3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

rail mounted style [-D].

Rotary Cylinder Series MRQ Size: 32, 40 1

(mm) (mm) Stroke 5 10 15 20 25 30 40 50 75 100 Y 12.5 15 15 20 20 15 17.5 17.5 25 30 Q 20 20 20 20 30 E 68 68 70.5 68 70.5 68 70.5 75.5 80.5 83 11-10-15 16 Refer to page 11-11-1 concerning further information on specifications of the auto switch single body.

MRQ

, A80, D-A7lH, A80H D-A73C, A80C 54 12 Reed switch D-A79W D-J79, J79W 53 49 11 11 12 2 wire 3 wire 56 Solid state switch D-F7 4 wire 56 14 Write "L" at the end of the part number for 3 meters of lead wire.

MHK2

MHK2 Size: 12, 16, 20, 25 How to Order MHK 2 20 Standard type M9N S D 1 F MHKL 2 20 S D 1 F M9N Long stroke type Number of auto switches Number of fingers Nil S 2 pcs. 1 pc.

MHK2

MHK2 Size: 12, 16, 20, 25 How to Order MHK 2 20 Standard type M9N S D 1 F MHKL 2 20 S D 1 F M9N Long stroke type Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Number of auto switches Number of fingers Nil S 2 pcs. 1 pc.

JA/JAH/JB/JS

Thread nominal size 30 Description H B C D d JS10 nut M4 x 0.7 3.2 7 8.1 6.8 JS16 nut M5 x 0.8 4 8 9.2 7.8 JS20 nut M8 x 1.25 5 13 15 12.5 D C JS32 nut M10 x 1.25 6 17 19.6 16.5 JS40 nut M14 x 1.5 8 22 25.4 21 H B JS63 nut M18 x 1.5 11 27 31.2 26 10-19-14

JA/JAH/JB/JS

Up to 3.5 MPa JA20-8-100 JA25-10-150 JA32-10-100 JA40-12-125 JA40-12-150 JA40-12-175 JA50-16-150 JA63-16-200 JA80-20-250 JA100-24-300 JA100-27-150 JA125-27-200 JA160-33-200 20 25 32 30, 40 40 30, 40 50 50, 63 80 100 100 125 160 8 10 10 12 12 12 16 16 20 24 27 27 33 44 49.5 49.5 60 60 60 71.5 71.5 90.5 110 110 123 165 17.5 19.5 19.5 20 20 20 22 22 27 32 35 34 38 30.5 34 34 38 38 38 44.5 44.5

10

D-G

Angular Air Gripper Series MHC2/MHCA2/MHCM2

Auto Switch Internal Circuits Auto Switch Weights Unit: g D-F9N, F9NV D-F9N(V) D-F9P(V) D-F9B(V) Auto switch part no.

JXCx-OMU0004

RESET B 8.3 P.41 RESET C OFF I/O STOP OFF OFF 8.5 ONP.44 RESET C D RESET C RESET D 66 No.JXC-OMU0004-A (M24V) RESET D RESET D 3.4 P.14 (C24V) RESET D RESET D ( E ) 67 No.JXC-OMU0004-A E ON E BK RLS E EEPROM EEPROM E 10 CPU CPU E 68 No.JXC-OMU0004-A 13. / 50mm ( ) 5m 5m 10% 15m 20% 69 No.JXC-OMU0004-A 14. / 14.1.

High Vacuum Angle Valve, XL Series

Auto switch: (for main exhaust valve) Heater: 23 Series XLD, XLDV High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm (b) XLD/Air operated type E C D E Fn (KF flange) Fd (K flange) (a) C E (c) B A G H J K Heater (optional) A (mm) H Fd G 26 41 52 70 83 Fn 40 55 75 87 114 D 1 2 2 3 3 C 48 66 79 100 117 B 123 170 183 217 256 A 50 65 70 88 90 E J 16 20 20 20 20 K 6.5 14 16.5 18.5 26.5 Model XLD

Refrigerated Air Dryer

1.0 20 D B C 1.5 15 10 5 H G 3.0 0 A E F -20 -10 0 10 20 30 40 50 60 0 10 20 30 40 50 60 70 80 Intake air temperature (C) Pressure dew point (C) Example) To obtain the amount of condensed water when the inlet air of a compressor is pressurized to 0.7 MPa then cooled down to 25C.

