AS-FS Series Speed Controller with Indicator/ Elbow Type: Uni Thread Type

Port size AS-D U01 Uni 1/8 U02 Uni 1/4 U03 Uni 3/8 U04 Uni 1/2 AS-T ASP Needle Valve/Flow Rate Characteristics ASN AS2201FSl-U02, AS2211FSl-U02 AS2201FSl-U01, AS2211FSl-U01 300 600 AQ Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 500 ASV 06, 07, 08, 09, 10 08, 09, 10, 11 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] 03, 04 06, 07 200 400 AK 01, 23 300 VCHC 03, 04 100 200 ASR ASQ 01, 23

Speed Controller with One-touch Fittings In-line Type/Panel Mount Type AS  1F-3 Series

How to Order 1 F 06 3 200 AS Flow Direction Symbols on Body Hexagon lock nut Round lock nut J Nil Lock nut option Body size Indication symbol Panel mount type Symbol M5 standard 1/8 standard 1/4 standard 3/8 standard 1/2 standard 100 200 205 300 400 Made to Order Refer to page 622 for details. Applicable tubing O.D.

Speed Controller with Uni One-touch Fitting AS Series Push-lock type

With One-touch fitting Port size U01 Uni 1/8 U02 Uni 1/4 U03 Uni 3/8 U04 Uni 1/2 Needle Valve/Flow Rate Characteristics AS2201F-U02, AS2211F-U02 AS2301F-U02, AS2311F-U02 AS2201F-U01, AS2211F-U01 AS2301F-U01, AS2311F-U01 600 300 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 06, 07, 08, 09, 10 500 08, 09, 10, 11 Flow rate L/min (ANR) Flow rate L/min (ANR) 03, 04 06, 07 200 400 01, 23 300

Tie-rod Type Hydraulic Cylinder

24 12 35 34 1/2 27 35 32 77 137 8 160 43 100 M16 x 2 M33 x 2 42 9 174 22 28 24 20 140 45 18 27 12 38 38 3/4 36 40 36 94 155 8 (mm) Without rod boot With rod boot Bore size (mm) H l ZZ e f h ZZ 40 66 185 55 25 92 211 50 73 201 60 28 99 227 1/4 stroke 63 80 212 65 30 106 238 80 90 236 80 32 116 262 100 100 258 100 35 123 281 1/5 stroke 125 100 261 100 35 123 284 160 108 290 120 38 131 313 400

Cylinder

Spring Retracting FOFce {g~ ) Bore size Stroke I0 Stroke 1 Stroke Stroke(mm) 5 I 10 I ' 5 Mopel (mm) (mm) end 6 5"10,15 I 15a I 400 _ _ C _ J_ pe_ 6_ + _ _ ,a.6 ' 131 " t 15.6 CJP. IO 28J3 3 38 10 5 , 1O,~ 25a 610 15 5.10,'5 450 I 1100 *' WeIght of hose nipple(.dgf) IS not included. lllSame spring force 1 0 f each stroke.

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

Vacuum Suction Type (Reference values) Specifications Suction flow rate L/min (ANR) Bore size (mm) 12/16/20/25 Size 5 12/16/20/25 Item Proof pressure 1.5 MPa Maximum operating pressure 1.0 MPa Minimum operating pressure 12, 16: 0.07 MPa, 20, 25: 0.05 MPa Without auto switch : 10C to 70C Ambient and fluid temperature With auto switch : 10C to 60C (No freezing) Cushion None Piston speed 30 to 400

Series REC 10- ø20, ø25, ø32, ø40 11- Sine Cylinder

150 to 700 45 1/8 150 to 1000 200 to 1000 50 1/4 60 Suction Flow Rate of Vacuum Suction Type (Reference values) Specifications Size Suction flow rate L/min (ANR) 20 25/32/40 Bore size (mm) Item 20/25/32/40 1 2 1.5 MPa 1.0 MPa 0.2 MPa 10C to 60C (With no freezing) Proof pressure Maximum operating pressure Minimum operating pressure Ambient and fluid temperature Piston speed Cushion 50 to 400

SMC

Piston speed Caution The cylinder speed upper limit that retains the particle generation grade is 400 mm/s. Back matter 5 Clean series: Common Precautions 3 Be sure to read before handling. Refer to the main text for detailed precautions for every series.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Weight (g) Vane type Single vane Double vane CRB2BW15-S CRB2BW20-S CRB2BW30-S CRB2BW40-S CRB2BW10-D CRB2BW15-D CRB2BW20-D CRB2BW30-D 90 Model CRB2BW40-D CRB2BW10-S 90 180 180 100 270 180 90 270 270 180 270 180 90 90 90 270 90 100 90 100 90 100 90 100 Rotating angle Body of rotary actuator 26.3 26.0 376 400 446 25.7 49 387 365 48 105 103 198 50 106 203 193 42 43 57 60 121 144 223 243 Flange

Possible to transfer a workpiece at low-speed.

