Delivery Pressure: 01 [0.5 to 10 psig (0.0034 to 0.07 MPa); Sub-atmospheric : 100mm Hg absolute to 10 psig (-88kPa to 0.07MPa)], Material: S (Body: 316L SS Secondary Remelt; Poppet: 316L SS; Diaphragm: Elgiloy™; Nozzle: 316L SS), Surface Finish: 15 μin. (0.4 μm), Standard, Range Options: A (Sub-atmospheric), Ports: 2PW [2 Ports (1-In; 2-Out)], Connections, Inlet: FV4 (1/4 Inch Face Seal

Delivery Pressure: 01 [0.5 to 10 psig (0.0034 to 0.07 MPa); Sub-atmospheric : 100mm Hg absolute to 10 psig (-88kPa to 0.07MPa)], Material: S (Body: 316L SS Secondary Remelt; Poppet: 316L SS; Diaphragm: Elgiloy™; Nozzle: 316L SS), Surface Finish: 15 μin. (0.4 μm), Standard, Range Options: A (Sub-atmospheric), Ports: 2PW [2 Ports (1-In; 2-Out)], Connections, Inlet: MV4 (1/4 Inch Face Seal

Delivery Pressure: 01 [0.5 to 10 psig (0.0034 to 0.07 MPa); Sub-atmospheric : 100mm Hg absolute to 10 psig (-88kPa to 0.07MPa)], Material: SH (Body: 316L SS Secondary Remelt; Poppet: Hastelloy® C-22; Diaphragm: Elgiloy®; Nozzle: 315L SS), Surface Finish: 15 μin. (0.4 μm), Standard, Range Options: A (Sub-atmospheric), Ports: 2PW [2 Ports (1-In; 2-Out)], Connections, Inlet: FV4 (1/4 Inch

Delivery Pressure: 01 [0.5 to 10 psig (0.0034 to 0.07 MPa); Sub-atmospheric : 100mm Hg absolute to 10 psig (-88kPa to 0.07MPa)], Material: SH (Body: 316L SS Secondary Remelt; Poppet: Hastelloy® C-22; Diaphragm: Elgiloy®; Nozzle: 315L SS), Surface Finish: 15 μin. (0.4 μm), Standard, Range Options: A (Sub-atmospheric), Ports: 2PW [2 Ports (1-In; 2-Out)], Connections, Inlet: MV4 (1/4 Inch

Delivery Pressure: 01 [0.5 to 10 psig (0.0034 to 0.07 MPa); Sub-atmospheric : 100mm Hg absolute to 10 psig (-88kPa to 0.07MPa)], Material: S (Body: 316L SS Secondary Remelt; Poppet: 316L SS; Diaphragm: Elgiloy™; Nozzle: 316L SS), Surface Finish: M [0.25 μм], Range Options: Standard, Ports: 2PW [2 Ports (1-In; 2-Out)], Connections, Inlet: FV4 (1/4 Inch Face Seal, Female), Connections,

Delivery Pressure: 01 [0.5 to 10 psig (0.0034 to 0.07 MPa); Sub-atmospheric : 100mm Hg absolute to 10 psig (-88kPa to 0.07MPa)], Material: S (Body: 316L SS Secondary Remelt; Poppet: 316L SS; Diaphragm: Elgiloy™; Nozzle: 316L SS), Surface Finish: 15 μin. (0.4 μm), Standard, Range Options: A (Sub-atmospheric), Ports: 2PW [2 Ports (1-In; 2-Out)], Connections, Inlet: FV4 (1/4 Inch Face Seal

Delivery Pressure: 01 [0.5 to 10 psig (0.0034 to 0.07 MPa); Sub-atmospheric : 100mm Hg absolute to 10 psig (-88kPa to 0.07MPa)], Material: S (Body: 316L SS Secondary Remelt; Poppet: 316L SS; Diaphragm: Elgiloy™; Nozzle: 316L SS), Surface Finish: 15 μin. (0.4 μm), Standard, Range Options: A (Sub-atmospheric), Ports: 2PW [2 Ports (1-In; 2-Out)], Connections, Inlet: MV4 (1/4 Inch Face Seal

Delivery Pressure: 01 [0.5 to 10 psig (0.0034 to 0.07 MPa); Sub-atmospheric : 100mm Hg absolute to 10 psig (-88kPa to 0.07MPa)], Material: SH (Body: 316L SS Secondary Remelt; Poppet: Hastelloy® C-22; Diaphragm: Elgiloy®; Nozzle: 315L SS), Surface Finish: M [0.25 μм], Range Options: A (Sub-atmospheric), Ports: 2PW [2 Ports (1-In; 2-Out)], Connections, Inlet: MV4 (1/4 Inch Face Seal, Male

Delivery Pressure: 01 [0.5 to 10 psig (0.0034 to 0.07 MPa); Sub-atmospheric : 100mm Hg absolute to 10 psig (-88kPa to 0.07MPa)], Material: SH (Body: 316L SS Secondary Remelt; Poppet: Hastelloy® C-22; Diaphragm: Elgiloy®; Nozzle: 315L SS), Surface Finish: M [0.25 μм], Range Options: A (Sub-atmospheric), Ports: 2PW [2 Ports (1-In; 2-Out)], Connections, Inlet: MV4 (1/4 Inch Face Seal, Male

