sResponse timeHysteresisPower supply voltageResistancePF2A750Air, Nitrogen2.5 to 52.5 l/min2.5 to 52.5 l/min5 to 50 l/min0.5 l/min0.5 l/pulsel/min, CFM x 10-2l, ft3 x 10-10 to 50C?5% F.S. or less?1% F.S. or less?3% F.S. or less (15 to 35C, based on 25C), ?5% F.S. or less (0 to 50C, based on 25C)150 mA or less250 g1/8, 1/4Heater type3-digit, 7-segment LED?

sResponse timeHysteresisPower supply voltageResistancePF2A750Air, Nitrogen2.5 to 52.5 l/min2.5 to 52.5 l/min5 to 50 l/min0.5 l/min0.5 l/pulsel/min, CFM x 10-2l, ft3 x 10-10 to 50C?5% F.S. or less?1% F.S. or less?3% F.S. or less (15 to 35C, based on 25C), ?5% F.S. or less (0 to 50C, based on 25C)150 mA or less250 g1/8, 1/4Heater type3-digit, 7-segment LED?

sResponse timeHysteresisPower supply voltageResistancePF2A750Air, Nitrogen2.5 to 52.5 l/min2.5 to 52.5 l/min5 to 50 l/min0.5 l/min0.5 l/pulsel/min, CFM x 10-2l, ft3 x 10-10 to 50C?5% F.S. or less?1% F.S. or less?3% F.S. or less (15 to 35C, based on 25C), ?5% F.S. or less (0 to 50C, based on 25C)150 mA or less250 g1/8, 1/4Heater type3-digit, 7-segment LED?

sResponse timeHysteresisPower supply voltageResistancePF2A750Air, Nitrogen2.5 to 52.5 l/min2.5 to 52.5 l/min5 to 50 l/min0.5 l/min0.5 l/pulsel/min, CFM x 10-2l, ft3 x 10-10 to 50C?5% F.S. or less?1% F.S. or less?3% F.S. or less (15 to 35C, based on 25C), ?5% F.S. or less (0 to 50C, based on 25C)150 mA or less250 g1/8, 1/4Heater type3-digit, 7-segment LED?

sResponse timeHysteresisPower supply voltageResistancePF2A750Air, Nitrogen2.5 to 52.5 l/min2.5 to 52.5 l/min5 to 50 l/min0.5 l/min0.5 l/pulsel/min, CFM x 10-2l, ft3 x 10-10 to 50C?5% F.S. or less?1% F.S. or less?3% F.S. or less (15 to 35C, based on 25C), ?5% F.S. or less (0 to 50C, based on 25C)150 mA or less250 g1/8, 1/4Heater type3-digit, 7-segment LED?

sResponse timeHysteresisPower supply voltageResistancePF2A750Air, Nitrogen2.5 to 52.5 l/min2.5 to 52.5 l/min5 to 50 l/min0.5 l/min0.5 l/pulsel/min, CFM x 10-2l, ft3 x 10-10 to 50C?5% F.S. or less?1% F.S. or less?3% F.S. or less (15 to 35C, based on 25C), ?5% F.S. or less (0 to 50C, based on 25C)150 mA or less250 g1/8, 1/4Heater type3-digit, 7-segment LED?

sResponse timeHysteresisPower supply voltageResistancePF2A750Air, Nitrogen2.5 to 52.5 l/min2.5 to 52.5 l/min5 to 50 l/min0.5 l/min0.5 l/pulsel/min, CFM x 10-2l, ft3 x 10-10 to 50C?5% F.S. or less?1% F.S. or less?3% F.S. or less (15 to 35C, based on 25C), ?5% F.S. or less (0 to 50C, based on 25C)150 mA or less250 g1/8, 1/4Heater type3-digit, 7-segment LED?

sResponse timeHysteresisPower supply voltageResistancePF2A750Air, Nitrogen2.5 to 52.5 l/min2.5 to 52.5 l/min5 to 50 l/min0.5 l/min0.5 l/pulsel/min, CFM x 10-2l, ft3 x 10-10 to 50C?5% F.S. or less?1% F.S. or less?3% F.S. or less (15 to 35C, based on 25C), ?5% F.S. or less (0 to 50C, based on 25C)150 mA or less250 g1/8, 1/4Heater type3-digit, 7-segment LED?

sResponse timeHysteresisPower supply voltageResistancePF2A750Air, Nitrogen2.5 to 52.5 l/min2.5 to 52.5 l/min5 to 50 l/min0.5 l/min0.5 l/pulsel/min, CFM x 10-2l, ft3 x 10-10 to 50C?5% F.S. or less?1% F.S. or less?3% F.S. or less (15 to 35C, based on 25C), ?5% F.S. or less (0 to 50C, based on 25C)150 mA or less250 g1/8, 1/4Heater type3-digit, 7-segment LED?

