PF2D

0 u !0 !2 w y r !0 e PF2A Number Parts Material 1 New PFA Body PF3W 2 New PFA Sensor 3 Super PFA Tube LFE 4 PPS Housing A 5 PPS Housing B PF2D PF2D 6 PPS Housing C 7 POM Bushing IF 8 PPS Cap 9 FKM Gasket !1 q t i 10 FKM O-ring PF2D540 o !0 u !0 !2ywr e 11 Stainless steel 304 Thread 12 PVC Lead wire !

Table of Contents - Tubing

Operating temperature 32 to 104F (0 to 40C) Material Conductive nylon + Flame resistant nylon (Equivalent to UL-94 Standards V-0) Surface resistance 104 to 107 Hardness Shore D 48 Note 1) Refer to the burst pressure characteristics and operating pressure curve for other temperatures. Avoid abnormal temperature rises due to adiabatic compression.

ZPT/ZPX

0 0 1 1 3 5 8 16 27 53 84 1 0 0 1 1 0 ZCU AMJ Misc.

BP1000

to 200 psig 0 to 400 psig 0 to 1000 psig 0 to 3000 psig 0 to 4000 psig -0.1 to 0.1 MPa -0.1 to 0.2 MPa -0.1 to 0.4 MPa -0.1 to 0.7 MPa -0.1 to 1.1 MPa -0.1 to 1.4 MPa 0 to 1.5 MPa 0 to 3 MPa 0 to 7 MPa 0 to 21 MPa 0 to 28 MPa 00-83000102 00-83000184 00-83000181 00-83000182 00-83000196 00-83033 00-83000193 00-83000194 00-83000187 00-83000234 00-83000183 00-83000287 00-83000288 00-83000289

0.4

The power supply for the unit should be 0 V as the standard for both power supply for output as well as power supply for control/input. VQZ SQ VFS +24 V +24 V Power supply for output Power supply for output VFR 0 V 0 V Power supply for control/input +24 V Power supply for control/input 24 V VQ7 4. Do not install a unit in a place where it can be used as a foothold.

MXF

0 CX o D-X 20Data !9 !8 i !5 u !7 q !

05-hyq-e

0 11 o !0 11 o !0 11 o !0 11 Rod seal Rod seal Rod seal Rod seal NBR NBR NBR NBR (FKM can be selected.) (FKM can be selected.) (FKM can be selected.) (FKM can be selected.) o !0 11 o !0 11 Rod seal Rod seal NBR (FKM can be selected.)

LEC-T1_C

Force OUT 1 Pin No. 0 OFF Pin No. 1 [ ] OFF Pin No. 2 [ ] ON SET ONOFFSET AX IS. Force OUT 1 ONSET Pin No. 0 ON Pin No. 1 [ ] Pin No. 2 [ ] AX IS. Force OUT 1 ON Pin No. 0 [ ] Pin No. 1 OFF Pin No. 2 [ ] b2 Force Output(pin) Output pin No.0 keykey Output pin No.1 Last Output pin No. 78 - (6) TB Ver2.1*LECPA (6-1) SET AX IS.

Rotary Table Series MSU

Dimensions (mm) 1in = 25.4mm MSUA3 MSUA3-S, SE Scale: 70% 8-M4 x 0.7 depth 7 C 58 B 36 44 27 30 4-M4 x 0.7 depth 5.5 22.5 5 +0.025 0 41h9 0 0.062 3H9 A +0.052 0 21H9 Long groove depth 5 (positioning pin hole) 22.5 29 2.5 3 +0.025 0 3-3H9 depth 3 ( A , B , C ) 2-4.5 through 3-R1.5 15.5 45 9 42h9 0 0.062 2 36 3 8 11 8 1.5 5 5 18.3 29 11 Angle adjustment bolt 2-4.5 through 3-R1.5 6 2-M5 x 0.8

LX Series Compact Electric Actuators

I l 50i 70 , iiFl.r* 0 q . . , . 50 6o ' 3 0 3o , , , . 3 0 , : LXPB5SA 40 40 '" .,1 i Slide Screw \ I i LXPB5SB 2D 2A LXSH2BC 100 50 220 High rigidity linear guide Ball LXSH2BD 100 50 90 Screw LXSH5BC 1 0 0 50 1 6 0 LXSH5BD 1 0 0 50 70 LXSH2SA 90 40 60 Slide LXSH2SB 45 20 30 Screw LXSHSSA 60 20 40 LXSH5SB 30 1 0 20 , \ | '-t 'oo"ot| I PLc I ll'i;!:-,?

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

VX21 0 1 2 3 VX021N-12A Dimensions page 22 (Single unit) VX22 0 2 3 4 VX23 0 2 3 4 VX022N-12A VX22 0 5 6 VX23 0 5 6 VX023N-12A-L 4 5 Series VX21/22/23 For Water /Manifold Solenoid Valve for Manifold/Valve Specifications N.C. N.O.

