Symbol: Base Mounted, 2 Port, N.O., Port 3 IN, Port 2 OUT, Function: Power-saving Circuit, Voltage: 12 VDC, Wetted Part Material: Plate: PFA; Diaphragm: Kalrez®, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: PFA, 1/4-28UNF, Option: Bracket + Manual Override, Lead Wire Length: -, CE Compliant: -

Symbol: Base Mounted, 2 Port, N.O., Port 3 IN, Port 2 OUT, Function: Power-saving Circuit, Voltage: 12 VDC, Wetted Part Material: Plate: PFA; Diaphragm: Kalrez®, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: Bracket + Manual Override, Lead Wire Length: -, CE Compliant: -

Programless Controller (With Stroke Study) ® Specialized for Series LEM Series LECP2

B-1 A-1 B-2 A-2 B-3 A-3 Connector C terminal no. Signal Cable color S Standard cable Brown Red Orange Yellow Green Blue A A B B COM-A/COM COM-B/ 2 1 6 5 3 4 Cable color Connector D terminal no.

Speed Controller with Uni One-touch Fitting AS Series

2 q o !7 r !3 o r !0 w u t y !2 !3 !1 q i !4 e Meter-in type Meter-in type Component Parts: Elbow Type Component Parts: Universal Type No. Description Material Note Body A Handle Body B Needle Needle guide Seat ring No.

Compact and Lightweight

(When using the 3 port valve, seal the R port of the release valve.) Supply valve (3 port valve) + Variable throttle + Suction filter Ex. 2 Supply/Release valve (5 port valve with 3-position) + Variable throttle Ex. 5 3 port valve 5 port valve with 3-position closed center Silencer 3 port valve is used to generate and release the vacuum.

3 Port Solenoid Valve, VQ100 Series, Base Mounted Type

Note 3) Locking type is optional specification.

VVXA21/22

# " $ < " $ /3 1 !" Tightness of Valve (Leak rate) 0" " " $'" ( 2 A NBR, FKM, EPDM )* +, " $ % 1 % 1 $ " /3 $'" ( , " , " # Pilot Pressure 4 " 4 " VXA21 VXA22 4 $ " < . q B 6 "5 !" $6" " 6 " " " w 0C4,D 4 e B 6 !"

AMPSeries

Thread type Rc NPT G Nil N F Port size Body size 4 Port size 3 Symbol 2 02 03 04 06 1/4 3/8 1/2 3/4 Models AMP220 AMP320 AMP420 Model 1000 (35) 200 (7) 500 (17.5) Max. flow capacity l/min (ANR)(SCFM) 1/2, 3/4 1/4, 3/8 3/8, 1/2 Port size (nominal size B) 1.15 (2.54) 0.43 (0.95) 0.68 (1.50) Weight kg (lb) Specifications Fluid Compressed air Element upstream pressure 0.1MPa or less (14.5 psi

25

X16 Liquid contact seals SF7000 (Perfluoropolyether rubber) 1 3 01 X16 PB101 A Actuation Symbol 3 Actuation Air operated X16 Made to Order Liquid contact seals SF7000 Thread type Option Symbol Type Rc NPT G Symbol Nil B Option None With foot Nil N F q With bracket which can be mounted to the back of the previous type e C With bracket which can be mounted to the foot at the back of the previous

Transfer

0 @2 @1 #2 ^2 ^5 $5 %2 @5 ^8 $4 ^1 @4 %4 %5 ^7 $3 #0 $2 %6 @7 ^4 o %7 ^9 ^6 @9 %8 ML2BS $1 %3 ^3 !

AMP

10 8 8 10 10 12 15 40 50 55 66 80 88 84 100 110 28 34 50 5 5 9 26 32 37 37 37 37 13 16 19 20 22 25 108 155 221 1/4, 3/8 3/8, 1/2 1/2, 3/4 3 Series AMP Model Selection Selection Caution Caution 1.

VXZ

Refer to pages 17-6-3 to 17-6-10 for Safety Instructions and Solenoid Valve Precautions. 17-3-62 3 Series VXZ22/23 Pilot Operated 2 Port Solenoid Valve For Zero Pressure Differential Operation The VX series will be revised shortly. N.C.

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

#4 #5 #6 #7 #8 #9 $0 $1 $2 $3 $4 $5 q w e r t y u i o !

MHK2

6 i u q r !1 !0 Closed condition Normally closed !2 !3 !4 Component Parts Material Material Note Note No. q w e No. i o !0 !1 !2 !3 !4 !

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

#4 #5 #6 #7 #8 #9 $0 $1 $2 $3 $4 $5 q w e r t y u i o !

MHK2

6 i u q r !1 !0 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Closed condition Normally closed !2 !3 !4 Component Parts Material Material Note Note No. q w e No. i o !0 !1 !2 !3 !4 !

CUJ

Bore size (mm) Hard anodized Aluminum alloy CUJB4-PS 4 q Cylinder tube Electroless nickel plated Copper alloy Set of nos. above !1, !2, !3 and an exclusive grease pack.

4 Port Direct Operated Poppet Solenoid Valve Series VQ D1000

Note 2) 1 (P) 3 (R) Note 3) 1.13-4 Series VQD1000 Construction JIS Symbol (A) 4 (B) 2 Part name Component Parts Note Material No. q w e r t y u i o !0 Solenoid coil assembly Sub-plate Body Spool valve Poppet Guide ring Return spring Manual override Gasket Round head screw VQD1000-S-M5(Base mounted only) Aluminum ZDC 1 (P) 3 (R) q u e !

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

Note 2) For the type set to 0.2 MPa only, repeatability will be within 3 kPa. Note 3) Mass shown is for product without any options.

Ionizer Nozzle type IZN10 Series IZS

Static Neutralization Characteristics (Discharge Time from 1000 V to 100 V) q Energy saving static neutralization nozzle with right angles: IZN10-01-X367 wHigh flow rate nozzle with right angles: IZN10-02-X367 5 5 0.1 MPa 0.05 MPa 0.3 MPa 0.1 MPa 0.05 MPa Discharge time (Static neutralization time) [s] Discharge time (Static neutralization time) [s] 4 4 3 3 0.3 MPa 0.7 MPa 2 2 0.5 MPa 0.5