VMx-OMP0001

B (3) (MPa) 3 OFF 1)4 1) OUT 0.7 0.6 VM1 VM1 () 0.5 0.4 0.3 0.2 ,0.6MPa VM2 VM2 0.1 ,0.3MPa 2 0 1 2 3 4 5 6 7 8 9 10 (m) 4 11 7. 4 (EXH) 1/8 (PIL) R 3 (R) 21/8 2 (A) 1 (P) 2M61 8 () 2x6.5 M6x1x12 4xM6 4X7 t=2 t=3 12 Revision history DVM VM100-A E (JIS) 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com

Miniature Fittings Stainless Steel 316 MS Series Applicable Tubes: ø 3.2, ø 4, ø 6 Connection Thread: M5, R 1/8

D E F MS-5H-4 MS-5H-6 15.5 16.5 7 8 1.8 2.5 7 8 6.5 8.5 Width across flats B Hose Elbow: MS-5HLH-4/6 Weight (g) 4.2 6.2 Effective area (mm2) 1.4 2.5 B Model L A C D E F M N Width across flats 7 MS-5HLH-4 MS-5HLH-6 15.8 17.8 12 13.5 7 8 8.5 9.5 1.8 2.5 7 8 6.5 8.5 15 16 5.5 6 Universal Elbow: MS-5UL Universal Tee: MS-5UT Width across flats 7 Width across flats 7 Effective area: 2.4 mm2 Weight

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

XB13 CXT Standard part number M L Microspeed cylinder Specifications Guide cylinder Slide unit Compact guide cylinder Dual rod cylinder Compact slide Platform cylinder Magnetically coupled rodless cylinder CJ2 CM2 CG1 MB CU CQ2 CQS CY1 MGP MGGM MGCM CX2 CXW CXS MXU Air cylinder/Standard type Freemounting cylinder Compact cylinder Compact cylinder Applicable cylinder M L M

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Note 5) For ZSE40F (compound pressure) with "psi" indication, zero clear is in the range of 0.01 psi. 100.0 to 100.0kPa 100.0 to 100.0kPa 101.3 to 101.3kPa 10.0 to 101.3kPa 0.1 to 1.000MPa 1.000 to 1.000MPa Internal circuits and wiring examples ZSE40 (F) ISE40-m-22 (L)-(M) ZSE40 (F) ISE40-m-62 (L)-(M) DC (+) (Brown) DC (+) (Brown) Analog output (Gray) Analog output (Gray) OUT1 (Black) OUT2

CEx-OMQ0013

8370: JIS B 8361: JIS B 9960-1: -1 ) JIS B 8433: *2) 1. 2. 3. 1. 2. 3. 4.

Dedicated Controller Series LC1 Uniaxial Type

T-nuts (weight 10.0g) Dedicated communication cable (IBM PC/AT compatible computer) M Model LC1-1-RC M Model 17.5 LC1-1-N3 M3 x 0.5 Cable length 02 2m 04 4m 03 3m 05 5m LC1-1-N5 M5 x 0.8 18 7.5 PC Controller T-brackets Model LC1-1-L5 (weight 16.0g) Model LC1-1-L3 (weight 15.5g) Cable length: 2 to 5m M5 M3 17.5 17.5 11 Dedicated communication cable (D-Sub) (for NEC PC-98 Series) Model LC1-

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ZS-22-B Response frequency 200Hz 200Hz 200Hz 200Hz 200Hz 200Hz (5ms) (5ms) (5ms) (Sms) (Sms) (5ms) (With two M4 mounting thread) Noj. l) Hysteresis Adjustable AdjlJSlable A~uslable Adjustable A~US1ab' A~lJstabte mode m;1 Cf rm: (}i jl t(rml t~,~I~IIm] Cldj.t;,' II"mI l~j~Cf nn'e:, 1: &ij. orm::fe,1 Hysl21 esls Wmdow Fixed Fi xed Fixed Fixed Fixed Fixed co6:rearator m e (3digit) (3digit)

IDX-OM-W017

C D E F G H J K L M N P Q IDFA3E Rc3/8 226 410 473 67 125 304 33 73 31 36 154 21 330 231 15 IDFA4E Rc1/2 453 13 498 283 275 IDFA6E 455 275 Rc3/4 15 485 568 355 300 270 31 42 80 230 32 15 240 80 IDFA8E IDFA11E IDFA15E1 Rc1 300 603 578 41 54 396 87 258 43 15 270 101 380 314 16 IDFA Series 6-3 6 3 IDX-OM-W017 6 6-4 IDFA3E / 4E / 6E / 8E IDFA11E C R GFGI R C R GFGI R L N PE L N PE TB TB ILS

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

R.

