Compact Hydraulic Cylinder

(mm) H I J K L C D E F U A B Z M N O P S Bore size (mm) 32 M10 x 1.5 60 4.5 14 8.5 82 12 16 45 20 31.5 65 14 34 5.5 9 depth 7 Rc1/8 58.5 40 M10 x 1.5 69 5 14 8.5 84 12 16 52 22 35 67 14 40 5.5 9 depth 7 Rc1/8 66 50 M12 x 1.75 86 7 18 11 98 15 20 64 25 41 76 19 50 6.6 11 depth 8 Rc1/4 80 63 M12 x 1.75 103 7 18 11 102 15 20 77 27 47.5 80 19 60 9 14 depth 10.5 Rc1/4 93 80 M16 x 2 132 6 22 11

CJ2X/CUX/CQSX/CQ2X/CM2X

Series 10-, 11-CQSX Series 10-, 11-CQ2X How to Order How to Order Clean Series 10 11 Clean Series 10 11 Relief type Vacuum type Relief type Vacuum type C(D)QSX B 20 10 30 F9BW C(D)Q2XB 40 10 30 J79W D D Built-in magnet Built-in magnet Low speed cylinder Mounting style Low speed cylinder Bore size 32 40 50 63 2 pcs. 1 pc. n pcs.

CL

Bore size (mm) H1 NA P PG PH PL PW S TA TB TC l H ZZ e f h ZZ Stroke range Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/8 33 38 39 44 55 62 62 70 19.5 24 24 24 16 17 17 17 20 24 24 24 30 30 35 35 38 41 41 41 178 193 196 221 141 151 154 169 35 40 40 50 Up to 200 Up to 300 Up to 300 Up to 300 11 11 11 12 5 6 6 8 11 11 10 10 24 29 36 44 M5 x 0.8 M6 x 0.75 M8 x 1 M10 x 1.25 198 215 218 241 20 25 32 40 0.25 stroke

Micro Mechanical Valve Series VM1000

, across flats 27 Min. 3 Max. 11 M5 x 0.8 (Pilot exhaust port) Symbol (B) 2 (A) 4 12 14 3 (EB) 1 (P) 5 (EA) 0.5 MPa supply 3.5 mm T.T. 2.0 mm O.T. 1.5 mm P.T. 20 N F.O.F. 3 x 4.5 mounting hole 5 x Rc 1 4 Roller plunger VFM250-02-06 VFM250-02-06S Panel mounting hole 15 polyacetal or head steel roller M18 x 1 Hexagon nut thick 11, across flats 27 Min. 3 Max. 11 M5 x 0.8 (Pilot exhaust port

CJ2X/CUX/CQSX/CQ2X/CM2X

Series 10-, 11-CQSX Series 10-, 11-CQ2X How to Order How to Order Clean Series 10 11 Clean Series 10 11 Relief type Vacuum type Relief type Vacuum type C(D)QSX B 20 10 30 F9BW C(D)Q2XB 40 10 30 J79W D D Built-in magnet Built-in magnet Low speed cylinder Mounting style Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside

70astamb1

11 MB-B08 Rotating Angle Method for longitudinal mounting of clevis pivot bracket When there is no air cushion, the unit is equipped with rubber bumpers.

Table of Contents

RQ MU DSpecifications Dimensions -X 11 3.5 The specifications are the same as those for the standard double acting type.

RLQ

Applicable Auto Switch/Refer to page 9-15-11 for further information on auto switches.

Thermo-chiller/Rack Mount Type

For pipe thread type N, an NPT thread conversion fitting set is included. 20 Not included for Option Z (Removed parts) 21 Not included for Options Z and Z1 (Removed parts) 11 1 No condensation should be present.

HRX-OM-R016

Centigrade(oC) Fahrenheit(oF) 5.13 11 Changing temp. unit Pressure unit can be changed.

HRX-OM-W038

Projection is not included. 11 Weight when the circulating fluid and facility water (for water-cooled type) is not included.

HRX-OM-O021

Projection is not included. 11 Weight when the circulating fluid and facility water (for water-cooled type) is not included.

