Speed Controller: Standard Type In-line Type AS Series

Nil Metric thread (M3, M5) Rc NPT G N F Bore size Bore size Applicable series M3 M5 01 02 03 04 M3 x 0.5 M5 x 0.8 1/8 1/4 3/8 1/2 AS1000 AS1000 AS2000 AS2000, 3000, 4000, 5000 AS3000, 4000, 5000 AS4000, 5000 650 A

Metering Valve with Silencer Series ASN2 1

ASN How to Order AQ ASN2 03 ASV JIS Symbol AK Option Nil S None With seal ASS Port size ASR M5 U10/32 01 02 03 04 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 ASF Thread type Metric thread (M5) Unified thread (10-32 UNF) R NPT Nil N Needle Valve/Flow Characteristics Inlet pressure: 0.5 MPa Flow rate (l/min (ANR)) Effective area (mm2) Number of needle rotations 15-11-1 2 Series ASN Construction Component

Speed Controller: Standard Type Elbow Type (Metal Body) AS Series

AS120-M5 M5 U10/32 01 02 03 04 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 AS120-U10/32 AS220-01 AS220-02 AS320-03 AS420-04 646 B

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8

Port size ASV Model M3 x 0.5 ASV120F-M3 0.3 0.3 AK M5 x 0.8 ASV220F-M5 1.3 1.3 R 1/8 ASV310F-01 8 7 ASS R 1/4 ASV310F-02 8 7 R 1/8 ASV410F-01 14 13.5 ASR R 1/4 ASV410F-02 14 13.5 R 3/8 ASV410F-03 14 13.5 ASF R 1/4 ASV510F-02 27 23 R 3/8 ASV510F-03 29 27 R 1/2 ASV510F-04 29 27 10-32 UNF 1.3 1.3 ASV220F-U10/32 NPT 1/8 ASV310F-N01 8 7 NPT 1/4 ASV310F-N02 8 7 NPT 1/8 ASV410F-N01 14 13.5 NPT 1

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 threads Broken lines indicate DIN rail mount type [-D] and connector top entry [-JU].

E-P HYREG ® VY1 Series

00 M5 01 00 01 02 00 02 03 04 M5 01 02 02 03 04 04 06 10 10 12 14 20 Without sub-plate M5 Without sub-plate M5 D B 1 8 Without sub-plate Base mounted Symbol 2 1 8 1 4 Internal pilot VY1D0 (5) Without sub-plate 1 4 4 3 8 1 2 (3) (3) A M5 3(R) 1 8 2(A) 1(P) (3) (3) 1 1 4 1 4 3 8 3 External pilot 1 2 Body ported 1 2 5 3 4 P1 1 1 VY1B0 (5) 7 1 1 4 1 4 1 1 2 1 3(R) 2(A) 1(P) 9 2 2 Note 3) Only

Speed Controller with One-touch Fitting Elbow Type (Metal Body) AS Series

Speed controller with Model Port size 4 6 8 10 12 ASD One-touch fittings for AS121-M5 AS221-01 AS221-02 AS321-02 AS321-03 M5 x 0.8 AS 1 8 R metal body specifications 1 4 R AS-FE 1 4 Usesflameresistantresinasstandard. (ULstandardV-0) R 3 8 R KE AS421-04 1 2 R Note 1) :Brasspartsareelectrolessnickelplated,providedasstandard.

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Dimensions EVS1-02-FG-S-M0 102 68 21.5 (14 port) 21.5 (12 port) 8.5 (2 port) 8.5 (4 port) 14 4 2 12 12 34 25 18 14 5 1 3 Indicator light 29.5 32.5 34 2-4.6 mounting holes 37 Manual override M8 connector 15.5 (12-, 14 port) 9 (2-, 4 port) 74.5 66.5 8.5 PE port 23 13.5 SMC 16 16 M5-2 ports 12, 14 port 1/8-2 ports 2, 4 port 1/8 1 port 1/8-2 ports 3, 5 port EVS1-02-FG-D-M0 EVS1-02-F G-D-M0 H

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Dimensions EVS1-02-FG-S-M0 102 68 21.5 (14 port) 21.5 (12 port) 8.5 (2 port) 8.5 (4 port) 14 4 2 12 12 34 25 18 14 5 1 3 Indicator light 29.5 32.5 34 2-4.6 mounting holes 37 Manual override M8 connector 15.5 (12-, 14 port) 9 (2-, 4 port) 74.5 66.5 8.5 PE port 23 13.5 SMC 16 16 M5-2 ports 12, 14 port 1/8-2 ports 2, 4 port 1/8 1 port 1/8-2 ports 3, 5 port EVS1-02-FG-D-M0 EVS1-02-F G-D-M0 H

Solenoid Valve (with M Connector) Conforming to ISO 15407-1 Series EVS1-01, 1-02

Dimensions EVS1-02-FG-S-M0 102 68 21.5 (14 port) 21.5 (12 port) 8.5 (2 port) 8.5 (4 port) 14 4 2 12 12 34 25 18 14 5 1 3 Indicator light 29.5 32.5 34 2-4.6 mounting holes 37 Manual override M8 connector 15.5 (12-, 14 port) 9 (2-, 4 port) 74.5 66.5 8.5 PE port 23 13.5 SMC 16 16 M5-2 ports 12, 14 port 1/8-2 ports 2, 4 port 1/8 1 port 1/8-2 ports 3, 5 port EVS1-02-FG-D-M0 EVS1-02-F G-D-M0

AS-FG

Note) Metric size Inch size 23 04 06 08 10 12 Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT Port size AS-FE KE 01 03 05 07 09 11 13 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 3.2 4 6 8 10 12 M5 U10/32 01 02 03 04 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 N AS-FG AS-FG AS-FP AS-FM Note) For applicable tubing O.D. selection, refer to the Model on page 542. Use 1/8" tube.

