SMC Corporation of America
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0 q CONTROLLER PRESSURE OUT w e w r RUN 4 3 2 1 F.R.L. CH kPa 4 3 2 1 SW t e AV y D-IN RUN UP SET P-ON AU DOWN STOP READ r u AF i AR o Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com t y u i o IR !

1 5 Port Air Operated Valve Series VFA3000 How to Order SA Thread type (Including pilot port) VA Nil F N T Rc G NPT NPTF SA Port size (P, A, B port) VA 01 02 1 8 1 4 Option R1, R2 port are 1/8.

Body ported single solenoid VFA3122 F 02 Foot bracket Body ported For 30 type manifold VFA3 1 0 3 02 Base mounted For 40 type manifold VFA3 1 0 4 02 Port size W/o sub-plate (Pilot port: Rc) VFA3 1 5 0 For 50 type manifold Nil Thread type for pilot port W/o sub-plate (Pilot port: Other than Rc) 00 For 60, 61,70, 71 manifold VFA3 1 0 6 02 02 03 1 4 3 8 Nil Rc G NPT NPTF 00F 00N 00T Function

Description AMJ3000 AMJ4000 AMJ5000 AMJ-EL3000 AMJ-EL4000 AMJ-EL5000 Element assembly w AMJ-CA3000AMJ-CA4000AMJ-CA5000Bowl assembly Note) e 111512 111636 111636 NBR O-ring r 111710 NBR O-ring t Note) Refer to the above for How to Order Bowl Assembly. 13-13-4 5 Drain Separator for Vacuum Series AMJ Dimensions AMJ3000/4000 L F A Bracket (Option) G K M D J C E H H OUT IN ZX ZR 2port size

Piping: ø6 One-touch Fitting, Elbow Type, Output: PNP Open Collector 1 Output, Display Unit: Fixed SI Unit, Lead Wire: -, Bracket/Panel Mount Adapter: -, Operating Manual/Certificate: -, Made to Order: -

Piping: ø6 One-touch Fitting, Elbow Type, Output: PNP Open Collector 2 Outputs, Display Unit: Fixed SI Unit, Lead Wire: -, Bracket/Panel Mount Adapter: -, Operating Manual/Certificate: -, Made to Order: -

Piping: ø6 One-touch Fitting, Elbow Type, Output: PNP Open Collector 1 Output+Analog Voltage Output, Display Unit: Fixed SI Unit, Lead Wire: -, Bracket/Panel Mount Adapter: -, Operating Manual/Certificate: -, Made to Order: -

Piping: ø6 One-touch Fitting, Elbow Type, Output: PNP Open Collector 1 Output+Analog Current Output, Display Unit: Fixed SI Unit, Lead Wire: -, Bracket/Panel Mount Adapter: -, Operating Manual/Certificate: -, Made to Order: -

Piping: ø6 One-touch Fitting, Elbow Type, Output: NPN Open Collector 1 Output+Analog Voltage Output, Display Unit: Fixed SI Unit, Lead Wire: -, Bracket/Panel Mount Adapter: -, Operating Manual/Certificate: -, Made to Order: -

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) ℓ/min], Flow Adjustment Valve: None, Port Size: ø6 One-touch Fitting, Piping Entry Direction: Bottom Side, Output Specification: 2 PNP Outputs, Unit Specification: Fixed SI Unit, Instruction Manual: -, Calibration Certificate: -, Connector: -, Option: -

Flow Rate Range: 50 [1 to 50 (25 for CO2) ℓ/min], Flow Adjustment Valve: None, Port Size: ø6 One-touch Fitting, Piping Entry Direction: Bottom Side, Output Specification: 2 NPN Outputs, Unit Specification: Fixed SI Unit, Instruction Manual: -, Calibration Certificate: -, Connector: -, Option: -

Flow Rate Range: 25 [0.5 to 25 (25 for CO2) ℓ/min], Flow Adjustment Valve: Yes, Port Size: ø6 One-touch Fitting, Piping Entry Direction: Bottom Side, Output Specification: 2 PNP Outputs, Unit Specification: Fixed SI Unit, Instruction Manual: -, Calibration Certificate: -, Connector: -, Option: -

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) ℓ/min], Flow Adjustment Valve: Yes, Port Size: ø6 One-touch Fitting, Piping Entry Direction: Bottom Side, Output Specification: 2 PNP Outputs, Unit Specification: Fixed SI Unit, Instruction Manual: -, Calibration Certificate: -, Connector: -, Option: -

Flow Rate Range: 25 [0.5 to 25 (25 for CO2) ℓ/min], Flow Adjustment Valve: Yes, Port Size: ø6 One-touch Fitting, Piping Entry Direction: Bottom Side, Output Specification: D [1 NPN Outputs + Analog (4 to 20 mA)], Unit Specification: Fixed SI Unit, Instruction Manual: -, Calibration Certificate: -, Connector: -, Option: -

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) ℓ/min], Flow Adjustment Valve: None, Port Size: ø6 One-touch Fitting, Piping Entry Direction: Bottom Side, Output Specification: F [1 PNP Outputs + Analog (4 to 20 mA)], Unit Specification: Fixed SI Unit, Instruction Manual: -, Calibration Certificate: -, Connector: -, Option: -

Flow Rate Range: 11 [2 to 100 (50 for CO2) ℓ/min], Flow Adjustment Valve: None, Port Size: ø6 One-touch Fitting, Piping Entry Direction: Bottom Side, Output Specification: 2 PNP Outputs, Unit Specification: Fixed SI Unit, Instruction Manual: -, Calibration Certificate: -, Connector: -, Option: -

Flow Rate Range: 11 [2 to 100 (50 for CO2) ℓ/min], Flow Adjustment Valve: Yes, Port Size: ø6 One-touch Fitting, Piping Entry Direction: Bottom Side, Output Specification: 2 PNP Outputs, Unit Specification: Fixed SI Unit, Instruction Manual: -, Calibration Certificate: -, Connector: -, Option: -

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) ℓ/min], Flow Adjustment Valve: Yes, Port Size: ø6 One-touch Fitting, Piping Entry Direction: Bottom Side, Output Specification: 2 NPN Outputs, Unit Specification: Fixed SI Unit, Instruction Manual: -, Calibration Certificate: -, Connector: -, Option: -

Flow Rate Range: 25 [0.5 to 25 (25 for CO2) ℓ/min], Flow Adjustment Valve: Yes, Port Size: ø6 One-touch Fitting, Piping Entry Direction: Bottom Side, Output Specification: 2 NPN Outputs, Unit Specification: Fixed SI Unit, Instruction Manual: -, Calibration Certificate: -, Connector: -, Option: -