Compact Guide Cylinder End Lock Type SeriesMGP

P P P Lock position Z80 P P H R Rear lock Front lock Y59A Y69A P p P Manual release Y7PV Y7P P P p N L Non-locking type Locking type Y59B Y69B P p P Solid state switch Y7NW Y7NWV P P p Y7PW Y7PWV P P p Y7BW Y7BWV P P p Y7BA P p Lead wire symbols 0.5m . Nil (Example) Y69B 3m . L Y69BL 5m . Z Y69BZ Solid state switches marked with a "p" are produced upon receipt of order.

•

I Special bracket major dimensions , t I ' Matenal :Rolled steel KX l KZ KZZ Part No.

ZPT/ZPX

Calculation D n W P t : Pad diameter (mm) : Number of pads used : Lifting force (N) : Stable vacuum pressure (kPa) : Safety factor: Horizontal pad contact: 4 (dynamic) Vertical pad contact: 8 (dynamic) Pad W D = 3.14 x P x n x t x 1000 4 1 W Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-

Stainless Steel 316

Note 2) Figures shown when using FEP tubing Union Y: KQGU W P 3 x Applicable tubing Note 1) Effective area Note 2) (mm2) D Applicable tubing O.D.

E-MY2B_E_A

Light load Output type Stroke N NPN Stroke adjusting unit P PNP Nil Motor placement M Motor side E End side T On the top D On the bottom W Double-side Note) Refer to the catalog for Stroke, Auto switch and Number of auto switches.

MQQ

P-80 (N)

IDX-OM-W095

11 T T 11.1 11.2 AC240V / DC24V 5A() / 2A() DC20V 3mA IDFC60/70/80/90 Series 11-1 IDX-OM-W095 T 11.3 AC230V ON A(4-5) B6-7 A4-5A B6-7B 3 5 /() OFF 3 OFF6.2 IDFC60/70/80/90 Series 11-2 IDX-OM-W095 T 11.4 M3.5 1.01.3Nm M4.0 1.42.0Nm 6 5 4 1 2 3 PE N L 7 L,N PE B A IDFC60-23-TIDFC70-23-T IDFC80-23-TIDFC90-23-T M3.5 8.5mm M4.0 9.5mm [3.2.5 ] IDFC60/70/80/90 Series

VDW

1 e w r e Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com u r u t t y y q q Component Parts Description Material No. Option Standard Stainless steel Body C37 q w e r t y u i o !0 !

Compact Rotary Actuator Rack-and-Pinion Type/Sizes: 10, 15, 20, 30, 40 Series CRQ2

(mm) P = Operating pressure [MPa] T 0425 T 0604 TU 0805 T 0806 1/8B T 1075 TU 1208 T 1209 1/4B TS 1612 3/8B T 1613 1/2B 3/4B 1B 4.9 4 2.5 l = Length of piping [mm] 12.6 6 4 a = Internal cross section of piping [mm ] 19.6 8 5 QC = Air consumption required for one reciprocation of rotary actuator [l (ANR)] 28.3 8 6 33.2 6.5 44.2 10 7.5 50.3 12 8 63.6 12 9 66.5 9.2 113 12 16 127 12.7 133

HRX-OM-Y098

(Refer to About TEMP READY function (P.527) for TEMP READY function.) Display [ ] if the circulating fluid discharge pressure has reached the pressure limit value. (Refer to About control function of circulating fluid discharge pressure (P.5-32) for details of PRESS LIMIT.) Ready / P.

HRX-OM-X037

P.5-12 (16) CH2 Independent pump operation CH2 pump operates independently while the button is pressed. P.5-12 To select a operation mode from the touch panel ( mode), contact input ( mode) (17) Operation mode P.5-12 Common or serial communication ( mode). (18) Operating condition display It indicates the run and stop status of the product. P.5-12 (19) Run/Stop To run/stop the product.

PF2D

Real-time switch output Unit switching Hysteresis mode ON YES Display Real-time flow rate Accumulated flow OFF P-1 P-2 L/min L Real-time flow rate GPM gal (US) "P" Window comparator mode H : Hysteresis GPM = gal (US)/min H H Note) Fixed SI unit (L/min, L, m3 or m3x10) will be set for the type without the unit switching function.

Clean Room Rodless Cylinder Series CYP ø15, ø32

adjustment screw Note 3) (inner cover) Plug Plug [P (port e)] [P (port c)] A A LW Plug Operating direction P (port a) P (port b) Auto switch mounting groove [P (port g)] 0.5 Note 2) 0.5 Note 2) Left Right Plug [P (port h)] HI HP H HL HG HT HS HB HA HB HA HG HT HI WB 4-J Depth JK Plug [P (port f)] WB WA TA TA WA R TB Plug TB R W [P (port d)] Inner cover Note 3) holding screw (mm) K 21 20

CL

For stopping accuracy, refer to Series CLJ (P. 9-2-12), Series CLM2 (P. 9-2-20), Series CLG1 (P . 9-2-30), and Series CL1 (P . 9-3-2) respectively. 7. In order to further improve stopping accuracy, the time from the stop signal to the operation of the lock should be shortened as much as possible.

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com E depth EK Q + Stroke Z + Stroke A G Stroke adjustment screw Note 3) (inner cover) Plug Plug [P (port e)] [P (port c)] A A LW Plug Operating direction P (port a) P (port b) Auto switch mounting groove [P (port g)] 0.5 Note 2) 0.5 Note 2) Left Right Plug [P

PF2x7.eng

U P DOWN Press and SET : Accumulation starts and flashes.

Large Size Vacuum Module: Series ZR

940 to 967 P. 968 to 983 Component equipment Characteristics Ejector unit ZR1-W Nozzle dia.

SYA3000/5000/7000

R port thread type Series 3 SYA3000 5 SYA5000 Rc Nil G F 40 SYA 7 1 Base mounted N NPT NPTF T P, R port thread type Type of actuation Rc Nil 2 position single G F Port size 1 N NPT Port size Without sub-plate Symbol Applicable series Nil NPTF T 2 position double 1 8 01 SYA3000 Port size With sub-plate 2 1 4 Port size Without sub-plate Symbol Nil With sub-plate 02 SYA5000 1 4 3 position closed

Clean Gas Filter

Construction q t e r w IN Description No.

AC Servo Motor Driver (CC-Link Type)

Select 'MR-J3-T' through Model" "New" and "Project". -7- 1.