125

34 + + 36 30 Foot bracket assembly (Option) 22 45 54 60 66 60.4 49.1 L plug connector Sol.b Silencer (for PE) (Option) 29.8 Grommet Sol.a M5 (Port PE/Pilot exhaust) M plug connector VEX3321: 1/8 VEX3322: 1/8 Plug (Port P1/Pilot air) 3 x 1/4, 3/8, 1/2 [Port 1(P), 2(A), 3(R)] A B PE 8.25 121.9 112.1 104.9 R 3 84.5 P1 15 30 30 15 60 52.5 P 1 A 2 30 33 2 x 5.5 (For mounting) A Air operated:

VCW

36.5 13.5 15 32 25 23 M5 24 59 46 57 60 54.5 48.5 101 57 68 1/2 22 45 89 41 11 17 36 22.5 23 M5 26 64.5 48 62.5 62 60 50.5 103 62.5 70 1/4, 3/8 VCW41 30 50 93.5 41 13.5 17 36 25 23 M5 26 66.5 48 64.5 62 62 50.5 103 64.5 70 1/2 35 60 101 41 17.5 17 36 30 28.2 M5 26 70 48 68 62 65.5 50.5 103 68 70 3/4 4.5-6 Direct Operated 2Port for Water Series VCW Dimensions (N.O.)

Angle Seat Valve

Since Q0 = 15/45 = 0.33 [L/min], according to Graph (2), if reading P when Q0 is 0.33, it will be 0.031 [MPa]. Example 2) Obtain the saturated steam flow rate when P1 = 0.8 [MPa], P = 0.008 [MPa] with a solenoid valve with an Av = 1.5 x 106 [m2]. According to Graph (2), if reading Q0 when P1 is 0.8 and P is 0.008, it is 0.7 [kg/h].

CVJ3

Valve Mounted Cylinder Single Acting, Single Rod, Spring Return/Extend Series CVJ3 10, 16 How to Order Stroke (mm) Electrical entry G L M Grommet L plug connector M plug connector 10 16 15, 30, 45, 60 15, 30, 45, 60 Bore size 10 16 10 mm 16 mm Light/Surge voltage suppressor Nil Without light/surge voltage suppressor With surge voltage suppressor With light/surge voltage suppressor With surge

Thermo-chiller

Circulating uid CH1: Tap water/CH2: Tap water, Deionized water1 Set temperature range [C] CH1: 15 to 25/CH2: 20 to 40 Cooling capacity2 [kW] 9 18 19 18 26 18 Heating capacity3 [kW] 1.5 1 4.5 1 6.5 1 Temperature stability4 [C] CH1: 0.1/CH2: 0.5 Rated ow (Outlet) [L/min] 45 (0.43 MPa) 10 (0.45 MPa) 45 (0.45 MPa) 10 (0.45 MPa) 125 (0.45 MPa) 10 (0.45 MPa) Maximum ow rate [L/min] 120 16 130

(Only 400 VAC type) Thermo-chiller Air-cooled 200 V/400 V Type Standard Type HRS090 Series

Circulating uid2 Tap water, 15% ethylene glycol aqueous solution, Deionized water Set temperature range1 C 5 to 35 Cooling capacity 50/60 Hz3 kW 8.0/9.0 Heating capacity 50/60 Hz4 kW 1.7/2.2 Temperature stability5 C 0.5 Circulating uid system Rated ow 50/60 Hz (Outlet)6 L/min 29/45 Maximum ow rate 50/60 Hz L/min 55/68 Maximum pump head m 50 Minimum operating ow rate 50/60 Hz7 L/min 29/45

AW-B 10- Series 21- Filter Regulator AW K-B 10- Series Filter Regulator with 21- Backflow Function

45 45 1/8 1/4 Drain guide port size Relieving type Construction 10-: Fluorine grease 21-: Lithium soap based grease Grease 10-: Class 3 Cleanliness class (ISO class) 21-: Class 3 Options/Part No.

Thermo-chiller Air-cooled 200 V Type Inverter Type HRSH Series (UL Standards)

m Circulating uid Note 1), 2) Tap water, 15 to 40% Ethylene glycol aqueous solution, Deionized water Set temperature range Note 1) C 5 to 35 Cooling capacity Note 3), 9) kW 10.5 15.7 20.5 25 28 Heating capacity Note 4) kW 2.5 3 5.5 7.5 Temperature stability Note 5) C 0.1 Circulating uid system Rated ow (Outlet) L/min 45 (0.43 MPa) 45 (0.45 MPa) 125 (0.5 MPa) Maximum ow rate L/min 120 130

AC Servo Motor Driver (SSCNET Type)

. -45- (4) Waveform Set the waveform data which will be displayed in the graph. Click of each Analog or Digital and set the type of waveform to be displayed. The analogue and digital waveforms that can be set with LECSS are shown below. Analogue waveform No.

AC Servo Motor Driver (CC-Link Type)

system . 35 5.3.6 Remote register-based position/speed specifying system selection . 36 5.3.7 Electronic Gears . 37 5.3.8 Verify of parameters . 38 5.3.9 Parameter initialization . 39 5.4 JOG Mode in the Setup Software . 40 5.4.1JOG Mode. 41 5.5 Changing I/O Signal Allocation . 42 5.5.1 Automatic Input Signal ON Selection Parameter Configuration . 42 5.5.2 Initial I/O Signal Allocation . 45

JXCx-OMU0024

(1) Test Drive . 45 1 - (2) JOG, Inching, and Return to origin in the Teaching window . 46 (3) Single step operation in Step Data window . 47 4.7 Forced output function . 48 (1) Forced output . 48 4.8.