DAdjustment range by adjustment bolt B Adjustment range by adjustment bolt B Adjustment range by adjustment bolt B 90 Rotation 90 Rotation 90 Rotation 335 MSQX Series Table Displacement (Reference values) The following graphs show the displacement at point A, which is 100 mm apart from the center of rotation, where the load is applied. 100 Load Arm A Displacement MSQXB10A MSQXB20A 300 400

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Smooth Cylinder 400 _ 800 '200 1600 Strni

Series CXS 10-/11-/12- Dual rod cylinder 21-/22- ø6, ø10, ø15, ø20, ø25, ø32

Suction flow rate of vacuum suction type (Reference values) Specifications 6 10 Bore size mm Fluid Proof pressure Max. operating pressure Min. operating pressure Ambient and fluid temperature Piston speed Cushion Stroke adjustable range Port size Air (Non-lube) Size Suction flow rate l/min (ANR) 6 10 1.05MPa 7 15 0.7MPa 0.15MPa 0.1MPa 10C to 60C (With no condensation) 30 to 400 mm/s Rubber

Micro Mechanical Valve Series VM1000

Application Weight (g) Actuator Model Polyacetal roller 300 310 320 320 330 420 410 420 400 Basic VFM250-02-00 Mechanical operation Manual operation VM-08D VM-06DS VM-06D VM-05D VM-02CS VM-02C VM-01CS VM-01C Roller lever VFM250-02-01 VFM250-02-01S Hard steel roller One way roller lever VFM250-02-02 VFM250-02-02S Polyacetal roller Hard steel roller Straight plunger VFM250-02-05 Polyacetal

VS 8-2/VS 8-4

number 4 2 1 3 L2 L1 (n-1) x 27 27 36.5 21 56 56 2 21 98 Indicator light Manual override 173 (Double dual 3-port) 139.5 (Single) 188.5 (3-position) 157.5 14 14 14 14 PWR 131 115 COM series EX500 12 12 12 12 SMC 8 SI unit 4 x M5 mounting holes Formula: L1 = 27n + 85, L2 = 27n + 130 n: Stations (Maximum 16 stations) Dimension (mm) 7 L n 9 328 373 112 157 1 166 211 301 346 8 274 319 10 355 400

7

For a 15 orifice (VXD242/Port size 1/2), P 0.16 MPa, for a 20 orifice (VXD252), P 0.055 MPa, for a 25 orifice (VXD262), P 0.032 MPa 1,000 Port size 2 50 Cv = 49 VX2 Port size 1 1/2 40 Cv = 31 500 400 Port size 1 1/4 35 Cv = 23 Port size 1 25 Cv = 12.5 VXK 300 Port size 3/4 20 Cv = 9.5 VXD VXD 200 VXZ Flow rate Q [L/min] Port size 1/2 15 Cv = 5.5 100 VXS Port size 3/8 15 Cv = 4.5 VXB 50

Stability of suction position,

Use a vacuum ejector with a high suction flow rate. 400 Model Selection Condition & Description of improvement Contributing factor Countermeasure Initial adsorption problem (During trial operation) Pressure drop of vacuum piping is large. Reconsider vacuum piping. Use a shorter or larger tube (with appropriate diameter).

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0.019 0.077 0.173 0.307 0.483 0.81 IT,lmtig 400 0.017 0.068 0.154 0.273 0.427 0.72 35~ 0.Q15 0.060 0.135 0.239 0.374 I 0.63 " . > JOCt 0.013 0.051 0.115 0.205 0.320 0.54 , , I?a:20 . 25 I 932 >40 1>50 2T 3T 4T Response time (sec) Aclsorpti&." area (em:!)

Clean Regulator/Fluororesin Type

MPa Deionized water (Pure water), N2 5 to 60C 10 cm3/min or less (fluid: water) 0.24 Maximum operating pressure (pilot pressure) Fluid Ambient and fluid temperature Valve leakage Tubing Integrated fittings With nut 0.08 1.2 Weight (kg) 0.10 0.28 1.3 Particulate Generation Characteristics Flow-through Characteristics Particle concentration (particles/mL) Particle diameter: 0.1 m or larger 400

CQ2

load W (N) 100 200 200 80 80 63 100 100 63 50 40 50 40 32 32 0 10 20 30 40 50 60 70 80 90 100 0 10 20 30 40 50 60 70 80 90 100 Stroke St (mm) Stroke St (mm) Bore size (mm) Cylinder stroke (mm) Weight Unit: g 15 10 5 100 75 50 45 40 35 30 25 20 482 32 329 308 587 287 267 246 225 204 184 142 163 616 40 432 409 736 386 362 339 316 293 270 224 247 982 50 690 653 1170 617 581 545 508 472 436 400

CRB2/CRBU2/CRB1

Weights (g) Vane type Single vane Double vane Model CRB2BW40-S CRB2BW10-D CRB2BW15-D CRB2BW20-D CRB2BW30-D CRB2BW15-S CRB2BW20-S CRB2BW30-S CRB2BW40-D CRB2BW10-S Rotation 90 180 180 90 100 270 180 90 270 270 180 270 180 90 90 90 270 90 100 90 100 90 100 90 100 Body of rotary actuator 26.3 26.0 376 400 446 25.7 49 387 365 48 105 103 198 50 106 203 193 42 43 57 60 121 144 223 243 Flange assembly