Compact

I l 50i 70 , iiFl.r* 0 q . . , . 50 6o ' 3 0 3o , , , . 3 0 , : LXPB5SA 40 40 '" .,1 Slide i Screw \ I i LXPB5SB 2D 2A LXSH2BC 100 50 220 High rigidity linear guide Ball LXSH2BD 100 50 90 Screw LXSH5BC 1 0 0 50 1 6 0 LXSH5BD 1 0 0 50 70 LXSH2SA 90 40 60 Slide LXSH2SB 45 20 30 Screw LXSHSSA 60 20 40 LXSH5SB 30 1 0 20 , \ | '-t 'oo"ot| I PLc I ll'i;!:-,?

Stroke Reading Cylinder and Counter

0 u @8 @4 !2 r e y @4 @8 @0 !0 i @3 o @4 @8@7 u @2 r y CEP1 CE1 CE1 r @9 @2 CE2 !9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5@6 @1 #0 q !1 w#1 #0 @2 @9 #1 @1 ML2B #8 12 40 to 63 @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3#3 r !4 e !6 @6 #7 #6 !5 !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 Component Parts Component Parts Material Note No. Description Material Note No.

Series MHZ2 11- ø10, ø16, ø20, ø25 22- Air Gripper

Flat finger [3] 4 x MM thread depth L Thread for mounting attachment K J A A D G B D B K J F C S W O (mm) Weight (g) F G Open Closed 2 2.5 3 4 L MM J K D C B Model A W MHZ2-10D3 1), 2) 11221122112211220 -0.05 0 -0.05 0 -0.05 0 -0.05 +0.5 +0.3 +0.5 +0.3 +0.5 +0.3 +0.5 +0.3 +0.025 0 +0.025 0 +0.025 0 +0.030 0 +2.2 0 +2.2 0 +2.3 0 +2.5 0 60 125 250 450 5 6 8 10 M2.5 x 0.45 M3 x 0.5 M4 x 0.7

Electromagnetic Digital Flow Switch

Flow rate Max. rated flow rated flow 5 3-Color Display Electromagnetic Digital Flow Switch LFE Series Flow Rate Characteristics (Pressure Loss) LFE1 LFE2 LFE3 0.02 0.02 0.02 Pressure loss [MPa] Pressure loss [MPa] Pressure loss [MPa] 0.015 0.015 0.015 0.01 0.01 0.01 0.005 0.005 0.005 0 0 0 0 5 10 15 20 0 20 40 60 80 100 0 50 100 150 200 Flow value [L/min] Flow value [L/min] Flow value [L/

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

Applicable solenoid valves: Series 10-SY3 0, 10-SY5 0, 10-SY7 0, 10-SY9 0 2 4 6 2 4 6 2 4 6 2 4 20 40 45 60 3 5 7 9 X90 10 SY Model no. Entry is the same as standard products. Specifications and performance are the same as standard products.

Secondary Batteries

90 ITV 2 0 1 0 N 0 1 2 Series compatible with secondary batteries 90 Material restriction Model 2 2000 type Pressure display unit Nil 2 3 4 5 MPa kgf/cm2 Pressure range bar psi kPa 1 3 5 0.1 MPa 0.5 MPa 0.9 MPa Cable connector type Power supply voltage N Without cable connector 0 1 24 VDC 12 to 15 VDC Bracket Nil B C Without bracket Flat bracket L-bracket Input signal 0 1 2 3 4 Current 4

Tamper Proof and Flat Head Screw

40.7 18 1.5 36.7 AS22 0-N02-ST NPT 1/4 17.5 NPT 1/4 AS32 0-02-ST Rc 1/4 19 22.5 R 1/4 AS32 0-F02-ST PF 1/4 24.3 9.5 30 55.3 22.4 1.5 49.3 AS32 0-N02-ST NPT 1/4 NPT 1/4 AS32 0-03-ST Rc 3/8 19 22.5 R 3/8 AS32 0-F03-ST PF 3/8 24.3 9.5 30 53.7 20.8 1.5 47.7 AS32 0-N03-ST NPT 3/8 NPT 3/8 AS42 0-04-ST Rc 1/2 24 27.5 R 1/2 AS42 0-F04-ST PF 1/2 28.5 12 38.5 63.8 26.7 1.5 55.8 AS42 0-N04-ST NPT 1

SYJ3000/5000/7000

(For manifold type 20) Body ported 5 L SYJ5 2 M5 1 0 2 5 0 L SYJ5 4 Base mounted Thread type Rc G NPT NPTF Nil F N T Body option Coil specifications Manual override Nil Standard With power saving circuit <24 V, 12 VDC only> 0: Pilot valve individual exhaust for the pilot valve Nil: Non-locking push type T Power saving circuit is not available in the case of D, DO or W type.

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

0 u !0 !2 w y r !0 e 1 New PFA Body 2 New PFA Sensor 3 Super PFA Tube 4 PPS Housing A 5 PPS Housing B 6 PPS Housing C 7 POM Bushing 8 PPS Cap 9 FKM Gasket 10 FKM O-ring 11 Stainless steel 304 Thread 12 PVC Lead wire !1 q t i PF2D540 o !0 u !0 !2ywr e !