SMC Corporation of America
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(mm) 72.9 L1 L2 L3 Manifold part no. 1 2 3 4 5 6 7 8 Stations n Vacuum (V) port ZZA101ZZA102ZZA103ZZA104ZZA105ZZA106ZZA107ZZA10810 20 28 Supply pilot valve 20 30 38 30 40 48 Release valve 40 50 58 50 60 68 60 70 78 57.6 70 80 88 Approx. 3000 80 90 98 9.6 5.8 5 Suction filter 10 12 14 n x 10 M5 both sides common air pressure supply (P) port P P Note 1) The above dimensions are for ZZA103-

Side mounting Body tapped Maximum tightening Thread depth: Max. thread depth: Model Bolt L1(mm) L2(mm) torque MXQ6 M40.7 2.1 5 8 MXQ8 M40.7 2.1 8 11 MXQ12 M50.8 4.4 11 15 MXQ16 M61 7.4 14 19 MXQ20 M61 7.4 9 MXQ25 M81.25 18 12 MXQ6A M40.7 2.1 8 11 MXQ8A M40.7 2.1 8 11 MXQ12A M50.8 4.4 8 12 MXQ16A M61 7.4 12 17 MXQ20A M61 7.4 9 MXQ25A M81.25 18 12 MXQ6B M40.7 2.1 5 8 MXQ8B M50.8 4.4 4 9 MXQ12B

Single Knuckle Joint Double Knuckle Joint Sphere R(R1) (mm) (mm) NDH10 A1 E1 L1 MM A1 E1 L1 MM Part no. Size Size Part no.

Applicable bore size (mm) Applicable bore size (mm) A B L L1 L2 MM NX R1 R2 U A NDd9 NDH10 B L1 L2 MM NDH10 NX R1 R2 U Part no. Part no.

8 164 176 244 256 9 182 194 272 284 10 200 212 300 312 38 50 48 60 ZFA100 L2 L1 L2 ZFA200 1107 Air Suction Filter With One-touch Fittings Series ZFB Model Recommended air flow (l/min (ANR)) (1) Internal capacity (cm3) Port size (Applicable tubing O.D.)

A1 L2 A2 A1 Mp W L1 A1 Mr Static moment Dynamic moment Graph (1) Load Mass: W W W MXJ4 A3 L3 L2 A2 0.10 L3 A3 Rubber stopper Mr Load mass W kg Mp 0.08 My Metal stopper W 0.06 W W 0.04 Mey Mep We 0.02 We L3 L2 A2 0.00 Collision speed V mm/s (Average speed x 1.4) 0 200 100 300 400 500 600 700 A3 MXJ6 Note) Static moment: Moment generated by gravity Dynamic moment: Moment generated by impact

Lateral Mounting (Body through-hole) Lateral Mounting (Body tapped) Model MXH6 MXH10 MXH16 MXH20 Bolt M3 x 0.5 M4 x 0.7 M4 x 0.7 M5 x 0.8 Maximum tightening torque (Nm) 1.1 2.5 2.5 5.1 l1 12.7 15.6 20.6 24.0 l1 12.7 15.6 20.6 24.0 l 9.4 11.2 16.2 16.0 Maximum tightening torque (Nm) 2.5 5.1 5.1 8.1 Bolt M4 x 0.7 M5 x 0.8 M5 x 0.8 M6 x 1 Model MXH6 MXH10 MXH16 MXH20 Vertical Mounting (Body

Model/Stroke Width at closing (mm) Width at opening (mm) Max. operating frequency Opening/Closing stroke (mm) Mass (g) Bore size (mm) Model (L1) (L2) (L2-L1) c.p.m MHL2-10D MHL2-10D1 MHL2-10D2 MHL2-16D MHL2-16D1 MHL2-16D2 MHL2-20D MHL2-20D1 MHL2-20D2 MHL2-25D MHL2-25D1 MHL2-25D2 MHL2-32D MHL2-32D1 MHL2-32D2 MHL2-40D MHL2-40D1 MHL2-40D2 60 20 56 76 280 40 78 118 345 10 40 60 96 156 425 30

Model Bolt Proper tightening torque N.m L1 MGZ/MGZR20 MGZ/MGZR25 MGZ/MGZR32 MGZ/MGZR40 MGZ/MGZR50 MGZ/MGZR63 MGZ/MGZR80 L2 11 11 16 16 16 16 20 10 10 12 12 15 15 23 2.5 to 3.1 2.5 to 3.1 4.1 to 6.4 4.1 to 6.4 8.8 to 13.8 8.8 to 13.8 30.4 to 47.5 M5 x 0.8 M5 x 0.8 M6 x 1 M6 x 1 M8 x 1.25 M8 x 1.25 M12 x 1.75 L2 L1 2.

(mm) 10 9 8 7 6 5 4 3 2 Manifold stations n L1 L2 180 165 150 135 120 105 90 75 60 235.5 223 198 185.5 173 160.5 148 123 110.5 14-8-10 11 Compact Electro-pneumatic Regulator Series ITV0 Precautions Be sure to read before handling. Refer to pages 14-21-3 to 14-21-4 for Safety Instructions and Common Precautions. Air Supply Handling Caution 1.

