port B port A port B port A port B port A port B port 4 Series CRB1 With Auto Switches Applicable auto switches Auto switch model Electrical entry Indicator light (lights when ON) Yes D-R73 Grommet

Compact

5 10 15 0.00 0 5 10 15 0.00 0 5 10 15 Load [N] Load [N] Load [N] MXZ16 MXZ16 MXZ16 0.15 0.15 0.15 Table displacement [mm] Table displacement [mm] Table displacement [mm] ST 25, 30 ST 25, 30 ST 25, 30 ST 15, 20 0.10 0.10 0.10 ST 15, 20 ST 15, 20 ST 5, 10 0.05 0.05 0.05 ST 5, 10 ST 5, 10 0.00 0 5 10 15 20 25 0.00 0 5 10 15 20 25 0.00 0 5 10 15 20 25 Load [N] Load [N] Load [N] MXZ20 MXZ20 MXZ20

BP1000

to 200 psig 0 to 400 psig 0 to 1000 psig 0 to 3000 psig 0 to 4000 psig -0.1 to 0.1 MPa -0.1 to 0.2 MPa -0.1 to 0.4 MPa -0.1 to 0.7 MPa -0.1 to 1.1 MPa -0.1 to 1.4 MPa 0 to 1.5 MPa 0 to 3 MPa 0 to 7 MPa 0 to 21 MPa 0 to 28 MPa 00-83000102 00-83000184 00-83000181 00-83000182 00-83000196 00-83033 00-83000193 00-83000194 00-83000187 00-83000234 00-83000183 00-83000287 00-83000288 00-83000289

SMC Pneumatic Clean Series

23> 0 0 10 0 0 0 M5 x 0.8 depth 7.5 M5 x 0.8 depth 8 M14 x 1.5 M6 x 1 depth 12 12 12 1/4 1/4 3/8 1/2 58 58 27 27 32 41 14<12> 14<12> 10 10 10 10 23 20 20 20 11 11 58 72 20<17> 20<17> 16 16 71 71 13 16 89 110 7 7 10 10 55 69 80 100 10 10 10 10 32 38 50 60 150 150 182 182 18 18 22 26 90 90 108 108 20 20 25 30 30 32 40 50 2 2 3 3 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 M8 x 1.25 depth 16 Up

air-filter-e

A B How to Order Standard Elements B 200 E N 002 Model Determination Element symbol Symbol Element seal material/Operating temperature range Element seal material Non-asbestos Fluororesin Operating temperature range(C) 0 to150 0 to120 A Note) T N V 4 A NBR FKM 0 to 80 Symbol Element material 0 to 120 Industrial Filters Replacement Procedure Actuators Modular F.R.L.