MXQ

20 30 40 50 75 100 125 150 Extension end Retraction end Extension end Retraction end Extension end Retraction end MXQ6 MXQ8 MXQ12 MXQ16 MXQ20 MXQ25 25 5 5 6 10 100 120 140 180 200 13 + 0.2 S 40 35 10 23 10 10 30 23 140 170 210 250 315 385 26 + 0.2 S 745 100 70 23 30 23 25 47 35 335 340 380 450 490 655 43 + 0.2 S 1250 1400 160 105 40 53 40 45 75 60 605 610 670 735 835 1000 55 + 0.2

Refrigerated Air Dryers

Applicable air dryer Capacity Type Inlet voltage Outlet voltage A B C D E F Weight IDF-TR500-3 IDF1E-10 to 8E-10 IDU3E-10, 4E-10, 8E-10 500 VA 380, 400, 415 VAC (50 Hz) 380 to 420 VAC (60 Hz) 100 VAC (50 Hz) 110 VAC (60 Hz) 15 kg IDF-TR1000-3 IDF11E-10, 15E1-10 IDU6E-10, 11E-10, 15E1-10 1 kVA Singlephase Singleturn 230 207 190 210 160 9 IDF-TR500-4 IDF1E-10 to 8E-10 IDU3E-10, 4E-10, 8E-10

XL

-6 {760 to 7.5 x 10-9} Operating pressure Pa {Torr} Conductance l/s Note 1) 5 14 45 80 160 200 1.3 x 10-10 {1 x 10-9} at ordinary temperatures, excluding gas transmission Leakage Pa m 3/s Internal 1.3 x 10-11 {1 x 10-10} at ordinary temperatures, excluding gas transmission {Torr l/s} External 40 45 60 60 95 105 XLG Operating time ms Note 2) 45 50 85 90 132 150 XLGV Flange type KF (NW), K

Air Cylinder

24 8 9 38 6 M5 x 0.8 5.5 8 8 M10 x 1.25 18 1/8 63 109 40 Up to 300 24 21 48 22 37 14 32 9 9 44 8 M5 x 0.8 8 12 8 M14 x 1.5 18 1/8 62 114 45 Up to 300 24 21 52 22 41 14 32 9 9 44 8 M5 x 0.8 8 12 8 M14 x 1.5 18 1/8 62 114 50 Up to 400 35 32 60 27 45 18 38 10 9 55 11 M6 x 1 7 16 11 M18 x 1.5 18 1/8 63 129 56 Up to 400 35 32 65 27 50 18 38 10 9 55 11 M6 x 1 7 16 11 M18 x 1.5 18 1/8 63 129 63

Floating Joint

-18-150 JA80-22-150 JA100-26-150 JA140-30-150 JA160-36-150 6 10 (CJ1) 10 (CZ1), 15 (CJ1) 15 (CZ1) 20 25, 32 40 50, 63 80 100 125, 140 160 3 4 5 6 8 10 14 18 22 26 30 36 0.5 0.7 0.8 1 1.25 1.25 1.5 1.5 1.5 1.5 1.5 1.5 15 17 23 23 30.5 34 38 47.5 56.5 68 94.5 112 23.2 26 34.5 34.5 44 49.5 60 74.5 89.5 110 152 178 7 9 12.5 12.5 17.5 19.5 20 25 29 35 42 52 8 10 14 14 45 55 12 12 16 16 21 24 31

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

40 35 190 190 190 190 190 190 190 10 10 10 10 10 10 10 10 10 10 10 10 10 10 90 80 65 50 45 40 35 60 50 50 40 40 30 20 17 23 27 33 37 44 57 36 50 66 68 78 91 115 40 54 60 72 82 95 19 40 54 60 72 82 95 19 21 27 31 37 41 48 61 21 27 31 37 41 48 61 10 20 30 50 70 100 200 Operating angle m: Value of the operating range Lm of a single auto switch converted to an axial rotation angle.