ZK2-C

NO.ZK2-OM00801-B // ZK2-ZSV-A A 2 9 10 11 14 14 15 16 16 17 17 20 20 20 F0 22 F1 OUT1 23 F2 OUT2 25 F3 27 F4 28 F6 30 F11 31 F80 32 F81 33 F90 34 F96 36 F98 37 F99 39 40 B 43 44 45 51 52 52 -1NO.ZK2-OM00801-B (ISO/IEC)(JIS)1)2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems.

Pressure switch for energy-saving control ejector with N.O. type valve

In case of P_1-60 kPa, enter 45 to H_3. (The equation will be changed to P_1H_3-60-45-105, so the vacuum pressure does not reach the point where the energy-saving function is triggered.) * The minimum value of P_1H_3 is -105.

ZQ-OM01401

. +2 +5 +20 Assy +25 +45 +50 [g] ZZQ101-BSB 115 ZZQ101-BSC 130 ZZQ101-BPB 150 ZZQ101-BPC 155 ZZQ101-OB 105 ZZQ101-OC 120 1 +2 (x ) + () + (1 x ) ZQ1-V114-5LU-A ZQ1-V124-5MU-A ZQ1-VQ110L-5L-A / DC24V -10 to 10 (%) 0.4W 1W L M L ( 2 1.7mm 0.2 to 0.33mm ) V100VQ100 33 - No.ZQ-OM01401-B 9.4 ZSE10 [kPa] 0 to -101 -100 to 100 [kPa] 10 to -105 -105 to 105 [kPa] 500 [kPa]

ZQ-OM01601

.2 OFF ON No.1 OFF No.3 No.4 No.5 No.6 44 - No.7 Yes No No.8 No.8 No.9 No.10 No.11 No.12 No.13 No.14 No.15 45 - No.

IDX-OM-U021

45 45 2-1 IDF100150F 2 1 IDX-OM-U021 2 2-2 2-2-1 (1) (85%) () B C 245050 () 2000m ) (2) 2-2 IDF100150F 2 2 IDX-OM-U021 2 2-2-2 P.6-2 6.3 IDF-AB501 14 1 1 1 4 5 3 2 1 600mm 600mm 600mm 600mm 600mm 2-2 IDF100150F 2 3 IDX-OM-U021 2 2-2-3 IDF100F-30 () 2-2 IDF100150F 2 4 IDX-OM-U021 2 2-2-4 60 60 IN OUT 2-2-5 10mm ( 2-2 IDF100150F 2 5 IDX-OM-U021 2 2-2-6 2-2

IDX-OM-Z004

45 45 IDF100150F-W 2.1 2 1 IDX-OM-Z004 2 2.2 2.2.1 (1) (85%) () C 245050 () 2000m ) (2) IDF100150F-W 2.2 2 2 IDX-OM-Z004 2 2.2.2 P.6-3 6.3 IDF-AB501 14 1 1 600mm 600mm 600mm 600mm 600mm 1 2 IDF100150F-W 2.2 2 3 IDX-OM-Z004 2 2.2.3 60 60 IN OUT 2.2.4 40 Y IDF100150F-W 2.2 2 4 IDX-OM-Z004 2 () () Y () 2.2.5 10mm ( IDF100150F-W 2.2 2 5 IDX-OM-Z004 2 2.2.6

IDX-OM-V020

Coefficient factors Inlet air temperature (oC) 5 to 25 30 35 40 45 50 55 60 65 1.42 1.15 1.00 0.71 0.62 0.50 0.40 0.33 0.21 Inlet air pressure (MPa) 0.3 0.4 0.5 0.6 0.7 to 1.6 0.71 0.75 0.82 0.89 1.00 Ambient temperature (oC) 2 to 25 30 35 40 45 1.0 0.85 0.80 0.73 0.62 Calculation example: The air flow capacity when the dew point of IDFA60 is set to 10 oC under the following conditions <

IDX-OM-U022

45 45 IDFA100F150F 2 1 2.1 IDX-OM-U022 2. 2.2 2.2.1 (1) (85%) () B C 245050 () 2000m ) (2) IDFA100F150F 2 2 2.2 IDX-OM-U022 2. 2.2.2 P.6-3 6.3 IDF-AB501 14 1 1 1 4 5 2 3 1 600mm 600mm 600mm 600mm 600mm 1 IDFA100F150F 2 3 2.2 IDX-OM-U022 2. 2.2.3 60 60 .

IDX-OM-W020

F (7.2C) (19 m 3/h) (27 m 3/h) (45 m 3/h) (74 m 3/h) (106 m 3/h) (136 m 3/h) 17 SCFM 28 SCFM 45 SCFM 65 SCFM 86 SCFM 12 SCFM 50 F (10C) (20 m 3/h) (28 m 3/h) (47 m 3/h) (77 m 3/h) (110 m 3/h) (147 m 3/h) 100psig (0.7MPa) 100 F (37.8C) 100 F (37.8C) 115V 60Hz 41-122 F (5-50C) 22psig (0.15MPa) 150psig (1.0MPa) () 36-104 F (2-40C) (85%) () 1 AC115V10% 60Hz (Note3) (2) 2.7A 3.0A