Air Slide Table Long Stroke Type Series MXY ø6, ø8, ø12 1

4 25 2.5 25 5 14 MXY12 M5 x 0.8 31 52 40 15 86 8.5 30.9 5 3 36 32 6 18 PH TB Z T WR RL QW R RH WE WD Q W PR P PL TH Model MXY6 5.1 2.9 88 4 12 60 5 7 30 11 13 3(depth 3) 3(depth 3) 2.5 9 20 25.5 MXY8 6.1 98 3.4 4 15 70 6.5 7 38 19 13 3(depth 3) 3(depth 3) 3 10 25 32 MXY12 7.8 114 4.5 21 5 8.5 90 7 50 29 18 4(depth 4) 4(depth 4) 4 13 33 42 n QL Model 50 100 150 200 250 300 350 400 50

IC

0 VEX IC-0(Internal sensor type) IC-1(External sensor type) No. q w e r Description Note Breathing port (M3 x 0.5 x 9.5) Breathing port (M3 x 0.5 x 9.5) Power supply, 10 bit input cable 13 wire, O.D. 6.8 mm, 1 mm length AMR Pneumatic regulator connection cable 5 wire, O.D. 6 mm, 1 mm length q q Cable for 4 point switch output ITV 3 wire, O.D. 3.4 mm, 1 mm length Cable for external sensor

10

0 q !6 r RJ10, 14, 2015, 2725 w i !2 r !3 !1 q e t y u o !0 !6 Component Parts No. Material Treatment Description No.

Heavy Duty Stopper Cylinder

head cap screw (M2.5 x 12 L). e If the detecting position is changed, go back to step q.

17

6 @5 #5 q #9 #4 !3 #2 !2 @1 !0 @2 @6 #6 #3 @8 #1 @4 o #8 !

4/5 Port Solenoid Valve Rubber Seal Series SYJ3000 For details about certified products conforming to international standards, visit us at www.smcworld.com.

center (A) 4 (B) 2 SX q t r w 5 (R) 3 (R) 1 (P) (B) 2 (A) 4 3 position exhaust center (A) 4 (B) 2 5 (R) 3 (R) 1 (P) 3 position pressure center u (A) 4 (B) 2 3 (R) 1 (P) 5 (R) (This figure shows a closed center type.) 5 (R) 3 (R) 1 (P) Component Parts Replacement Parts Note Zinc die-casted Part no.

Step Motor (Servo/24 VDC) Electric Actuator Miniature Rod Type LEPY Series LEPY6, 10

q Check the actuator label for model number. This matches the controller/driver. w Check Parallel I/O conguration matches (NPN or PNP). q w Refer to the operation manual for using the products.

SI Unit for Vacuum Manifold

Designation Content 1 L+ +24 V for logic/input 2 P24 +24 V for output 3 L0 V for logic/input 4 C/Q IO-Link communication data 5 N24 0 V for output Fig 2-1. Pin allocation of M12 5 pins plug A-coded connector The power supply for logic/input and the power supply for output are isolated. 2.2.

Compact End Lock Cylinder Series CBQ2

Q End lock mechanism dimensions (mm) B + Stroke L J E Bore size (mm) HN (Max.)

e-Rodless Actuator

The tightening torque should be 0.1 to 0.2 Nm. 5 to 6 14 e-Rodless Actuator Series E-MY2 Names and Functions of Individual Part Controller detail w t q u End Motor I/O cable Controller Power supply cable Slider i y e r Switch FG terminal Motor side end Description Content/Function q w e r t y u i Stroke learning switch Description Content/Function Switch to move the actuator to intermediate

Compact Cylinder with Air Cushion Series RQ

Standard type (through hole, double end tapped common)/RQB, RDQB 2-M5 x 0.8 (port size) 2-cushion needle 2 x 4-9 depth of counter bore 7 H effective thread depth C E1 E2 Q F 4-5.4 through D M E 1 Flat washer 4 pcs.

Sine Rodless Cylinder Series REBR Direct Mount Type

0 @1 r t e u y @0 q @2 @4 @8 @9 !3 !8 !7 #0 @6 o @3 w @7 !5 @5 !4 REBR15 Parts list Parts list No. Description Material Note No.

2 Phase Stepper Motor/Without Motor Brake Series LXS

Home position switch (optional) De-energized operating type 0.1Nm 24VDC 5% 5W (at 75C) Model Static torque Rated voltage Power consumption Brake specifications Applicable driver Positioning repeatability LC6D-220AD-Q (Refer to page 306 for details.) LC6D-507AD-Q (Refer to page 306 for details.) 0.05mm Holding plate: MB1 (1 pc.), Phillips countersunk head screw: M3 x 6l (1 pc.)

CV/MVGQ

Description Note Note Material Aluminum alloy Material Zinc alloy Clear anodized Plate q !2 MK(2) Refer to the note below. Clear anodized Aluminum alloy Head cover Solenoid valve w !3 Stainless steel Cylinder tube Aluminum alloy Clear anodized Pipe e !4 RS Q G Stainless steel Piston rod NBR Piston seal r !5 Brass Piston NBR Rod seal t !

IC

No. q !0 q CONTROLLER PRESSURE OUT w Position Detection Switch Flow Sensor Pressure Control Pressure Sensor e w r RUN 4 3 2 1 CH kPa 4 3 2 1 SW t e y D-IN RUN UP SET P-ON DOWN STOP READ r u i o t y u i o !

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

LEKFS Series Workpiece mounting pitch: Same dimensions Table width Height q LEFS Series Height w Body mounting pitch: Same dimensions Body width The body bottom positioning pin holes have been standardized.

Line Filter Rated Pressure: 3.5, 7, 14, 21 MPa FH34/44/54/64 Series

Differential pressure indication switch r O-ring Applicable Applicable q O-ring w O-ring e O-ring Port size order no. hydraulic hydraulic order no. order no. order no.

Refrigerated Air Dryer

Port size Model AFF IDFA22E IDFA37E R 1 775 600 290 623 134 405 698 93 13 25 85 340 R 11/2 855 680 AM AMD IDFA55E, IDFA75E AMH A R B AME AMF Q E ZFC D SF G SFD F LLB C AD GD M N L P K 4 x 13 Dimensions (mm) A B C D E F G K L M N P Q R Model Port size IDFA55E IDFA75E 800 (868) R 2 470 855 (128) (273) (110) 13 500 75 700 526 (110) 519 900 (968) 97 Refrigerant R407C (HFC) IDFA100F/125F/150F

SMC Pneumatic Clean Series

: 10 or more The mean q Non-unidirectional airflow: at least two locations NL = A x 64/(10M) 0.5 q Number of sampling locations: 2 to 9 95% UCL of the mean and the mean of the averages w Number of sampling locations: 1, or 10 or more The mean Derive it from the area of the cleanroom or clean air controlled space.

SMC Pneumatic Clean Series

: 10 or more The mean q Non-unidirectional airflow: at least two locations NL = A x 64/(10M) 0.5 q Number of sampling locations: 2 to 9 95% UCL of the mean and the mean of the averages w Number of sampling locations: 1, or 10 or more The mean Derive it from the area of the cleanroom or clean air controlled space.