CUJ

Auto switch CUJ cylinder Cylinder B Cylinder A Auto switch Magnetic substance Non-magnetic spacer of 2.5 mm or more Without Shielding Plate d Bore (mm) 10 L 6 8 L d 19 6 19 6 19.5 6 The space can be reduced by attaching shielding plates (steel plates 0.2 to 0.3 mm thick) to the sides of the cylinders facing each other.

Exhaust Cleaner for Clean Rooms AMP Series

hole F Applicable screw M5 hexagon socket head cap screw M6 hexagon socket head cap screw M8 hexagon socket head cap screw Model AMP220 AMP320 AMP420 E OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90

Vacuum Equipment

If the leakage volume is 30 /min (ANR), the vacuum pressure of the S type is 20 kPa q w e, and for the L type it is 33 kPa q' w' e'. If the leakage volume is 5 /min (ANR), the vacuum pressure of the S type is 80 kPa r t y, and for the L type it is 47 kPa r' t' y'.

Series 11-CRA1-Z Rack & Pinion Type Rotary Actuator Size: 30, 50

R.

Low Maintenance Filter Series FN1

B t 120 327 188 (519) w w 84 OUT 2-R 1 r IN 53 DRAIN G 1/4 Note Parts list Dimensions (mm) A B No.

VEX-OMY0001

11.5Nm 2) RNPT 23 R,NPT Nm EXH.

Rated Flow Range: 02 (20 to 2000 l/min), Output Specifications: L [Out: IO-Link, Switch Output (N/P); Func: None; Monitor Unit Model: None], Lead Wire: w/Lead Wire and M12 Connector, 3m, Unit Specification: Units Selection Function, Calibration Certificate: None, Certificate in both English and Japanese, Flow Direction: R (Right to Left)

Rated Flow Range: 20 to 2000 l/min, Output Specifications: L [Out: IO-Link, Switch Output (N/P); Func: None; Monitor Unit Model: None], Lead Wire: w/Lead Wire and M12 Connector, 3m, Unit Specification: Units Selection Function, Calibration Certificate: None, Certificate in both English and Japanese, Flow Direction: Right to Left

Clamp Cylinder with Lock Series CLK1

Pin Dd9 2-3 L 4 4 D L Part no.

HRX-OM-W032

less 200 or less Calcium hardness [mg/L] 50 or less 150 or less Ionic silica [mg/L] 30 or less 50 or less Iron [mg/L] 0.3 or less 1.0 or less Copper [mg/L] 0.1 or less 0.3 or less Sulfide ion [mg/L] Should not be Should not be Referential detected any detected any item Ammonium ion [mg/L] 0.1 or less 1.0 or less Residual chlorine [mg/L] 0.3 or less 0.3 or less Free carbon dioxide [mg/L]

XL-OMV0002

Kalrez R Chemraz R VMQ PLASMA ARMOR R No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 UA4640 -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 -XU1 1) Barrel Perfluoro R Kalrez R dupont dupont Chemraz R Greene Tweed & Co ULTIC ARMOR R Nippon Valqua Industries, Ltd. 6 XL-OMV0002 3. 3-1.

XLC-25,40 ∗ -F7NJ ∗ - ∗ Series

Barrel Perfluoro R is a registered trademark of MATSUMURA OIL Co.,Ltd. Kalrez R is a registered trademark of E. I. du Pont de Nemours and Company. Chemraz R is a registered trademark of Greene, Tweed & Co., ULTIC ARMOR R is a registered trademark of NIPPON VALQUA INDUSTRIES, LTD.

XL-OMY0003

R Kalrez Chemraz VMQ R PLASMA R Perfluoro No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 UA4640 -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 -XU1 1) Barrel Perfluoro R R Kalrez Greene, Tweed Technologies, Inc.

LEF-OM007xx

Step motor (Servo24VDC l Left side Nil Left side Nil Controller option Right side R Right side R Servo motor DC24V Servo motor DC24V Without controller Without controller Nil Nil A A With controller (NPN) 6N With controller (NPN) 6N Motor option Ball screw lead With controller (PNP) 6P With controller (PNP) 6P Without lock Nil Without lock Nil Size Size With programless controller (NPN

Compact Cylinder Series NCQ8

1 r t !2 !

Large Type Vacuum Unit Series ZR

(L) Lead wire length 0.6 (3.0) m PNP output 27 (L) Lead wire length 0.6 (3.0) m NPN output D3 26 (L) Lead wire length 0.6 (3.0) m Analog output 67 (L) Maximum vacuum pressure Lead wire length 0.6 (3.0) m PNP output S 84kPa Vacuum switch specifications (E) L 53kPa Nil Lead wire length 0.6m Grommet type L Lead wire length 3.0m Ejector exhaust type C Lead wire length 0.6m CL Connector type

Speed Controller with One-touch Fittings

min (ANR)) Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) AS-FG AS-FP AS-FM AS-D Number of needle rotations Number of needle rotations Number of needle rotations AS-T Construction AS1002F, AS2002F, AS2052F AS1002F-02, AS3002F, AS4002F ASP w e r u !

Guide Table Series MGF ø40, ø63, ø100 1

40 50 40 DMGF63 Load weight m0 (kg) Load weight m0 (kg) Load weight m (kg) Load weight m (kg) 30 30 20 -X 20 20 MGF40 MGF40 20MGF40 MGF40 10 10 10 MGF40 Data MGF40 10 5 4 3 5 4 3 2 2 5 5 1 10 20 30 40 50 100 200 300 400 1 5 4 10 20 30 40 50 100 200 300 400 5 10 50 100 10 50 100 Eccentric distance l (mm) Eccentric distance l (mm) Stroke (mm) Stroke (mm) l = 200 mm l = 300 mm Graph (3) Graph

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Elbow Type (Metal Body) Flow rate and effective area AS220M-02 Model AS120M AS220M-01 R 1/4 Cylinder side Tubing side M5 x 0.8 10-32UNF NPT 1/8 NPT 1/4 R 1/8 Port size Rc 1/4 Rc 1/8 l/min (ANR) {Nl/min} Flow rate 38 7 12 Controlled flow Effective area mm 0.6 0.1 0.2 l/min (ANR) {Nl/min} 420 Flow rate 105 280 Free flow 6.5 1.6 4.3 Effective area mm Note) Flow rates are values measured with

Process Pump Series PA3000/5000/PAX1000 Series PB1000

(A) 2 0.7MPa (101psi) 0.15MPa (22psi) 1.8 (0.1) 10HZ 3 (R) 1 (P) 3 (R) 1 (P) Refer to Best Pneumatics (1) Page 2.2-1 Mist Separator Series AM Specifications Models Model Compressed air 1.0MPa (145psi) 0.05MPa (7psi) Fluid AM150 AM250 Maximum operating pressure Rated flow rate (ANR) 300l/min (10.5SCFM) 750 l/min (26.5SCFM) Note 1) Series AM separates and removes the oil mist in compressed