MB1

Bore size (mm) Z DA DB DL DU DC DX DE DR DO DT DS DH Z DD H10 +0.058 0 +0.058 0 +0.070 0 +0.070 0 +0.084 0 +0.084 0 32 40 50 63 80 100 32 40 50 63 80 100 6.6 6.6 9 9 11 11 46 52 65 75 95 114 32 32 43 43 64 64 22 22 30 30 45 45 10 10 11.5 11.5 14 14 44 44 60 60 86 86 14 14 20 20 30 30 62 62 81 81 111 111 15 15 18 18 22 22 7 7 8 8 10 10 33 33 45 45 65 65 154 158 182 182 228 228 10 10 14 14

Non-contact Gripper

45 45 45 P.C.D.

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

16 20 25 12 16 20 25 Relief type Vacuum suction type 5, 10, 15, 20, 25, 30 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 M5 x 0.8 M5 x 0.8 Double acting Single rod 5, 10, 15, 20, 25, 30 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 Suction Flow Rate of Vacuum Suction Type (Reference values) Specifications Suction flow rate L/min (ANR) Bore size (mm) 12/16/20/25 Size 5 12/16/20/25 Item Proof pressure 1.5

High Vacuum Angle Valve, XL Series

-6 {760 to 7.5 x 10-9} Operating pressure Pa {Torr} Conductance l/s Note 1) 5 14 45 80 160 200 1.3 x 10-10 {1 x 10-9} at ordinary temperatures, excluding gas transmission Leakage Pa m 3/s Internal 1.3 x 10-11 {1 x 10-10} at ordinary temperatures, excluding gas transmission {Torr l/s} External 40 45 60 60 95 105 XLG Operating time ms Note 2) 45 50 85 90 132 150 XLGV Flange type KF (NW), K

HRX-OM-Y098

Circulating fluid1 CH1 : Clear water,DI water (pure water)9 / CH2 : Clear water,DI water (pure water) Set temperature range C CH1 : 5 to 35 / CH2 : 10 to 40 Cooling capacity2 kW 9 1 8 19 1 8 26 1 8 Heating capacity3 kW 1.5 1 4.5 1 6.5 1 Temperature stability 4 C CH1 0.1 CH2 0.5 Rated flow rate (Outlet) L/min 45 10 45 10 125 10 (0.43MPa) (0.45MPa) (0.45MPa) (0.45MPa) (0.45MPa) (0.45MPa)

NAAMS Standards Compliant

ACA213M 150.0 1.0 50 mm offset: Machined 25 mm offset: Machined A A B B C C 8F7 through +0.028 +0.013 D 8F7 through +0.028 +0.013 D E E 200.03 F G F 10 200.03 10 G 300.025 300.025 11 through H 300.025 300.025 I 11 through H 250.05 J 250.05 I M6 x 1.0 45 R45 500.05 6.5 18 M6 x 1.0 10 750.05 3 R25 10 R6 1 1 6.5 R25 19 18 19 R25 19 [mm] R6 19 [mm] Model NAAMS code A B C D E F G H I Weight [kg

70astamb1

Bore size (mm) Z DA DB DL DU DC DX DE DR DO DT DS DH Z DD H10 +0.058 0 +0.058 0 +0.070 0 +0.070 0 +0.084 0 +0.084 0 32 40 50 63 80 100 32 40 50 63 80 100 6.6 6.6 9 9 46 52 65 75 95 114 32 32 43 43 64 64 22 22 30 30 45 45 10 10 11.5 11.5 14 14 44 44 60 60 86 86 14 14 20 20 30 30 62 62 81 81 111 111 15 15 18 18 22 22 7 7 8 8 10 10 33 33 45 45 65 65 154 158 182 182 228 228 10 10 14 14 22 22

mb1

Bore size (mm) Z DA DB DL DU DC DX DE DR DO DT DS DH Z DD H10 +0.058 0 +0.058 0 +0.070 0 +0.070 0 +0.084 0 +0.084 0 32 40 50 63 80 100 32 40 50 63 80 100 6.6 6.6 9 9 46 52 65 75 95 114 32 32 43 43 64 64 22 22 30 30 45 45 10 10 11.5 11.5 14 14 44 44 60 60 86 86 14 14 20 20 30 30 62 62 81 81 111 111 15 15 18 18 22 22 7 7 8 8 10 10 33 33 45 45 65 65 154 158 182 182 228 228 10 10 14 14 22 22