Booster Regulator/Air Tank

05 10 20 38 Drain valve/ VBAT-V2 22 (Width across flats 19) When the tank OUT port is 3/8, use 3/8 fittings.

Sine Rodless Cylinder Series REBR Direct Mount Type

C D 15 (mm) Auto switch model A D-F9 B C D D-A9 D-F9 D-A9 D-F9 D-A9 D-F9 Bore size (mm) 17.5 15 D-A9 21.5 76.5 72.5 56.5 60.5 Note) Auto switches cannot be installed in Area C in the case of 15. 25, 32 (mm) A D-Y5 D-Y7 D-Y7W B C D Auto switch model D-Y5 D-Y7 D-Y7W D-Y5 D-Y7 D-Y7W D-Y5 D-Y7 D-Y7W D-Z7 D-Z8 D-Z7 D-Z8 D-Z7 D-Z8 D-Z7 D-Z8 Bore size (mm) 25 22 101 103 47 47 78 78 22 32 30.5

Series CXS 10-/11-/12- Dual rod cylinder 21-/22- ø6, ø10, ø15, ø20, ø25, ø32

Auto switches / Proper mounting position for stroke end detection Electrical entry direction: Inward Electrical entry direction: Outward B D C A (mm) D-Z73 D-Y59A,D-Y59B A B C D Bore size D 0.5 4 0.5 3 5 5 C 16.5 23 34 46 46.5 56 6 20.5 27 38 50 50.5 60 -1 2.5 -1 1.5 3.5 3.5 32 15 21.5 32.5 44.5 45 54.5 4.5 8 4.5 7 8.5 9 10 15 20 25 Note 1) The above mentioned values are indicated as a guide

Turntable Cylinder Series MGT

1) D-Z8 type D-A9 type D-F9 type D-Y6 type Ball bushing D-Y7 type Note 1) Vertical outlet types cannot be mounted.

Electric Actuator Series LJ1H/LJ1S Made to Order Specifications

TSUBAKI CABLEVEYOR cross-sectional dimensions (mm) A Series A B H S LJ1 10 LJ1 20 LJ1 30 10 20 B H S H S 10 20 14 40 H S Example) For LJ1 10 2 3 6 4 8 8 4 Correct: 60% or less Incorrect: More than 60% 103 Made to Order/Clean Room Specification Series LJ1H10 Dimensions/LJ1H10 (X60) 1 2 Scale: 20% Dimensions inside ( ) are for the model with brake. 120 40 70 2-5H10 depth 8 4-Limit switch mounting

SFOD-OMT0009CN

D RESET SVON <> 92 No.SFOD-OMT0009CN-B code <> <> (1-147) D RESET <> SVON <> <> <> (1-148) D RESET SVON 93 No.SFOD-OMT0009CN-B code <> (1-192) E <> <> ON(SVON ON) (1-193) E <> ONSVON ON <> (1-194) E <> <> (1-195) E <> <> 1-196 E <> <> EEPROM (1-197) E <> EEPROM 10 <> CPU CPU CPU (1-198) E <> 94 No.SFOD-OMT0009CN-B 12. / A 50mm () 5m 5m 10% 15m 20% 95 No.SFOD-OMT0009CN-B

Title not found

s Series Variations $ types provided I Four mounting f}-h fit Fi)s f4F-{X.}Eptu, {ttsfrd d 'd\ c{e zad I Piping is possible from two directions Slide beadng Ball bushing 1 2 1 6 20 25 32I 40 .

2/3 Port Valve

148 159.5 175.5 52 52 62 72 26 26 31 36 4.5 4.5 5.5 6.5 24.3 24.3 28.3 33.3 2.3 2.3 2.3 2.3 25 25 30 35 34 34 43 49 42 42 50 60 3 8 1 2 3 4 VNC2-10A VNC2-15A VNC3-20A 20 100 108 VNC4-25A 90 Port size: 32A, 40A, 50A Thread connection MainPort Rc(PT) Pilot port Rc(PT) A Model B C D E F H J K L 1 8 1 4 1 4 105 120 140 77 96 113 53 60 74 26.5 30 37 120.5 137 160 20 24 24 129.5 147 170 229.5