sResponse timeHysteresisPower supply voltageResistancePF2A750Air, Nitrogen2.5 to 52.5 l/min2.5 to 52.5 l/min5 to 50 l/min0.5 l/min0.5 l/pulsel/min, CFM x 10-2l, ft3 x 10-10 to 50C?5% F.S. or less?1% F.S. or less?3% F.S. or less (15 to 35C, based on 25C), ?5% F.S. or less (0 to 50C, based on 25C)150 mA or less250 g1/8, 1/4Heater type3-digit, 7-segment LED?

sResponse timeHysteresisPower supply voltageResistancePF2A750Air, Nitrogen2.5 to 52.5 l/min2.5 to 52.5 l/min5 to 50 l/min0.5 l/min0.5 l/pulsel/min, CFM x 10-2l, ft3 x 10-10 to 50C?5% F.S. or less?1% F.S. or less?3% F.S. or less (15 to 35C, based on 25C), ?5% F.S. or less (0 to 50C, based on 25C)150 mA or less250 g1/8, 1/4Heater type3-digit, 7-segment LED?

sResponse timeHysteresisPower supply voltageResistancePF2A750Air, Nitrogen2.5 to 52.5 l/min2.5 to 52.5 l/min5 to 50 l/min0.5 l/min0.5 l/pulsel/min, CFM x 10-2l, ft3 x 10-10 to 50C?5% F.S. or less?1% F.S. or less?3% F.S. or less (15 to 35C, based on 25C), ?5% F.S. or less (0 to 50C, based on 25C)150 mA or less250 g1/8, 1/4Heater type3-digit, 7-segment LED?

sResponse timeHysteresisPower supply voltageResistancePF2A750Air, Nitrogen2.5 to 52.5 l/min2.5 to 52.5 l/min5 to 50 l/min0.5 l/min0.5 l/pulsel/min, CFM x 10-2l, ft3 x 10-10 to 50C?5% F.S. or less?1% F.S. or less?3% F.S. or less (15 to 35C, based on 25C), ?5% F.S. or less (0 to 50C, based on 25C)150 mA or less250 g1/8, 1/4Heater type3-digit, 7-segment LED?

sResponse timeHysteresisPower supply voltageResistancePF2A750Air, Nitrogen2.5 to 52.5 l/min2.5 to 52.5 l/min5 to 50 l/min0.5 l/min0.5 l/pulsel/min, CFM x 10-2l, ft3 x 10-10 to 50C?5% F.S. or less?1% F.S. or less?3% F.S. or less (15 to 35C, based on 25C), ?5% F.S. or less (0 to 50C, based on 25C)150 mA or less250 g1/8, 1/4Heater type3-digit, 7-segment LED?

sResponse timeHysteresisPower supply voltageResistancePF2A750Air, Nitrogen2.5 to 52.5 l/min2.5 to 52.5 l/min5 to 50 l/min0.5 l/min0.5 l/pulsel/min, CFM x 10-2l, ft3 x 10-10 to 50C?5% F.S. or less?1% F.S. or less?3% F.S. or less (15 to 35C, based on 25C), ?5% F.S. or less (0 to 50C, based on 25C)150 mA or less250 g1/8, 1/4Heater type3-digit, 7-segment LED?

Exhaust Cleaner for Vacuum Pump AMV Series

AMV6-14 AMV15-20 AMV37-20 AMV75-30 AMV160-40 1.6 3.0 5.9 10 43 59 0.3 0.5 1.0 1.0 10 10 360 650 1,500 3,700 7,500 16,000 1 1 1/2 2 2 80 (3B) JIS 10K FF flange 360 650 1,500 3,700 7,500 16,000 100 (4B) JIS 10K FF flange Construction Gasket Cover Element Tension bolt No Description Material Component Parts 1 2 3 4 Holder Case Cover Tension bolt Aluminum alloy Carbon steel Carbon steel Carbon

D-F6N/D-F6P/D-F6B

Electrical entry direction In-line Wiring type 2-wire 3-wire NPN PNP Output type Applicable load IC circuit, relay, and PLC 24 VDC relay, PLC Power supply voltage 5, 12, 24 VDC (4.5 to 28 V) Current consumption 10 mA or less Load voltage 24 VDC (10 to 28 VDC) 28 VDC or less Load current 2.5 to 40 mA 40 mA or less Internal voltage drop 4 V or less 0.8 V or less at 10 mA (2V or less at

Slit Valve

10 O-ring: FKM Internal leak Note 2) (Pam3/s) O-ring: Kalrez 6.5 x 10 9 6.5 x 10 8 Internal leak Note 2) (Pam3/s) at reversed pressure [Reversed pressure: 0.1 MPa (abs) or less] O-ring: FKM O-ring: Kalrez 6.5 x 10 7 6.5 x 10 11 External leak Note 2) (Pam3/s) Gate part 5 to 150 Operation temperature Note 3) (C) Actuator part 5 to 60 Inert gas Fluid 0.6 to 1 Operating time Note 4) (s) FKM,

Settings can be copied to up to 10 slave sensors at once?

Settings can be copied to up to 10 slave sensors at once?