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Packaged with Each Cylinder d C H B C d Part no. SN-032B SN-040B Applicable bore size (mm) 25, 32 40 M26 x 1.5 8 32 37 H B M32 x 2.0 11 41 47.3 10-2-12 12 Sine Rodless Cylinder Direct Mount Type Series REAR 10, 15, 20, 25, 32, 40 How to Order RE A B REA R 25 300 Y7BW REC CX Number of auto switches CY Nil 2 pcs. S 1 pc. MQQ M n n pcs.

air inlet (D) Specific Product Precautions Refrigerant R134a (HFC) IDF E Port size (B) Port size (E) (A) (A) (B) (D) (C) (C) Refrigerant R407C (HFC) IDF E Dimensions [mm] Refrigerant R407C (HFC) IDF F Part no.

Minimum Auto Switch Mounting Stroke (inch) D-M9, D-F9W D-M9V, D-F9WV No. of auto switches D-A9 D-A9V D-F9BAL Model NCDQ8A(B)-(C)(M) NCDQ8A(B)-100S(M) NCDQ8A(B)-200S(M) NCDQ8A(B)W-(C)(M) NCDQ8A(B)Z-(M) NCDQ8A(B)Z-100S(M) NCDQ8A(B)Z-200S(M) NCDQ8A(B)Z-100T(M) NCDQ8A(B)Z-200T(M) 0.62 (5/8") 0.25 (1/4") 0.62 (5/8") 0.25 (1/4") 1.00 (1") 1 0.62 (5/8") 0.37(3/8") 0.62 (5/8") 0.25 (1/4") 1.00 (1

Refer to page 100 for part numbers. 291 Made to Order Series LXF/LXP/LXS Short Stroke Type Low Particulate Generation Specification With Motor Brake/Without Motor Brake How to Order LXFH 5 B 1 C 25 GD X60 Low Profile Slide Table Type LXPB 2 B 1 B C 50 F9N X60 Guide Rod Type LXSH 2 B 1 B C 50 F9N X60 High Rigidity Slide Table Type Motor type Low particulate generation specification 2 phase

Note 4) Dual 3-port type is not applicable. 2 2-position double (Rubber) 4-position dual 3-port valve (C) 2(B) 4(A) 2(B) (A)4 Note) C C: Locking type (Manual) (R1)5 1 (P) 3(R2) 1(P) 5(R1) 3(R2) N.C. N.O.

(2) DC24V NFB MC M (3) IEC60664-12 (IP54) A 10 (4) (a) YIEC60664-1 400V (b) DC24V (5) (a) (PE) () (PE) (b) (PE) () 1 PE PE PE PE (c) (PE) () (6) (a) (b) EN (7) (a) EN/IEC B() A B (b) EN60204-15C 40 PVC() (c) EMC (8) EMC EMC () EMCEMC(IB()67303) A 11 UL/C-UL (1) LECSSLE-S5-LE-S6-LE-S7-LE-S8() .

B-1 A-1 B-2 A-2 B-3 A-3 Connector C terminal no. Circuit Cable color Brown Red Orange Yellow Green Blue A A B B COM-A/COM COM-B/ 2 1 6 5 3 4 Cable color Connector D terminal no.

(mm) Auto switch model Bore size (mm) 20 25 32 40 D-M9l(V) D-M9lW(V) D-A9l(V) Auto switch model Bore size 20 25 32 40 D-A9l(V) 6 6 6 6 BM5-020 (A set of a, b, c, d) BM5-025 (A set of a, b, c, d) BM5-032 (A set of a, b, c, d) BM5-040 (A set of a, b, c, d) D-M9l(V) D-M9lW(V) D-M9lA(V) 3 3 4 3.5 D-M9lA(V) Note 2) BM5-020S (A set of b, c, d, e) BM5-025S (A set of b, c, d, e) BM5-032S (A set of

b) 2 1 (8) (14) (a) B1 A1 (17.7) 6 5 (c) 2 1 (18) A6 B6 15 16 L (11) (30.7) 10.4 [820m] (a) (b) L E C P * A B-1 2 L 1 A A-1 6 B B-2 ) 8 8m 5 B A-2 ) 3 A 10m COM-A/COM B-3 4 COM-B/ A-3 ) B 15m (c) Shield ) C 20m Vcc B-4 12 GND A-4 13 ) A B-5 7 A A-5 6 B B-6 9 B A-6 8 3 (14.2) (b) 2 1 (5.5) (14) (a) B A1 5 6 (17.7) 1 (c) 2 1 (18) A6 B6 (6.3) 15 16 L (11) (30.7) 82 No.SFOD-OMT0009CN-B

Flow characteristics Type 21P Flow characteristics Port size 14/2 (PA/B) 4/25/3 (A/BR) Effective area (mm2) C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv 1(P), 5/3(R) port 2(B), 4(A) port Manifold Body ported for internal pilot 0.9 10-SS5YJ3-21P 10-SYJ323 1/8 M3 x 0.5 0.25 0.25 0.19 0.18 0.060 0.059 0.32 0.3 0.25 0.27 0.077 0.075 Base mounted for internal pilot 10-SS5YJ3-32P-M5 M5 x 0.8 C4 1/

Applicable bore (mm) B H C d Part no.

VMG Material Brass Brass Brass No. 1 2 3 4 Description Sleeve Stud Barb elbow Gasket Note Electroless nickel plated Electroless nickel plated Electroless nickel plated J D NBR, Stainless steel I G F E C Thread B A Barb one-touch: M-32F-2, M-04F-2 Applicable tubing (mm) a (O.D. x I.D.) b (O.D.) 3.2 4 2 x 1 .2 Weight g A B C D E M Model M-32F-2 M-04F-2 17.7 18 1 3.7 14 7.5 8.5 2.4 2.9 4 0.9

(c) (a) (b) (c) (b) (c) (a) (b) (c) (a) (b) (c) (b) (c) (a) (b) (c) (b) (c) (a) (b) (c) Note 1) The above (a), (b), (c) indicate heater mounting positions.

30 40 0 40 80 120 160 100 0 200 300 Outlet air flow rate (l/min (ANR)) Outlet air flow rate (l/min (ANR)) IDG30H (Type B products group) IDG50H (Type B products group) P1 = 0.3 MPa 0 P1 = 0.3 MPa 0 Outlet air atmospheric pressure dew point (C) Outlet air atmospheric pressure dew point (C) P1 = 0.5 MPa P1 = 0.5 MPa 10 10 P1 = 0.7 MPa P1 = 0.7 MPa 20 20 HA 30 30 AT 40 40 ID 50 50 600 0 200

CRA1 P P h L1 b CRQ2 b (h9) h (h9) L1 A port B port A port B port 4 0 0.030 4 0 0.030 20 MSQ A A MSZ F F A parallel key is used instead of single flat for size 40. E E CRQ2X MSQX L L MRQ K K D B C G G D B C N N 1 M T T M 25.5 (34.5: Connector type) 2 x R Auto switch 2 x R Y Y Auto switch W W1 Size: 20, 30 Size: 40 W W 2 67 8 8 15 32.5 When D-M9m is used 65 4 *1.

Features 2 Model Selection 1 Obtain the correction factor for the temperature from data A or B and the correction factor for the air pressure from data C. Temperature Data A or B = Series IDU: Data A IDF1D to 240D: Data B-1 IDF 370B: Data B-2 Air pressure Data C = Series IDU and Series IDF: Data C 2 Calculate corrected air flow by using A or B and C.

-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com N B A B 2-P C L L C A B A B LVA10 2-F B B K LVA60 LVA20 With flow rate adjustment With indicator (Max.