HRX-OM-Y120

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 CH1 abnormal low tank fluid level 1 CH1 low tank fluid level 2 CH2 Abnormal low tank fluid level 3 CH2 low tank fluid level 4 Reservation 5 Fan failure *1 Alarm flag 1 6 Air exhaust fan failure *2 7 Reservation 8 CH1 abnormal rise of circulating fluid

3 Port Solenoid Valve

14 1 2b 2b 2b 2b 2b 40 3 2a 2a 2a 2a 2a One-touch fitting [1(P), 3(E) port] 11.4 5.7 L1 Applicable tubing O.D: 4 6 5/32" 1/4" (8.9) If the fittings are mounted on side.

21

15 20 75 75 + 55 (n 2) (n = 2, 4, 6) D-A3mA/A44A D-G39A D-K39A 10 35 100 100 + 100 (n 2) 35 + 30 (n 2) Note 1) Auto switch mounting With 2 auto switches Same surface Note 1) Different surfaces Note 1) 6 A A 6 15 Auto switch model Auto switch D-M9m D-M9mW 6 B B 6 The auto switch is mounted by slightly displacing it in a direction (cylinder tube circumferential exterior) so that the auto

JXCx-OMT0001CN

12.5 ([5m ] (a) (b) L E C P * B -* A B-1 2 A A-1 1 L B B-2 6 B A-2 5 1 1.5m COM-A/COM B-3 3 3 3m COM-B/ A-3 4 (c) 5 5m Shield Vcc B-4 12 GND A-4 13 A B-5 7 A A-5 6 B B-6 9 B A-6 8 3 (d) S 4 + B-1 5 A-1 1 + B-3 2 A-3 (8) (a) (b) (14.2) B1 A1 (17.7) 2 1 (14) (18) 6 (10.2) B6 5 A6 2 1 B1 A1 B3 A3 (d) (5.7) 15 16 (c) L (11) (30.7) 12.6 ([820m] (a) (b) LE CP * B A B-1

LEC-OM005xx

screen . 86 (6-2) Monitor items . 86 (6-3) Monitor details . 86 (6-3-1) Drive monitor. 86 (6-3-2) Output monitor . 88 (6-3-3) Input monitor . 89 (6-3-4) Output pin monitor . 91 (6-3-5) Input pin monitor . 91 (7) Normal mode Alarm . 92 (7-1) Alarm selecting screen . 92 (7-2) Alarm selecting items . 92 (7-3) Alarm function details . 93 (7-3-1) Active ALM . 93 (7-3-2) ALM log record . 94 (7

CNG

I J 10 (12) 5.5 M4 x 0.7 to 200 20 to 200 85 18 15.5 13 38 93 1/8 50.5 14 8 18 6 4 8 5 26 201 to 350 201 to 350 10 (12) 6.5 M5 x 0.8 to 300 20 to 300 96 22 19.5 17 45 103 1/8 57 16.5 10 25 9 7 10 6 31 301 to 400 301 to 400 10 (12) 6.5 M5 x 0.8 to 300 20 to 300 97 22 19.5 17 45 104 1/8 57 20 12 25 9 7 10 6 38 301 to 450 301 to 450 10 (13) 7 M6 x 1 to 300 20 to 300 104 30 27 19 52 112 1/8 65.5

Tamper Proof Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS  1F-T

Flow Rate and Sonic Conductance AS221F-01 AS231F-01 AS221F-02 AS231F-02 AS321F AS331F AS421F AS431F AS121F AS131F Model Metric size 3.2, 4, 6 10, 12 3.2, 4 6, 8, 10 8, 10 4 6 6 8 10 12 Tubing O.D. 1/8", 5/32" 1/8", 3/16", 1/4", 1/4", 5/16", 3/8" 1/4" Inch size 5/32" 3/16" 5/16" 3/8" 1/2" 5/32" 5/16" 3/8" 3/16", 1/4" Flow rate (L/min (ANR)) 180 230 100 260 390 660 790 460 920 1580 1710 Controlled

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

Example: In case of 6 stations of air suction filter ZFA (single) ZFA100-01 6 pcs. (Brackets for 6 stations) ZZFA1-06 1 pc.

IZx-OMP0064

1 1 1 IZS40-E3 5 4 5 5 6 340 400 460 580 640 820 1120 1300 1600 1900 2320 2500 1 2 520 1 1 700 2 1 1540 1660 1720 1 1 1 1 1 1 760 1 1 1 880 1 2 1780 1840 2 1 2 940 3 1000 2 2 1960 2020 1 1 5 6 6 7 6 6 1 3 2 3 1060 1 1 2 1180 1 3 2080 2140 2 4 2 5 1240 4 1360 1 1 3 1 1 2200 2260 2 1 1 7 2 7 1420 1 4 1480 1 4 2380 2440 8 7 AC adapter AC adapter for IZS40 Note) AC cord is only for use in Japan

60

(100.5) (69.5) (127) 3, 4.5, 6, 8 Note 1) (64) (138) (103.5) (72.5) (136.5) 3, 4.5, 6, 8 Note 1) (66.5) (143.5) (106) (75) (142.5) Note 1) An orifice size of 8 is only available with the N.C. spec.

