SMC Pneumatic Clean Series

+ Stroke ZZ + Stroke (mm) 2 1 10 10 10 10 GB M4 x 0.7 depth 7 J M10 x 1.25 M10 x 1.25 M8 x 1.25 MM 1/8 1/8 1/8 1/8 P 27 19.5 19.5 15.5 AL Bore size Standard stroke range Up to 200 Up to 300 Up to 300 Up to 300 50 35 32 Up to 300 63 80 100 50 40 40 35 H A 8 6 6 5 H1 47 38 31 26 I 13<10> 20<18> 20 20 GA 19 17 17 13 B1 6 5.5 5.5 5 K 44 35.5 29 24 NA 9 7 7 7 RA 26 20 16.5

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

N.O. 1 (P) 5 (R1) 3 (R2) 3 position exhaust center 4 position dual 3 port valve (A) 4 position dual 3 port valve (C) (A) 4 (B) 2 4 2 4 2 5 3 1 5 3 1 1 (P) 5 (R1) 3 (R2) N.C. N.O. N.C.

New

VX021S-1-16FB Bracket Assembly Part No. (for Metal Body) VXZ 3 0S 14A 1 3 4 3 A B For VXZ2 6 5 C D 5 For VXZ2 2 mounting screws are shipped together with the bracket assembly. 29 Series VXZ Glossary of Terms Electrical Terminology Pressure Terminology 1.

2–4

5 15 10 10 2 pcs. 10 15 20 2 pcs. 5 10 15 15 20 20 25 15 32, 40, 50 32, 40, 50 5 15 10 5 1 pc. 10 10 20 1 pc. 5 5 10 15 15 20 25 15 Besides the models listed in How to Order, the following auto switches are applicable.

Rotary Table/

5 !4 @2 !3 w @4 @3 !6 !7 !8 !1 @1 !2 q @0 u !

Valve Mounted Guide Cylinder Series MVGQ ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 Valve, Speed Controller, and Cylinder are formed into one unit. Easy piping wiring work for Valve, Speed Controller and Cylinder can be formed into one unit, furthe

Minimum Stroke for Auto Switch Mounting (mm) 12 16 20 25 32 40 50 63 80 100 Auto switch model No. of auto switches mounted 1 pc. 10 5 D-A9 2 pcs. 15 10 D-A9V D-M9V 1 pc. 5 2 pcs. 10 1 pc. 15 10 5 D-M9 2 pcs. 15 10 1 pc. 15 10 D-M9W 2 pcs. 15 10 1 pc. 10 D-M9WV 2 pcs. 10 D-Z7 D-Z80 1 pc. 10 5 2 pcs. 15 10 D-Y59 D-Y7P 1 pc. 5 10 2 pcs. 15 10 D-Y69 D-Y7PV 1 pc. 5 2 pcs. 5 D-Y7W D-Y7WV 1 pc.

ZR

Nil F G Rc Example) Attached to the first and third stations ZR1-RV1-1 ZR1-RV1-3 ZR1-R1-A3 T NPTF Example) Attached to the first and third stations ZR1-R1-1 ZR1-R1-3 Example) ZZR106-R .1 pc. (Manifold base only) ZR120S1-K15MZ-EC ... 5 pcs. (Unit) ZR1-BM1 . 1 pc. (Blank plate) ZR1-R1-3 . 1 pc.

CG5-S

1 i r !3 y o q u e !0 w Parts list Material No. 1 2 3 4 5 6 7 Description Material No.

Thermo-chiller

0 Union (Size: 1/2 inch) Stainless steel 1 (197) !1 DI sensor piping assembly Stainless steel 1 !2 Mounting bracket 1 !3 DI filter inlet hose PVC 1 !4 DI filter outlet hose PVC 1 !5 Hose clamp 4 !6 Mounting screw (Size: M5) 2 !7 Cable tie holder 5 !8 Binding band 4 !

LEF-OM002xx

Part name Qty (1) Electric actuator / Slider type 1 (2) Controller 1 (3) Power supply plug 1 (4) Actuator cable 1 (5) I/O cable (Not use in this section) 1 (6) Teaching box 1 (7) Controller setting kit [The controller setting software, The communication cable, USB cable and conversion unit are included.] 1 Option (1) Electric actuator Communication /Slider type cable To USB port 120.3 120.3

CXWM/CXWL

1 !2 !3 !4 !5 !6 !7 !8 !

