XL-OMV0002

Kalrez R Chemraz R VMQ PLASMA ARMOR R No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 UA4640 -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 -XU1 1) Barrel Perfluoro R Kalrez R dupont dupont Chemraz R Greene Tweed & Co ULTIC ARMOR R Nippon Valqua Industries, Ltd. 6 XL-OMV0002 3. 3-1.

XLC-25,40 ∗ -F7NJ ∗ - ∗ Series

Barrel Perfluoro R is a registered trademark of MATSUMURA OIL Co.,Ltd. Kalrez R is a registered trademark of E. I. du Pont de Nemours and Company. Chemraz R is a registered trademark of Greene, Tweed & Co., ULTIC ARMOR R is a registered trademark of NIPPON VALQUA INDUSTRIES, LTD.

XL-OMY0002

R R R EPDM PLASMA No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 UA4640 -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 -XU1 1) Barrel Perfluoro Kalrez R R Greene, Tweed Technologies, Inc.

XLGR Series

Note4) Two O-rings (8) are require per valve. 6 XL-OMP0001 Additional symbols of the seal materials Seal material EPDM Barrel Perfluoro R Kalrez R Chemraz R VMQ FKM for PLASMA ULTIC ARMOR R Combination No. 2101-80. 70W 4079 SS592 SS630 SSE38 1232-70. 3310-75.

XMC/XYC Series

Note2) Barrel Perfluoro R is a registered trademark of MATSUMURA OIL Co.,Ltd. Kalrez R is a registered trademark of Dupont Co.,Ltd. Chemraz R is a registered trademark of Greene, Tweed & Co., ULTIC ARMOR R is a registered trademark of NIPPON VALQUA INDUSTRIES, LTD. Note3) MITSUBISHI CABLE INDUSTRIES, LTD. 3.

XMD/XYD Series

Note2) Barrel Perfluoro R is a registered trademark of MATSUMURA OIL Co.,Ltd. Kalrez R is a registered trademark of Dupont Co.,Ltd. Chemraz R is a registered trademark of Greene, Tweed & Co., ULTIC ARMOR R is a registered trademark of NIPPON VALQUA INDUSTRIES, LTD. Note3) MITSUBISHI CABLE INDUSTRIES, LTD. 6 XL-OMP0003-A 3.

AMX-OM-D023-D

R 1/4 12-14 R 3/8 22-24 (Refer to tightening torque in the table on the right). R 1/2 28-30 Do not use a pipe wrench or pliers. They may break the R 3/4 28-30 R 1 36-38 product.

XLF Series

Barrel Perfluoro R is a registered trademark of MATSUMURA OIL Co.,Ltd. Kalrez R is a registered trademark of E. I. du Pont de Nemours and Company. Chemraz R is a registered trademark of Greene, Tweed & Co., ULTIC ARMOR R is a registered trademark of NIPPON VALQUA INDUSTRIES, LTD. 3.

High Vacuum L Type Valve

Barrel Perfluoro R is a registered trademark of MATSUMURA OIL Co.,Ltd. Kalrez R is a registered trademark of E. I. du Pont de Nemours and Company. Chemraz R is a registered trademark of Greene, Tweed & Co., ULTIC ARMOR R is a registered trademark of NIPPON VALQUA INDUSTRIES, LTD. 6 XL*-OMI0011-E 3.

XLG Series

Barrel Perfluoro R is a registered trademark of MATSUMURA OIL Co.,Ltd. Kalrez R is a registered trademark of E. I. du Pont de Nemours and Company. Chemraz R is a registered trademark of Greene, Tweed & Co., ULTIC ARMOR R is a registered trademark of NIPPON VALQUA INDUSTRIES, LTD. 7 XL*-OMI0010-E 3. Specifications 3-1.

XMA/XYA Series

Note2) Barrel Perfluoro R is a registered trademark of MATSUMURA OIL Co.,Ltd. Kalrez R is a registered trademark of Dupont Co.,Ltd. Chemraz R is a registered trademark of Greene, Tweed & Co., ULTIC ARMOR R is a registered trademark of NIPPON VALQUA INDUSTRIES, LTD. Note3) MITSUBISHI CABLE INDUSTRIES, LTD. 3.

MRQ

snap ring R-shape snap ring R-shape snap ring NBR O ring Aluminium alloy Aluminium alloy Anodized Anodized Rod packing guide Color Cushion ring Zinc chromated Bearing Bearing Rolled steel Electroless nickel plated Aluminium alloy Chromated Shell type needle roller bearing O ring retainer Thrust needle roller bearing Bearing ring NBR O ring Cushion valve Ass'y Wearing Steel wire Resin Nickel

2/3 Port Valve for Various

Base, Body Seal material Aluminum NBR, FKM, EPDM LQ Port A Port A LVN Port P TI/ TIL Port R Energized open Energized closed PA PAX PB Model Manifold base model Port A Rc Port P Rc Port R Rc VVXA311-stations VVXA312-stations VVXA321-stations VVXA322-stations Manifold Manifold stations Manifold B mount 2 to 10 stations 1 8 1 4 1 8 1 4 1 4 1 4 17-3-105 The VX series will be revised shortly.

Rotary Actuator CRA1 Series Rack & Pinion Type/Size: 30, 50, 63, 80, 100

y n e io at k ot R Angle adjustment range 3 of e g n a r n R io ot at Size Foot bracket Contents Mounting screw size included in foot bracket 30 CRA1L 30-Y-1Z Foot bracket : 2 pcs.

Series 10-, 21- AF-A Air Filter

R.

Rotary Actuator

Basic inertia moment 2 r m I m : Weight of load (kg) r : Load center of gravity and distance of rotation axis. (m) r m Fig. (10) Inertia moment This shows inertia moment of m (weight) at r from the rotation axis. Calculation of inertia moment depends on the shape of the object.

SYJ Series

Leakage voltage Take note that the leakage voltage will increase when a resistor is used in parallel with switching element or a C-R circuit (surge voltage suppressor) is used for protecting a switching device because of the passing leakage voltage through the C-R circuit. The suppressor residual leakage voltage should be as follows. Design / Selection 1.

VY511, VYU5

SW RESET RUN2 RUN1 OV INPUT 6 7 5 8 4 + 9 3 SET UP A 2 B 1 0 C D 1 E F 0 to 10V V R 1 OUTPUT SET UP BALANCE CONTROLLER VYU5-D 2 V R 2 OV ERR.

MXW

R: Right (OUT side) L: Left (IN side) Made to Order Specifications (For details, refer to pages 1955 to 2021.) MXP L R MXY Theoretical Output Dual rod cylinder produces double the thrust of standard cylinder.

ASP

Metric size Inch size 06 08 10 12 3 4 5 6 1/8 standard 1/4 standard 3/8 standard 1/2 standard 07 09 11 13 1/4" 5/16" 3/8" 1/2" 6 8 10 12 Universal Port size Pilot port M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/4 G 1/8 G 1/8 G 1/4 10-32 UNF NPT 1/8 NPT 1/8 NPT 1/4 Cylinder side R 1/8 R 1/4 R 3/8 R 1/2 R 1/4 R 3/8 R 1/2 NPT 1/8 NPT 1/4 NPT 3/8 NPT 1/2 Symbol 01 02 03 04 F02 F03 F04 N01 N02 N03 N04 With One-touch