Applicable Tubing: ø 2 Connection Thread: M3, M5 Made to Order (Refer to page 193 for details.) Miniature Fittings M Series

4/2.5 x R 4/2.5 x M5 For soft nylon and polyurethane tubing M-01AU-4 M-5HL-4 For nylon, soft nylon and polyurethane tubing Body rotates at 360 around the stud axis For reducing R 1/8 female to M5. 1 8 KKA 1 8 R R x M5 female M-5B 1 8 6/4 x R 6/4 x M5 M-01AU-6 P.196 M-5HL-6 P.198 KP 1 8 P.199 Plug Hose nipple Use to plug unused M5 port.

VDW

55.8 8.5 (6.3) 8 5 22 M5, 1/8 6 36 (27.6) 1 (IN) port M5, 1/8 2 (N.C.) port 1/8, 1/4 1/8, 1/4 2 (N.C.) port 1 (IN) port 2 x M3 x 5 2 x M4 x 6 15 12.8 Bracket assembly part no.

Air Cylinder: Standard/Non-rotating Rod Double Acting/Single Acting, Single Rod/Double Rod Series NCM ø3/4", ø7/8", ø1 1/16", ø1 1/4", ø1 1/2", ø2" 1

Standard Stroke (in) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Max. stroke as standard Mounting Long stroke Standard stroke 1/2, 1, 2, 3, 4, 5, 6 1/2, 1, 2, 3, 4, 5, 6 7, 8, 10, 12 1/2, 1, 2, 3, 4, 5, 6 1/2, 1, 1 1/2, 2, 3, 4, 5, 6 Rod side nose (B) 12 40 Double

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

6/Rc 1 8 6/Rc 1 8 ZH07B ZH10B ZH13B ZH05D ZH07D ZH10D ZH13D ZH15D ZH18D ZH20D 12/Rc 3 8 Body ported type (Without silencer) 8/Rc 1 8 10/Rc 1 4 6/Rc 1 8 6/Rc 1 8 6/Rc 1 8 6/Rc 1 8 6/Rc 1 8 8/Rc 1 8 8/Rc 1 8 10/Rc 1 4 10/Rc 1 4 3 8 12/Rc 10/Rc 1 4 12/Rc 3 8 12/Rc 3 8 16/Rc 1 2 16/Rc 1 2 13-5-2 3 Series ZH Vacuum Ejector: Box Type (Built-in Silencer)/Body Ported Type Ejector JIS Symbol Body

IDX-OM-W022

References 6 1 Specifications . 6 1 6 2 Refrigerant with GWP reference . 6 3 6 3 Dimensions. 6 4 6 4 Electrical Circuit . 6 5 6 5 Compressed Air and Refrigerant Circuit / Operation Principles . 6 7 Chapter 7 Specification for Option C 7 1 Specifications . 7 1 7 2 Precautions for the installation and handling of the product . 7 1 Chapter 8 Specification for Option K 8 1 Safety instructions

Fieldbus system DeviceNet TM compatible SI unit

A ddress setting Data Rate setting Address Data Rate Communication speed Node Address x10 x1 0 125 kbps (Default setting) 0 0 0 (Default setting) 1 250 kbps 0 1 1 2 500 kbps 0 2 2 3 PGM : : : : 6 2 62 9 6 3 63 6 4 PGM : : 9 9 : When PGM is set, the data rate is set via DeviceNet TM network.

Shock Absorbers and Rate Controls

. 0 = 2 0 . . , . . o l:.1:/ 0 a 0 2 0 4 0 . 6 0 8 1 . 0 1 2 1 . 4 1 6 1 . 4 2 . 0 1 . 0 1 . 5 2 0 2 5 3 . 0 0 0 5 TOTAL ENERGY (i IbS/C) (Tho!

HEC_001W-E

-5-7 3) PRESSURE LOSS OF RADIATING WATER -5-8 5.3.3 PERFORMANCE OF PUMP CAPACITY -5-9 iii Number of pages 1) PUMP CAPACITY(COMMON TO HEC001 AND 003)-5-9 6 PREPARATION FOR OPERATION -6-1 6.1 PIPING -6-1 6.1.1 PREPARATION FOR RADIATING WATER -6-1 6.1.2 PREPARATION FOR RECIRCULATING FLUID -6-2 6.2 WIRING -6-4 6.2.1 POWER SUPPLY -6-4 6.2.2 CIRCUIT BREAKER -6-4 6.2.3 GROUNDING -6-4 6.2.4 AVOIDANCE

MHC2

MHC2-6 MHL MHCA2-6 Model MHR MHCA2-6 Axial ported (With hose nipple) (2) (1) Cylinder bore (mm) MHK Opening/Closing angle (Both sides) Weight g Action Model Gripping moment (Effective value) Nm MHS MHC2-6D MHCA2-6D MHC2-6S MHCA2-6S 6 6 6 6 22 19 22 19 30 to 10 Double acting 0.038 MHC 30 to 10 Single acting (Normally open) 0.024 MHT Note 1) At the pressure of 0.5 MPa Note 2) Excluding the

MHC2

-6S MHCA2-6S 6 6 6 6 22 19 22 19 30 to 10 Double acting 0.038 MHC 30 to 10 Single acting (Normally open) 0.024 MHT Note 1) At the pressure of 0.5 MPa Note 2) Excluding the auto switch weight.