Floating Joint

Applicable model P215420-07 For JT20 7 Dust cover P215432-07 For JT32 P215440-07 For JT40 Dimensions JT20 to 40 M, P D M E F C G A B H Standard Pneumatic: Up to 0.7 MPa [mm] Model Connection thread M A B C D E F G Width across flats H Maximum thread depth P Weight JT20 M8 x 1.25 19.2 8 11 (25.4) 23 10 13.6 22 9.5 22 g JT32 M10 x 1.25 23 10 13.4 (30.6) 28 12 16.3 27 11.5 38 g JT40 M14 x 1.5

Rotary One-touch Fittings Manifold Series KM

Series KM Rotary One-touch Fittings Manifold Construction KM11 KM12 Port A: One-touch fitting Port B: One-touch fitting Port A: One-touch fitting Port B: NPT or Rc (PT) female thread KM14 KM13 Port A: One-touch fitting Port B: One-touch fitting Port A: One-touch fitting Port B: One-touch fitting, R(PT) male thread KM16 KM15 Port A: One-touch fitting Port B: One-touch fitting stud Port A:

Digital Flow Switch For Air/Water Series PF2A/PF2W

Description Front protective cover + Panel mounting adapter ZS-26-B ZS-26-C Panel mounting adapter A, B ZS-22-E Panel mounting adapter With waterproof seal, mounting screw With mounting bracket With waterproof seal, mounting screw PF2A3 PF2W3 Panel Front protective cover Mounting screw (M3 x 8 L) (accessory) Panel mounting adapter A Panel mounting adapter B Panel mounting adapter Mounting

Wedge Cam Operation Provides

MHW2 Groove position of auto switch A Model MHK2-12l MHK2-16l A 10.4 12.8 B 1.8 1.6 MRHQ B Auto switch Standard switch grooves Dimensions A and B other models are same as standard switch grooves. 2.4-17

1 D. P. Lube (Unit) Series ALD(U)600/900 F.R.L. Standard Specifications  Centralized control of multi-point (1) D.P . Lube D.P . Lube Unit Model name lubrication AV ALDU600 ALDU900 ALD900 ALD600 Model  Low oil consumption volume 1 1 1 4 1 4 3 4

Lube Unit Mounting thread M12 Float switch mounting position J (Bracket mounting dimensions) Panel (Option) Bracket (Option) A B C D E F G H J K L M N P Q R S Model Port size ALDU600-06 ALDU600-10 ALDU900-12 ALDU900-14 ALDU900-20 43 10 57 51 16 67 77 85 90 100 283 296 424 424 476 4 3 135 345 460 145 90 150 480 20 430 470 175 87.5 30 62.5 1 1 1 2 615 615 682 419.2 209 4 1 250 125 33.2 33.2

Speed Controller with

WQ Edition B Safety Instructions Be sure to read the Handling Precautions for SMC Products (M-E03-3) and Operation Manual before use.

Safety Instructions

Leakage voltage Particularly when using a resistor in parallel with a switching element and using a C-R element (surge voltage suppressor) to protect the switching element, take note that leakage current will flow through the resistor and C-R element, etc., creating a danger that the valve may not shut OFF.

Fluoropolymer Piping Equipment

(Example) Body class 3 A side: 10 x 8 B side: 8 x 6 Order as shown below. A SMC LVN30 S 10 08 B Different dia. tubing size (B side) Applicable tubing size (A side) 938 High Purity Fluoropolymer Needle Valve LVN Series Standard Specifications Model LVN20 LVN30 LVN40 4, 6 Tubing O.D.

EX250-SDN1(-X102)_eng

M3 hexagon screw Tightening torque: 0.6 N m Tie-rod Tightening torque: 0.6 N m EX250 No. 1 3 5 7 Side B No. 1 4 6 Side B Free Danger: DANGER indicates a hazard with a high level of risk which, if not avoided, will result in death or serious injury.

High Precision Digital Pressure Switch, Series ZSE40/ISE40

Note 5) For ZSE40F (compound pressure) with "psi" indication, zero clear is in the range of 0.01 psi. 22 62 30 70 Set pressure range 100.0 to 100.0kPa 10.0 to 101.3kPa 0.1 to 1.000MPa Setting range 100.0 to 100.0kPa 101.3 to 101.3kPa 1.000 to 1.000MPa Internal circuits and wiring examples ZSE40 (F) ISE40--62 (L)-(M) ZSE40 (F) ISE40--22 (L)-(M) DC (+) (Brown) DC (+) (Brown) Analog output

TRBU

100 Length per roll Tubing model Symbol 20 100 Length 20 m roll 100 m reel Color Symbol Symbol Color Black White Red Color Blue Yellow Green BU Y G B W R 486 FR Double Layer Polyurethane Tubing TRBU Series Installation on One-touch Fittings Caution Lengths of tubes to be inserted into One-touch fittings are indicated on the outer layer of TRBU tubes.