ITV

Return 0.5 0.4 0.2 0 0 Out 0.2 0.4 0.5 0.6 0.8 0 25 50 75 1 1 2 3 4 1 5 100 Input signal (%F .S.)

CLA

~~ , A 00) 0(0) 0 (2.5) 2(6) 4(7. 5) ~ , 40 D-AG 43.5 49 55.5 3 D-AS 1(0 1(0) 5(1.5 I O{S.5) 8(4 3t 35 42 so 57 .5 ~ Ht A 00) 00) 0(2.5 26 417 .5) D-A3 B !

MY1

impact: P = 0.5MPa For 40 Horizontal impact: P = 0.5MPa 2000 1500 2000 1500 Impact speed (mm/s) Impact speed (mm/s) L-unit 1000 1000 Air cushion 500 400 300 500 400 300 L-unit Air cushion 200 200 Caution 1002 3 4 5 10 20 50 100 1 2 3 4 5 10 20 30 400 50 1.

IDX-OM-W031

. 3 2 Chapter 4 Maintenance 4 1 Daily inspection . 4 1 4 2 Periodical maintenance . 4 1 4 2 1 Cleaning of ventilation grille (suction grille) . 4 1 4 2 2 Service parts . 4 1 4 2 3 Cleaning of the bowl assembly . 4 2 Chapter 5 Troubleshooting 5 1 Cause and countermeasure of errors . 5 1 5 2 How to reset the thermal relay and high pressure switch . 5 3 Table of Contents 1 Table of Contents

Modular/F.R.L. Units Series AC

Standard Specifications AC40B AC30B AC25B AC10B AC20B AC60B AC55B AC50B AC40B-06 Model AF40 AF30 AF30 AF10 AF20 AF60 AF60 AF50 AF40-06 Air filter Component AR40 AR30 AR25 AR10 AR20 AR60 AR50 AR50 AR40-06 Regulator Port size M5 x 0.8 1/4, 3/8 1/4, 3/8 1/8, 1/4 1 1 3/4, 1 3/4 1/4, 3/8, 1/2 Pressure gauge port size Note 1) 1/8 1/4 1/16 Air Fluid Ambient and fluid temperature Note 2) 5 to 60C

MNB

4 @3 #3 #5 t @7 $5 !5 @4 !8 @0 !7 !9 i @2 q r y #0 $0 $2 w A C B A section $1 !2 !2 $6 !0 u @5 !6 @1 !1 $7 o $8 #4 @6 #9 @8 #6 #7 e $4 B section C section #1 #2 !2 100 80 63 50 40 32 80, 100 80, 100 Description Material Note Component Parts No. Description Material Note No.

MNB

4 @3 #3 #5 t @7 $5 !5 @4 !8 @0 !7 !9 i @2 q r y #0 $0 $2 w A C B A section $1 !2 !2 $6 !0 u @5 !6 @1 !1 $7 o $8 #4 @6 #9 @8 #6 #7 e $4 B section C section #1 #2 !

High Vacuum Angle Valve, XL Series

-43S(V) P DIN terminal M L Model G 59 60 63 H 48 58.5 64 64 63 J 47 48 51 51 (Unit: inch) 1/4 1/4 1/4 3/8 8 10 10 10 3 5 5 5 XSA12S(V) XSA22S(V) XSA3-32S(V) XSA3-43S(V) 34 High Vacuum Angle Valve Series XL 1 With pilot pressure at 0.5MPa (72psi) XLA Normally closed XLC Double acting (dual operation) Valve type Model 1200 1200 1000 1000 800 800 T msec T msec 600 600 Bellows seal 400 400 200

MXS Series Air Slide Table

Applicable model H G A B C J K E D F 16.5 MXS-AT6 5 MXS 6 7 10.5 2.5 21 19 8 5 M2.5 X 8 M5 X 0.8 MXS6, MXS8 26.5 MXS-AT6-X11 15 D 16.5 MXS-AT8 5 E E H MXS 8 M3 X 10 M6 X 1 8 12.5 3 25 9 6 22.5 26.5 MXS-AT8-X11 15 36.5 MXS-AT8-X12 25 5 G 20 MXS-AT12 MXS12 12 18.5 4 32 13 8 31 M4 X 8 M8 X 1 30 MXS-AT12-X11 15 B C 40 MXS-AT12-X12 25 24.5 MXS-AT16 5 F K K F A J MXS16 M5 X 10 M10 X 1 14 23 5 40