energy saving effect

[MPa] Circulating fluid pressure [MPa] Usable flow rate range Usable flow rate range 0.5 0.5 50 HECR 50 0.43 0.45 Outlet Pump head [m] Pump head [m] Outlet 0.4 0.4 40 40 HEC 0.3 30 0.3 30 HEB 0.2 20 0.2 20 HED Return port 0.1 10 0.1 10 Return port 0 0 0 0 HEA 45 40 50 0 10 20 30 60 70 80 90 100 110 120 Circulating fluid flow rate [L/min] 45 0 20 10 40 30 50 60 70 80 90 100 110 120 130 Circulating

5 Port Solenoid Valve Series SV

Characteristics Port size Flow characteristics 14, 2(PA, B) 4, 25, 3(A, BEA, EB) Model 4, 2 (A, B) 1, 5, 3 (P, EA, EB) C[dm3/(sbar)] C[dm3/(sbar)] Cv Cv b b C6 SS5V1-10 C8 0.96 0.24 0.28 0.26 0.35 1.1 C8 SS5V2-10 C10 2.1 0.46 0.48 0.20 0.18 2.4 C10 SS5V3-10 C12 4.2 0.91 0.93 0.22 0.21 4.3 C12 SS5V4-10 C12 6.2 1.3 1.6 0.19 0.18 7.0 Note) Value is for manifold base with 5 stations and individually

CNA

Note 2) +0.070 0 80 60 10 102 85 119 17 9 17 12 45 60 62 10 162 15 CA1-S04 +0.070 0 80 60 10 112 95 129 17 9 17 12 45 60 74 10 181 15 Note 3) CA1-S06 +0.070 0 100 70 15 130 110 150 20 11 22 14 55 73 90 10 191 18 +0.084 0 120 90 15 166 140 192 26 13.5 24 17 75 100 110 12 231 25 CA1-S08 +0.084 0 120 90 15 188 162 214 26 13.5 24 17 75 100 130 12 255 25 9-7-19 20 Series CNA Accessory Bracket

CNA

Note 2) +0.070 0 80 60 10 102 85 119 17 9 17 12 45 60 62 10 162 15 CA1-S04 +0.070 0 80 60 10 112 95 129 17 9 17 12 45 60 74 10 181 15 Note 3) CA1-S06 +0.070 0 100 70 15 130 110 150 20 11 22 14 55 73 90 10 191 18 +0.084 0 120 90 15 166 140 192 26 13.5 24 17 75 100 110 12 231 25 CA1-S08 +0.084 0 120 90 15 188 162 214 26 13.5 24 17 75 100 130 12 255 25 9-7-19 20 Series CNA Accessory Bracket

Compressed Air Preparation Filter

70 0.01 2 40 6000 100 40 0.1 3 90 1000 20 1 4 10 +3 5 5 10 +7 6 0 < Cp 5 +10 7 5 < Cp 10 Cw 0.5 8 0.5 < Cw 5 9 5 < Cw 10 x Cp > 10 Cw > 10 > 5 [How to Perform a Test to Check the Performance] ISO 12500, which sets out the test method to be used in order to check the filter performance for each of the three kinds of contaminants, is indicated below.

Air Fittings & Tubing

3.4 16 17 1 8 1 4 32 34 10 14 10 18 18.5 M5 X 0.8 M6 X 1.0 3.4 3.4 27.5 8 8 6 17 1 8 12.8 33 35 36.5 10 14 17 12 14 17 8.7 6.9 10 1 4 18 3 8 22 26 28 37 39 41 1 8 1 4 20.5 18.5 8 12 15.2 19.7 19.7 3 8 24 27 29 33 27.5 29.5 33.5 32 35 42 43.5 45 47.5 45.5 47.5 49.5 55 56.5 1 8 1 4 17 18.5 24 21 17 30.9 23.2 10 3 8 1 2 22 1 4 17 20.9 17 25 22 12 3 8 1 2 3 8 1 2 44.5 35.1 22