Delivery Pressure: 01 [0.5 to 10 psig (0.0034 to 0.07 MPa); Sub-atmospheric : 100mm Hg absolute to 10 psig (-88kPa to 0.07MPa)], Material: S (Body: 316L SS Secondary Remelt; Poppet: 316L SS; Diaphragm: Elgiloy™; Nozzle: 316L SS), Surface Finish: X [5 μin. (0.13 μm)], Range Options: Standard, Ports: 2PW [2 Ports (1-In; 2-Out)], Connections, Inlet: FV4 (1/4 Inch Face Seal, Female), Connections

Body Size: 20, Thread: Rc (Rc: for Sizes 20, 25, 30, 40; M5: for Size 10), Port Size: 01 (1/8), Option: G (Size 20 25, 30, 40: Round Type Pressure Gauge w/Limit Indicator; Size 10: Round Type Pressure Gauge w/o Limit Indicator), Attachment: TV (T + V), Semi-Standard 1: 16C (1 + 6 + C), Semi-Standard 2: Standard

Body Size: 20, Thread: Rc (Rc: for Sizes 20, 25, 30, 40; M5: for Size 10), Port Size: 01 (1/8), Option: G (Size 20 25, 30, 40: Round Type Pressure Gauge w/Limit Indicator; Size 10: Round Type Pressure Gauge w/o Limit Indicator), Attachment: V (3-Port Valve for Residual Pressure Release; Mounting: AF+AR+V), Semi-Standard 1: 1 (0.02 to 0.2MPa Setting), Semi-Standard 2: Standard

Body Size: 1 (M5 X 0.8, 10-32UNF), Type: 2 (Elbow), Control Type: 1 (Meter-in), Thread Type: R, Port Size: U10/32 (10-32 UNF), Dimension, Across Flat [H]: Body Size 1: 9mm; Body Size 2, 3, 4 None, Applicable Tubing O.D.: 01 (Ø1/8), Seal Method: None

Body Size: 1 (M5 X 0.8, 10-32UNF), Type: 3 (Universal), Control Type: 1 (Meter-in), Thread Type: R, Port Size: U10/32 (10-32 UNF), Dimension, Across Flat [H]: Body Size 1: 9mm; Body Size 2, 3, 4 None, Applicable Tubing O.D.: 01 (Ø1/8), Seal Method: None

Body Size: 20, Thread: N (NPT), Port Size: 01 (1/8), Option: G (For Sizes 10, 20, 30, 40 Round Type Pressure Gauge w/Limit Indicator; For For Size 10: Round Type Pressure Gauge w/o Limit Indicator ), Semi-Standard 1: 12N (1 + 2 + N), Semi-Standard 2: Z (NPT Porting requires Z, Name Plate, Caution Plate for Bowl, & Pressure Gauge in Imperial Units: psi, °F)

Body Size: 20, Thread: N (NPT), Port Size: 01 (1/8), Option: G (For Sizes 10, 20, 30, 40 Round Type Pressure Gauge w/Limit Indicator; For For Size 10: Round Type Pressure Gauge w/o Limit Indicator ), Semi-Standard 1: 1 (0.02 to 0.2MPa Setting), Semi-Standard 2: Z (NPT Porting requires Z, Name Plate, Caution Plate for Bowl, & Pressure Gauge in Imperial Units: psi, °F)

Body Size: 20, Thread: N (NPT), Port Size: 01 (1/8), Option: G (For Sizes 10, 20, 30, 40 Round Type Pressure Gauge w/Limit Indicator; For For Size 10: Round Type Pressure Gauge w/o Limit Indicator ), Semi-Standard 1: 12 (1 + 2), Semi-Standard 2: Z (NPT Porting requires Z, Name Plate, Caution Plate for Bowl, & Pressure Gauge in Imperial Units: psi, °F)

Body Size: 20, Thread: N (NPT), Port Size: 01 (1/8), Option: G (For Sizes 10, 20, 30, 40 Round Type Pressure Gauge w/Limit Indicator; For For Size 10: Round Type Pressure Gauge w/o Limit Indicator ), Semi-Standard 1: 1J (1 + J), Semi-Standard 2: Z (NPT Porting requires Z, Name Plate, Caution Plate for Bowl, & Pressure Gauge in Imperial Units: psi, °F)

Body Size: 20, Thread: N (NPT), Port Size: 01 (1/8), Option: G (For Sizes 10, 20, 30, 40 Round Type Pressure Gauge w/Limit Indicator; For For Size 10: Round Type Pressure Gauge w/o Limit Indicator ), Semi-Standard 1: 1C (1 + C), Semi-Standard 2: Z (NPT Porting requires Z, Name Plate, Caution Plate for Bowl, & Pressure Gauge in Imperial Units: psi, °F)

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: 01 (Rc1/8), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: With Instruction Manual, Calibration Certificate: A (w/Calibration Certificate)