HRX-OM-R005

Centigrade(oC) Fahrenheit(oF) 5.13 11 Changing temp. unit 12 Changing pressure unit Pressure unit can be changed.

IP80-OM00019

No.IP80-OM00019-B / / * 3-4 5 1. 5 2. 6-7 2-1 IP8000 6 2-2 IP8100 7 3. 8-9 3-1 IP8000 8 3-2 IP8100 9 4. 10-12 5. 13 5-1 13 5-2 13 6. 14 7. 15-17 7-1 16 7-2 17 7-3 17 8. 18 9. 18-20 10. 20-22 11. 23-25 11-1 23 11-2 IP8100 23 11-3 IP8000 24 11-4 24 11-5 25 12. 26 13. 27-33 2 A (ISO/IEC)(JIS)*1) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic

mb1

11 MB-B08 Rotating Angle Method for longitudinal mounting of clevis pivot bracket When there is no air cushion, the unit is equipped with rubber bumpers.

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

27 25 60 27 30 6 19 8 14 1/4 3/8 3/8 1/2 1/2 Refer to p.3.4-18 for further information on rod end nuts and accessories. 58 13 17 up to 600 20 17 52 12 11 27 47.3 61 M8 X 1.25 M18 X 1.5 159 40 90 17 11 30 25 70 7 19 0 32 35 18 58 17 up to 600 20 17 64 10 11 27 54.8 M18 X 1.5 170 40 15.5 68.5 M10 X 1.25 98 17 14 31 25 7 19 0 85 32 35 18 71 21 up to 750 21 25 78 14 13 32 65.8 M22 X 1.5 204

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

SOL.A 10 () (+) White Black Item Characteristics Japan Aviation Electronics Industry, Ltd. 10 stations SOL.B 23 () (+) Gray Red 11 () (+) White Red Conductor resistance /km, 20C J.S.T. Mfg. Co., Ltd. 65 or less SOL.A 11 stations Hirose Electric Co., Ltd.

Stainless Steel One-touch Fittings Series KG

L1 L2 M Nylon Urethane Weight (g) D 1 8 KGF04-01 KGF04-02 KGF06-01 KGF06-02 KGF06-03 KGF08-01 KGF08-02 KGF08-03 KGF10-02 KGF10-03 KGF12-02 KGF12-03 5.6 15 23 11 16 14 11 13 15 17 13.1 13.1 14 27 31 27.5 31 33.5 29 32.5 33.5 34.5 36.5 35 37 41 4 10 5.6 1 4 17 14 17 19 14 17 19 17 19 17 1 8 15 22 25 17 24 24 27 30 36 31 1 4 12 6 3 8 1 8 1 4 3 8 1 4 3 8 1 4 3 8 11 13 14 14 15 8 18.0 18.5 26.1

Series KG Stainless Steel One-touch Fittings

L1 L2 M Nylon Urethane Weight (g) D 1 8 KGF04-01 KGF04-02 KGF06-01 KGF06-02 KGF06-03 KGF08-01 KGF08-02 KGF08-03 KGF10-02 KGF10-03 KGF12-02 KGF12-03 5.6 15 23 11 16 14 11 13 15 17 13.1 13.1 14 27 31 27.5 31 33.5 29 32.5 33.5 34.5 36.5 35 37 41 4 10 5.6 1 4 17 14 17 19 14 17 19 17 19 17 1 8 15 22 25 17 24 24 27 30 36 31 1 4 12 6 3 8 1 8 1 4 3 8 1 4 3 8 1 4 3 8 11 13 14 14 15 8 18.0 18.5 26.1

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

-10} at ambient temperature, excluding gas permeation Internal Leakage Pam3/s 1.3 x 10-11{1 x 10-11} at ambient temperature, excluding gas permeation External Flange type KF (NW), CF KF (NW) KF (NW), CF KF (NW) Principle materials Body: SCS13 (Conforms to Stainless steel SUS304) Bellows: Stainless steel SUS316L Bellows holder: Stainless steel SUS304.