High Vacuum L Type Valve

Step 6 Bolt b 3 Tightening torque of bolt b Nm 1 2 Valve Tightening 4 size torque Handle assembly XLH-16 0.7 -25 1.5 -40 2.5 -50 6 Tightening torque of bolt a Nm Bolt a Valve Tightening size torque Body All sizes 0.3 Cover Heater Tighten Bolt b in numerical order to assemble the Body and the Handle assembly with the valve opened a little in numerical order.

HEAVY DUTY STOPPER CYLINDER

B Sealant tape Expose approx. 1 thread Figure-3 3-3.

AMPSeries

hole F Applicable screw M5 hexagon socket head cap screw M6 hexagon socket head cap screw M8 hexagon socket head cap screw Model AMP220 AMP320 AMP420 E OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90

RSQ

3 Stopper Cylinder: Fixed Mounting Height Series RSQ 12, 16, 20, 32, 40, 50 How to Order RE A B Without auto switch B RSQ 20 15 D REC CX J79W 20 15 RSDQ With auto switch B D CY Number of auto swiches Auto switch Built-in magnet MQQ M Nil Without auto switch Nil S 2 pcs. 1 pc. Mounting style For the applicable auto switch model, refer to the table below.

Exhaust Cleaner for Clean Rooms AMP Series

hole F Applicable screw M5 hexagon socket head cap screw M6 hexagon socket head cap screw M8 hexagon socket head cap screw Model AMP220 AMP320 AMP420 E OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90

SY3000-OMH0002

8370: JIS B 8361: JIS B 9960-1: -(1 :) JIS B 8433-1993: *2) 1. 2. 3. 1. 2. 3. 4.2 2 No.SY3000-OMH0002 / / / / 1 1 3) 3) 1 1 () 3 No.SY3000-OMH0002 SY Series 3 3 3 3 5 5 5 5 / / / / 1 DC VQ (DC ) N.O.( ) 3 () 0.1 2 C-R ( ) C-R ( ) 3 3 EXH ( ) ( ) 3 DC 3% AC 20% (SSR )AC 1) (C-R ) OFF 2)() 4 No.SY3000-OMH0002 SY Series 3 3 3 3 5 5 5 5 / / / / -10 1V () (1) ()COM COM (

Compact Cylinder Series NCQ8

Features 1 Compact Cylinder Double Acting, Single Rod Bore size: 056 (9/16), 075 (3/4), 106 (1-1/16), 150 (1-1/2), 200 (2), 250 (2-1/2) Series NCQ8 How to Order Without auto switch B 056 025 NCQ8 B 056 025 Z M9B S NCDQ8 With auto switch X-Option Built-in magnet Nil XB6 XC4 Standard High temp.

Two Hand Control Valve

Two Hand Control Valve VR51 Series RoHS An output is available through synchronized, twohanded operation (within 0.5 s)!

VKF300

Grommet type (G) Without light Without light Without light With light With light With light S Non-locking push type (tool required) AC Hole dia. 5 Z None S 12 VDC or less 9 None Z There are manual overrides in 2 directions, on the top and on the side (solenoid side).

Digital Flow Switch (Remote type monitor unit)

Insert panel mount adapter B into section A of panel mount adapter A. Push panel mount adapter B from behind until the display is fixed onto the panel. The pin of panel mount adapter B engages the notched part of panel adapter section A to fix the display. The product can be mounted on a panel with a thickness of 1.0 to 3.2 mm.

VN-OMP0001

8370: JIS B 8361: JIS B 9960-1: 1 JIS B 8433-1993: *2) 1. 2. 3. 1. 2. 3. 4. 2 VN-OMP0001 / / / / 1 1 1 1 1 1 1 1.5 .5 .5 .5 *3) *3) *3) *3) 1 1 1 1 1 1 1 1 () 3 VN-OMP0001 VNC VNC VNC VNC VNH VNH VNH VNH / / / / ( ( ( ( ) ) ) ) ( ) IP54 IP54 IP54 IP54 4) 4) 4) 4) 1) 1) 1) 1) 50mm 2/s 80100 1) 1) 1) 1) 2) 2) 2) 2) 5m 3) 3) 3) 3) , , , , 4 VN-OMP0001 VNC VNC VNC VNC V V V VNH NH

Precision Regulator

(Note 4)The F .S. means the condition at the maximum setting pressure of the product. (F .S. 0.2MPa, IR3000) (Note 5) Repeatability: This is the reproducibility of the downstream pressure at every operation (ON/OFF) on the downstream side.

Precision Regulator

(Note4) The F .S. means the condition at the maximum setting pressure of the product. (F .S. 0.2MPa, IR1000) (Note 5) Repeatability: This is the reproducibility of the downstream pressure at every operation (ON/OFF) on the downstream side.

3 Port Air Operated Valve Series SYJA300 1

N.O. 0.4 0.3 0.2 0.1 0.2 0.3 0.4 0.5 0.6 Operating pressure (MPa) Flow Characteristics/Weight C [dm 3/(s bar)] b Cv C [dm 3/(s bar)] b Cv 1 2 (P A) 2 3 (A R) Valve model Flow characteristics Weight (g) Effective area (mm2) Pilot port size Type of actuation Port size SYJA312-M3 SYJA322-M3 SYJA314-M5 0.41 0.18 0.086 0.35 0.33 0.086 Body ported N.C. N.O. N.C.

SYJA300

N.O. 0.1 0.2 0.3 0.4 0.5 0.6 Operating pressure MPa Flow Characteristics/Mass Flow characteristics C [dm 3/(s bar)] b Cv C [dm 3/(s bar)] b Cv 12 (PA) 23 (AR) Valve model Mass (g) Pilot port size Type of actuation Port size SYJA512-M5 SYJA522-M5 0.12 0.18 0.39 0.45 0.47 0.66 0.14 0.18 0.45 0.45 N.C. 0.53 0.66 M5 x 0.8 Body ported 34 N.O.

Low Profile Air Gripper Series MHF2

Number of auto switches Number of fingers Nil S n 2 2 finger 2 pcs. 1 pc. n pcs.

4/2 5/3 (A/B R1/R2)Standard(0.4 W)Quick response(0.95 W) C [dm3/(s?

4/2 5/3 (A/B R1/R2)Standard(0.4 W)Quick response(0.95 W) C [dm3/(s?

4/2 5/3 (A/B R1/R2)Standard(0.4 W)Quick response(0.95 W) C [dm3/(s?

4/2 5/3 (A/B R1/R2)Standard(0.4 W)Quick response(0.95 W) C [dm3/(s?