ZSE30/ISE30

For positive pressure ZSE30 01 25 M For vacuum/Low pressure Option 2 Piping specification R 1/8 (with M5 female thread) NPT 1/8 (with M5 female thread) 01 T1 None Bracket Nil A Output specification NPN output PNP output 1 to 5V output 4 to 20mA output 25 65 26 28 Panel mount B Unit specification Nil M With unit switching function Fixed SI unitI (International System of Units) Note) Note)

Series DXT474

M type connector w/ plug and 300 mm lead wire MO M type connector w/o plug and lead wire MN M type connector w/ plug and pins Air Operated Valve DXT474-A Valve Manifold Assembly DXT475 A * * * * * * 02 * Valve Actuation Type Sup.

asilltr

C Rubber Bumper M Male Rod CM Rubber Bumper & Male Rod Feed Switch B Basic Model A Threaded Mounting Holes.

NCRAI seies

E* A73L D-A73L Parls M 3 X 0 . 5 X 3 M 3 X 0 . 5 X 5 M 3 X 0 . 5 X 5 M 3 X 0 . 5 X 5 tvl3x0.5x5 @ Rotary Actuator Series:NCRAl l n ck and pinion rype ||m 30(17Ie) 50121,63(2 %),80(3 %),1 0o{4) Fluid Air Air o o o o 90' 180' 100" 190" Rotatio 1 ) o r)o Basic o o Shaft Singleend Doubleend o o o Body option With ctshion a Wlthalctqruitph -oand to 200. lrom 180" model.

With Factory Installed

_Ie SMC CORPORATION 1-16-4 Shimbashi, Minato-ku, Tokyo 105 JAPAN Tel:03-3502-2740 Fax:03-350S-24S0 15t printing June 1995.D-036,P-62(M) Specifications are subject to change without prior notice November 1997. 39(RP) Printed in Singapore and any obligation on the part of the manufacturer.

,

Solenoid Valve (with M Connector) Conforming to ISO 15407-1 , , ISO 15407-1 Interface Large capacity Size 01 (EVS1-01) and Size 02 (EVS1-02) Interface conforms to ISO 15407-1 Flow rate Cylinder driving size EVS1-01 (Size: 01) EVS1-02 (Size: 02) 100 80 1000L/min (ANR) 400L/min (ANR) Accommodates enclosure IP65 Dust/Splashproof type Light weight Size 01 (3-position): 0.26kg Size 02 (3-position

CU

Lead wire length (m) Load voltage Auto switch part no.

AMPSeries

Exhaust flow speed Conditions: At max. flow capacity 9 8 Min. required distance Exhaust flow speed m/s 7 (maintenance space) 6 5 AMP420 4 AMP320 3 AMP220 2 1 0 0.4 0.8 1.2 1.6 2.0 Distance from exhaust port m Flow characteristic graph Conditions: Initial element condition 0.05 Distance from exhaust port Max, flow rate capacity line Upstream pressure MPa 0.04 0.5 AMP420 Flow

AMP

Exhaust flow speed Conditions: At max. flow capacity 9 8 Min. required distance Exhaust flow speed m/s 7 (maintenance space) 6 5 AMP420 4 AMP320 3 AMP220 2 1 0 0.4 0.8 1.2 1.6 2.0 Distance from exhaust port m Flow characteristic graph Conditions: Initial element condition 0.05 Distance from exhaust port Max, flow rate capacity line Upstream pressure MPa 0.04 0.5 AMP420 Flow

PSE200

Internal Circuits and Connections Error Code & Solution PSE200-(M) NPN open collector 5 outputs + Auto shift 1 input specification LED display Contents Solution Excess current is flowing into the switch output of OUT1. Shut off the power supply. After eliminating the output factor that caused the excess current, turn the power supply back on.

,

P-EX01-2A Solenoid Valve (with M Connector) Conforming to ISO 15407-1 , , ISO 15407-1 Interface Large capacity Size 01 (EVS1-01) and Size 02 (EVS1-02) Interface conforms to ISO 15407-1 Flow rate Cylinder driving size EVS1-01 (Size: 01) EVS1-02 (Size: 02) 100 80 1000L/min (ANR) 400L/min (ANR) Accommodates enclosure IP65 Dust/Splashproof type Light weight Size 01 (3-position): 0.26kg Size 02

,,: ,.

L M a l e E l b o w . . . . . . L__ Plug-in Elbow .. ... L Union Elbow . . . . . . LF Female Elbow . K 45" Male Elbow . . . KF 45' Female Elbow Y M a l e R u n T e e . . . . . T Male Branch Tee . , T Union Tee , . . . . . . , TF Female Branch Tee E Bulkhead Connector E Bulkhead Union . . , U Male Branch 'Y" . . . U Union "Y" . . . . . . . .

Exhaust Cleaner for Clean Rooms AMP Series

Exhaust flow speed Conditions: At max. flow capacity 9 8 Min. required distance Exhaust flow speed m/s 7 (maintenance space) 6 5 AMP420 4 AMP320 3 AMP220 2 1 0 0.4 0.8 1.2 1.6 2.0 Distance from exhaust port m Flow characteristic graph Conditions: Initial element condition 0.05 Distance from exhaust port Max, flow rate capacity line Upstream pressure MPa 0.04 0.5 AMP420 Flow

5 Port Solenoid Valve, Series VQC

Withstand pressure V, 1 minute, AC 1000 Special wiring specifications (options) Insulation resistance M/km, 20C 5 or more Note) The minimum bending radius for D-sub connector cables is 20mm. (For 25P) Mixed single and double wiring are available as options. The maximum number of manifold stations is determined by the number of solenoids.

PSE300.eng

When [M] is included in the controller model number the controller displays [S_J]. When [M] is not included in the controller model number the controller displays [S_F]. Hysteresis mode ON OFF Power on Specifications Outline with Dimensions (in mm) n_1 High pressure Wiring Normally closed mode Detects pressure displays values and performs switching.

CM2

Material: Carbon steel Dd9 d L Part No. m t l 0.040 0.076 CD-S02 CD-S03 20/25 32/40 8 C8 type for pivot 7.6 24.5 19.5 1.6 0.9 0.040 0.076 10 C10 type for pivot 9.6 34 29 1.35 1.15 Applicable bore size 20 25/32 40 Part No.

Series CQ2

M Rod end male threads Cushion C Rubber bumper Action D Double acting Applicable auto switches Lead wire length (mm) Auto switch models Electrical entry direction Load voltage Type Detailed specifications Indicator light Electrical entry Special function Wiring (output) 0.5 (Nil) 3 (L) Applicable loads 5 (Z) AC DC Perpendicular In-line Z76 5V IC circuit 3 wire Yes P.9 Z73 12V 100V Grommet

ISO Interface

SMC Corporation of America (Detroit) 2990 Technology Drive Rochester Hills, MI 48309 TEL: (248) 299-0202 FAX: (248) 293-3 w w w . s m c u s a . c o m SMC CORPORATION OF AMERICA U.S. HEADQUARTERS 3011 N. FRANKLIN ROAD INDIANAPOLIS INDIANA 46226

W2M/4M

Cor|duit, DIN connector (Note) Gauge port RC(PT)1/8, Pre6sur g6uge, 14{1.0}, 28{2.0}, 72{5.1), 100{7.1}, 145{10.2) How to Order Model t x#l r*m ? Electrlcal connectlon ?

NGIP seies

o u n V F l a n g e M o u n t . . . . . . . . . 7 4 Construction/Parts List . . .