Modular Type Air Filter Series AF

Port size Port size Body size Body size Port size Port size Bowl Symbol Symbol 30 40 50 60 20 30 40 50 60 Applicable model AF20 to 60 Symbol 2 Note 4) Description 02 03 04 06 10 01 02 03 04 06 10 1/8 1/4 3/8 1/2 3/4 1 1/4 3/8 1/2 3/4 1 Bowl Metal bowl Applicable model AF30 to 60 Description Symbol Metal bowl with level gauge 8 Note 3) AF30 to 60 2 Note 4) Metal bowl Note 4) Only Metal Bowl

SYJA3000

-M3 X 0.5 (Piping port) 33 36 (Non-locking) Manual override B P R R 7 7 SlA 36 2 35 7 13.5 28.5 15 A 21 R2 P R1 VlA 13 1 (Bleed port) 11 10 4 15 10 10 5-M5 X 0.8 (Piping port) 8.2 14 14 15 Bracket VM/VR VH 2 position double: SYJA3220-M3(-F) 2 position double: SYJA3240-M5 10 9 36 7.1 2-M3 X 0.5 (Pilot port) 10 1.8 4 A B (Mounting holes) 3.2 21.5 1.5 22 7 8.2 2.5 (Mounting holes for manifold

ITV

Output deviation (%F.S.) 0.5 0.5 Out VE 40 0 0 Return VY G 60 0.5 0.5 AL 80 1.0 1 0 2 4 6 8 10 0 25 50 75 100 0 25 50 75 100 Input signal (%F.S.) Input signal (%F.S.)

VCW

) 10 is available only for N.C.

VCL

Symbol 01 02 1 Stations 2 3 4 5 n U side D side Material Seal material Base material C37 Stainless steel Symbol Nil H FKM Stations Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 02 2 stations 10 10 stations Refer to page 17-2-37 in the L dimension table regarding

VEX-OMY0001

No.VEX-OMY0001 1) 2) 3) 1.351.45Nm P8,9 02 03 04 02 03 04 04 06 10 10 12 01 02 01 02 14 20 VEX312VEX322VEX332VEX342VEX350VEX370VEX390( ) VEX1-18-1A VEX5-32A VEX7-32A VEX9-32A ( ) VEX1-18-2A VEX3-32-2A P2 AN120-M5 AN103-01 AN210-02 1) VEX1-9-1P VEX4-2A-P VEX1-11-2 VEX4-4 DXT152-14-1A NXT013-3 VO307K-1 2) 3) VEX322 VEX342 Rc A 1/8 1/4 F G VVEX2 VVEX4 B 1/4 3/8 N NPT ( ) VEX1-17

4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

|VFR2200-OF 3 posiiion cloed center:NVFR230O-oF 3 position exhaust center:NVFR24oGOF 3 pooition pressure center:NVFB250GOF < ):26NPTF < >:/aNPTF Series NVFRz000:Base Mounted Tlpe Non Plug-in type 2 position single/Dilnerwions Grommet:NVFR21 10-OG -o ; 3 ; 6 )o.t 10-32 No.n (M5) lfu I ES.!! 10-32l.

VCS

Body material C37 Stainless steel Seal material Symbol D N FKM Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 1 Stations 02 2 stations 10 10 stations Refer to page 17-247 in the L dimension table regarding the maximum number of stations.

-fl Seies

|VFR2200-OF 3 posiiion cloed center:NVFR230O-oF 3 position exhaust center:NVFR24oGOF 3 pooition pressure center:NVFB250GOF < ):26NPTF < >:/aNPTF Series NVFRz000:Base Mounted Tlpe Non Plug-in type 2 position single/Dilnerwions Grommet:NVFR21 10-OG -o ; 3 ; 6 )o.t 10-32 No.n (M5) lfu I ES.!! 10-32l.

Nozzle Diameter: ø1.3, Body Style: Box, Vacuum Pressure: -660mmHg, SUP: One-touch Fitting Ø8, VAC: One-touch Fitting Ø10, EXH: -

Nozzle Diameter: ø1.3, Body Style: Box, Vacuum Pressure: -48KPa{-360mmHg}, SUP: One-touch Fitting Ø8, VAC: One-touch Fitting Ø10, EXH: -

Stations: 8 Stations, DIN Rail Length: 10 Stations

Type: [Fitting] Pipe/Plug, Fitting Type: Other shapes, Body Material: [PBT Resin] PBT, Application: Clean environment, Shape: [Others] Sputtering Cover, Compatible Fluid: Water / Air, Applicable Fitting Size (mm): 8, Release button color: White

Type: [Fitting] One-Touch Coupling, Fitting Type: Union with different diameters, Tube Size 1(φ): 6, Body Material: [303/304 Stainless Steel] SUS304+PBT, Application: Clean environment, Packing, Material of O-Ring: [NBR] Standard (NBR), Tube to Tube Reducing Union Shape: [Unequal Dia. Union Tee] Unequal diameter Straight, Compatible Fluid: Water / Air, Number of Connection Tubes(piece): 3

Type: [Fitting] One-Touch / Pipe, Fitting Type: Socket and reducer, Tube Size 1(φ): 6, Body Material: [303/304 Stainless Steel] SUS304+PBT, Application: Clean environment, Packing, Material of O-Ring: [NBR] Standard (NBR), Tube to Stem Shape: [Others] Others, Compatible Fluid: Water / Air, Applicable Fitting Size (mm): 8, Number of Connection Tubes(piece): 1, Color: White, Specification:

Type: One-Touch Coupling Related Parts, Fitting Type: Other shapes, Tube Size 1(φ): 8, Body Material: [Flame Resistant Resin (UL94 V-0 Equivalent)] Flame Retardant PBT (Ul94 V-0 Equivalent), Application: Standard/Mini, Shape: [Others] Sputter Cover, Number of Connection Tubes(piece): 3

Type: [Fitting] One-Touch Coupling, Fitting Type: Union with different diameters, Tube Size 1(φ): 6, Body Material: [303/304 Stainless Steel] SUS304+PBT, Application: Clean environment, Packing, Material of O-Ring: [NBR] Standard (NBR), Tube to Tube Reducing Union Shape: [Unequal Dia. Union Straight] Unequal Diameter Straight, Compatible Fluid: Water / Air, Number of Connection Tubes(piece

Type: [Fitting] One-Touch Coupling, Fitting Type: Union with different diameters, Tube Size 1(φ): 6, Body Material: [303/304 Stainless Steel] SUS304+PBT, Application: Clean environment, Packing, Material of O-Ring: [NBR] Standard (NBR), Tube to Tube Reducing Union Shape: [Unequal Dia. Union Y] Unequal Dia. Union Y, Compatible Fluid: Water / Air, Number of Connection Tubes(piece): 3, Color

Stations: 8 Stations, DIN Rail Length: 10 Stations

Nozzle Diameter: ø1.3mm, Vacuum Pressure: -89 kPa, SUP: One-touch Fitting ø8, VAC: One-touch Fitting ø10