L2 L1 L2 VVX31 LQ VVX32 VVX33 LVN Z 59 62 64 W 83 99 106 X 47 48 51 Y 47 58 67 V 102 114 123 S 39 41 44 T 59 62 64 U 92 95 97 Q 23 25 28 L 6 9 9 M 45.5 50.5 50.5 N 20 23 25.5 K 36 46 46 F 33 34 34 H 24 25 25 J 30 40 40 D 22 24 24 A 40 44 44 B 20 22 22 C 9 10 10 Model VVX31 VVX32 VVX33 TI/ TIL PA PAX PB 17-3-91

EX) VV5FR4-10-l1-l VV5FR4-10-l2-l Caution Refer to p.0-33 to 0-36 for Safety Instruction and common precautions. EX) VV5FRA4-10-061-03 1 pc. VFRA4111 5 pcs.

Pitch (Section F-F') Port size (The above diagram is for ZFA200) ZFA100 Port size Symbol Model A B 19 18 24 28 1 8 1 4 ZFA200 L1 1 Number of manifold stations Model Symbol 2 56 68 76 88 3 74 86 104 116 4 92 104 132 144 5 110 122 160 172 6 128 140 188 200 7 148 158 216 228 8 164 176 244 256 9 182 194 272 284 10 200 212 300 312 38 50 48 60 ZFA100 L2 L1 L2 ZFA200 13-10-3

Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Pitch P = 16 Common SUP. port 2-M5 x 0.8 Individual SUP. port Common pilot EXH. port VAC port Silencer dedicated for manifold VAC. port electrical entry (In the case of side entry/With plug at the bottom) Rc 1/8 Hexagon socket head cap plug (mm) L1

VAC. port Silencer dedicated for manifold (mm) L1 1 Stations L 28 1.5 40 1.5 72 1.5 10 3 60 1.5 72 1.5 104 1.5 4 76 1.5 88 1.5 120 1.5 5 92 1.5 104 1.5 136 1.5 6 108 2.0 120 2.0 152 2.0 7 124 2.0 136 2.0 168 2.0 8 140 2.0 152 2.0 184 2.0 9 156 2.0 168 2.0 200 2.0 2 44 1.5 56 1.5 88 1.5 172 2.0 184 2.0 216 2.0 L2 L3 13-4-31

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com L2 L1 ZL Release flow adjusting screw ZY 8 P PE Exhaust part 2-3.5 ZQ 62.8 (Body mounting hole Note 1)) 3 75 Suction filter ZF With L type plug connector ZP Vacuum pressure switch PE P EXH ZCU AMJ S R U N L H L H S R U N L H L H S R U N L H L H S R U

l 0.437 hf20 0.75 o.749 0.34 1.32 o.25 3.41 1.06 %-16 0.88 1.37 0.74 15O l1%) o.437 o.75 0.749 o.38 1.56 o.25 3.3A 1.25 3a-16 0.8a 1.25 0.62 5.12 @ Air Cvlinder Stain]esJ Steel Cylinder Series NCM Single Acting Spring Return /Spring Extend slrc' DITENSIONS NC BO-OS NCilCO-OS F 1.69 1.56 *o T'ICMBO.OT |-1 rr"" o*"-\H @ slrc' Air Cvlinder Stainles5 Steel Cylinder Series NCM Non-RotatinCRod

8 lrg , L1 2.28 (58) 2.91 174) 3.54 (90) (06) 4.80 112.) 5.43 (38) 6.06 054) 6.69 (170) 086) t,n2) 8.58 (a8) 9.21 (234) 9.84 (250) 10.47 (266) 1110 1282) 11.73 (298) (3|4) 12.99 (330) 13.62 (346) L2 1.57 \40) 2.20 (561 2.43 (72) 3.,16 (88) 4.09 (ta) 4.72 0n) 036) 5.98 ,.152) 068) 7.24 (184) 7.87 8.50 (2oo) (26) 9.'13 1232) 9.76 \248) 10.39 l2u) 11.02 \2fi) 11.65 (296) 12.24 \312) 12.91 (328

CA2 ND hole H10 CS1 Axis d9 C76 C85 Material: Rolled steel Material: Brass Material: Iron C95 Applicable bore (mm) A1 L MM L1 Part no. Applicable bore (mm) Applicable bore (mm) d C C d Part no. B H Part no.

E1 NDH10 Size A1 E1 MM Size L1 L1 MM A1 +0.058 0 +0.058 0 +0.058 0 +0.070 0 8 10 10 14 10.5 12 14 18 16 18 20 28 27 31 36 46 M10 X 1.25 M12 X 1.25 M14 X 1.5 M18 X 1.5 10.5 12 14 18 14 18 20 28 27 31 36 46 M10 X 1.25 25 32 40 50, 63 25 32 40 50, 63 I-MU02 I-MU03 I-MU04 I-MU05 Y-MU02 Y-MU03 Y-MU04 Y-MU05 M12 X 1.25 M14 X 1.5 M18 X 1.5 Applicable pin NDH10 NL U1 U1 Part No. NO Part No.