AS-FG

Note) Metric size Inch size 23 04 06 08 10 12 Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT Port size AS-FE 01 03 05 07 09 11 13 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 3.2 4 6 8 10 12 M5 U10/32 01 02 03 04 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 KE N AS-FG AS-FG AS-FP Note) For applicable tubing O.D. selection, refer to the Model on page 680. Use 1/8" tube.

VEX1

N Port P1 0 3 ITV Thread type Fittings for M5 IC Nil F N T Rc G Note 1) Body size Port size Body size Port Port size 1(P), 2(A) 3(R) ITVH NPT NPTF 8 1 01 02 02 03 04 04 06 10 10 12 14 20 Nil 01 02 ITVX 1 4 1 ForVEX13 (NBR seals) Fixed orifice assembly (with O-ring) part no.: VEX1-A30-3 ForVEX133B(FKMseals) Fixed orifice assembly (with O-ring) part no.: VEX1-A30-3B Note)

D

TMH M5 Port size ASD M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 10-32 UNF NPT 1/8 NPT 1/4 NPT 3/8 NPT 1/2 Applicable tubing O.D. Note) Type 01 02 03 04 Inch size Metric size Elbow Universal 2 3 1/8" AS 23 01 3.2 03 05 07 09 11 13 04 06 08 10 12 4 5/32" 6 3/16" Control AS-FE U10/32 N01 N02 N03 N04 8 1/4" Meter-out Meter-in 0 1 10 5/16" Made to Order Refer to the below for details.

PSxx-OMG0005CN

) 28 (420mA) 02 R1/4(M5) C01 Rc1/8 N01 NPT1/8(M5) N02 NPT1/4(M5) A2 URJ1/4 B2 TSJ1/4 ZS-28-C 1 Rc1/4 ZS-31-X175 1 NPT1/4 ZS-31-X186 1 Rc1/8 ZS-31-X188 1 NPT1/8 ZS-31-X189 1 15[V]F.S.=514[V] (1F.S.40.010.04[V]) F.S. ( 25[]ON-OFF (1K 1M A/D 5V A/D 5(V)1(M)/(1(k)+1(M))4.995(V)0.005V ) ripple -8No.PS-OMG0005CN-E 20 mm A PSE56 PSE56-28 1 (DC+) (LINE(+)) 2 3 (DC-) 4 (IN15 V) (LINE(-)

3 Port Direct Operated Solenoid Valve Metal Seal, Body Ported/Base Mounted

VS3135 A01-01 A01-02 A07-52 q Description Electrical entry VS3145 Solenoid cover Body 100 VAC 200 VAC Grommet A12-01 A12-02 A08-52 w e Spool/Sleeve 24 VDC 100 VAC 200 VAC Conduit terminal 24 VDC A01-01-63 A01-02-63 A07-52-63 A12-01-63 A12-02-63 A08-52-63 Replacement Parts Material Part no. VS3135 XT019-6 XT013-13-2 XT010-15 Description VS3145 No.

ASP

Metric size Inch size Pilot port Model Port size 6 8 10 12 1/4" 5/16" 3/8" 1/2" ASP330F-01 ASP430F-02 ASP530F-03 ASP630F-04 ASP430F-F02 ASP530F-F03 ASP630F-F04 ASP330F-N01 ASP430F-N02 ASP530F-N03 ASP630F-N04 M5 x 0.8 R 1/8 Rc 1/8 R 1/4 Rc 1/8 R 3/8 Rc 1/4 R 1/2 G 1/8 R 1/4 G 1/8 R 3/8 G 1/4 R 1/2 10-32 UNF NPT 1/8 NPT 1/8 NPT 1/4 NPT 1/8 NPT 3/8 NPT 1/4 NPT 1/2 Note) Brass parts are all

PSE57  Series Pressure Sensor for General Fluids

output type 4 to 20 mA Port size Symbol Port size Model PSE570 PSE573 PSE574 PSE575 PSE576 PSE577 01 R1/8 (with M5 female thread) 02 R1/4 (with M5 female thread) shipped together.

Vacuum Module Series ZX

(or M6) 1 4.7 AMJ 20 5 AMV Pitch = 21 22.5 Vacuum port (V) M5 (or M6) AEP HEP Related Equipment + 79 65.1 10.7 8.5 V V V V Pitch = 21 Vacuum Port (V) M5 (or M6) 4.2 22.5 Vacuum Port (V) M5 (or M6) Vacuum Port (V) M5 (or M6) 897 Series ZX Vacuum port (V) Vacuum port (V) Ejector System Manifold: Type K1 Common EXH port (EXH.)

ZSE80/ISE80

For positive pressure 80 ISE 02 N M For vacuum/ compound pressure M 80 ZSE 02 N Option 3 Rated pressure range Operating Note) manual (Booklet) (CD-ROM) Operating Note) manual 80 80F Calibration certificate Calibration certificate 0 to 101 kPa 100 to 100 kPa Symbol Symbol (Booklet) (CD-ROM) K T R Nil Piping Y W R1/4 (M5 female threaded) Rear ported 02 Note) All texts in both English